TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - A spectro-microscopic approach for spatially resolved characterisation of semiconductor structures in PEEM Y1 - 2000 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Appel, Günter A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Determination of the Vacuum Level in NEXAFS-spectra by Selected-Yield-NEXAFS Y1 - 1999 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - Photoemissionselektronenmikroskopie - ein Instrument für die Materialforschung Y1 - 1999 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter A1 - Kittler, Martin T1 - A spectro-microscopic approach to study the morphology and elemental distribution of mc-Si surfaces Y1 - 1999 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Appel, Günter A1 - Schmeißer, Dieter T1 - Doping and defect inhomogeneities of polypyrrole tosylate films as revealed by ?-NEXAFS Y1 - 1999 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - PEEM-investigations on cleaved MoTe2-surfaces Y1 - 1998 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - Doping inhomogenities in Polypyrrole films: a Photoemission Electron Microscope (PEEM) and Spectro-Microscopic Study Y1 - 1998 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Heller, Thomas A1 - Schmeißer, Dieter T1 - Lateral Doping Inhomogeneities as Revealed by ?-NEXAFS and ?-PES Y1 - 1998 ER - TY - JOUR A1 - Batchelor, David R. A1 - Follath, Rolf A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Commissioning Results of the BTUC-PGM beamline Y1 - 2001 ER - TY - THES A1 - Hoffmann, Patrick T1 - Untersuchungen zu Inhomogenitäten an der Halbleitergrenzfläche Silizium-Siliziumoxynitrid KW - Grenzflächeneigenschaften KW - SiO2 KW - SiON KW - Synchrotron-basierte Röntgen-Spektroskopie KW - XPS KW - XAS Y1 - 2003 SN - 3-8322-1982-X PB - Shaker-Verlag CY - Aachen ER - TY - CHAP A1 - Wehner, Stefan A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Brand, Helmut R. A1 - Küppers, Jürgen T1 - CO oxidation on Ir(111) surfaces: consequences of anisotropic diffusion and noise T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41 N2 - The CO oxidation reaction on Iridium(111) surfaces shows bistability in a limited range of the CO fraction of the reactant gas flux Y and a wide range of temperatures T. The two branches are characterized by their reactivity for CO2 formation. The upper rate (high CO2 formation) rate is related to high oxygen coverage on the surface, the lower rate (little CO2 formation) to high CO coverage. Quadrupol mass spectroscopy and PEEM (photoelectron emission microscopy) was employed to study the influence of a noisy reactant gas flux composition on the spatio-temporal pattern development in the CO oxidation reaction on flat Ir(111) and stepped Ir(977) surfaces. PEEM shows nucleation and growth of few oxygen resp. CO islands at small noise amplitudes. Anisotropic diffusion of CO parallel and normal to the steps causes elliptic shapes of large islands. The long axes of the ellipses are aligned along the steps. At increased noise amplitudes the density of islands becomes larger. 2D modeling of the phenomena based on reaction-diffusion differential equations reproduces the experimental findings quite nicely. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/o/session/14/contribution/37 SN - 0420-0195 SP - S. 475 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Himpsel, Franz J. A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried A1 - Stegmann, Heiko A1 - Denlinger, Jonathan D. T1 - Characterization of Chemical Bonding in Low-K Dielectric Materials for Interconnect Isolation: XAS and EELS Study T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41 N2 - The use of low dielectric constant materials in the on-chip interconnect process reduces interconnect delay, power dissipation and crosstalk noise. In CVD deposited organo-silicate glass (OSG) the substitution of oxygen in SiO2 by methyl groups (-CH3) reduces the permittivity significantly (from 4.0 in SiO2 to 2.6-3.3 in the OSG). However, plasma processing removes C and H containing molecular groups. Therefore, compositional analysis and chemical bonding characterization of structured films with nanometer resolution is necessary. OSG thin films as-deposited and after plasma treatment are studied using XAS and EELS. In both techniques, the fine structure near the C1s edge allows to identify C-H, C-C, and C-O bonds. XAS spectra have been recorded for non-patterned films and EELS spectra for patterned structures. The chemical bonding is compared for as-deposited and plasma-treated low-k materials. The flu-orescence and the electron yield recorded while XAS measurement are compared. Examination of the C 1s near-edge structures reveal a mod-ified bonding of the remaining C atoms in the plasma-treated sample regions. Y1 - 2006 SN - 0420-0195 SP - S. 156 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -