TY - CHAP A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Low-cost-Plot-Technologie fur die Mikrostrukturierung von Gassensoren T2 - Sensoren im Fokus neuer Anwendungen, 5. Dresdner Sensor-Symposium, 10. - 12. Dezember 2001, Dresden N2 - Bei der Herstellung von Mikrosensoren ist die Strukturierung von Elektroden oder elektrischen Zu-leitungen mit einem hohen Miniaturisierungsgrad ein entscheidender Punkt. Dazu müs-sen häufig teure Verfahren (Lithographie, Maskentechniken) herangezogen werden.Dieser Beitrag beschreibt eine low-cost-Technologie zur Herstellung organischer Mikrostrukturen für elektronische und messtechnische Anwendungen im Bereich der Sensorik. Geplottete Strukturen mit Polypyrrol und Poly(3,4-Ethylen-Dioxy-Thiophen), dotiert mit Polystyrolsulfonat (PEDOT/PSS) wurden als Widerstandssensoren für die Detektion von Luftfeuchte ein-gesetzt. Die prinzipielle Ein-satzmöglichkeit unserer Technik im Bereich der organischen Elektronik konnten wir mit dem Bau organischer Feldeffekttransistoren nachweisen. Mit einem computergesteu-erten Plotter des Typs Rol-land DXY-1150A, Plot-Kapillaren für das Tuschezeichnen, handelsüblichen Folien für wasserlösliche Tinten als Substrat und kolloidalen Graphit als leitendes Material konnten wir Auflösungen, das heißt insbesondere Kanalbreiten bzw. Elektrodenabstände im Bereich von 20+10%B5m (auf 2cm Länge) her-stellen. Y1 - 2002 SN - 3-935712-71-5 SP - 166 EP - 169 PB - w.e.b. Universitätsverlag CY - Dresden ER - TY - CHAP A1 - Batchelor, David R. A1 - Berg, A. A1 - Simon, Sylvio A1 - Wagner, Lothar A1 - Viehweger, Bernd A1 - Schmeißer, Dieter T1 - Development of Joining Techniques through Pressforming of Steel and Aluminium Y1 - 2001 UR - http://www.materialsweek.org/proceedings/index.htm ER - TY - CHAP A1 - Henkel, Karsten A1 - Elling, B. A1 - Danz, R. A1 - Büchtemann, A. A1 - Straube, Oliver A1 - Paloumpa, Ioanna A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter T1 - Piezoelectric polymer sensor for high pressures in forming machines Y1 - 2001 UR - http://www.materialsweek.org/proceedings/index.htm ER - TY - CHAP A1 - Hulea, Iulian A1 - Hoffmann, Patrick A1 - Brinza, Monica A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - The interface of friction-welded Al-Fe joints. ATB Metallurgy Y1 - 2001 ER - TY - CHAP A1 - Jaegermann, Wolfram A1 - Schmeißer, Dieter T1 - Elementary Processes at Solid/Electrolyte Interfaces Y1 - 2001 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Tsiniarakis, G. A1 - Labrakopoulos, S. A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter T1 - Conductive polymers of pyrrole as pigments in organic anticorrosive coatings-application for aluminium alloys Y1 - 2001 ER - TY - CHAP A1 - Sidorenko, Alexander A1 - Tokarev, Igor A1 - Krenek, Radim A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Minko, S. A1 - Stamm, Manfred ED - Champion, Yannick ED - Fecht, Hans-Jörg T1 - Generation of Nanostructured Materials from Thin Films of Block Copolymer Assembles T2 - Nano-architectured and manostructured materials, fabrication, control and properties, EUROMAT 2003 Y1 - 2004 SN - 3-527-31008-8 SP - 143 EP - 150 PB - Wiley-VCH CY - Weinheim ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Pr-silicate formation on SiO2 covered 3C-SiC(111) T2 - Physics of semiconductors, 27th International Conference on the Physics of Semiconductors Y1 - 2005 SN - 0-7354-0257-4 SP - 75 EP - 76 PB - AIP, American Inst. of Physics CY - New York, NY ER - TY - CHAP A1 - Schmeißer, Dieter T1 - Chemical Bonding in Low-k Dielectric Materials for Interconnect Isolation: Characterization using XAS and EELS KW - XAS KW - EELS KW - low-k Materials Y1 - 2006 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried A1 - Stegmann, Heiko A1 - Himpsel, Franz J. A1 - Denlinger, Jonathan D. ED - Tsui, Ting Y. T1 - Characterization of chemical bonding in low-k dielectric materials for interconnect isolation: A XAS and EELS Study T2 - Materials, technology and reliability of low-k dielectrics and copper interconnects, symposium held April 18 - 21, 2006, San Francisco, California Y1 - 2006 SN - 978-1-55899-870-5 SP - 55 EP - 62 PB - Materials Research Society CY - Warrendale, Pa. ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Zheng, Fan A1 - Perez-Dieste, Virginia T1 - Silicate Formation at the Interface of Pr-Oxide as a High-K Dielectric and Si(001) surfaces Y1 - 2006 ER - TY - CHAP A1 - Domaradzki, Jarosław A1 - Schmeißer, Dieter A1 - Kaczmarek, Danuta A1 - Beuckert, Guido A1 - Prociow, E. L. A1 - Borkowska, Angnieszka A1 - Kudrawiec, Robert A1 - Misiewicz, J. T1 - Characterization of Nanocrystalline TiO2 - HfO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering Y1 - 2006 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Zheng, Fan A1 - Himpsel, Franz J. A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried T1 - Silicate Formation at the Interface of High-k Dielectrics and Si(001) Surfaces Y1 - 2006 ER - TY - CHAP A1 - Zschech, Ehrenfried A1 - Stegmann, Heiko A1 - Schmeißer, Dieter A1 - Hoffmann, Patrick T1 - Chemical Bonding, Permittivity, and Elastic Properties in Locally Modified Organosilicate Glass Y1 - 2006 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Zheng, Fan T1 - X-ray Absorption and Photoemission Spectroscopy of 3C- and 4H-SiC Y1 - 2006 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Sohal, Rakesh A1 - Schmeißer, Dieter T1 - Resonant photoemission at the oxygen K edge as a tool to study the electronic properties of defects at SiO2/Si and SiO2/SiC interfaces Y1 - 2006 ER - TY - CHAP A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schmeißer, Dieter T1 - Al-Oxynitrides as a Buffer Layer for Pr2O3/SiC Interfaces Y1 - 2006 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Wehner, Stefan A1 - Hoffmann, Patrick A1 - Brand, Helmut R. A1 - Küppers, Jürgen ED - Descalzi, Orazio T1 - Influence of the Substrate on the Pattern Formation of a Surface Reaction T2 - Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006 Y1 - 2007 SN - 978-0-7354-0421-2 SP - 121 EP - 126 PB - AIP Publishing CY - Melville, New York ER - TY - CHAP A1 - Müller, Sebastian A1 - Schmeißer, Dieter T1 - Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - synchrotron KW - radiation KW - spectroscopy KW - ultrathin KW - titanium KW - chromium Y1 - 2009 SN - 978-1-4244-4303-1 SP - 64 EP - 68 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - atomic layer deposition KW - microsystems KW - high-k dielectrics Y1 - 2009 SN - 978-1-4244-4303-1 SP - 47 EP - 51 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Klocek, Jolanta A1 - Friedrich, Daniel A1 - Schmeißer, Dieter A1 - Hecker, Michael A1 - Zschech, Ehrenfried T1 - The stability of C60 and its derivatives upon handling in microsystems technologies T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - c60 KW - derivatices Y1 - 2009 SN - 978-1-4244-4303-1 SP - 43 EP - 46 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Kolanek, Krzysztof A1 - Schmeißer, Dieter T1 - Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films KW - in-situ2 KW - ALD KW - nano-functional Y1 - 2009 ER - TY - CHAP A1 - Heim, S. A1 - Friedrich, Daniel A1 - Guttmann, P. A1 - Rehbein, S. A1 - Chumakov, Dmytro A1 - Ritz, Y. A1 - Schneider, G. A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects KW - x-ray KW - Microscopy KW - Interconnects Y1 - 2009 UR - http://link.aip.org/link/?APCPCS/1143/20/1 ER - TY - CHAP A1 - Seifarth, Olaf A1 - Wilke, A. A1 - Walczyk, Christian A1 - Dabrowski, Jarek Marek A1 - Zaumseil, Peter A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim A1 - Schroeder, Thomas T1 - Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111) T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - band gab KW - XAS KW - UPS KW - Si(111) Y1 - 2008 SP - 285 EP - 286 ER - TY - CHAP A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Bergholz, Matthias A1 - Karavaev, Konstantin A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schmeißer, Dieter T1 - Al-Oxynitride as a buffer layer for high-k dielectrics T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - buffer layer KW - high-k KW - dielectric Y1 - 2008 SP - 161 EP - 162 ER - TY - CHAP A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Lazareva, I. A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Electrical investigations on MFIS structures consisting P[VDF/TrFE] as ferro-electric layer for non-volatile memory applications T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - MFIS, P[VDF/TrFE] KW - ferroelectric KW - non-volatile Y1 - 2008 SP - 159 EP - 160 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - HfO2 ALD-growth studied by in situ photoemission T2 - Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008 KW - ald KW - photoemission Y1 - 2008 SP - 289 EP - 290 ER - TY - CHAP A1 - Wyrodek, Jakub A1 - Tallarida, Massimo A1 - Weisheit, Martin A1 - Schmeißer, Dieter T1 - Determination of interfacial layers in high-k nanomaterials by ADXPS measurements Y1 - 2010 ER - TY - CHAP A1 - Starzyk, Łukasz A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition Y1 - 2010 ER - TY - CHAP A1 - Broczkowska, K. A1 - Klocek, Jolanta A1 - Friedrich, Daniel A1 - Henkel, Karsten A1 - Kolanek, Krzysztof A1 - Urbanowicz, A. A1 - Schmeißer, Dieter A1 - Miller, M. A1 - Zschech, Ehrenfried T1 - Fullerene based materials for ultra-low-k application T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", Szklarska, Poreba, Poland, 25 - 27 June 2010 Y1 - 2010 SN - 978-1-4244-8324-2 SP - 39 EP - 43 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Karavaev, Konstantin A1 - Tallarida, Massimo A1 - Schmeißer, Dieter ED - Vierhaus, Heinrich Theodor T1 - In-situ Atomic Layer Deposition growth of Hafnium oxide T2 - DEDIS-Nano-Days, October 11th and October 12th, 2007 Y1 - 2007 SP - 13 EP - 19 PB - BTU CY - Cottbus ER - TY - CHAP A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Sohal, Rakesh A1 - Schwiertz, Carola A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter ED - Dudley, Michael T1 - Pr-O-N Dielectrics for MIS Stacks on Silicon and Silicon Carbide Surfaces T2 - Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A. Y1 - 2006 SN - 978-1-55899-867-4 SP - 353 EP - 358 PB - Materials Research Society CY - Warrendale, Pa. ER - TY - CHAP A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Carbon-Plot-Micostructuring for All-Polymer-Transistors Y1 - 2001 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Bourdas, N. A1 - Lambrakopoulos, S. A1 - Yfantis, N. A1 - Paloumpa, Ioanna A1 - Yfantis, Alexandros D. T1 - Conductive polymers precoats-application on metallisation of ABS Y1 - 2003 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Bourdas, N. A1 - Lambrakopoulos, S. A1 - Yfantis, N. A1 - Paloumpa, Ioanna A1 - Yfantis, Alexandros D. T1 - Primers of conductive polymers-application in powder coatings technology Y1 - 2003 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Bourdas, N. A1 - Yfantis, N. A1 - Yfantis, Alexandros D. A1 - Lambrakopoulos, S. A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - A study of anticorrosive conversion coatings based on conductive polymers of pyrrole Y1 - 2002 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Beuckert, Guido A1 - Schmeißer, Dieter A1 - Kittler, Martin A1 - Ourmazd, A. A1 - Lewerenz, Hans-Joachim T1 - Solare Energieumwandlung in dünnen Schichten Y1 - 2000 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Spectro-Microscopic analyses in metallurgical systems: spheroidic graphite in cast iron and the interface of friction-welded Al-Fe joints Y1 - 2000 ER - TY - CHAP A1 - Gehrlich, Lukas A1 - Ohsiek, Susanne A1 - Klein, C. A1 - Geiß, M. A1 - Friedemann, Michael A1 - Kücher, Peter A1 - Schmeißer, Dieter T1 - Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements T2 - 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM 2011), Dresden, Germany, 8 - 12 May 2011 Y1 - 2011 SN - 978-1-4577-0503-8 U6 - https://doi.org/10.1109/IITC.2011.5940322 SP - 82 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Control of the Crystalline Polymorph, Molecular Dipole and Chain Orientations in P(VDF-HFP) for High Electrical Energy Storage Application T2 - International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011 Y1 - 2012 SN - 978-1-4577-2035-2 U6 - https://doi.org/10.1109/NSTSI.2011.6111801 PB - IEEE ER - TY - CHAP A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - The Co2p oxidation state in Co-PI catalysts T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 N1 - MA2012-02(14) SP - 1803 PB - The Electrochemical Society ER - TY - CHAP A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Multiple Auger decay at resonant photo-excitation in carbon thin films T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 UR - http://ma.ecsdl.org/content/MA2012-02/50/3509.full.pdf+html N1 - MA2012-02(50) SP - 3509 PB - The Electrochemical Society ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Richter, Matthias A1 - Tallarida, Massimo ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Intrinsic defects in TiO2 to explain resistive switching devices T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - resonant photoelectron spectroscopy KW - Auger processes KW - XPS KW - X-ray absorption spectroscopy Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch45 SP - 255 EP - 256 PB - Wiley-VCH CY - Weinheim ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Das, Suken A1 - Schmeißer, Dieter ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Control of β- and γ-Phase formation in electroactive P(VDF-HFP) films by silver nano-particle doping T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - P(VDF.HFP) KW - electroactive phase KW - nanoparticle doping KW - FTIR Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch69 SP - 640 EP - 641 PB - Wiley-VCH CY - Weinheim ER - TY - CHAP A1 - Tallarida, Massimo T1 - III-V/oxide interfaces investigated with synchrotron radiation photoemission spectroscopy T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 KW - interfaces KW - III/V KW - Synchrotron Photoemission Spectroscopy Y1 - 2012 UR - http://ma.ecsdl.org/content/MA2012-02/31/2587.full.pdf+html N1 - MA2012-02(31) SP - 2587 EP - 2587 PB - The Electrochemical Society ER - TY - CHAP A1 - Mai, Andreas A1 - Dauderstädt, Ulrike A1 - Pahner, D. A1 - Krellmann, M. A1 - Schmeißer, Dieter A1 - Wagner, M. T1 - In situ determination of laser induced degradation of micro-mirror arrays T2 - International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011 N2 - The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test. KW - micro-mirror arrays KW - laser induced degradation Y1 - 2011 SN - 978-1-4577-1651-5 U6 - https://doi.org/10.1109/STYSW.2011.6155850 SP - 84 EP - 88 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces After Wet Chemical Treatments T2 - Meeting Abstracts-Electrochemical Society, San Francisco, 2013 KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 UR - http://ma.ecsdl.org/content/MA2013-02/30/2132.full.pdf+html N1 - MA2013-02(30) SP - S. 2132 PB - The Electrochemical Society ER - TY - CHAP A1 - Henkel, Karsten A1 - Tallarida, Massimo A1 - Haeberle, Jörg A1 - Gargouri, Hassan A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Arens, Michael A1 - Schmeißer, Dieter ED - Glück, Bernhard K. ED - Schmidt, Sindy ED - Stein, Erhard ED - Raschke, Jörg-Uwe ED - Richter, Hans T1 - PE-ALD-Al2O3-Schichten für die Passivierung von Solarzellen T2 - Tagungsband Photovoltaik-Meeting: Anwendungen-Qualität-Perspektiven, Senftenberg, 16.04.2014 N2 - Dünne Al2O3-Schichten wurden bei Substrattemperaturen zwischen Raumtemperatur und 200°C mittels PE-ALD auf Si-Substraten abgeschieden und ellipsometrisch, spektroskopisch und elektrisch charakterisiert. Ihr Potenzial für die chemische und Feldeffektpassivierung der Oberflächenrekombination wird bewertet. KW - Al2O3 KW - Atomlagenabscheidung (ALD) KW - Passivierung KW - PE-ALD KW - negative fixe Oxidladungen Y1 - 2014 SP - 7 EP - 14 PB - Cottbus-Senftenberg CY - BTU ER - TY - CHAP A1 - Krenek, Radim A1 - Cimrova, Vera A1 - Seifarth, Olaf A1 - Bocharova, Vera A1 - Gorodyska, Ganna A1 - Sidorenko, Alexander A1 - Schmeißer, Dieter A1 - Stamm, Manfred T1 - Electronic Properties of Metals Embedded into Porous Polymeric Nanotemplates T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 41 N2 - We report on electrical measurements (current-voltage characteristics (CVC)) of metals which are templated via porous polymeric nanotemplates. The nanotemplates are based on self-organization of poly(styrene-block 4-vinylpyridine) (PS-PVP). The cylindrical pores of 8 nm in the diameter are ordered in a hexagonal lattice (24 nm in the period). Chromium and gold were embedded in the nanotemplates by magnetron sputtering, nickel was electrodeposited. These thin films were characterized by AFM, ellipsometry, x-ray reflectivity, XAS, XPS and NEXAFS. CVC were acquired by a connection common for light emitting diodes discussing a further use of nanotemplated metals in these devices. To make the connection, the nanotemplate was deposited on glass with ITO electrodes, then metal was embedded into it and finally Al electrodes were evaporated on the device. Behaviour of space charge limited currents (SCLC) was observed. Also, we deal with the electrical mode of AFM as well. Finally electronic behaviour of the metallic nanorods embedded in polymeric nanotemplates is discussed in respective to the structure and chemical composition obtained by AFM and x-ray techniques. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/cpp/session/25/contribution/2 SN - 0420-0195 SP - S. 108 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Tallarida, Massimo A1 - Sohal, Rakesh A1 - Schmeißer, Dieter T1 - Electronic properties of the 2x1 3C-SiC surface reconstruction studied with resonant photoemission T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41 N2 - We have studied the 2x1 reconstructed surface of the 3C-SiC polytype by means of photoemission spectroscopy. The reconstruction was characterized through Si2p and C1s core level and angle-integrated valence band spectroscopy, and confirmed by the observation of a two-domain 2x1 LEED pattern. The electronic properties of this surface were investigated by collecting valence band spectra at photon energies near the Si2p and C1s absorption edges. The results show a strong dependence of the photoemission intensity on the excitation energy with characteristic resonances for certain valence band features. With a detailed study of the resonances we are able to assign the electronic origin of the resonating states and the nature of the electronic transition near the absorption edges. Y1 - 2006 UR - http://www.dpg-verhandlungen.de/year/2006/conference/dresden/part/hl/session/5/contribution/2 SN - 0420-0195 SP - S. 239 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -