TY - GEN A1 - Zöllner, Marvin Hartwig A1 - Dabrowski, Jarek Marek A1 - Zaumseil, Peter A1 - Giussani, A. A1 - Schubert, Markus Andreas A1 - Lupina, Grzegorz A1 - Wilkens, Henrik A1 - Wollschläger, Joachim A1 - Bäumer, Marcus A1 - Reichling, M. A1 - Schröder, Thomas T1 - On the unusual stacking behavior of twin-free, type B oriented CeO2(111) films on hexagonal Pr2O3(0001) / Si(111) systems T2 - Physical Review Y1 - 2012 UR - http://link.aps.org/doi/10.1103/PhysRevB.85.035302 U6 - https://doi.org/10.1103/PhysRevB.85.035302 SN - 1098-0121 VL - 85 IS - 3 SP - 035302 EP - 035311 ER - TY - GEN A1 - Wilkens, Henrik A1 - Spieß, Wanja A1 - Zöllner, Marvin Hartwig A1 - Niu, Gang A1 - Schroeder, Thomas A1 - Wollschläger, Joachim T1 - Post deposition annealing of epitaxial Ce1−xPrxO2−δ films grown on Si(111) T2 - Physical Chemistry Chemical Physics Y1 - 2015 U6 - https://doi.org/10.1039/C6CP01553K SN - 1463-9084 SN - 1463-9076 VL - 17 SP - 9991 EP - 9996 ER - TY - GEN A1 - Niu, Gang A1 - Zöllner, Marvin Hartwig A1 - Schröder, Thomas A1 - Schäfer, Andreas A1 - Jhang, Jin-Hao A1 - Zielasek, Volkmar A1 - Bäumer, Marcus A1 - Wilkens, Henrik A1 - Wollschläger, Joachim A1 - Olbrich, Reinhard A1 - Lammers, Christian A1 - Reichling, Michael T1 - Controlling the physics and chemistry of binary and ternary praseodymium and cerium oxide systems T2 - Physical Chemistry Chemical Physics Y1 - 2015 U6 - https://doi.org/10.1039/C5CP02283E SN - 1463-9084 SN - 1463-9076 VL - 17 IS - 38 SP - 24513 EP - 24540 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Meyer, Robert A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Zöllner, Marvin Hartwig A1 - Wenger, Christian A1 - Flege, Jan Ingo T1 - Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma T2 - Journal of Vacuum Science and Technology A N2 - Indium oxide (InxOy) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium and oxygen plasma in a low-temperature range of 80–200 °C. The optical properties, chemical composition, crystallographic structure, and electrical characteristics of these layers were investigated by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), as well as current-voltage and capacitance-voltage measurements. The SE results yielded a nearly constant growth rate of 0.56 Å per cycle and a thickness inhomogeneity of ≤1.2% across 4-in. substrates in the temperature range of 100–150 °C. The refractive index (at 632.8 nm) was found to be 2.07 for the films deposited at 150 °C. The PEALD-InxOy layers exhibit a direct (3.3 ± 0.2 eV) and an indirect (2.8 ± 0.1 eV) bandgap with an uptrend for both with increasing substrate temperature. Based on XPS characterization, all InxOy samples are free of carbon impurities and show a temperature-dependent off-stoichiometry indicating oxygen vacancies. XRD diffraction patterns demonstrate an onset of crystallization at 150 °C. Consistent with the optical, XPS, and XRD data, the films deposited at ≥150 °C possess higher electrical conductivity. Our findings prove that a low-temperature PEALD process of InxOy is feasible and promising for a high-quality thin-film deposition without chemical impurities on thermally fragile substrates. KW - Indium oxide KW - Plasma-enhanced atomic layer deposition KW - X-ray photoelectron spectroscopy KW - Ellipsometry KW - X-ray diffraction KW - Electrical properties Y1 - 2021 U6 - https://doi.org/10.1116/6.0001375 SN - 0734-2101 SN - 1520-8559 VL - 39 IS - 6 ER - TY - GEN A1 - Niu, Gang A1 - Zöllner, Marvin Hartwig A1 - Zaumseil, Peter A1 - Pouliopoulos, A. A1 - d'Acapito, F. A1 - Schröder, Thomas A1 - Boscherini, F. T1 - X-ray diffraction and extended X-ray absorption fine structure study of epitaxial mixed ternary bixbyite PrxY2-xO3 (x=0-2) films on Si (111) T2 - Journal of Applied Physics Y1 - 2013 SN - 0021-8979 VL - 113 IS - 4 SP - 043504 EP - 043506 ER - TY - GEN A1 - Olbrich, R. A1 - Wilkens, Henrik A1 - Oelke, R. A1 - Wollschläger, Joachim A1 - Zöllner, Marvin Hartwig A1 - Schroeder, Thomas A1 - Reichling, M. T1 - A well-structured metastable ceria surface T2 - Applied Physics Letters Y1 - 2014 U6 - https://doi.org/10.1063/1.4866667 VL - 104 IS - 8 SP - 081910-1 EP - 081910-4 ER - TY - GEN A1 - Kuschel, Olga A1 - Dieck, Florian A1 - Wilkens, Henrik A1 - Gevers, Sebastian A1 - Rodewald, Jari A1 - Otte, Christian A1 - Zöllner, Marvin Hartwig A1 - Niu, Gang A1 - Schröder, Thomas A1 - Wollschläger, Joachim T1 - Plasma Enhanced Complete Oxidtation of Ultrathin Epitaxial Praseodymia Films on Si(111) T2 - Materials Y1 - 2015 U6 - https://doi.org/10.3390/ma8095312 SN - 1996-1944 VL - 8 IS - 9 SP - 6379 EP - 6390 ER - TY - GEN A1 - Wilkens, Henrik A1 - Schuckmann, O. A1 - Oelke, R. A1 - Gevers, Sebastian A1 - Reichling, M. A1 - Schaefer, A. A1 - Bäumer, Marcus A1 - Zöllner, Marvin Hartwig A1 - Niu, Gang A1 - Schroeder, Thomas A1 - Wollschläger, Joachim T1 - Structural transitions of epitaxial ceria films on Si(111) T2 - Physical Chemistry Chemical Physics Y1 - 2013 SN - 1463-9084 VL - 15 IS - 42 SP - 18589 EP - 18599 ER - TY - GEN A1 - Niu, Gang A1 - Zaumseil, Peter A1 - Schubert, Markus Andreas A1 - Zöllner, Marvin Hartwig A1 - Dabrowski, Jarek Marek A1 - Schroeder, Thomas T1 - Lattice-matched single crystalline ternary PrxY2-xO3 films on SrO-passivated Si (001): interface engineering and crystallography tailoring T2 - Applied Physics Letters Y1 - 2013 VL - 102 SP - 011906-1 EP - 011906-5 ER - TY - GEN A1 - Wilkens, Henrik A1 - Rodewald, Jari A1 - Gevers, Sebastian A1 - Zöllner, Marvin Hartwig A1 - Schroeder, Thomas A1 - Wollschläger, Joachim T1 - Surface morphology of ultra-thin hex-Pr2O3 films on Si(111) T2 - Journal of Physics : D, Applied Physics Y1 - 2013 SN - 0022-3727 VL - 46 IS - 28 SP - 285306 EP - 285313 ER - TY - GEN A1 - Chahine, Gilbert A. A1 - Zöllner, Marvin Hartwig A1 - Richard, Marie-Ingrid A1 - Subhajit, G. A1 - Zaumseil, Peter A1 - Capellini, Giovanni A1 - Schroeder, Thomas A1 - Schülli, Tobias U. T1 - Strain and Lattice Orientation Distribution in SiN/Ge CMOS Compatible Light Emitters Microstructures by Quick X-ray Nano-diffraction Microscopy T2 - Applied Physics Letters Y1 - 2015 U6 - https://doi.org/10.1063/1.4909529 SN - 1077-3118 VL - 106 SP - 071902-1 EP - 071902-4 ER - TY - GEN A1 - Zöllner, Marvin Hartwig A1 - Zaumseil, Peter A1 - Wilkens, Henrik A1 - Gevers, Sebastian A1 - Wollschläger, Joachim A1 - Bäumer, Marcus A1 - Xie, Ya-Hong A1 - Niu, Gang A1 - Schroeder, Thomas T1 - Stoichiometry-structure correlation of epitaxial Ce1-xPrxO2-δ (x = 0-1) thin films on Si(111) T2 - Journal of Crystal Growth Y1 - 2012 SN - 0022-0248 VL - 355 IS - 1 SP - 159 EP - 165 ER - TY - GEN A1 - Zaumseil, Peter A1 - Yamamoto, Yuji A1 - Schubert, M. A1 - Capellini, Giovanni A1 - Skibitzki, Oliver A1 - Zöllner, Marvin Hartwig A1 - Schroeder, Thomas T1 - Tailoring the strain in Si nano-structures for defect-free epitaxial Ge overgrowth T2 - Nanotechnology Y1 - 2015 U6 - https://doi.org/10.1088/0957-4484/26/35/355707 SN - 1361-6528 VL - 26 IS - 35 SP - 355707 ER - TY - GEN A1 - Wilkens, Henrik A1 - Schuckmann, O. A1 - Oelke, R. A1 - Gevers, Sebastian A1 - Schaefer, A. A1 - Bäumer, Marcus A1 - Zöllner, Marvin Hartwig A1 - Schroeder, Thomas A1 - Wollschläger, Joachim T1 - Stabilization of the ceria Jota-phase Ce7O12 surface on Si(111) T2 - Applied Physics Letters Y1 - 2013 SN - 0003-6951 VL - 102 IS - 11 SP - 111602-1 EP - 111602-3 ER - TY - GEN A1 - Zöllner, Marvin Hartwig A1 - Niu, Gang A1 - Jhang, Jin-Hao A1 - Schäfer, Andreas A1 - Zaumseil, Peter A1 - Bäumer, Marcus A1 - Schröder, Thomas T1 - Temperature dependent reduction of epitaxial Ce1-xPrxO2-δ (x = 0-1) thin films on Si(111): A combined TPD, XRD, XPS and Raman study T2 - Journal of Physical Chemistry : C Y1 - 2013 U6 - https://doi.org/10.1021/jp4082867 SN - 1932-7455 VL - 117 IS - 47 SP - 24851 EP - 24857 ER - TY - GEN A1 - Janowitz, Christoph A1 - Mahmoodinezhad, Ali A1 - Kot, Małgorzata A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Zöllner, Marvin Hartwig A1 - Bärwolf, Florian A1 - Stolarek, David A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation T2 - Dalton Transactions N2 - An Al2O3/ZnO heterojunction was grown on a Si single crystal substrate by subsequent thermal and plasma-assisted atomic layer deposition (ALD) in situ. The band offsets of the heterointerface were then studied by consecutive removal of the layers by argon sputtering, followed by in situ X-ray photoelectron spectroscopy. The valence band maximum and conduction band minimum of Al2O3 are found to be 1.1 eV below and 2.3 eV above those of ZnO, resulting in a type-I staggered heterojunction. An apparent reduction of ZnO to elemental Zn in the interface region was detected in the Zn 2p core level and Zn L3MM Auger spectra. This suggests an interface formation different from previous models. The reduction of ZnO to Zn in the interface region accompanied by the creation of oxygen vacancies in ZnO results in an upward band bending at the interface. Therefore, this study suggests that interfacial properties such as the band bending as well as the valence and conduction band offsets should be in situ controllable to a certain extent by careful selection of the process parameters. KW - ALD heterojunction KW - band alignement KW - ZnO KW - Al2O3 KW - interface properties Y1 - 2022 U6 - https://doi.org/10.1039/D1DT04008A SN - 1477-9234 SN - 1477-9226 VL - 51 SP - 9291 EP - 9301 ER - TY - GEN A1 - Reiter, Sebastian A1 - Han, Weijia A1 - Mai, Christian A1 - Spirito, Davide A1 - Jose, Josmy A1 - Zöllner, Marvin Hartwig A1 - Fursenko, Oksana A1 - Schubert, Markus Andreas A1 - Stemmler, Ivo A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties T2 - Plasmonics Y1 - 2023 U6 - https://doi.org/10.1007/s11468-023-01810-3 SN - 1557-1963 SP - 1 EP - 13 ER - TY - GEN A1 - Sana, Prabha A1 - Tetzner, Henriette A1 - Dabrowski, Jarek Marek A1 - Tarnawska, Lidia Lupina A1 - Costina, Ioan A1 - Thapa, Sarad A1 - Storck, Peter A1 - Schröder, Thomas A1 - Zöllner, Marvin Hartwig T1 - Growth of ScN(111) on Sc₂O₃ (111) for GaN integration on Si(111): Experiment and ab initio calculations T2 - Journal of Applied Physics Y1 - 2016 U6 - https://doi.org/10.1063/1.4963826 SN - 1089-7550 SN - 0021-8979 VL - 120 SP - 135103 ER - TY - GEN A1 - Pieper, H. H. A1 - Derks, C. A1 - Zöllner, Marvin Hartwig A1 - Olbrich, R. A1 - Troeger, L. A1 - Schroeder, Thomas A1 - Neumann, M. A1 - Reichling, M. T1 - Morphology and nanostructure of CeO2(111) surfaces of single crystals and of Si(111) supported ceria films, T2 - Physical Chemistry Chemical Physics Y1 - 2012 U6 - https://doi.org/10.1039/C2CP42733H SN - 1463-9084 VL - 14 IS - 44 SP - 15361 EP - 15368 ER - TY - GEN A1 - Richard, Marie-Ingrid A1 - Zöllner, Marvin Hartwig A1 - Chahine, Gilbert A. A1 - Zaumseil, Peter A1 - Capellini, Giovanni A1 - Häberlen, Maik A1 - Storck, Peter A1 - Schülli, Tobias U. A1 - Schröder, Thomas T1 - Structural Mapping of Functional Ge Layers Grown on Graded SiGe Buffers for sub-10 nm CMOS Applications Using Advanced X-ray Nano-Diffraction T2 - ACS Applied Materials and Interfaces Y1 - 2015 U6 - https://doi.org/10.1021/acsami.5b08645 SN - 1944-8244 SN - 1944-8252 VL - 7 IS - 48 SP - 26696 EP - 26700 ER -