TY - CHAP A1 - Muth, Marco A1 - Schmid, Reiner P. A1 - Schnitzlein, Klaus T1 - Specific modifications to enhance sensitivity in null-ellipsometry T2 - Book of abstracts, 8th Workshop Ellipsometry, March 10 - 12, 2014, Dresden, Germany Y1 - 2014 UR - http://www.ipfdd.de/fileadmin/user_upload/ax/OEA/8th_Workshop_Ellipsometry/Book%20of%20abstracts.pdf SP - S. 84 ER -