TY - JOUR A1 - Torche, Mohamed A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - The interaction of Al, Ag, Au and Ti to Pr2O3 thin film dielectrics KW - thin films KW - Pr2O3 Y1 - 2006 ER - TY - GEN A1 - Seifarth, Olaf A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Stamm, Manfred T1 - Metallic nickel nanorod arrays embedded into ordered block copolymer templates T2 - Thin Solid Films Y1 - 2007 SN - 0040-6090 VL - 515 IS - 16 SP - 6552 EP - 6556 ER - TY - GEN A1 - Schroeder, Thomas A1 - Lupina, Grzegorz A1 - Seifarth, Olaf A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2-xO3 (x=0-2) dielectrics on TiN for dynamic random access memory applications T2 - Journal of Applied Physics Y1 - 2007 SN - 0021-8979 VL - 102 IS - 1 SP - 014103 ER - TY - JOUR A1 - Henkel, Karsten A1 - Sohal, Rakesh A1 - Schmeißer, Dieter A1 - Schwiertz, Carola A1 - Burkov, Yevgen A1 - Torche, Mohamed T1 - Al-oxynitride buffer layer facilities for PrOx/SiC interfaces Y1 - 2007 ER - TY - JOUR A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Organic field effect transistors with ferroelectric hysteresis Y1 - 2007 ER - TY - JOUR A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Schmeißer, Dieter T1 - No interfacial layer for PEDOT electrodes on PVDF: Characterization of reactions at the interface P(VDF/TrFE)/Al and P(VDF/TrFE)/PEDOT:PSS Y1 - 2007 ER - TY - THES A1 - Meyer, Moritz Andreas T1 - Effects of advanced process approaches on electromigration degradation of Cu on-chip interconnects KW - Elektromigration Y1 - 2007 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-3509 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/343 ER - TY - THES A1 - Sohal, Rakesh T1 - CVD growth of (001) and (111) 3C-SiC epilayers and their interface reactivity with praseodymium oxide dielectric layers KW - Siliciumcarbid KW - Kristallfläche KW - Dielektrische Schicht KW - CVD-Verfahren Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-121 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/13 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Bierman, Matthew J. T1 - Ferromagnetic Semiconducting EuO Nanorods Y1 - 2007 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Wehner, Stefan A1 - Hoffmann, Patrick A1 - Brand, Helmut R. A1 - Küppers, Jürgen ED - Descalzi, Orazio T1 - Influence of the Substrate on the Pattern Formation of a Surface Reaction T2 - Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006 Y1 - 2007 SN - 978-0-7354-0421-2 SP - 121 EP - 126 PB - AIP Publishing CY - Melville, New York ER - TY - JOUR A1 - Müller, Sebastian A1 - Seibold, Götz A1 - Schmeißer, Dieter ED - Vierhaus, Heinrich Theodor T1 - Preparation and Characterization of TiO2 Thin Films and Cr and Co Doped TiO2 Thin Films Y1 - 2007 ER - TY - JOUR A1 - Burkov, Yevgen ED - Vierhaus, Heinrich Theodor T1 - Dielectric Buffer Layer (Aluminium Oxynitride/AlON) for Ultrathin High-k Materials Y1 - 2007 ER - TY - GEN A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Study of Bulk and Interface Defects in Silicon Oxide with X-ray Absorption Spectroscopy T2 - Materials Science and Engineering : B Y1 - 2007 SN - 0921-5107 VL - 144 IS - 1-3 SP - 23 EP - 26 ER - TY - JOUR A1 - Beck, Romuald B. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Bieniek, Tomasz A1 - Jakubowski, Andrzej T1 - Composition and Electrical Properties of Ultra-Thin SiOxNy Layers Formed by rf Plasma Nitrogen Implantation/Plasma Oxidation Processes Y1 - 2007 ER - TY - JOUR A1 - Mroczynski, Robert A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - The Influence of Annealing (900 Grad C) of Ultra-Thin PECVD Silicon Oxynitride Layers Y1 - 2007 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Mroczynski, Robert A1 - Bieniek, Tomasz T1 - Comparison of Composition of Ultra-Thin Silicon Oxynitride Layers´ fabricated by PECVD and Ultrashallow rf Plasma Ion Implantation Y1 - 2007 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Burkov, Yevgen A1 - Paloumpa, Ioanna A1 - Mandal, Dipankar A1 - Henkel, Karsten T1 - Microscopic and Spectroscopic Characterization of Interfaces and Dielectric Layers for OFET Devices Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Karavaev, Konstantin T1 - Al-Oxynitride Interfacial Layer Investigations for PrxOy on SiC and Si Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Domaradzki, Jarosław A1 - Kaczmarek, Danuta A1 - Borkowska, Angnieszka A1 - Müller, Sebastian T1 - Influence of Annealing on the Structure and Stoichiometry of Europium-Doped Titanium Dioxide Thin Films Y1 - 2008 ER - TY - THES A1 - Lehmann, Carsten T1 - Elektronische Struktur dünner Halbleiterfilme (Chalkopyrite) als Absorbermaterialien für Dünnschichtsolarzellen KW - Photovoltaik KW - Dünnschichtsolarzelle Y1 - 2007 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-4319 UR - http://opus.kobv.de/btu/volltexte/2008/431/ ER - TY - THES A1 - Mandal, Dipankar T1 - Ultra-thin films of a ferroelectric copolymer: P(VDF-TrFE) KW - Grenzflächenchemie KW - Photoelektronenspektroskopie KW - Polymerfilm Y1 - 2008 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-5628 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/439 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müller, S. A1 - Seifarth, Olaf A1 - Dabrowski, Jarek Marek A1 - Müssig, Hans-Joachim A1 - Schroeder, Thomas T1 - On the band gaps and electronic structure of thin single crystalline praseodymium oxide layers on Si(111) T2 - Journal of vacuum science & technology / B KW - band gabs KW - electronic structure KW - oxide layers Y1 - 2009 VL - 27 IS - 1 SP - 271 EP - 276 ER - TY - THES A1 - Neubauer, Antje T1 - Untersuchung der ultraschnellen Elektronentransferdynamik an organisch/anorganischen Grenzflächen unter Einsatz von Femtosekundenspektroskopie im Ultrahochvakuum KW - Halbleiteroberfläche KW - Perylen KW - Synthetischer Farbstoff KW - Absorptionsspektroskopie KW - Elektronentransfer Y1 - 2009 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-7858 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/711 ER - TY - GEN A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Sohal, Rakesh A1 - Karavaev, Konstantin A1 - Burkov, Yevgen A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Pr-O-Al-N dielectrics for metal insulator semiconductor stacks KW - semiconductor KW - dielectric Y1 - 2011 ER - TY - GEN A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Spin coated organic ferroelectric films for non volatile memories KW - organic KW - ferroelectric Y1 - 2011 ER - TY - GEN A1 - Koval, Yuri A1 - Lazareva, I. A1 - Müller, P. A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Friedrich, Daniel T1 - Field effect transistors on graphitized polymer surfaces KW - transistors KW - polymer Y1 - 2011 ER - TY - GEN A1 - Seifarth, Olaf A1 - Schubert, Markus Andreas A1 - Giussani, A. A1 - Klenov, D. O. A1 - Schmeißer, Dieter A1 - Schroeder, Thomas T1 - Single crystalline Pr2-xYxO3 (x=0-2)dielectrics on Si with tailored electronic and crystallographic structure KW - crystalline KW - dielectric KW - structure Y1 - 2010 SN - 1089-7550 VL - 108 IS - 10 SP - 103709 ER - TY - GEN A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Band gab determination of P(VDF-TrFE) copolymer film by electron energy loss spectroscopy Y1 - 2010 ER - TY - GEN A1 - Sioncke, Sonja A1 - Lin, Hang-Chu A1 - Brammertz, Guy A1 - Delabie, Annelies A1 - Conard, Thierry A1 - Franquet, Alexis A1 - Caymax, Matty A1 - Meuris, Marc A1 - Schmeißer, Dieter A1 - Tallarida, Massimo T1 - ALD on high mobility channels: engineering the proper gate stack passivation T2 - ECS Transactions KW - ALD KW - engineering KW - gate stack KW - passivation Y1 - 2010 SN - 1938-5862 VL - 33 IS - 2 SP - 9 EP - 23 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Hermann, Peter A1 - Dudek, Piotr T. A1 - Gotszalk, Teodor A1 - Chumakov, Dmytro A1 - Weisheit, Martin A1 - Hecker, Michael A1 - Zschech, Ehrenfried T1 - Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon-germanium thin films T2 - Thin Solid Films KW - oxidation KW - microscope KW - measurements KW - thin films Y1 - 2010 SN - 0040-6090 VL - 518 IS - 12 SP - 3267 EP - 3272 ER - TY - GEN A1 - Tamm, Aile A1 - Kemell, Marianna A1 - Kozlova, Jekaterina A1 - Sajavaara, Timo A1 - Tallarida, Massimo A1 - Kukli, Kaupo A1 - Sammelselg, V. A1 - Ritala, Mikko A1 - Leskelä, Markku T1 - Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxid Thin Films T2 - Journal of The Electrochemical Society KW - atomic Layer deposition KW - Erbium KW - Zirconium KW - Oxid-Doped Y1 - 2010 VL - 157 IS - 10 SP - G193 EP - G201 ER - TY - GEN A1 - Kukli, Kaupo A1 - Aarik, Jaan A1 - Aidla, Aleks A1 - Uustare, Teet A1 - Jõgi, Indrek A1 - Lu, Jun A1 - Tallarida, Massimo A1 - Kemell, Marianna A1 - Kiisler, Alma- Asta A1 - Ritala, Mikko A1 - Leskelä, Markku T1 - Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1´-methyl-ruthenocene T2 - Journal of Crystal Growth KW - morphology KW - atomic layer deposition Y1 - 2010 U6 - https://doi.org/10.1016/j.jcrysgro.2010.03.033 SN - 0022-0248 VL - 312 IS - 12-13 SP - 2025 EP - 2032 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope KW - in situ KW - atomic layer deposition KW - dielectric KW - microscope Y1 - 2010 ER - TY - GEN A1 - Ho, Paul S. A1 - Zschech, Ehrenfried A1 - Schmeißer, Dieter A1 - Meyer, Moritz Andreas A1 - Huebner, Rene A1 - Hauschildt, Meike A1 - Zhang, Lijuan A1 - Gall, Martin A1 - Kraatz, Matthias T1 - Scaling effects on microstructure and reliability for cu interconnects KW - scaling KW - microstructure KW - interconnects Y1 - 2010 ER - TY - GEN A1 - Wehner, Stefan A1 - Karpitschka, Stefan A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Küppers, Jürgen A1 - Brand, Helmut R. T1 - Stochastic aspects of pattern formation during the catalytic oxidation of CO on Pd(111) KW - stochastic KW - pattern KW - catalytic oxidation Y1 - 2010 ER - TY - GEN A1 - Henkel, Karsten A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Buffer layer incestigaions on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene] T2 - IOP conference series : Materials Science and Engineering KW - MFIS capacitors KW - ferroelectric Y1 - 2010 SN - 1757-899X VL - 8 IS - 1 SP - 012036 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Bergholz, Matthias A1 - Tallarida, Massimo T1 - The band gab and band offset in ultrathin oxide-semiconductor heterostructures KW - band gab KW - offset KW - ultrathin KW - heterostructures Y1 - 2010 ER - TY - CHAP A1 - Müller, Sebastian A1 - Schmeißer, Dieter T1 - Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - synchrotron KW - radiation KW - spectroscopy KW - ultrathin KW - titanium KW - chromium Y1 - 2009 SN - 978-1-4244-4303-1 SP - 64 EP - 68 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - atomic layer deposition KW - microsystems KW - high-k dielectrics Y1 - 2009 SN - 978-1-4244-4303-1 SP - 47 EP - 51 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Klocek, Jolanta A1 - Friedrich, Daniel A1 - Schmeißer, Dieter A1 - Hecker, Michael A1 - Zschech, Ehrenfried T1 - The stability of C60 and its derivatives upon handling in microsystems technologies T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - c60 KW - derivatices Y1 - 2009 SN - 978-1-4244-4303-1 SP - 43 EP - 46 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Kolanek, Krzysztof A1 - Schmeißer, Dieter T1 - Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films KW - in-situ2 KW - ALD KW - nano-functional Y1 - 2009 ER - TY - CHAP A1 - Schwiertz, Carola A1 - Henkel, Karsten A1 - Blei, S. A1 - Heidenreich, R. A1 - Schmeißer, Dieter T1 - Nachweis von Aerosolen (<1µm) mit Schwingquarzimpedanzspektroskopie KW - Schwingquarzimpedanzspektroskopie Y1 - 2009 ER - TY - GEN A1 - Zschech, Ehrenfried A1 - Ho, O. S. A1 - Schmeißer, Dieter A1 - Meyer, Moritz Andreas A1 - Vairagar, A. V. A1 - Schneider, G. A1 - Hauschildt, Meike A1 - Kraatz, Matthias A1 - Sukharev, V. T1 - Geometry and Microstructure Effect on EM-Induced Copper Interconnect Degradation T2 - IEEE Transactions on Device and Materials Reliability KW - Microstructure Y1 - 2009 UR - http://ieeexplore.ieee.org/xpls/icp.jsp?arnumber=4796372 SN - 1530-4388 VL - 9 IS - 1 SP - 20 EP - 30 ER - TY - CHAP A1 - Heim, S. A1 - Friedrich, Daniel A1 - Guttmann, P. A1 - Rehbein, S. A1 - Chumakov, Dmytro A1 - Ritz, Y. A1 - Schneider, G. A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects KW - x-ray KW - Microscopy KW - Interconnects Y1 - 2009 UR - http://link.aip.org/link/?APCPCS/1143/20/1 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Tallarida, Massimo T1 - Interface Reactions in Ultrathin Functional Dielectric Films KW - ultrathin KW - dielectric Y1 - 2009 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Tallarida, Massimo A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Chumakov, Dmytro A1 - Zschech, Ehrenfried T1 - Characterization of oxidic and organic materials with synchrotron radiation based XPS and XAS KW - oxidic KW - organic KW - materials KW - synchrotron radiation KW - XPS KW - XAS Y1 - 2009 ER - TY - GEN A1 - Lazareva, I. A1 - Koval, Yuri A1 - Müller, P. A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Interface screening and imprint in pol(vinylidene fluoride/trifluoroethylene) ferroelectric field effect transistors KW - interface KW - screening KW - transistors Y1 - 2009 ER - TY - CHAP A1 - Müller, Klaus A1 - Burkov, Yevgen A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Goryachko, Andriy A1 - Schmeißer, Dieter ED - Wöll, Christof T1 - Microscopic and spectroscopic characterization of interfaces and dielectric layers for OFET devices T2 - Organic Electronics : structural and Electronic Properties of OFETs KW - microscopic KW - spectrocsopic KW - dielectric Y1 - 2009 SN - 978-3-527-40810-8 SP - 445 EP - 468 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - HfO2/Si interface formation in atomic layer deposition films: an in situ investigation KW - atomic layer deposition Y1 - 2009 ER - TY - GEN A1 - Henkel, Karsten A1 - Lazareva, I. A1 - Mandal, Dipankar A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Koval, Yuri A1 - Müller, P. A1 - Schmeißer, Dieter T1 - Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using Poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications KW - metal KW - frerroelectric KW - insulator KW - semiconductor Y1 - 2009 ER - TY - GEN A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Karavaev, Konstantin A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Optimization of the AION buffer layer for PrxOy/Si stacks KW - AION buffer Y1 - 2009 ER - TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Konarski, Piotr A1 - Cwil, M. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation KW - ultrashallow KW - oxynitride Y1 - 2008 ER - TY - GEN A1 - Zschech, Ehrenfried A1 - Geisler, Holm A1 - Rinderknecht, Jochen A1 - Schneider, Gerd A1 - Spolenak, Ralph A1 - Schmeißer, Dieter T1 - Nano-scale analysis using synchrotron-radiation: Applications in the semiconductor industry T2 - Current nanoscience KW - synchrotron-radiation KW - semiconductor Y1 - 2008 SN - 1573-4137 VL - 4 IS - 3 SP - 256 EP - 266 ER - TY - GEN A1 - Zagorodniy, Kostyantyn A1 - Chumakov, Dmytro A1 - Täschner, Christine A1 - Lukowiak, Anna A1 - Stegmann, Heiko A1 - Schmeißer, Dieter A1 - Geisler, Holm A1 - Engelmann, Hans-Jürgen A1 - Hermann, Helmut A1 - Zschech, Ehrenfried T1 - Novel Carbon-cage based ultralow-k materials: Modelling and first experiments KW - carbon-cage KW - ultralow-k Y1 - 2008 U6 - https://doi.org/10.1109/TSM.2008.2005396 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Study of silicon/oxides interfaces by means of Si2p resonant photoemission KW - photoemission KW - Si2p Y1 - 2008 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - The initial atomic layer deposition of HfO2/Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy KW - synchrotron KW - photoelectron KW - HfO2 Y1 - 2008 ER - TY - JOUR A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Ferroelectric properties of spin-coated ultrathin (down to 10nm) copolymer films KW - ferroelectric KW - spin-coated KW - copolymer Y1 - 2008 ER - TY - GEN A1 - Opel, Matthias A1 - Nielsen, Karl-Wilhelm A1 - Bauer, Sebastian A1 - Goennenwein, Sebastian T. B. A1 - Gross, Rudolf A1 - Cezar, Julio C. A1 - Schmeißer, Dieter A1 - Simon, Jürgen A1 - Mader, Werner T1 - Nanosized superparamagnetic precipitates in cobalt-doped ZnO T2 - The European Physical Journal : B KW - nanosized KW - superparamagnetic Y1 - 2008 SN - 1434-6036 VL - 63 IS - 4 SP - 437 EP - 444 ER - TY - CHAP A1 - Seifarth, Olaf A1 - Wilke, A. A1 - Walczyk, Christian A1 - Dabrowski, Jarek Marek A1 - Zaumseil, Peter A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim A1 - Schroeder, Thomas T1 - Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111) T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - band gab KW - XAS KW - UPS KW - Si(111) Y1 - 2008 SP - 285 EP - 286 ER - TY - CHAP A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Bergholz, Matthias A1 - Karavaev, Konstantin A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schmeißer, Dieter T1 - Al-Oxynitride as a buffer layer for high-k dielectrics T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - buffer layer KW - high-k KW - dielectric Y1 - 2008 SP - 161 EP - 162 ER - TY - CHAP A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Lazareva, I. A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Electrical investigations on MFIS structures consisting P[VDF/TrFE] as ferro-electric layer for non-volatile memory applications T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - MFIS, P[VDF/TrFE] KW - ferroelectric KW - non-volatile Y1 - 2008 SP - 159 EP - 160 ER - TY - JOUR A1 - Zimina, A. A1 - Batchelor, David R. A1 - Eisebitt, S. A1 - Schmeißer, Dieter A1 - Shukalov, A. A1 - Eberhardt, W. T1 - Soft X-ray emission electron microscopy: chemical state microscopy from interface and bulk KW - x-ray KW - microscopy KW - interface KW - bulk Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Seibold, Götz A1 - Reif, Jürgen T1 - Nano-scaled Dielectric Barriers (NanoDieB) for CMOS compatible Si-technologies JF - Forum der Forschung KW - nano-scaled KW - dielectric KW - CMOS Y1 - 2006 SN - 0947-6989 IS - 19 SP - 131 EP - 136 ER - TY - JOUR A1 - Müller, Sebastian A1 - Schmeißer, Dieter T1 - Properties of Cr deposited on TiO2 thin films KW - cr KW - TiO2 Y1 - 2008 ER - TY - JOUR A1 - Sohal, Rakesh A1 - Lupina, Grzegorz A1 - Lippert, Gunther A1 - Wenger, Christian A1 - Seifarth, Olaf A1 - Schröder, Thomas A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Interface chemistry of high-k PrxAl2-xO3 (x=2-0) dielectrics on TiN for dynamic random access memory applications KW - high-k KW - dielectric KW - random Y1 - 2008 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - HfO2 ALD-growth studied by in situ photoemission T2 - Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008 KW - ald KW - photoemission Y1 - 2008 SP - 289 EP - 290 ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - Elshocht, Sven van A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum T2 - Applied physics letters Y1 - 2011 U6 - https://doi.org/10.1063/1.3615784 SN - 1077-3118 VL - 99 IS - 4 SP - 042906-1 EP - 042906-3 ER - TY - GEN A1 - Schwarzkopf, Jutta A1 - Dirsyte, R. A1 - Devi, A. A1 - Kwasniewski, A. A1 - Schmidbauer, M. A1 - Wagner, Gerd A1 - Michling, Marcel A1 - Schmeißer, Dieter A1 - Fornari, Robert T1 - Influence of Na on the structure of Bi4Ti3O12 films deposited by liquid-delivery spin MOCVD T2 - Thin solid films Y1 - 2011 SN - 0040-6090 VL - 519 IS - 17 SP - 5754 EP - 5759 ER - TY - GEN A1 - Tallarida, Massimo A1 - Weisheit, Martin A1 - Kolanek, Krzysztof A1 - Michling, Marcel A1 - Engelmann, Hans-Jürgen A1 - Schmeißer, Dieter T1 - Atomic layer deposition of nanolaminate oxide films on Si T2 - Journal of Nanoparticle Research Y1 - 2011 U6 - https://doi.org/10.1007/s11051-011-0319-x VL - 13 IS - 11 SP - 5975 EP - 5983 ER - TY - CHAP A1 - Wyrodek, Jakub A1 - Tallarida, Massimo A1 - Weisheit, Martin A1 - Schmeißer, Dieter T1 - Determination of interfacial layers in high-k nanomaterials by ADXPS measurements Y1 - 2010 ER - TY - CHAP A1 - Starzyk, Łukasz A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition Y1 - 2010 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Schmidt, Stephan A1 - Seibold, Götz A1 - Cherkashinin, Gennady A1 - Jaegermann, Wolfram T1 - Localized Gap States in LiCoO2 and their Influence on the Transport Properties in Li-Ion Batteries T2 - ECS Transactions Y1 - 2010 SN - 1938-5862 VL - 25 IS - 35 SP - 37 EP - 45 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Atomic layer deposition of HfO2 investigated in situ by means of a noncontact atomic force microscopy Y1 - 2010 ER - TY - CHAP A1 - Broczkowska, K. A1 - Klocek, Jolanta A1 - Friedrich, Daniel A1 - Henkel, Karsten A1 - Kolanek, Krzysztof A1 - Urbanowicz, A. A1 - Schmeißer, Dieter A1 - Miller, M. A1 - Zschech, Ehrenfried T1 - Fullerene based materials for ultra-low-k application T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010 Y1 - 2010 SN - 978-1-4244-8324-2 SP - 39 EP - 43 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Henkel, Karsten A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Optimization of MFIS structures containing poly(vinylidene-fluoride trifluoroethylene) for non-volatile memory applications Y1 - 2010 ER - TY - GEN A1 - Henkel, Karsten A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Buffer layer investigations on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene] Y1 - 2010 ER - TY - GEN A1 - Dudek, Piotr T. A1 - Lupina, Grzegorz A1 - Kozłowski, Grzegorz A1 - Zaumseil, Peter A1 - Bauer, Jakob A1 - Fursenko, Oksana A1 - Dabrowski, Jarek Marek A1 - Schmidt, R. A1 - Lippert, Gunther A1 - Müssig, Hans-Joachim A1 - Schröder, Thomas A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Atomic-scale engineering of future high-k dynamic random access memory dielectrics: The example of partial Hf substitution by Ti in BaHfO3 T2 - Journal of Vacuum Science and Technology / B Y1 - 2011 SN - 2166-2754 VL - 29 IS - 1 ER - TY - GEN A1 - Janowitz, Christoph A1 - Scherer, Valentina A1 - Mohamed, Mansour A1 - Krapf, Alica A1 - Dwelk, Helmut A1 - Manzke, Recardo A1 - Galazka, Zbigniew A1 - Uecker, Reinhard A1 - Irmscher, Klaus A1 - Fornari, Robert A1 - Michling, Marcel A1 - Schmeißer, Dieter T1 - Experimental electronic structure of In2O3 and Ga2O3 T2 - New Journal of Physics Y1 - 2011 SN - 1367-2630 VL - 13 IS - 8 SP - 085014 ER - TY - GEN A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Comment on "Preparation and Characterization of Silver-Poly(vinylidene fluoride) Nanocomposites:Formation of Piezoelectric Polymorph of Poly(vinylidene fluoride" Y1 - 2011 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Michling, Marcel A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - Atomic layer deposition reactor for fabrication of metal oxides Y1 - 2011 ER - TY - GEN A1 - Tallarida, Massimo A1 - Kukli, Kaupo A1 - Michling, Marcel A1 - Ritala, Mikko A1 - Leskelä, Markku A1 - Schmeißer, Dieter T1 - Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium T2 - Chemistry of Materials Y1 - 2011 SN - 0897-4756 VL - 23 IS - 13 SP - 3159 EP - 3168 ER - TY - GEN A1 - Tallarida, Massimo A1 - Friedrich, Daniel A1 - Städter, Matthias A1 - Michling, Marcel A1 - Schmeißer, Dieter T1 - Growth of TiO2 with Thermal and Plasma Enhanced Atomic Layer Deposition T2 - Journal of Nanoscience and Nanotechnology Y1 - 2011 SN - 1533-4880 VL - 11 IS - 9 SP - 8049 EP - 8053 ER - TY - GEN A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - Novel "In-situ2" Approach to Modified ALD Processes for Nano-functional Metal Oxide Films Y1 - 2009 ER - TY - GEN A1 - Karavaev, Konstantin A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - In-Situ Studies of ALD Growth of Hafnium Oxide Films Y1 - 2009 ER - TY - JOUR A1 - Henkel, Karsten A1 - Karavaev, Konstantin A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - Al-Oxyxynitride interfacial layer investigations for PrXOY on SiC and Si Y1 - 2008 ER - TY - CHAP A1 - Müller, S. A1 - Schmeißer, Dieter T1 - Deposition of reactive and non-reactive metals on titanium dioxide - chromium and cobalt Y1 - 2008 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Study of bulk and interface defects in silicon oxide with X-ray absorption spectroscopy Y1 - 2007 ER - TY - CHAP A1 - Karavaev, Konstantin A1 - Tallarida, Massimo A1 - Schmeißer, Dieter ED - Vierhaus, Heinrich Theodor T1 - In-situ Atomic Layer Deposition growth of Hafnium oxide T2 - DEDIS-Nano-Days, October 11th and October 12th, 2007 Y1 - 2007 SP - 13 EP - 19 PB - BTU CY - Cottbus ER - TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Konarski, Piotr A1 - Cwil, M. T1 - Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor Y1 - 2006 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Sohal, Rakesh A1 - Schmeißer, Dieter T1 - Resonant photoemission at the Oxygen K edge as a tool to study the eletronic properties of defects at SiO2/Si and SiO2/SiC interfaces Y1 - 2006 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Wehner, Stefan A1 - Schmeißer, Dieter A1 - Brand, Helmut R. A1 - Küppers, Jürgen T1 - Noise-induced spatiotemporal patterns in a bistable reaction-diffusion system: Photoelectron emission micrsoscopy experiments and modeling of the CO oxidation reaction on Ir(111) T2 - Physical Review : E Y1 - 2006 SN - 1550-2376 VL - 73 IS - 5 SP - 056123 ER - TY - CHAP A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Sohal, Rakesh A1 - Schwiertz, Carola A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter ED - Dudley, Michael T1 - Pr-O-N Dielectrics for MIS Stacks on Silicon and Silicon Carbide Surfaces T2 - Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A. Y1 - 2006 SN - 978-1-55899-867-4 SP - 353 EP - 358 PB - Materials Research Society CY - Warrendale, Pa. ER - TY - GEN A1 - Beerbom, Martin A1 - Mayer, Thomas A1 - Jaegermann, Wolfram A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Electrochemically Induced Redox-Reactions on GaAs-Surfaces: High Resolution Photoemission Spectra Taken at the U49/2 Beamline Y1 - 2001 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Soinski, M. S. A1 - Follath, Rolf T1 - The chromatic aberration of PEEM - demonstration on graphite inclusions in cast iron, Kategrorie: Microscopy - Spectromicroscopy Y1 - 2001 ER - TY - JOUR A1 - Sieber, N. A1 - Mantel, B. F. A1 - Seyller, Th. A1 - Ristein, J. A1 - Ley, L. A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Structural, electronic and chemical properties of hydrogen terminated 6H-SiC Y1 - 2001 ER - TY - JOUR A1 - Graupner, R. A1 - Seyller, Th. A1 - Ley, L. A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - PEEM Investigation of CVD-Diamond grown on Si Y1 - 2001 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Follath, Rolf T1 - N2O-Oxidation of Si(100) Y1 - 2001 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Valence band spectroscopy of semiconducting regioregular Poly(3-Hexylthiophene)-2,5-diyl Y1 - 2001 ER - TY - CHAP A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Carbon-Plot-Micostructuring for All-Polymer-Transistors Y1 - 2001 ER - TY - JOUR A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter A1 - Kompotiatis, L. T1 - Polypyrrole based conversion coatings for aluminium alloys Y1 - 2001 ER -