Bare and Pd-doped ceria thin films prepared by ALD and EBE for hydrogen detection

  • The need to store and use hydrogen safely as part of green economy based on renewable energy evokes a necessity to reliably detect it at ambient conditions. The majority of currently used sensors are working at elevated temperatures (200-500 °C). In this work, we demonstrate that ceria films deposited on a commercial electrode by atomic layer deposition (ALD) and electron beam evaporation (EBE) electrically respond to hydrogen (from 20 to 500 ppm) at much lower temperatures (50-200 °C). The results reveal that <1.5 nm thin Pd adlayer increases the electrical response by several orders of magnitude for both ceria films. The NAP-XPS study under changing oxidative/reductive atmospheres sheds light on the mechanism of Pd-CeOx thermal activation and the role of the deposition technique in the reactivity of the oxide.

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Author: Yuliia KostoORCiD, Paulina Kapuscik, Rudi Tschammer, Dominic Guttmann, Ewa MankowskaORCiD, Peter MatvijaORCiD, Carlos MoralesORCiD, Michał MazurORCiD, Karsten HenkelORCiDGND, Iva MatolinovaORCiD, Jarosław DomaradzkiORCiD, Jan Ingo FlegeORCiD
Title of the source (English):Verhandlungen der DPG
Publisher:Deutsche Physikalische Gesellschaft
Place of publication:Bad Honnef
Document Type:Conference publication not peer-reviewed
Year of publication:2024
Tag:Atomic layer deposition (ALD); Hydrogen sensor; Near-ambient pressure X-ray photoelectron spectroscopy (NAP-XPS); ceria
Series ; volume number:Verhandlungen der DPG
Faculty/Chair:Fakultät 1 MINT - Mathematik, Informatik, Physik, Elektro- und Informationstechnik / FG Angewandte Physik und Halbleiterspektroskopie
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