TY - GEN A1 - Schmeißer, Dieter A1 - Haeberle, Jörg T1 - Intrinsic localized gap states in IGZO and its parent single crystalline TCOs T2 - Thin Solid Films N2 - We report on the X-ray absorption data for Indium–Gallium–Zink–Oxide thin films, amorphous ZnO films, amorphous SnOx films, and single crystalline In2O3, Ga2O3, ZnO, and SnO2 data. These absorption data probe the empty conduction band states explicitly. Also they allow for an elemental assignment using resonant excitation to derive the contributions of each metal ion. We find that the lowest states appear right at the Fermi energy and result from configuration interaction induced charge transfer states which we consider as intrinsic gap states. KW - Transparent conducting oxide KW - X-ray photoelectron spectroscopy KW - Resonant photoemission spectroscopy KW - X-ray absorption spectroscopy KW - Electronic band structure KW - Intrinsic localized gap states Y1 - 2016 U6 - https://doi.org/10.1016/j.tsf.2016.02.010 SN - 0040-6090 SN - 1879-2731 IS - 603 SP - 206 EP - 211 ER -