TY - GEN A1 - Reif, Jürgen A1 - Schneider, Thomas A1 - Wolfframm, Dirk A1 - Schmid, Reiner P. T1 - Femtosecond nonlinear optical characterisation of silicon wafers: the role of symmetry T2 - Materials Science in Semiconductor Processing Y1 - 2001 UR - http://www.sciencedirect.com/science/article/pii/S1369800100001669 U6 - https://doi.org/10.1016/S1369-8001(00)00166-9 SN - 1369-8001 VL - 4 IS - 1-3 SP - 241 EP - 243 ER - TY - GEN A1 - Tönnies, Karen A1 - Schmid, Reiner P. A1 - Weickhardt, Christian A1 - Reif, Jürgen A1 - Grotemeyer, J. T1 - Multiphoton ionization of nitrotoluenes by means of ultrashort laser pulses T2 - International Journal of Mass Spectrometry Y1 - 2001 UR - http://www.sciencedirect.com/science/article/pii/S1387380600003742 SN - 1387-3806 VL - 206 IS - 3 SP - 245 EP - 250 ER - TY - JOUR A1 - Reif, Jürgen A1 - Schmid, Reiner P. A1 - Schneider, Thomas A1 - Wolfframm, Dirk T1 - Nonlinear optical characterization of the surface of silicon wafers: In-situ detection of external stress Y1 - 2000 ER - TY - CHAP A1 - Reif, Jürgen A1 - Schneider, Thomas A1 - Schmid, Reiner P. A1 - Wolfframm, Dirk ED - Helvajian, Henry T1 - Nonlinear optical characterization of the surface of silicon wafers: In-situ detection of external stress T2 - Laser Applications in Microelectronics and Optoelectronic Manufacturing V, 24 - 26 January 2000, San Jose, USA Y1 - 2000 SN - 0-8194-3550-3 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Reif, Jürgen A1 - Schmid, Reiner P. T1 - Efficient instantaneous optical switching, frequency conversion and simple logic operations on a femtosecond time scale T2 - 25th International Congress on High-Speed Photography and Photonics, 29 September - 4 October 2002, Beaune, France Y1 - 2003 UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=889727 SN - 0-8194-4744-7 U6 - https://doi.org/10.1117/12.516816 SP - 137 EP - 140 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Schmid, Reiner P. A1 - Mankovics, Daniel A1 - Arguirov, Tzanimir V. A1 - Ratzke, Markus A1 - Mtchedlidze, T. A1 - Kittler, Martin T1 - Rapid dislocation-related D1-photoluminescence imaging of multicrystalline Si wafers at room temperature T2 - Physica Status Solidi : A Y1 - 2011 U6 - https://doi.org/10.1002/pssa.201026269 SN - 1610-1642 VL - 208 IS - 4 SP - 888 EP - 892 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Mankovics, Daniel A1 - Arguirov, Tzanimir V. A1 - Mtchedlidze, T. A1 - Kittler, Martin T1 - Novel imaging techniques for dislocation-related D1-photo-luminescence of multicrystalline Si wafers - two different approaches Y1 - 2011 ER - TY - CHAP A1 - Muth, Marco A1 - Schmid, Reiner P. A1 - Schnitzlein, Klaus T1 - Specific modifications to enhance sensitivity in null-ellipsometry T2 - Book of abstracts, 8th Workshop Ellipsometry, March 10 - 12, 2014, Dresden, Germany Y1 - 2014 UR - http://www.ipfdd.de/fileadmin/user_upload/ax/OEA/8th_Workshop_Ellipsometry/Book%20of%20abstracts.pdf SP - S. 84 ER - TY - CHAP A1 - Muth, Marco A1 - Schmid, Reiner P. A1 - Schnitzlein, Klaus T1 - Einfache Methode zur Steigerung der Empfindlichkeit in Null-Ellipsometrie T2 - DPG Frühjahrstagung 2013 in Regensburg Y1 - 2013 UR - http://www.dpg-verhandlungen.de/year/2013/conference/regensburg/part/ds/session/30/contribution/10 PB - DPG CY - Bad Honnef ER - TY - GEN A1 - Muth, Marco A1 - Schmid, Reiner P. A1 - Schnitzlein, Klaus T1 - Ellipsometric study of molecular orientations of Thermomyces lanuginosus lipase at the air-water interface by simultaneous determination of refractive index and thickness T2 - Colloids and Surfaces B: Biointerfaces Y1 - 2016 UR - http://www.sciencedirect.com/science/article/pii/S0927776515303714 U6 - https://doi.org/10.1016/j.colsurfb.2015.12.024 SN - 1873-4367 SN - 0927-7765 VL - 140 SP - 60 EP - 66 ER - TY - GEN A1 - Wolfframm, Dirk A1 - Kouteva-Arguirova, Simona A1 - Arguirov, Tzanimir V. A1 - Schmid, Reiner P. A1 - Dittmar, K. A1 - Zienert, I. A1 - Reif, Jürgen T1 - Hafnium oxide on silicon: A non-destructive characterization of the interfacial layer T2 - Solid State Phenomena Y1 - 2004 UR - http://www.scientific.net/SSP.95-96.653.pdf SN - 1662-9779 SN - 0377-6883 VL - 95-96 SP - 653 EP - 658 ER - TY - CHAP A1 - Schmid, Reiner P. A1 - Reif, Jürgen T1 - All-Optical Full Logic Unit with Femtosecond Switching T2 - Second International Symposium on Laser Precision Microfabrication, 16 - 18 May 2001, Singapore Y1 - 2002 SN - 0-8194-4137-6 U6 - https://doi.org/10.1117/12.456869 SP - S. 460 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Schmid, Reiner P. A1 - Schneider, Thomas A1 - Reif, Jürgen T1 - Femtosecond All-optical Wavelength and Time Demultiplexer for OTDM/WDM Systems T2 - Applied Physics B Y1 - 2002 UR - http://link.springer.com/article/10.1007/s00340-002-0876-x U6 - https://doi.org/10.1007/s00340-002-0876-x SN - 0946-2171 SN - 1432-0649 VL - 74 IS - Suppl. 1 SP - 205 EP - 208 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Bahnmaier, Albert H. A1 - Zhang, Bing A1 - Jones, Harold T1 - Highly sensitive Infrared Spectroscopy: IR-REMPI Double Resonance Experiments T2 - Berichte der Bunsengesellschaft für physikalische Chemie KW - Infrared Spectroscopy Y1 - 1992 SN - 0005-9021 VL - 96 IS - 9 SP - 1305 EP - 1308 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Jones, Harold T1 - Laser ionisation spectroscopy of formyl fluoride T2 - Zeitschrift für Naturforschung A KW - Laser ionisation Y1 - 1996 SN - 0932-0784 VL - 51 IS - 7 SP - 809 EP - 812 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Chowdhury, P. K. A1 - Miyawaki, J. A1 - Ito, F. A1 - Sugawara, K. A1 - Nakanaga, T. A1 - Takeo, Harutoshi A1 - Jones, Harold T1 - Infrared spectroscopy of aniline-X (X=N2. CH4, CHF3, CO) clusters and their corresponding cluster cations inthe NH2-stretching vibration region T2 - Chemical Physics KW - Infrared spectroscopy Y1 - 1997 UR - http://www.sciencedirect.com/science/article/pii/S0301010497000724 U6 - https://doi.org/10.1016/S0301-0104(97)00072-4 SN - 0301-0104 VL - 218 IS - 3 SP - 291 EP - 300 ER - TY - GEN A1 - Jäckel, Johann-Georg A1 - Schmid, Reiner P. A1 - Jones, Harold A1 - Nakanaga, T. A1 - Takeo, Harutoshi T1 - The van der Waals vibrational frequencies of the aniline-carbon monoxide complex in its S1 state T2 - Chemical Physics KW - Vibrational Frequencies Y1 - 1997 SN - 0301-0104 VL - 215 IS - 2 SP - 291 EP - 298 ER - TY - GEN A1 - Arusi-Parpar, Talya A1 - Schmid, Reiner P. A1 - Li, R.-J. A1 - Bar, I. A1 - Rosenwaks, Salman T1 - Rotational state dependent selectivity in bond fission of C2HD (5v1) T2 - Chemical Physics Letters KW - Dependent Selectivity Y1 - 1997 UR - http://www.sciencedirect.com/science/article/pii/S0009261497001632 U6 - https://doi.org/10.1016/S0009-2614(97)00163-2 SN - 0009-2614 VL - 268 IS - 1-2 SP - 163 EP - 168 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Arusi-Parpar, Talya A1 - Li, R.-J. A1 - Bar, Illana A1 - Rosenwaks, Salman T1 - Photodissociation of rovibrationally excited C2H2: Observation of two pathways T2 - Journal of chemical physics KW - Photodissodiation Y1 - 1997 U6 - https://doi.org/10.1063/1.474399 SN - 0021-9606 VL - 107 IS - 2 SP - 385 EP - 391 ER - TY - GEN A1 - Arusi-Parpar, Talya A1 - Schmid, Reiner P. A1 - Ganot, Y. A1 - Bar, I. A1 - Rosenwaks, Salman T1 - Enhanced action spectra of combination bands of acetylene via vibrationally mediated photodissociation and fragment ionization T2 - Chemical Physics Letters KW - Photodissociation Y1 - 1998 U6 - https://doi.org/10.1016/S0009-2614(97)01452-8 SN - 0009-2614 VL - 287 IS - 3-4 SP - 347 EP - 352 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Ganot, Y. A1 - Bar, I. A1 - Rosenwaks, Salman T1 - Combination bands vs. overtone stretch excitation and rotational effects in vibrationally mediated photodissociation of acetylene T2 - Journal of chemical physics KW - Photodissociation Y1 - 1998 UR - http://scitation.aip.org/content/aip/journal/jcp/109/20/10.1063/1.477567 UR - http://adsabs.harvard.edu/abs/1998JChPh.109.8959S U6 - https://doi.org/10.1063/1.477567 SN - 0021-9606 VL - 109 IS - 20 SP - 8959 EP - 8967 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Ganot, Y. A1 - Rosenwaks, Salman A1 - Bar, I. T1 - Action spectra vs rovibrational absorption spectra: a tool for photodissociation dynamics investigation T2 - Journal of Molecular Structure KW - Rovibrationally mediated photodissociation, Action spectra; Rovibrational absorption spectra Y1 - 1999 UR - http://www.sciencedirect.com/science/article/pii/S0022286098006322 SN - 0022-2860 VL - 480-481 SP - 197 EP - 205 ER - TY - GEN A1 - Schmid, Reiner P. A1 - Weickhardt, Christian T1 - Designing reflectron time-of-flight mass spectrometers with and without grids: a direct comparison T2 - International Journal of Mass Spectrometry KW - Time-of-flight mass spectrometers KW - Gridless reflector KW - Trajectory simulations KW - Reflectron Y1 - 2001 UR - http://www.sciencedirect.com/science/article/pii/S1387380600003110 SN - 1387-3806 VL - 206 IS - 3 SP - 181 EP - 190 ER - TY - CHAP A1 - Schmid, Reiner P. A1 - Ganot, Y. A1 - Arusi-Parpar, Talya A1 - Li, R.-J. A1 - Bar, Illana A1 - Rosenwaks, Salman T1 - State-selective dissociation of acetylene isotopomers T2 - Laser Techniques for State-Selected and State-to-State Chemistry IV KW - Doppler effect KW - Ionization KW - Molecules KW - Photons Y1 - 1998 U6 - https://doi.org/10.1117/12.308414 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Schmid, Reiner P. A1 - Jäckel, Johann-Georg A1 - Jones, Harold A1 - Taubmann, Gerhard A1 - Takeo, Harutoshi T1 - Photoionization investigation of cluster formation in heterocyclic compounds and their reactions with acidic species T2 - International Journal of Mass Spectrometry KW - Photoionization Y1 - 1998 UR - http://www.sciencedirect.com/science/article/pii/S138738069814054X U6 - https://doi.org/10.1016/S1387-3806(98)14054-X SN - 1387-3806 VL - 177 IS - 2-3 SP - 197 EP - 205 ER - TY - GEN A1 - Mankovics, Daniel A1 - Schmid, Reiner P. A1 - Arguirov, Tzanimir V. A1 - Kittler, Martin T1 - Dislocation-related photoluminescence imaging of mc-Si wafers at room temperature T2 - Crystal Research and Technology KW - dislocations KW - imaging KW - photoluminescence KW - silicon Y1 - 2012 UR - http://onlinelibrary.wiley.com/doi/10.1002/crat.201200146/full U6 - https://doi.org/10.1002/crat.201200146 SN - 1521-4079 VL - 47 IS - 11 SP - 1148 EP - 1152 ER - TY - CHAP A1 - Kittler, Martin A1 - Arguirov, Tzanimir V. A1 - Schmid, Reiner P. A1 - Seifert, Winfried T1 - Photoluminescence and EBIC for Process Control and Failure Analysis in Si-Based Photovoltaics T2 - ISTFA 2010, conference proceedings from the 36th International Symposium for Testing and Failure Analysis, November 14-18, 2010 KW - Photoluminescence Y1 - 2010 SN - 978-1-61503-041-5 SN - 0-61503-041-7 SP - 137 EP - 142 PB - ASM International Materials Park CY - Texas, USA ER - TY - CHAP A1 - Schmid, Reiner P. A1 - Reif, Jürgen T1 - Efficient instantaneous optical switching and frequency conversion on a femtosecond time scale T2 - Nonlinear Optics: Materials, Fundamentals and Applications KW - optical switching KW - frequency conversion Y1 - 2002 SN - 1-55752-721-0 U6 - https://doi.org/10.1364/NLO.2002.MC8 N1 - Paper MC8 PB - Optical Communications CY - Wailea, Maui, Hawaii United States ER - TY - CHAP A1 - Schmid, Reiner P. A1 - Reif, Jürgen T1 - Efficient instantaneous optical switching and frequency conversion on a femtosecond time scale T2 - European Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003, 22 - 27 June 2002, Munich ICM, Germany KW - instantaneous optical Y1 - 2003 SN - 0-7803-7734-6 SP - S. 460 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Schmid, Reiner P. A1 - Muth, Marco A1 - Schnitzlein, Klaus T1 - Adsorptionskinetik der Lipase Thermomyces lanuginosus an fluiden Grenzflächen mittels Ellipsometrie T2 - Tagungsband, GVC-DECHEMA-Vortrags- und Diskussionstagung Bioverfahrenstechnik an Grenzflächen, Potsdam, 30. Mai - 1. Juni 2011 KW - Adsorptionskinetik KW - fluiden Grenzflächen KW - Ellipsometrie Y1 - 2011 SP - 89 EP - 90 PB - DECHEMA CY - Frankfurt, M. ER - TY - GEN A1 - Muth, Marco A1 - Rothkötter, Stefanie A1 - Paprosch, Steven A1 - Schmid, Reiner P. A1 - Schnitzlein, Klaus T1 - Competition of Thermomyces lanuginosus lipase with its hydrolysis products at the oil-water interface T2 - Colloids and Surfaces B: Biointerfaces Y1 - 2017 U6 - https://doi.org/10.1016/j.colsurfb.2016.10.019 SN - 0927-7765 VL - 149 SP - 280 EP - 287 ER - TY - GEN A1 - Kot, Małgorzata A1 - Henkel, Karsten A1 - Naumann, Franziska A1 - Gargouri, Hassan A1 - Tarnawska, Lidia Lupina A1 - Wilker, Viola A1 - Kus, Peter A1 - Pożarowska, Emilia A1 - Garain, Samiran A1 - Rouissi, Zied A1 - Schmeißer, Dieter T1 - Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources T2 - Journal of Vacuum Science and Technology A N2 - A comparative study of thin aluminum nitride (AlN) films deposited by plasma-enhanced atomic layer deposition in the SENTECH SI ALD LL system applying either a direct inductively coupled plasma (ICP) or an indirect capacitively coupled plasma (CCP) source is presented. The films prepared with the ICP source (based on a planar triple spiral antenna) exhibit improved properties concerning the growth rate per cycle, total cycle duration, homogeneity, refractive index, fixed and mobile electrical charges, and residual oxygen content compared to the CCP source, where the comparison is based on the applied plasma power of 200 W. The increase of the plasma power to 600 W in the ICP process significantly reduces the residual oxygen content and enhances the electrical breakdown field. The AlN layers grown under these conditions, with a growth rate per cycle of 1.54 Å/cycle, contain residual oxygen and carbon concentrations of about 10% and 4%, respectively, and possess a refractive index of 2.07 (at 632.8 nm). KW - Plamsa-enhanced atomic layer deposition (PEALD) KW - inductively coupled KW - capacitively coupled KW - plamsa source KW - ellipsometry KW - X-ray photoelectron spectroscopy (XPS) KW - X-ray diffraction (XRD) KW - Field emission scanning electron microscopy (FESEM) KW - capacitance-voltage (CV) KW - atomic force microscopy Y1 - 2019 U6 - https://doi.org/10.1116/1.5079628 SN - 0734-2101 SN - 1520-8559 VL - 37 IS - 2 ER -