TY - GEN A1 - Adelmann, Christoph A1 - Cuypers, Daniel A1 - Tallarida, Massimo A1 - Rodriguez, Leonard A1 - De Clercq, Astrid A1 - Friedrich, Daniel A1 - Conard, Thierry A1 - Delabie, Annelies A1 - Seo, Jin Won A1 - Locquet, Jean-Pierre A1 - De Gendt, Stefan A1 - Schmeißer, Dieter A1 - Elshocht, Sven van A1 - Caymax, Matty T1 - Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide T2 - Chemistry of Materials N2 - The surface chemistry and the interface formation during the initial stages of the atomic layer deposition (ALD) of Al2O3 from trimethylaluminum (TMA) and H2O on InP(100)were studied by synchrotron radiation photoemission spectroscopy and scanning tunneling microscopy. The effect of the ex situ surface cleaning by either H2SO4 or (NH4)2S was examined. It is shown that the native oxide on the InP surface consisted mainly of indium hydrogen phosphates with a P enrichment at the interface with InP. After a (NH4)2S treatment, S was present on the surface as a sulfide in both surface and subsurface sites. Exposure to TMA led to the formation of a thin AlPO4 layer, irrespective of the surface cleaning. The surface Fermi level of p-type InP was found to be pinned close to midgap after H2SO4 cleaning and moved only slightly further toward the conduction band edge upon TMA exposure, indicating that the AlPO4/InP interface was rather defective. (NH4)2S passivation led to a Fermi level position of p-type InP close to the conduction band edge. Hence, the InP surface was weakly inverted, which can be attributed to surface doping by S donors. TMA exposure was found to remove surface S, which was accompanied by a shift of the Fermi level to midgap, consistent with the removal of (part of) the S donors in combination with a defective AlPO4/InP interface. Further TMA/H2O ALD did not lead to any detectable changes of the AlPO4/InP interface and suggested simple overgrowth with Al2O3. Y1 - 2013 U6 - https://doi.org/10.1021/cm304070h SN - 1520-5002 VL - 25 IS - 7 SP - 1078 EP - 1091 ER - TY - GEN A1 - Rossi, Francesca A1 - Fabbri, Filippo A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Modreanu, Mircea A1 - Attolini, Giovanni A1 - Salviati, Giancarlo T1 - Structural and luminescence properties of HfO2 nanocrystals grown by atomic layer deposition on SiC/SiO2 core/shell nanowires T2 - Scripta Materialia N2 - In this work we report the morphological, structural and luminescence properties of HfO2 nanocrystals grown on the surface of SiC/SiO2 core/shell nanowires by atomic layer deposition. All the studies are carried out in comparison with HfO2 nanocrystal aggregates grown on planar oxidized silicon substrates. The structural analyses reveal that HfO2has monoclinic structure with dif-ferent orientations. The cathodoluminescence emission shows the main components at 2.7 and 2.3 eV, deeply influenced by the arrangement and aggregation of the nanocrystals. KW - Silicon carbide KW - Silicon dioxide KW - Nanowires KW - Hafnium oxide KW - Nanocrystals Y1 - 2013 U6 - https://doi.org/10.1016/j.scriptamat.2013.08.017 SN - 1359-6462 VL - 69 IS - 10 SP - 744 EP - 747 ER - TY - THES A1 - Klocek, Jolanta T1 - Processing and investigation of thin films with incorporated carbon species for possible application as low-k materials N2 - In this thesis the detailed investigations concerning processing and stability of thin films including carbon species and their possible application as materials of a low dielectric constant (low k) are presented. In order to gather a complex information regarding the chemical, morphological and dielectric properties of the produced layer a combination of the spectroscopy: X-ray photoelectron spectroscopy (XPS), near edge X-ray absorption fine structure spectroscopy (NEXAFS) and Fourier transform infrared spectroscopy (FTIR), microscopy: atomic force microscopy (AFM) and electrical characterization: capacitance-voltage technique (CV) have been applied. The films deposited by means of variety of techniques have been described, ranging from evaporation, through spraying and dropping to spin-coating. Regarding the possible low-k application, a considerable attention has been paid to the hybrid organic-inorganic 3-aminopropyl-trimethoxysilane (APTMS) based composite materials enriched with carbon species coming from the following dopants: C60 fullerenes, [6,6]-phenyl-C61-butyric acid (PCBM), copper phthalocyanine (CuPc), and tris(dimethylvinylsilyloxy)-POSS (POSS). In the following thesis progressive steps leading to gradual decreasing of the resulting permittivity of the hybrid material is presented. As revealed by the performed investigations, the replacement of C60 within the APTMS based matrix by its better soluble derivative PCBM allows the increase of the concentration of the carbon species within the composite films. The introduction of POSS as an additional dopant gave the opportunity of increasing the resistance of the produced material against the ambient influence. With the excess of the POSS concentration an original fractal-shaped cluster formation has been observed. Finally, the dispersion of the properly chosen low concentration of CuPc and POSS molecules within the APTMS based matrix led to the fabrication of homogenous layer with an ultra-low dielectric constant of 1.8. KW - X-ray photoelectron spectroscopy KW - Capacitance–voltage characterization KW - 3-Aminopropyltrimethoxysilane KW - Low-k materials KW - Atomic force microscopy Y1 - 2012 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-24358 UR - http://opus.kobv.de/btu/volltexte/2012/2435/ N1 - Auch im Südwestdeutschen Verlag für Hochschulschriften in Saarbrücken erschienen ER - TY - THES A1 - Kraatz, Matthias T1 - Studying the effect of Cu microstructure on electromigration reliability using statistical simulation KW - Electromigration KW - Simulation KW - Grain growth KW - Statistics Y1 - 2011 N1 - Dissertation wurde an der University of Texas in Austin eingereicht, Teilaspekte wurden an der BTU bearbeitet ER - TY - THES A1 - Karavaev, Konstantin T1 - In-situ Atomic Layer Deposition growth of Hf-oxide N2 - We have grown HfO2 on Si(001) by atomic layer deposition (ALD) using HfCl4, TEMAHf, TDMAHf and H2O as precursors. The early stages of the ALD were investigated with high-resolution photoelectron spectroscopy and x-ray absorption spectroscopy. We observed the changes occurring in the Si2p, O1s, Hf4f, Hf4d, and Cl2p (for HfCl4 experiment) core level lines after each ALD cycle up to the complete formation of two layers of HfO2. The investigation was carried out in-situ giving the possibility to determine the properties of the grown film after every ALD cycle or even after a half cycle. This work focused on the advantages of the in-situ approach in comparison to ex-situ experiments. The study provides to follow the evolution of the important properties of HfO2: contamination level, density and stoichiometry, and influence of the experimental parameters to the interface layer formation during ALD. Our investigation shows that the in-situ XPS approach for ALD gives much more information than ex-situ experiments. KW - Atomic layer deposition KW - ALD KW - X-ray photoelectron spectroscopy KW - XPS KW - Hf=2 Y1 - 2011 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-22617 UR - http://opus.kobv.de/btu/volltexte/2011/2261/ ER - TY - THES A1 - Müller, Sebastian T1 - Synchrotron radiation spectroscopy studies of the initial interaction of Chromium and Cobalt with the surface of Titanium Dioxide N2 - In the framework of this thesis, synchrotron radiation based spectroscopy methods are applied to study the electronic structures of stoichiometric Rutile single crystals and TiO2 thin films, and the initial stage of chromium and cobalt growth on TiO2 thin films. Resonance photoemission spectroscopy of clean TiO2 at the Ti L2,3 edges led to Auger-like features, with kinetic energies corresponding to the Ti L2,3M4,5M4,5 Auger decay channels. The presence of these features is assigned to origin from a d2L2 charge transfer state. The resonance of the Ti L3M2,3V Auger channel at the Ti L2 edge is assigned to the L2L3V Coster-Kronig Auger, followed by the normal L3M2,3V Auger decay. The deposition of chromium on the TiO2 film causes a strong interaction at the interface, in which TiO(2-x) is formed together with chromium in the Cr 3+ state. Besides the oxidized component, contribution of metallic chromium is found as well. In the ultra-low coverage regime, post-deposition oxidation is observed, in which metallic chromium is oxidized to Cr2O3, accompanied by re-oxidation of the substrate to TiO2. The interface reaction is also reflected by the appearance of two defect states in the band gap. Resonant photo-emission at the Cr 2p and Ti 2p edges shows well distinguishable Cr 3d respectively Ti 3d character of the respective states. Indications for self-cleaning properties are found by removal of surface carbon during storage in UHV, but the influence of chromium on these properties is not studied in detail. The interaction between cobalt and TiO2 is weaker than that of chromium and TiO2. Nevertheless, an interface reaction is found, in which some of the deposited cobalt is oxidized, while the oxide support is partly reduced. The particular oxidation state of Cobalt is identified by means of multiplet calculation including charge transfer and crystal field effects. The calculated XAS and XPS spectra indicate Co 2+ in a tetrahedral coordination with four oxygen atoms. The metallic component of cobalt gives rise to a broad resonance in the valence band down to -20 eV, with a pronounced satellite feature that reflects the oxidized component. KW - Titanium dioxide KW - Metal/metal-oxide interaction KW - Multiplet-calculation KW - Resonant photoemission Y1 - 2010 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-18914 UR - http://opus.kobv.de/btu/volltexte/2010/1891/ ER - TY - THES A1 - Henkel, Karsten T1 - Electrical Investigations on Praseodymium Oxide/Aluminum Oxynitride Containing Metal-Insulator-Semiconductor Stacks and on Metal-Ferroelectric-Insulator-Semiconductor Structures Consisting of Poly[vinylidene fluoride trifluoroethylene] N2 - In this thesis electrical characterizations on metal-insulator-semiconductor (MIS) and metal-ferroelectric-insulator-semiconductor (MFIS) stacks are presented. The results are discussed in terms of the increase of the performance of these stacks in order to optimize the characteristics of devices like the field effect transistor (FET) for logic applications and the ferroelectric field effect transistor (FeFET) for non-volatile and non-destructive readout memory applications. Therefor, two material classes are investigated. Firstly, this work focuses on praseodymium oxide (PrxOy) films as a high-kmaterial on silicon (Si) and silicon carbide in MISsamples. In particular the improvement of the performance by the introduction of an aluminum oxynitride buffer layer, which acts as an interdiffusion barrier and reduces the leakage current, the interface state density and the equivalent oxide thickness, is demonstrated. Secondly, in this work the very attractive ferroelectric material poly[vinylidene fluoride trifluoroethylene] (P[VDF/TrFE]) is introduced in MFIS stacks on Si. The way of successive improvements of the MFIS stack is extensively discussed. Here, the optimization of the preparation of the samples as well as of the layer parameters in the sequence of the MFIS stacks is depicted. An improved long time stability of the memory functionof the MFIS stack with a partially optimized layer sequence is exhibited. The electrical results are correlated to spectroscopic findings on both material systems. Strong interfacial reactions between the PrxOy and Si as well as between the aluminum electrode and the P[VDF/TrFE] layer are observed. For both systems the importance of a buffer layer is discussed and its optimization is addressed, too. On both systems a very nice, as consistent, chain of improvements is shown caused by the spectroscopic controlled preparation combined with electrical measurements in order to obtain the functionality of a given material system. KW - Pr2O3 KW - P(VDF-TrFE) KW - capacitance-voltage KW - conductance-voltage KW - current-voltage KW - dielectric properties KW - high-k KW - feFET Y1 - 2009 SN - 978-3-8322-8404-6 PB - Shaker CY - Aachen ER - TY - THES A1 - Torche, Mohamed T1 - Praseodymium oxide as dielectric in MIS stacks KW - high-k KW - Pr2O3 KW - X-ray photoelectron spectroscopy KW - XPS Y1 - 2006 CY - Cottbus ER - TY - THES A1 - Seifarth, Olaf T1 - Properties of chromium, cobalt and nickel nanoparticles embedded into ordered block copolymers and conducting polymers KW - block copolymers KW - chromium nanoparticles KW - cobalt nanoparticles KW - nickel nanoparticles Y1 - 2006 CY - Cottbus ER - TY - GEN A1 - Haeberle, Jörg A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Arens, Michael A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films T2 - Beilstein Journal of Nanotechnology N2 - We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using thermal atomic layer deposition (T-ALD) and plasma enhanced atomic layer deposition (PE-ALD) in the SENTECH SI ALD LL system. The T-ALD Al2O3layers were deposited at 200 °C, for the PE-ALD films we varied the substrate temperature range between room temperature (rt) and 200 °C. We show data from spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4” wafers and correlatethem to X-ray photoelectron spectroscopy (XPS) results. The 200°C T-ALD and PE-ALD processes yield films with similar refractive indices and with oxygen to aluminum elemental ratios very close to the stoichiometric value of 1.5. However, in both also fragments of the precursor are integrated into the film. The PE-ALD films show an increased growth rate and lower carbon contaminations. Reducing the deposition temperature down to rt leads to a higher content of carbon and CH-species. We also find a decrease of the refractive index and of the oxygen to aluminum elemental ratio as well as an increase of the growth rate whereas the homogeneity of the film growth is not influenced significantly. Initial state energy shifts in all PE-ALD samples are observed which we attribute to a net negative charge within the films. KW - Al2O3 KW - ALD KW - ellipsometry KW - PE-ALD KW - XPS Y1 - 2013 U6 - https://doi.org/10.3762/bjnano.4.83 SN - 2190-4286 VL - 2013 IS - 4 SP - 732 EP - 742 ER - TY - CHAP A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces After Wet Chemical Treatments T2 - Meeting Abstracts-Electrochemical Society, San Francisco, 2013 KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 UR - http://ma.ecsdl.org/content/MA2013-02/30/2132.full.pdf+html N1 - MA2013-02(30) SP - S. 2132 PB - The Electrochemical Society ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Transactions N2 - In this work synchrotron radiation photoemission spectroscopy (SRPES) is used to study InP surfaces after different wet chemical treatments. All results are compared to a typical fingerprint of surface components present on an as received InP sample. It is shown that acidified (HCl and H₂SO₄) treatments efficiently remove the native phosphate, although components like Pᴼ, Inᴼ and P(2±∆)+ remain present. In alkaline solution (NH₄OH) oxide remains present at the surface. As an alternative treatment, the immersion into (NH₄)₂S was studied. This passivation treatment results in fewer surface components which suggests that a higher quality surface is obtained. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 U6 - https://doi.org/10.1149/05806.0297ecst SN - 1938-6737 SN - 1938-5862 VL - 58 IS - 6 SP - 297 EP - 303 ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Conard, Thierry A1 - Rodriguez, Leonard A1 - Mees, M. A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Journal of Solid State Science and Technology N2 - The influence of different wet chemical treatments (HCl, H₂SO₄, NH₄OH) on the composition of InP surfaces is studied by using synchrotron radiation photoemission spectroscopy (SRPES). It is shown that a significant amount of oxide remains present after immersion in a NH₄OH solution which is ascribed to the insolubility of In³⁺ at higher pH values. Acidic treatments efficiently remove the native oxide, although components like Pᴼ, Inᴼ and P(2±Δ)+ suboxides are observed. Alternatively, the influence of a passivation step in (NH₄)₂S solution on the surface composition was investigated. The InP surface after immersion into (NH₄)₂S results in fewer surface components, without detection of Pᴼ and P(2±Δ)+ suboxides. Finally, slight etching of InP surfaces in HCl/H₂O₂ solution followed by a native oxide removal step, showed no significant effect on the surface composition. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - Scanning Tunneling Microscopy KW - InP KW - Wet chemical treatment Y1 - 2014 U6 - https://doi.org/10.1149/2.005401jss SN - 2162-8777 SN - 2162-8769 VL - 3 IS - 1 SP - N3016 EP - N3022 ER - TY - GEN A1 - Müller, Klaus A1 - Städter, Matthias A1 - Rachow, Fabian A1 - Hoffmannbeck, David A1 - Schmeißer, Dieter T1 - Sabatier-based CO2-methanation by catalytic conversion T2 - Environmental Earth Sciences N2 - The catalytic conversion of CO2is an important component for the reintegration of secondary products like CO2 or H2 into the energy supply. An example is the "power to gas’" concept with a conversion of CO2 into CH4. The CO2 is transferred into a carrier of chemical energy, with the possibility to feed the produced CH4 into the existing network of natural gas. At temperatures of around 350 °C, hydrogenation of CO2 to CH4 is possible by the Sabatier reaction CO2+4H2->CH4+H2O. One prerequisite for efficient kinetics of the Sabatier reaction is the application and optimization of catalysts. The focus of catalyst development is given to their performance under the conditions to be expected in the special application. As a part of the project Geoenergy-Research (GeoEn), we address questions related to the catalytic utilization of CO2 produced in the course of the oxyfuel combustion of lignite. In this contribution, we report on the experimental setup in laboratory scale, which enables an advanced characterization of the catalytic performance, including thermodesorption measurements at atmospheric pressure in order to determine the amount of adsorbed CO2 under real conditions. We also show data for activation energies, the catalytic performance as function of temperature and the long time stability of a commercial Ru-based catalyst. KW - CO2 KW - Sabatier reaction KW - Catalysis KW - RuO2 Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2609-3 SN - 1866-6280 VL - 70 IS - 8 SP - 3771 EP - 3778 ER - TY - GEN A1 - Das, Chittaranjan A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Linear dichroism in ALD layers of TiO₂ T2 - Environmental Earth Sciences N2 - We prepare TiO₂film by ALD and study their electronic properties by soft X-ray absorption spectroscopy (XAS) and photoelectron spectroscopy. We focus on XAS and X-ray linear dichroism to indentify band onset and learn about local distortion of the Ti–O octahedral atomic and about defects which cause Ti-based electronic states within the band gap. KW - Anatase KW - Dichroism KW - Amorphous Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2836-7 SN - 1866-6280 VL - 70 IS - 8 SP - 3785 EP - 3795 ER - TY - GEN A1 - Städter, Matthias A1 - Müller, Klaus A1 - Rachow, Fabian A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Ambient pressure thermal desorption spectroscopy (AP-TDS) of NiO/SiO2 catalysts T2 - Environmental Earth Sciences N2 - The Sabatier reaction is a key process in the "power-to-gas" application which is considered to con-tribute to future chemical energy storage systems. In this contribution we focus on the catalytic active sites of a NiO catalyst supported on SiO2(NiO/SiO2) which is commonly used in the Sabatier reaction. A novel technique for the characterization of the active sites is presented and dis-cussed using thermal desorption spectroscopy at ambient pressure. This analytical tool is operated under reaction conditions and allows element specific measurements during the catalytic process of CO2 reforming towards methane. Beside the desorption experiments, XPS and XAS measurements of pristine and catalytically used samples are performed to determine the influence of the Sabatier reaction conditions on the surface structure of the catalyst. KW - CO2 KW - NiO KW - TDS KW - XAS KW - XPS Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2835-8 SN - 1866-6280 VL - 70 IS - 8 SP - 3779 EP - 3784 ER - TY - GEN A1 - Scheck-Wenderoth, Magdalena A1 - Schmeißer, Dieter A1 - Mutti, Maria A1 - Kolditz, Olaf A1 - Huenges, Ernst A1 - Schultz, Hans-Martin A1 - Liebscher, Axel A1 - Bock, Michaela T1 - Geoenergy: new concepts for utilization of geo-reservoirs as potential energy sources T2 - Environmental Earth Sciences KW - Geothermal technologies KW - capturing and storing and utilizing CO2 KW - hydraulic fracturing Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2877-y SN - 1866-6280 VL - 70 IS - 8 SP - 3427 EP - 3431 ER - TY - GEN A1 - Gerlich, Lukas A1 - Ohsiek, Susanne A1 - Klein, Christoph A1 - Geiß, Mario A1 - Friedemann, Michael A1 - Kücher, Peter A1 - Schmeißer, Dieter T1 - Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth T2 - Microelectronic Engineering N2 - As a consequence of device shrinking the resistivity of the widely used TaN/Ta double barrier layer becomes an increasingly important parameter for device speed beyond the 32 nm technology node. In this study we describe the optimization of the deposition of TaN/Ta stacks in such a way that tantalum nitride layer thickness is minimized and tantalum grows in the favorable conducting alpha-phase. In the first part of the study we usedin situ ARXPS to investigate the growth of different tantalum nitride layers on SiO2 and SiOCH as a function of deposition time, nitrogen flow and deposition power. In the second part we analyzed the crystalline phase of a 20 nm thick tantalum layer deposited on top of the same series of tantalum nitride layers characterized in the growth study. The main findings are the appearance of tan-talum carbide and tantalum silicide as interface species for the deposition on SiOCH and only tantalum silicide for the deposition on SiO2. We found that alpha-tantalum grows preferably on tantalum carbide and nitrogen rich intermediate layers whereas silicide at the interface promotes the growth of beta-tantalum. To verify these findings we studied two additional modifications of the interface. A lower bias power for a deposition of tantalum nitride on SiO2 was used to confirm the role of tantalum silicide and a thermal treatment of a thin tantalum layer on SiOCH was applied to confirm the role of tantalum carbide. Finally, the contact resistance in via chains on patterned wafers for four selected processes showed the same trends as the sheet resistance of the corresponding barrier films on blanket wafer experiments. KW - Tantalum KW - in situ XPS KW - Ta-phase KW - TaNx KW - Barrier KW - Interface Y1 - 2013 U6 - https://doi.org/10.1016/j.mee.2013.01.017 VL - Vol. 106 SP - 63 EP - 68 ER - TY - GEN A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Gruska, Bernd A1 - Arens, Michael A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by PE-ALD at 25°C ≤ T ≤ 200°C T2 - Journal of Vacuum Science and Technology A N2 - In this work, plasma enhanced atomic layer deposited (PE-ALD) samples were prepared at substrate temperatures in the range between room temperature (RT) and 200 °C and investigated by capacitance–voltage and conductance–voltage recordings. The measurements are compared to standard thermal atomic layer deposition (T-ALD) at 200 °C. Very low interface state density (D it) ~1011 eV−1 cm−2 could be achieved for the PE-ALD process at 200 °C substrate temperature after postdeposition anneal (PDA) in forming gas at 450 °C. The PDA works very effectively for both the PE-ALD and T-ALD at 200 °C substrate temperature delivering also similar values of negative fixed charge density (N fix) around −2.5 × 1012 cm−2. At the substrate temperature of 150 °C, highest N fix (−2.9 × 1012 cm−2) and moderate D it (2.7 × 1011 eV−1 cm−2) values were observed. The as deposited PE-ALD layer at RT shows both low D it in the range of (1 to 3) × 1011 eV−1 cm−2 and low N fix (−4.4 × 1011 cm−2) at the same time. The dependencies of N fix, D it, and relative permittivity on the substrate temperatures and its adjustability are discussed. KW - Atomic layer deposition (ALD) KW - Al2O3 KW - dielectric properties KW - interface state density KW - fixed oxide charge KW - permittivity Y1 - 2014 UR - http://link.aip.org/link/?JVA/32/01A107&aemail=author U6 - https://doi.org/10.1116/1.4831897 VL - 1 IS - 32 SP - 01A107-1 EP - 01A107-10 ER - TY - THES A1 - Hoffmann, Patrick T1 - Untersuchungen zu Inhomogenitäten an der Halbleitergrenzfläche Silizium-Siliziumoxynitrid KW - Grenzflächeneigenschaften KW - SiO2 KW - SiON KW - Synchrotron-basierte Röntgen-Spektroskopie KW - XPS KW - XAS Y1 - 2003 SN - 3-8322-1982-X PB - Shaker-Verlag CY - Aachen ER - TY - THES A1 - Mikalo, Ricardo Pablo T1 - Elektronische Eigenschaften von leitfähigen konjugierten Polymeren und deren Grenzflächenreaktionen im elektrischen Kontakt mit Metallen KW - konjugierte Polymere KW - Photoelektronenspektroskopie KW - XPS KW - XAS Y1 - 2003 SN - 3-89959-115-1 PB - Der Andere Verlag CY - Osnarbrück ER - TY - THES A1 - Heller, Thomas T1 - Molekulare Resonanzen im Wirkungsquerschnitt der Photoemission in den Valenzzuständen der stöchiometrischen und der mit Natrium belegten WO3 und TiO2 (110) 1x1 Oberfläche KW - WO3 KW - TiO2 KW - Photoelektronenspektroskopie KW - Natriumadsorption Y1 - 2002 SN - 3-8322-0742-2 PB - Shaker CY - Aachen ER - TY - THES A1 - Yfantis, Alexandros D. T1 - Development and Characterisation of Corrosion Resistent Layers of Conducting Polymers on Aluminium Alloys KW - corrosion protection KW - conducting polymers KW - X-ray photoelectron spectroscopy Y1 - 2001 SN - 960-394-115-8 PB - Parissianou CY - Athen ER - TY - THES A1 - Appel, Günter T1 - Untersuchungen zur mesoskopischen und elektronischen Struktur von Polypyrroltosylat und Polypyrrolkupferphthalocyaninsulfonat KW - Polypyrroltosylat KW - Polypyrrolkupferphthalocyaninsulfonat KW - elektronische Struktur KW - XPS KW - XAS Y1 - 1999 SN - 3-8265-4830-2 PB - Shaker CY - Aachen ER - TY - THES A1 - Hofmann, Andreas T1 - Elektronische Struktur epitaktischer Chalkopyrite und deren Heterokontakte für die Photovoltaik Y1 - 2012 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-24434 N1 - Prof. Schmeißer, Gutachter, Arbeit am HZB CY - Cottbus ER - TY - THES A1 - Zimmer, Fabian T1 - Herstellung und Charakterisierung hocheffzienter, mikromechanischer NIR-Beugungsgitter für den Einsatz in miniaturisierten Spektrometern KW - Mikrosystemtechnik KW - MEMS KW - Mikrooptik KW - Mikrospiegel KW - Spektrometer Y1 - 2012 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-25224 UR - http://opus.kobv.de/btu/volltexte/2012/2522/ ER - TY - THES A1 - Dudek, Piotr T. T1 - Atomic scale engineering of HfO2–based dielectrics for future DRAM applications N2 - Modern dielectrics in combination with appropriate metal electrodes have a great potential to solve many difficulties associated with continuing miniaturization process in the microelectronic industry. One significant branch of microelectronics incorporates dynamic random access memory (DRAM) market. The DRAM devices scaled for over 35 years starting from 4 kb density to several Gb nowadays. The scaling process led to the dielectric material thickness reduction, resulting in higher leakage current density, and as a consequence higher power consumption. As a possible solution for this problem, alternative dielectric materials with improved electrical and material science parameters were intensively studied by many research groups. The higher dielectric constant allows the use of physically thicker layers with high capacitance but strongly reduced leakage current density. This work focused on deposition and characterization of thin insulating layers. The material engineering process was based on Si cleanroom compatible HfO2 thin films deposited on TiN metal electrodes. A combined materials science and dielectric characterization study showed that Ba added HfO2 (BaHfO3) films and Ti added BaHfO3 (BaHf0.5Ti0.5O3) layers are promising candidates for future generation of state of the art DRAMs. In especial a strong increase of the dielectric permittivity k was achieved for thin films of cubic BaHfO3 (k~38) and BaHf0.5Ti0.5O3 (k~90) with respect to monoclinic HfO2 (k~19). Meanwhile the CET values scaled down to 1 nm for BaHfO3 and ~0.8 nm for BaHf0.5Ti0.5O3 with respect to HfO2 (CET=1.5 nm). The Hf4+ ions substitution in BaHfO3 by Ti4+ ions led to a significant decrease of thermal budget from 900°C for BaHfO3 to 700°C for BaHf0.5Ti0.5O3. Future studies need to focus on the use of appropriate metal electrodes (high work function) and on film deposition process (homogeneity) for better current leakage control. KW - Dielectrics KW - High-k materials KW - Atomic Scale Engineering KW - HfO2-based materials KW - XPS Y1 - 2011 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-22775 UR - http://opus.kobv.de/btu/volltexte/2011/2277/ ER - TY - THES A1 - Rauscher, Stefan T1 - Dynamische Modifizierung von Silizium-Elektrolyt-Grenzflächen und deren oberflächenphysikalischen Eigenschaften Y1 - 2004 PB - Brandenburgische Techn. Univ. CY - Cottbus ER - TY - GEN A1 - Richter, Matthias A1 - Starke, Ulrich A1 - Schmeißer, Dieter T1 - Multiple Auger processes in Graphene T2 - Journal of Electron Spectroscopy and Related Phenomena N2 - Resonant Auger decay processes have been studied by resonant photoemission spectroscopy (resPES) and X-ray absorption spectroscopy (XAS) in Graphene systems. The pi*-resonance is used to identify the degree of localization of the lowest pi*-orbitals in the conduction band. Localization and lifetime of the photo-excited intermediate state cause the formation of multiple Auger processes. For the Graphene systems we identify two novel Auger decay combinations with a four hole final state: the (S+S) and the(S+S)* decay. We demonstrate that these processes are sensitive for interlayer coupling and interactions with the metallic free electrons of the substrate. KW - Graphene KW - X-Ray absorption spectroscopy KW - XAS KW - resonant photoemission spectroscopy KW - resPES KW - multiple hole Auger Y1 - 2014 U6 - https://doi.org/10.1016/j.elspec.2013.12.009 SN - 0368-2048 IS - Vol. 192 SP - 1 EP - 6 ER - TY - GEN A1 - Tallarida, Massimo A1 - Das, Chittaranjan A1 - Schmeißer, Dieter T1 - Quantum size effects in TiO2 thin films grown by atomic layer deposition T2 - Beilstein Journal of Nanotechnology N2 - We study the atomic layer deposition of TiO2 by means of X-ray absorption spectroscopy. The Ti precursor, titanium isopropoxide, was used in combination with H2O on Si/SiO2 substrates that were heated at 200 °C. The low growth rate (0.15 Å/cycle) and the in situ characterization permitted to follow changes in the electronic structure of TiO2 in the sub-nanometer range, which are influenced by quantum size effects. The modified electronic properties may play an important role in charge carrier transport and separation, and increase the efficiency of energy conversion systems. KW - atomic layer deposition (ALD) KW - charge transfer multiplet KW - covalency KW - energy conversion KW - quantum size effects KW - titanium dioxide (TiO2) KW - water splitting KW - X-ray absorption spectroscopy (XAS) Y1 - 2014 U6 - https://doi.org/10.3762/bjnano.5.7 SN - 2190-4286 IS - 5 SP - 77 EP - 82 ER - TY - GEN A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Interlayer-exciton mediated three-hole-Auger-decay in the pi-band of highly oriented pyrolytic graphite T2 - Physica E N2 - Resonant photoemission spectroscopy(resPES) is used to probe the occupied pi- and unoccupied pi*-bands of carbon thin films with particular focus on the Auger decay. Highly Oriented Pyrolytic Graphite (HOPG) is studied at the C1s edge. We find strong resonant features at 285.5 eV and 292 eV in the resPES diagram. The normal two-hole Auger decay proceeds under constant kinetic energy (451)only in the sigma*-region. In the pi*-region, however, it proceeds under 67.5° in terms of a Ebind(w) diagram. We attribute this to a multiple Auger decay with a net three hole final state. For this novel decay process we propose a model.We discuss the long lifetime of the first resonant excitation and conclude that it arises from the strong excitonic character of the first resonant state. We use HOPG as a reference system and suggest that this novel process is a tool to identify interlayer–substrate interaction of the carbon layers involved. KW - resonant excitation KW - three hole Auger decay KW - X-ray photoelectron spectroscopy KW - HOPG Y1 - 2014 U6 - https://doi.org/10.1016/j.physe.2013.01.015 SN - 1386-9477 VL - Vol. 56 SP - 441 EP - 446 ER - TY - THES A1 - Michling, Marcel Frank T1 - Spektroskopische Untersuchungen an organischen Materialien und Metalloxiden N2 - Im Rahmen der vorliegenden Arbeit wurde mit Synchrotron-basierenden, optischen und Elektronen-basierenden Methoden die elektronischen Eigenschaften zweier unterschiedlicher Materialklassen untersucht. Der Fokus lag dabei im besonderen auf der Bestimmung der Größe der Bandlücke/HOMO-LUMO-Lücke und ihre Abhängigkeit der verwendeten Methode. Die zwei unterschiedliche Materialklassen, welche untersucht wurden sind folgende: Erstens die organischen Systeme Cobalt-Phthalocyanin und Fulleren. An Ihnen wird der Einfluss der verwendeten Messmethoden aufgezeigt und die sich draus ergebenen HOMO- LUMO-Lücken (elektronisch, Volumen, Oberfläche, optisch) diskutiert. Es zeigt sich, dass die optische Methode (Ellipsometrie) generell den kleinsten Wert und die elektronischen Methoden (XPS, XAS) den größten Wert ergeben. Die Gründe dafür werden ausführlich diskutiert. Durch die Kombination von XPS- , XAS- und Ellipsometrie-Messungen war es möglich die Orientierung der aufgedampften CoPc-Moleküle auf den SiO2-Substrat zu bestimmen. Zweitens wurden die Metalloxide HfO2, Al2O3, In2O3 und Ga2O3 aufgrund ihrer großen technologischen Bedeutung untersucht. Mit Hilfe von ALD Zyklus-für-Zyklus Experimenten konnten die elektronischen Eigenschaften von HfO2 in Abhängigkeit der ALD- Zyklenzahl und das Wachstum von HfO2 in den ersten Zyklen studiert werden. Auf Basis der XPS- und EELS-Ergebnisse wurde ein Wachstumsmodell entwickelt. Es wird ebenfalls der Einfluss einer Dipolschicht an der Grenzfläche HfO2/SiO2 auf die Größe der Bandlücke in den EELS-Messungen diskutiert. Mittels resonanten Photoemission wurde ein neuer Auger-Mechanismus (3-Loch-Auger-Prozess) in den Oxiden gefunden. Dieser hat seine Ursache in Defekten. Defekte führen auch zu einer Fano-Anti-Resonanz, welche an der O1s-Absorptions-Kante beobachtet und diskutiert wird. KW - Spektroskopie KW - Organik KW - Metalloxide KW - Bandlücke KW - 3h-Auger Y1 - 2013 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-29014 UR - http://opus.kobv.de/btu/volltexte/2013/2901/ ER - TY - THES A1 - Richter, Matthias T1 - Excitons and Polarons in resonant Auger decay processes N2 - In the framework of this thesis synchrotron radiation spectroscopy is applied to study the electronic structure of organic semiconductors, of Graphene, and of transition metal (TM) oxide water splitting catalysts (Co-PI) with emphasis on excitonic and polaronic effects. For a correct theoretical description of the electronic structure of these material classes electron-phonon and electron-electron coupling as well as polarization and excitonic effects have to be considered. Excitons and Polarons are localized in-gap states. They are known to affect the optical properties of the material. Their influence can also be revealed in the resonant Auger decay profile. Even in TM-oxides Polarons and Excitons are observed as a consequence of an oxygen 2p to TM3d charge transfer. Therefor, the following three material classes are chosen for the fundamental study of Excitons and Polarons in resonant Auger decay processes. First, the existence of localized polaronic and excitonic states is investigated for regioregular-Poly(3 hexylthiophene-2,5-diyl) (rr-P3HT) and Phenyl-C61-butyric acid methyl ester (PCBM) used as a light absorber in organic solar cells. The existence of 2D-Polarons, singlet Exciton, and triplet Exciton is demonstrated for rr-P3HT whereas for PCBM only singlet Excitons are observed. Singlet Excitons show an influence on the resonant Auger decay by a combined spectator-participator (S+P) Auger decay in the π*-band. Second, for a more detailed study of the (S+P) decay Highly Ordered Pyrolytic Graphite (HOPG) is chosen. For Graphene as a single layer of HOPG without van der Waals force another combination of Auger decays can be observed: a double spectator Auger (S+S) and a double spectator Auger-Gain (S+S)* decay. Third, Co-PI (cobalt oxide compound) is investigated. It is a TM-oxide catalyst used for the oxygen evolution reaction in photo-electrochemical cells. Self-trapped Excitons formed by resonant core electron excitation into self-trapped hole states give rise to a combined Auger decay process (S+P). For all three novel Auger decay processes {(S+P), (S+S), and (S+S)*} a model is proposed. KW - Exciton KW - Polaron KW - X-Ray absorption spectroscopy (XAS) KW - resonant photoemission spectroscopy (resPES) KW - Auger decay Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-29816 UR - http://opus.kobv.de/btu/volltexte/2014/2981/ ER - TY - GEN A1 - Haeberle, Jörg A1 - Richter, Matthias A1 - Galazka, Zbigniew A1 - Janowitz, Christoph A1 - Schmeißer, Dieter T1 - Resonant Photoemission at the O1s threshold to characterize In2O3 single crystals T2 - Thin Solid Films N2 - We report on spectroscopic investigations on In2O3 single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. We analyze the electronic structure and assign the O2p to build the valence band and both, O2p and In5s5p states to contribute to the conduction band (CB). We determine the partial density of states for the valence and CBs and find a strong hybridization of O2p and In5s states. This is deduced from constant final state spectra on the O-KLL-Auger over the O K-edge and In M4,5-edge and a comparison to the corresponding X-ray absorption spectroscopy data.We also identify several types of defects. A broad band of oxygen derived defects is identified that extends throughout the gap. These are attributed to small polarons which cause an anti-resonance in the valence states around the O1s threshold. In addition, a separate Auger decay at resonance indicates the existence of localized charge transfer states which involves localized In5s5p states. KW - In2O3 KW - TCO KW - X-ray spectroscopy KW - Small polaron KW - Charge transfer Y1 - 2014 U6 - https://doi.org/10.1016/j.tsf.2013.03.036 SN - 0040-6090 SN - 1879-2731 VL - 2014 IS - 555 SP - 53 EP - 56 ER - TY - GEN A1 - Kramm, Ulrike Ingrid A1 - Herrmann-Geppert, Iris A1 - Fiechter, Sebastian A1 - Zehl, Gerald A1 - Zizak, Ivo A1 - Dorbandt, Iris A1 - Schmeißer, Dieter A1 - Bogdanoff, Peter T1 - Effect of iron carbide formation on the number of active sites in Fe-N-C catalysts for the oxygen reduction reaction in acidic media T2 - Journals of materials chemistry A KW - Oxygen reduction reaction (ORR) KW - Fe-N-C catalyst KW - acidic media KW - high-temperature X-ray diffraction (HT-XRD) KW - thermogravimetry coupled with mass-spectroscopy (TG-MS) Y1 - 2014 U6 - https://doi.org/10.1039/c3ta13821f SN - 2050-7488 SN - 2050-7496 IS - 8 SP - 2663 EP - 2670 ER - TY - GEN A1 - Kramm, Ulrike Ingrid A1 - Lefèvre, Michel A1 - Larouche, Nicholas A1 - Schmeißer, Dieter A1 - Dodelet, Jean-Pol T1 - Correlations between Mass Activity and Physicochemical Properties of Fe/N/C Catalysts for the ORR in PEM Fuel Cell via 57 Fe Mössbauer Spectroscopy and Other Techniques T2 - Journal of the American Chemica Society N2 - The aim of this work is to clarify the origin of the enhanced PEM-FC performance of catalysts prepared by the procedures described in Science 2009, 324, 71 and Nat. Commun. 2011, 2, 416. Catalysts were characterized after a first heat treatment in argon at 1050 °C (Ar) and a second heat treatment in ammonia at 950 °C (Ar + NH3). For the NC catalysts a variation of the nitrogen precursor was also implemented. 57Fe Mössbauer spectroscopy, X-ray photoelectron spectroscopy, neutron activation analysis, and N2 sorption measurements were used to characterize all catalysts. The results were correlated to the mass activity of these catalysts measured at 0.8 V in H2/O2 PEM-FC. It was found that all catalysts contain the same FeN4-like species already found in INRS Standard (Phys. Chem. Chem. Phys. 2012, 14, 11673). Among all FeN4-like species, only D1 sites, assigned to FeN4/C, and D3, assigned to N-FeN2+2 /C sites, were active for the oxygen reduction reaction (ORR). The difference between INRS Standard and the new catalysts is simply that there are many more D1 and D3 sites available in the new catalysts. All (Ar + NH3)-type catalysts have a much larger porosity than Ar-type catalysts, while the maximum number of their active sites is only slightly larger after a second heat treatment in NH3. The large difference in activity between the Ar-type catalysts and the Ar + NH3 ones stems from the availability of the sites to perform ORR, as many sites of the Ar-type catalysts are secluded in the material, while they are available at the surface of the Ar + NH3-type catalysts. KW - Fe-N-C catalyst KW - 57 Fe Mössbauer Spectroscopy KW - X-ray photo-electron spectroscopy KW - neutron activation analysis KW - nitrogen sorption measurements KW - oxygen reduction reaction (ORR) KW - PEM Fuel Cell Y1 - 2014 U6 - https://doi.org/10.1021/ja410076f SN - 0002-7863 SN - 1520-5126 VL - 136 IS - 3 SP - 978 EP - 985 ER - TY - THES A1 - Gerlich, Lukas T1 - In situ ARXPS Charakterisierung von tantalbasierten Barriereschichten N2 - Als eine Folge der Miniaturisierung aller integrierten elektrischen Bauteile wird der spezifische Widerstand der TaN/Ta Doppelsperrschichten ein zunehmend wichtiger Parameter für die Schaltgeschwindigkeit beim 32 nm Technologieknoten. In Rahmen dieser Arbeit wird die Optimierung der Abscheidung von TaN/Ta Stapeln durchgeführt, mit dem Ziel die Tantalnitridschichtdicke zu minimieren und das Tantal in der leitfähigeren alpha-Phase wachsen zu lassen. Im ersten Teil der Studie wurde in situ ARXPS verwendet, um das Wachstum von verschiedenen Tantalnitridschichten auf SiO2 und SiCOH in Abhängigkeit der Abscheidezeit, des Stickstoffflusses und der Abscheideleistung zu untersuchen. Im zweiten Teil wurde die kristalline Phase 20 nm dicken Tantal Schichten abgeschieden auf verschiedenen Tantalnitridschichten, die in der Wachstumsstudie vorgestellt worden sind, untersucht. Die wichtigsten Erkenntnisse sind das Auftreten von Tantalkarbid und Tantalsilizid als Zwischenschichtverbindungen bei der Abscheidung auf SiCOH und nur Tantalsilizid für die Abscheidung auf SiO2. Demzufolge wächst alpha-Tantal vorzugsweise auf Tantalkarbid und stickstoffreichen Zwischenschichten, während Silizid an der Schnittstelle das Wachstum von beta-Tantal fördert. Um die Ergebnisse zu überprüfen, wurden zwei weitere Modifikationen des Interfaces untersucht. So wurde eine kleinere Bias-Leistung für eine Abscheidung von Tantalnitrid auf SiO2 benutzt, um die Rolle des Tantalsilizids zu bestätigen. Außerdem wurde eine thermische Behandlung einer dünnen Tantalschicht auf SiCOH durchgeführt, um die Rolle des Tantalkarbids zu bestätigen. Schließlich ergab die Kontaktwiderstandsmessung in Viaketten auf strukturierten Wafern für vier ausgewählte Prozesse tendenziell den gleichen Verlauf wie die Schichtwiderstandsergebnisse der entsprechenden Barrierenaufbauten der Experimente auf blanken Testwafern. KW - Photoelektronenspektroskopie KW - Tantal KW - ARXPS KW - Barriere KW - Interface Y1 - 2013 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus-28485 UR - http://opus.kobv.de/btu/volltexte/2013/2848/ ER - TY - GEN A1 - Adelmann, Christoph A1 - Schram, Tom A1 - Chew, Soon Aik A1 - Woicik, J. C. A1 - Brizzi, Simone A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Horiguchi, Naoto A1 - Elshocht, Sven van A1 - Ragnarsson, Lars-Åke T1 - On the scalability of doped hafnia thin films T2 - Applied Physics Letters N2 - The scaling behavior of Gd- and Al-doped HfO2 films as gate dielectrics in metal-oxide-semiconductor (MOS) capacitors was studied. For equivalent oxide thicknesses (EOTs) in the range of 10 Å, crystallized Gd:HfO2 showed higher leakage current densities than crystallized Al:HfO2, with undoped HfO2 in between. Ultimately, the scalability of Al:HfO2 was limited by the ability to crystallize the films at a given thermal budget. As a result, for post-deposition annealing at 800 °C, the EOT of Al:HfO2 based MOS capacitors was limited to ∼8 Å. However, for such an EOT, leakage current densities were reduced by about 100× with respect to HfO2. This demonstrates the high potential of Al:HfO2 for low-standby-power MOS devices. KW - scalability KW - hafnia thin films KW - Al:HfO2 KW - Gd:HfO2 KW - EXAFS KW - equivalent oxide thickness (EOT) KW - leakage current KW - X-ray absorption spectroscopy (XAS) Y1 - 2014 U6 - https://doi.org/10.1063/1.4870075 SN - 0003-6951 SN - 1077-3118 IS - 104 SP - 122906-1 EP - 122906-4 ER - TY - CHAP A1 - Henkel, Karsten A1 - Tallarida, Massimo A1 - Haeberle, Jörg A1 - Gargouri, Hassan A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Arens, Michael A1 - Schmeißer, Dieter ED - Glück, Bernhard K. ED - Schmidt, Sindy ED - Stein, Erhard ED - Raschke, Jörg-Uwe ED - Richter, Hans T1 - PE-ALD-Al2O3-Schichten für die Passivierung von Solarzellen T2 - Tagungsband Photovoltaik-Meeting: Anwendungen-Qualität-Perspektiven, Senftenberg, 16.04.2014 N2 - Dünne Al2O3-Schichten wurden bei Substrattemperaturen zwischen Raumtemperatur und 200°C mittels PE-ALD auf Si-Substraten abgeschieden und ellipsometrisch, spektroskopisch und elektrisch charakterisiert. Ihr Potenzial für die chemische und Feldeffektpassivierung der Oberflächenrekombination wird bewertet. KW - Al2O3 KW - Atomlagenabscheidung (ALD) KW - Passivierung KW - PE-ALD KW - negative fixe Oxidladungen Y1 - 2014 SP - 7 EP - 14 PB - Cottbus-Senftenberg CY - BTU ER - TY - GEN A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Improved performance of a polymer nanogenerator based on silver nanoparticles doped electrospun P(VDF–HFP) nanofibers T2 - Physical Chemistry Chemical Physics N2 - We report on the electrospinning of poly(vinylidene fluoride–hexafluoropropylene) [P(VDF–HFP)] nanofibers doped with silver nanoparticles for the preparation of a polymer based nanogenerator (PNG). It has been found that the yield of the piezoelectric phase is increased by the addition of silver nanoparticles. Furthermore, defects in the P(VDF–HFP) electrospun fibers are removed resulting in a significant enhancement in the output power of the PNG. A maximum generated PNG output voltage of 3 V with a current density of 0.9 μA cm−2 is achieved. KW - piezoelectric thin polymer film KW - FTIR KW - nanogenerator KW - PVDF KW - P(VDF-HFP) KW - nanofibers Y1 - 2014 U6 - https://doi.org/10.1039/C3CP55238A SN - 1463-9084 SN - 1463-9076 VL - 2014 IS - 16 SP - 10403 EP - 10407 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Haeberle, Jörg A1 - Barquinha, Pedro A1 - Gaspar, Diana A1 - Pereira, Luís A1 - Martins, Rodrigo A1 - Fortunato, Elvira T1 - Electronic structure of amorphous ZnO films T2 - Physica Status Solidi C N2 - We use resonant photoemission spectroscopy (resPES) to study the electronic properties of amorphous ZnO (a-ZnO) layers. We report on the core levels, the valence band (VB) PES data, and the X-ray absorption (XAS) data which we use for the conduction band (CB) density of states. From these results we are able to derive the partial density of states (pDOS) of O2p and Zn4s4p states in the VB and CB, respectively as well as a band scheme. At the O1s resonance we observe a band of localized defect states which is located between the Fermi energy and the CBM. At the Zn2p edge the XAS data indicate that localized Zn4s4p states are involved in the DOS starting already at the Fermi energy. KW - a-ZnO thin films KW - intrinsic defects KW - resonant PES KW - amorphous oxide semiconductors (AOS) KW - transparent conducting oxides (TCO) KW - charge transfer Y1 - 2014 U6 - https://doi.org/10.1002/pssc.201400010 SN - 1610-1642 VL - 11 IS - 9-10 SP - 1476 EP - 1480 ER - TY - GEN A1 - Tallarida, Massimo A1 - Das, Chittaranjan A1 - Cibrev, Dejan A1 - Kukli, Kaupo A1 - Tamm, Aile A1 - Ritala, Mikko A1 - Lana-Villarreal, Teresa A1 - Gómez, Roberto A1 - Leskelä, Markku A1 - Schmeißer, Dieter T1 - Modification of Hematite Electronic Properties with Trimethyl Aluminum to Enhance the Efficiency of Photoelectrodes T2 - The Journal of Physical Chemistry Letters N2 - The electronic properties of hematite were investigated by means of synchrotron radiation photoemission (SR-PES) and X-ray absorption spectroscopy (XAS). Hematite samples were exposed to trimethyl aluminum (TMA) pulses, a widely used Al-precursor for the atomic layer deposition (ALD) of Al2O3. SR-PES and XAS showed that the electronic properties of hematite were modified by the interaction with TMA. In particular, the hybridization of O 2p states with Fe 3d and Fe 4s4p changed upon TMA pulses due to electron inclusion as polarons. The change of hybridization correlates with an enhancement of the photocurrent density due to water oxidation for the hematite electrodes. Such an enhancement has been associated with an improvement in charge carrier transport. Our findings open new perspectives for the understanding and utilization of electrode modifications by very thin ALD films and show that the interactions between metal precursors and substrates seem to be important factors in defining their electronic and photoelectrocatalytic properties. KW - Hematite KW - Atomic Layer deposition KW - Photoelectrode KW - electro-catalysis KW - TMA KW - efficiency enhancement Y1 - 2014 U6 - https://doi.org/10.1021/jz501751w VL - 5 IS - 20 SP - 3582 EP - 3587 ER - TY - GEN A1 - Kramm, Ulrike Ingrid A1 - Lefèvre, Michel A1 - Bogdanoff, Peter A1 - Schmeißer, Dieter A1 - Dodelet, Jean-Pol T1 - Analyzing Structural Changes of Fe-N-C Cathode Catalysts in PEM Fuel Cell by Mößbauer Spectroscopy of Complete Membrane-Electrode-Assemblies T2 - The Journal of Physical Chemistry Letters N2 - The applicability of analyzing by Mößbauer spectroscopy the structural changes of Fe–N–C catalysts that have been tested at the cathode of membrane electrode assemblies in proton exchange membrane (PEM) fuel cells is demonstrated. The Mößbauer characterization of powders of the same catalysts was recently described in our previous publication. A possible change of the iron species upon testing in fuel cell was investigated here by Mößbauer spectroscopy, energy-dispersive X-ray cross-sectional imaging, and neutron activation analysis. Our results show that the absorption probability of γ rays by the iron nuclei in Fe–N–C is strongly affected by the presence of Nafion and water content. A detailed investigation of the effect of an oxidizing treatment (1.2 V) of the non-noble cathode in PEM fuel cell indicates that the observed activity decay is mainly attributable to carbon oxidation causing a leaching of active iron sites hosted in the carbon matrix. KW - iron-based catalyst KW - iron−nitrogen−carbon catalyst KW - non-noble metal catalyst KW - nonprecious metal catalyst KW - oxygen reduction reaction KW - ORR KW - polymer electrolyte membrane fuel cell KW - PEM-FC KW - degradation Y1 - 2014 U6 - https://doi.org/10.1021/jz501955g SN - 1948-7185 VL - 2014 IS - 5 SP - 3750 EP - 3756 ER - TY - GEN A1 - Szakacs, Csaba E. A1 - Lefèvre, Michel A1 - Kramm, Ulrike Ingrid A1 - Dodelet, Jean-Pol A1 - Vidal, François T1 - A density functional theory study of catalytic sites for oxygen reduction in Fe/N/C catalysts used in H2/O2 fuel cells T2 - Physical Chemistry Chemical Physics N2 - The oxygen reduction catalytic activity of carbon-supported FeN4 moieties bridging micropores between two graphene sheets was investigated by density functional theory (DFT). Based on the FeN2+2/C structure proposed earlier by our group, two types of FeN2+2/C structures were considered: one mostly planar and one in which the Fe ion is significantly displaced out of the graphitic plane. A structure in which the FeN4 moiety is embedded in an extended graphene sheet (FeNpyri4/C) was also considered. In addition, we have investigated the influence of an axial pyridine group approaching the Fe centre. The formation energy is lowest for the planar FeN2+2/C structure. The overall downhill behaviour of the relative free energy vs. the reaction step suggests that most structures have catalytic activity near zero potential. This conclusion is further supported by calculations of the binding energies of adsorbed O2 and H2O and of the O–O bond lengths of adsorbed O2 and OOH. The side-on interaction of adsorbed O2 is preferred over the end-on interaction for the three basic structures without the axial pyridine. The pyridine coordination produces a stronger binding of O2 for the planar FeN2+2/C and the FeNpyri4/C structures as well as a dominant end-on interaction of O2. The energy levels of the planar FeN2+2/C structure with and without the pyridine ligand are nearly equal for iron spin states S = 1 and S = 2, suggesting that both configurations are formed with similar concentration during the preparation process, as also previously found for two of the iron sites by Mössbauer spectroscopy experiments. KW - density functional theory (DFT) KW - iron-based catalyst KW - iron−nitrogen−carbon catalyst KW - non-noble metal catalyst KW - oxygen reduction reaction (ORR) KW - polymer electrolyte membrane fuel cell (PEM-FC) Y1 - 2014 U6 - https://doi.org/10.1039/C3CP55331K SN - 1463-9076 SN - 1463-9084 VL - 2014 IS - 16 SP - 13654 EP - 13661 ER - TY - GEN A1 - Indra, Arindam A1 - Menezes, Prashanth W. A1 - Sahraie, Nastaran Ranjbar A1 - Bergmann, Arno A1 - Das, Chittaranjan A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Strasser, Peter A1 - Driess, Matthias T1 - Unification of Catalytic Water Oxidation and Oxygen Reduction Reactions: Amorphous Beat Crystalline Cobalt Iron Oxides T2 - Journal of the American Chemical Society N2 - Catalytic water splitting to hydrogen and oxygen is considered as one of the convenient routes for the sustainable energy conversion. Bifunctional catalysts for the electrocatalytic oxygen reduction reaction (ORR) and the oxygen evolution reaction (OER) are pivotal for the energy conversion and storage, and alternatively, the photochemical water oxidation in biomimetic fashion is also considered as the most useful way to convert solar energy into chemical energy. Here we present a facile solvothermal route to control the synthesis of amorphous and crystalline cobalt iron oxides by controlling the crystallinity of the materials with changing solvent and reaction time and further utilize these materials as multifunctional catalysts for the unification of photochemical and electrochemical water oxidation as well as for the oxygen reduction reaction. Notably, the amorphous cobalt iron oxide produces superior catalytic activity over the crystalline one under photochemical and electrochemical water oxidation and oxygen reduction conditions. KW - photochemical KW - electrochemical KW - catalyst KW - water oxidation reaction KW - oxygen reduction reaction KW - cobalt iron oxides KW - control of crytallinity Y1 - 2014 U6 - https://doi.org/10.1021/ja509348t SN - 1520-5126 SN - 0002-7863 VL - 2014 IS - 136 SP - 17530 EP - 17536 ER - TY - GEN A1 - Das, Chittaranjan A1 - Henkel, Karsten A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Gargouri, Hassan A1 - Kärkkänen, Irina A1 - Schneidewind, Jessica A1 - Gruska, Bernd A1 - Arens, Michael T1 - Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties T2 - Journal of Vacuum Science and Technology A N2 - Titanium oxide (TiO2) deposited by atomic layer deposition (ALD) is used as a protective layer in photocatalytic water splitting system as well as a dielectric in resistive memory switching. The way ALD is performed (thermally or plasma-assisted) may change the growth rate as well as the electronic properties of the deposited films. In the present work, the authors verify the influence of the ALD mode on functional parameters, by comparing the growth rate and electronic properties of TiO2 films deposited by thermal (T-) and plasma-enhanced (PE-) ALD. The authors complete the study with the electrical characterization of selected samples by means of capacitance–voltage and current–voltage measurements. In all samples, the authors found a significant presence of Ti3+ states, with the lowest content in the PE-ALD grown TiO2 films. The observation of Ti3+ states was accompanied by the presence of in-gap states above the valence band maximum. For films thinner than 10 nm, the authors found also a strong leakage current. Also in this case, the PE-ALD films showed the weakest leakage currents, showing a correlation between the presence of Ti3+ states and leakage current density. KW - titanium oxide (TiO2) KW - atomic layer deposition KW - plasma enhanced atomic layer deposition KW - synchrotron radiation photoelectron spectroscopy (SR-PES) KW - x-ray absorption spectroscopy KW - capacitance-voltage (CV) KW - current-voltage (IV) KW - ellipsometry KW - in-gap states Y1 - 2015 U6 - https://doi.org/10.1116/1.4903938 SN - 1520-8559 SN - 0734-2101 VL - 2015 IS - 33 SP - 01A144-1 EP - 01A144-8 ER - TY - THES A1 - Städter, Matthias T1 - Untersuchungen zu Fanoresonanzen in der resonanten Photoelektronenspektroskopie N2 - Im Mittelpunkt der vorliegenden Arbeit stehen die Untersuchung von Fanointerferenzen innerhalb der wissenschaftlichen Methode der resonanten Photoelektronenspektroskopie. Basis dieser Methode ist die Interpretation aus dem Festkörper emittierter Elektronen. Die detektierten Elektronen können dabei aus direkten Photoemissionen oder Deaktivierungsprozessen (Spectator-/Participator-Zerfälle) nach resonanten Anregungen von Rumpfelektronen stammen. Führen beide Prozesse zum selben Systemendzustand, können die emittierten Elektronen interferieren, was sich in der Ausprägung eines charakteristischen Intensitätsprofils, dem Fano-Profil, äußert. Die Form des Intensitätsprofils kann dabei über den Fanoparameter q beschrieben werden. Im Rahmen dieser Arbeit erfolgte die Diskussion von Fanointerferenzen an organischen (HOPG, Graphenflocken) und oxidischen (CuO, In2O3, SiO2) Materialsystemen. Im HOPG und den untersuchten Graphenflocken konnten mittels der Analyse der Fanoprofile exzitonische Zustände innerhalb der Bandlücke nachgewiesen werden. Durch die Untersuchungen am CuO konnte die Variation des Fanoparameters in Abhängigkeit vom Grundzustand des Systems gezeigt werden. Die für die untersuchten In2O3 Einristalle beobachteten Interferenzen beruhen auf der Existenz besetzter Zustände an der Fermienergie. Abschließend konnte eine Korrelation des jeweils auftretenden Fanoparameters mit den beobachteten multi-hole-Auger-Zerfällen nachgewiesen werden. KW - Fano KW - Fanointerferenzen KW - Festkörperphysik KW - In-gap Zustände KW - Resonante Photoelektronenspektroskopie Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:co1-opus4-31860 UR - http://opus4.kobv.de/opus4-btu/frontdoor/index/index/docId/3186 ER - TY - GEN A1 - Garain, Samiran A1 - Sinha, Tridib Kumar A1 - Adhikary, Prakriti A1 - Henkel, Karsten A1 - Sen, Shrabanee A1 - Ram, Shanker A1 - Sinha, Chittaranjan A1 - Schmeißer, Dieter A1 - Mandal, Dipankar T1 - Self-Poled Transparent and Flexible UV Light-Emitting Cerium Complex–PVDF Composite: A High-Performance Nanogenerator T2 - ACS Applied Materials & Interfaces N2 - Cerium(III)-,N-dimethylformamide-bisulfate [Ce(DMF)(HSO4)3] complex is doped into poly(vinylidene fluoride) (PVDF) to induce a higher yield (99%) of the electroactive phases (β- and γ-phases) of PVDF. A remarkable enhancement of the output voltage (∼32 V) of a nano-generator (NG) based on a nonelectrically poled cerium(III) complex containing PVDF composite film is achieved by simple repeated human finger imparting, whereas neat PVDF does not show this kind of behavior. This high electrical output resembles the generation of self-poled electroactiveβ-phase in PVDF due to the electrostatic interactions between the fluoride of PVDF and the surface-active positive charge cloud of the cerium complex via H-bonding and/or bipolar interaction among the opposite poles of cerium complex and PVDF, respectively. The capacitor charging capability of the flexible NG promises its applicability as piezoelectric-based energy harvester. The cerium(III) complex doped PVDF composite film exhibit an intense photoluminescence in the UV region, which might be due to a participation of electron cloud from negative pole of bipolarized PVDF. This fact may open a new area for prospective development of high-performance energy-saving flexible solid-state UV light emitters. KW - PVDF KW - electroactive phase KW - nanogenerator KW - cerium charge transfer complex KW - piezoelectric energy harvester KW - UV-emitter Y1 - 2015 U6 - https://doi.org/10.1021/am507522r SN - 1944-8244 SN - 1944-8252 VL - 2015 IS - 7 SP - 1298 EP - 1307 ER - TY - CHAP A1 - Krenek, Radim A1 - Cimrova, Vera A1 - Seifarth, Olaf A1 - Bocharova, Vera A1 - Gorodyska, Ganna A1 - Sidorenko, Alexander A1 - Schmeißer, Dieter A1 - Stamm, Manfred T1 - Electronic Properties of Metals Embedded into Porous Polymeric Nanotemplates T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41 N2 - We report on electrical measurements (current-voltage characteristics (CVC)) of metals which are templated via porous polymeric nanotemplates. The nanotemplates are based on self-organization of poly(styrene-block 4-vinylpyridine) (PS-PVP). The cylindrical pores of 8 nm in the diameter are ordered in a hexagonal lattice (24 nm in the period). Chromium and gold were embedded in the nanotemplates by magnetron sputtering, nickel was electrodeposited. These thin films were characterized by AFM, ellipsometry, x-ray reflectivity, XAS, XPS and NEXAFS. CVC were acquired by a connection common for light emitting diodes discussing a further use of nanotemplated metals in these devices. To make the connection, the nanotemplate was deposited on glass with ITO electrodes, then metal was embedded into it and finally Al electrodes were evaporated on the device. Behaviour of space charge limited currents (SCLC) was observed. Also, we deal with the electrical mode of AFM as well. Finally electronic behaviour of the metallic nanorods embedded in polymeric nanotemplates is discussed in respective to the structure and chemical composition obtained by AFM and x-ray techniques. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/cpp/session/25/contribution/2 SN - 0420-0195 SP - S. 108 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Tallarida, Massimo A1 - Sohal, Rakesh A1 - Schmeißer, Dieter T1 - Electronic properties of the 2x1 3C-SiC surface reconstruction studied with resonant photoemission T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41 N2 - We have studied the 2x1 reconstructed surface of the 3C-SiC polytype by means of photoemission spectroscopy. The reconstruction was characterized through Si2p and C1s core level and angle-integrated valence band spectroscopy, and confirmed by the observation of a two-domain 2x1 LEED pattern. The electronic properties of this surface were investigated by collecting valence band spectra at photon energies near the Si2p and C1s absorption edges. The results show a strong dependence of the photoemission intensity on the excitation energy with characteristic resonances for certain valence band features. With a detailed study of the resonances we are able to assign the electronic origin of the resonating states and the nature of the electronic transition near the absorption edges. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/hl/session/5/contribution/2 SN - 0420-0195 SP - S. 239 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Wehner, Stefan A1 - Hofmann, Patrick A1 - Schmeißer, Dieter A1 - Brand, Helmut R. A1 - Küppers, Jürgen T1 - Pattern formation in the CO + O reaction on Ir(111) surfaces under the influence of noise T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41 N2 - The rate of CO oxidation on Ir(111) surfaces exhibits bistability at T = 500 K in a range of the CO fraction Y in the CO + O reactant gas flux. Quadrupol mass spectrometer measurements of the CO2 rates as a function of the noise strength imposed on Y are well reproduced by parameter-free modeling. We present Photoelectron emission microscopy (PEEM) measurements and 2D calculations of the spatio-temporal patterns of CO and O rich domains. The role of combined multiplicative and additive noise on Y for CO and O domain wall motion and island nucleation-growth-coalescence processes is analysed. For small noise amplitudes few islands nucleate and grow up to some 100 µ m in diameter, before they merge with another island. With increasing noise amplitudes more islands nucleate. With large noise amplitudes bursts to and switching between the branches is observed. The domain wall velocity is found to be independent of the noise strength and island size. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/syss/session/1/contribution/9 SN - 0420-0195 SP - S. 708 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -