TY - GEN A1 - Ehrig, Lutz A1 - Schenk, Hermann A1 - Wall, Franziska A1 - Melnikov, Anton A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Conrad, Holger T1 - Electrostatic all-silicon MEMS audio transducer for in-ear audio applications – acoustic measurements and modelling approach T2 - 23rd International Congress on Acoustics, Aachen, Germany, 2019 Y1 - 2019 U6 - https://doi.org/10.18154/RWTH-CONV-239893 ER - TY - PAT A1 - Augel, Lion A1 - Knobbe, Jens T1 - Vorrichtung und Verfahren zur Absorption von elektromagnetischer Strahlung, System zur Verwendung in einem Bildsensor, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Y1 - 2023 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137474 ER - TY - PAT A1 - Augel, Lion A1 - Knobbe, Jens T1 - Vorrichtung, Verfahren und System zur Absorption von elektromagnetischer Strahlung, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Y1 - 2023 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137466 ER - TY - GEN A1 - Jongmanns, Marcel T1 - Implementation of a hand gesture recognition using ultrasound measurements on a NVIDIA Jetson platform with AI-based evaluation Y1 - 2023 SN - 978-3-8007-6204-0 SN - 978-3-8007-6203-3 N1 - Poster, Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023 PB - Berlin CY - VDE Verlag ER - TY - GEN A1 - Wen, Hanying A1 - Augel, Lion A1 - Wang, Wenjuan A1 - Knobbe, Jens T1 - Characterization of AlSiCu/TiN/p-Si Schottky Contacts with Nanophotonic Structures for Near-infrared Photodetectors T2 - 2023 46th International Spring Seminar on Electronics Technology (ISSE) : 10-14 May 2023 : conference location: Timișoara, Romania N2 - Schottky photodetectors based on internal photoemission have the potential of an adjustable detection range in the near-infrared range and Si compatible technology integration. The external quantum efficiency of Schottky photodetectors can be improved using nanophotonic structures, which enhance the absorption of the device. However, the electrical properties of Schottky photodetectors deviate under an altered metal-semiconductor interface topography. We characterize a common layer system for metal contacts consisting of a TiN interstitial layer between the p-Si wafer and the AlSiCu metallization. By varying the thickness of the TiN we discuss how homogeneity of the sputtered layers influence device properties with different interface topographies. Through electrical wafer-level characterization, the characteristics of the Schottky contact are evaluated and compared to the ideal physical modelling. Y1 - 2023 UR - https://ieeexplore.ieee.org/document/10168510 SN - 979-8-3503-3485-2 SN - 979-8-3503-3484-5 U6 - https://doi.org/10.1109/ISSE57496.2023.10168510 SP - 1 EP - 5 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Augel, Lion A1 - Wen, Hanying A1 - Knobbe, Jens T1 - TiN-Si Schottky Diodes for SWIR Detection T2 - Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023 Y1 - 2023 SN - 978-3-8007-6204-0 SN - 978-3-8007-6203-3 SP - 30 EP - 34 PB - VDE Verlag CY - Berlin ER - TY - CHAP A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically in-plane driven silicon micropump for modular configuration T2 - Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands Y1 - 2017 UR - http://publica.fraunhofer.de/dokumente/N-477736.html SP - 57 EP - 60 PB - University of Twente CY - Enschede ER - TY - GEN A1 - Spitz, Barbara A1 - Wall, Franziska A1 - Schenk, Hermann A1 - Melnikov, Anton A1 - Ehrig, Lutz A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald A1 - Pufe, Wolfram T1 - Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren T2 - MikroSystemTechnik-Kongress, Berlin, Germany, 2019 N2 - Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity. Y1 - 2019 SP - 54 EP - 57 PB - VDE-Verlag ER - TY - PAT A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Mikromechanical devices with mechanical actuators T1 - Mikromechanische Bauelemente mit mechanischen Aktuatoren Y1 - 2018 ER - TY - GEN A1 - Melnikov, Anton A1 - Schenk, Hermann A1 - Wall, Franziska A1 - Spitz, Barbara A1 - Ehrig, Lutz A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation T2 - SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293 Y1 - 2020 U6 - https://doi.org/10.1117/12.2551271 ER -