TY - THES A1 - Goryachko, Andriy T1 - Investigations of perspective materials for aggressively scaled gate stacks and contact structures of MOS devices KW - silicon KW - praseodymium oxide KW - tungsten nitride KW - tungsten silicide KW - cobalt silicide KW - scanning tunneling microscopy KW - Angerelection spectroscopy Y1 - 2002 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-000000342 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/59 ER - TY - JOUR A1 - Batchelor, David R. A1 - Follath, Rolf A1 - Schmeißer, Dieter T1 - Commissioning Results of the BTUC-PGM beamline Y1 - 2001 ER - TY - GEN A1 - Böhme, O. A1 - Lloyd Spetz, Anita A1 - Lundström, Ingemar A1 - Schmeißer, Dieter T1 - Nanoparticles as the Active Element of High-Temperature Metal-Insulator-Silicon Carbide Gas Sensors T2 - Advanced Materials Y1 - 2001 SN - 1521-4095 SN - 0935-9648 VL - 13 IS - 8 SP - 597 EP - 601 ER - TY - GEN A1 - Gürek, A. G. A1 - Appel, Günter A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - Synthesis of dihydroxy silicon phthalocyanine tetrasulfonic acid and poly-µ-oxo silicon phthalocyanine tetrasulfonic acid T2 - Journal of Porphyrins and Phthalocyanines Y1 - 2001 SN - 1099-1409 SN - 1088-4246 VL - 5 IS - 10 SP - 751 EP - 757 ER - TY - GEN A1 - Henkel, Karsten A1 - Oprea, A. A1 - Paloumpa, Ioanna A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Kamieth, P. T1 - Selective polypyrrole electrodes for quartz microbalances : NO2 and gas flux sensitivities T2 - Sensors and Actuators : B, Chemical 76(2001)1-3 Y1 - 2001 SN - 0925-4005 VL - 76 IS - 1-3 SP - 124 EP - 129 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Yfantis, Alexandros D. A1 - Batchelor, David R. A1 - Appel, Günter A1 - Schmeißer, Dieter T1 - A Spectro-Microscopic Approach for Thin Film Analysis Grain Boundaries in mc-Si and Sn/SnO2 Nano Particles T2 - Microchimica Acta Y1 - 2001 SN - 1436-5073 SN - 0026-3672 VL - 136 IS - 3-4 SP - 109 EP - 113 ER - TY - JOUR A1 - Lopez, A. A1 - Bitzer, Thomas A1 - Heller, Thomas A1 - Richardson, Neville V. T1 - Adsorption of water on alkoxy modified Si(1 0 0), Si(1 1 3) and Si(1 1 5) surfaces Y1 - 2001 ER - TY - JOUR A1 - Lopez, A. A1 - Bitzer, Thomas A1 - Heller, Thomas A1 - Richardson, Neville V. T1 - Adsorption of maleic anhydride on Si(1 0 0)-2 x 1 JF - Surface Science Y1 - 2001 SN - 0039-6028 VL - 477 SP - 219 EP - 226 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Appel, Günter A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Band Bending in Doped Conducting Polypyrrole Interaction with Silver Y1 - 2001 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Appel, Günter A1 - Schmeißer, Dieter T1 - Conductivity of Silver exposed Polypyrrole Films Y1 - 2001 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Lloyd Spetz, Anita A1 - Lundström, Ingemar T1 - Comparison of HF and ozone treated SiC surfaces Y1 - 2001 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Seyller, Th. A1 - Ley, L. A1 - Lloyd Spetz, Anita T1 - Oxide growth on SiC (0001) surfaces Y1 - 2001 ER - TY - JOUR A1 - Sieber, N. A1 - Mantel, B. F. A1 - Seyller, Th. A1 - Ristein, J. A1 - Ley, L. A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Electronic and chemical passivation of hexagonal 6H-SiC surfaces by hydrogen termination Y1 - 2001 ER - TY - CHAP A1 - Batchelor, David R. A1 - Berg, A. A1 - Simon, Sylvio A1 - Wagner, Lothar A1 - Viehweger, Bernd A1 - Schmeißer, Dieter T1 - Development of Joining Techniques through Pressforming of Steel and Aluminium Y1 - 2001 UR - http://www.materialsweek.org/proceedings/index.htm ER - TY - CHAP A1 - Henkel, Karsten A1 - Elling, B. A1 - Danz, R. A1 - Büchtemann, A. A1 - Straube, Oliver A1 - Paloumpa, Ioanna A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter T1 - Piezoelectric polymer sensor for high pressures in forming machines Y1 - 2001 UR - http://www.materialsweek.org/proceedings/index.htm ER - TY - CHAP A1 - Hulea, Iulian A1 - Hoffmann, Patrick A1 - Brinza, Monica A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - The interface of friction-welded Al-Fe joints. ATB Metallurgy Y1 - 2001 ER - TY - CHAP A1 - Jaegermann, Wolfram A1 - Schmeißer, Dieter T1 - Elementary Processes at Solid/Electrolyte Interfaces Y1 - 2001 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Tsiniarakis, G. A1 - Labrakopoulos, S. A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter T1 - Conductive polymers of pyrrole as pigments in organic anticorrosive coatings-application for aluminium alloys Y1 - 2001 ER - TY - THES A1 - Schweizer, Stefan T1 - Dynamisches Verhalten von Silizium-Elektroden in Fluor-haltigen Elektrolyten KW - Silizium KW - Oxidation KW - Voltammogramme KW - Injektion KW - AFM Y1 - 2004 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-000000526 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/80 PB - Brandenburgische Techn. Univ. CY - Cottbus ER - TY - GEN A1 - Lewerenz, Hans-Joachim A1 - Aggour, Mohammed A1 - Murrell, Chris A1 - Kanis, M. A1 - Jungblut, H. A1 - Jakubowicz, J. A1 - Cox, P. A. A1 - Campbell, S. A. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Initial stages of structure formation on silicon electrodes investigated by photoelectron spectroscopy using synchrotron radiation and in-situ atomic force microscopy T2 - Journal of the Electrochemical Society N2 - The surface condition of electrochemically H-terminated Si is compared with the situation at the first photocurrent maximum in dilute acidic ammonium fluoride solution where the divalent dissolution converts into the four-valence process. The first high spectral-resolution photoelectron spectroscopy data using synchrotron radiation of electrochemically hydrogenated Si are presented. A combined electrochemistry/ultrahigh vacuum surface analysis system, attached to the U 49/2 beamline at the synchrotron Bessy II, is used for photoelectron spectroscopy (PES) of the electrochemically conditioned samples. We analyze the Si 2p, O 1s, and F 1s core levels. A comparison of a density functional theory calculation of the reaction sequence, proposed in the dissolution model of Gerischer and co-workers, with the PES results supports this model. The anodized sample is characterized by a residual H coverage of 0.35 monolayers evidenced by a surface core level shift, Si-OH and Si-Fx species, F-, and a higher oxidized Si species. SiO2 is not found. Even on very well H-terminated surfaces, we find residual Si-OH complexes, fluoride and water. In situ atomic force microscopy shows a roughening with a root mean square roughness parameter of 2.6 nm. %A92003 The Electrochemical Society. All rights reserved. Y1 - 2003 SN - 1945-7111 VL - 150 IS - 3 SP - E185 EP - E189 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Roters, G. A1 - Nenyei, Z. T1 - Non-destructive probing of interfacial oxidation and nitridation states at RTA Si-oxides T2 - Thin Solid Films N2 - The quality of the SiO2/Si interface is of crucial importance in the development and performance of sub 0.1 small mu, Greekm technologies. The knowledge of the chemical composition of the interface is an important piece of information in the preparation of ultra-thin oxides and high-k dielectrics, in order to maintain a high-quality interface and channel mobility. Here we report on investigations of 2 nm oxide layers formed by a RTP process under various gas mixtures containing N2O and NH3 at different concentrations. We studied the SiO2/Si(001) interface by a non-destructive depth profiling using Synchrotron radiation photoelectron spectroscopy. We determine the thickness of the oxide layer, the relative content and chemical state of nitrogen within the oxide, the thickness of the interface layer, and the relative abundance of Si intermediate oxides within. In all systems we find the thickness of the intermediate layer to be approximately 0.17 nm. The intermediate layer contains Si atoms in the oxidation states +1, +2 and +3 with similar relative abundance. Nitrogen is found predominantly close to the intermediate layer forming Si---N as well as Si---N---O bonds. Within the oxide there are only spurious nitrogen content with predominately Si---N---O bonds. Our method is able to detect a nitrogen content within the intermediate layer as low as approximately 5%. KW - Silicon KW - Oxynitride KW - N20 KW - NH3 KW - Photoelectron spectroscopy KW - Ultrathin oxide Y1 - 2003 SN - 0040-6090 VL - 428 IS - 1-2 SP - 216 EP - 222 ER -