TY - GEN A1 - Pérez, Eduardo A1 - Ossorio, Óscar G. A1 - Dueñas, Salvador A1 - Castán, Helena A1 - García, Hector A1 - Wenger, Christian T1 - Programming Pulse Width Assessment for Reliable and Low-Energy Endurance Performance in Al:HfO2-Based RRAM Arrays T2 - Electronics (MDPI) N2 - A crucial step in order to achieve fast and low-energy switching operations in resistive random access memory (RRAM) memories is the reduction of the programming pulse width. In this study, the incremental step pulse with verify algorithm (ISPVA) was implemented by using different pulse widths between 10 μ s and 50 ns and assessed on Al-doped HfO 2 4 kbit RRAM memory arrays. The switching stability was assessed by means of an endurance test of 1k cycles. Both conductive levels and voltages needed for switching showed a remarkable good behavior along 1k reset/set cycles regardless the programming pulse width implemented. Nevertheless, the distributions of voltages as well as the amount of energy required to carry out the switching operations were definitely affected by the value of the pulse width. In addition, the data retention was evaluated after the endurance analysis by annealing the RRAM devices at 150 °C along 100 h. Just an almost negligible increase on the rate of degradation of about 1 μ A at the end of the 100 h of annealing was reported between those samples programmed by employing a pulse width of 10 μ s and those employing 50 ns. Finally, an endurance performance of 200k cycles without any degradation was achieved on 128 RRAM devices by using programming pulses of 100 ns width KW - RRAM KW - Reliability Y1 - 2020 U6 - https://doi.org/10.3390/electronics9050864 SN - 2079-9292 VL - 9 IS - 5 ER - TY - GEN A1 - Morales, Carlos A1 - Mahmoodinezhad, Ali A1 - Schubert, Andreas Markus A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Functional ultra-thin oxide films deposited by atomic layer deposition on structured substrates T2 - Verhandlungen der DPG - SurfaceScience21 N2 - In the last decades, atomic layer deposition (ALD) has gained prominence in the materials and surface science communities owing to its high potential for integration as a scalable process in microelectronics. ALD's largest strengths are its well-controlled layer-by-layer deposition and growth conformity on 3D structures. Yet, the ALD technique is also well known to lead to amorphous and defective, non-stoichiometric thin films, resulting in modified materials properties that may even preferentially be used in certain applications. To study these issues, we have developed an in-situ ALD reactor attached to an X-ray photoelectron spectroscopy (XPS) system, capable of switching between both pump and flow-type operation. This novel tool allows to cover the entire range of compounds and recipes used in ALD, thus clarifying the role of such defects at different deposition stages, growth conditions and film/substrate interfaces. To exemplify these sorts of studies, we show the deposition of Al2O3 5-10 nm films on nanostructured Si, and their use as substrates for functional CeOx ALD deposits. KW - Atomic layer deposition KW - sensors KW - structured substrates KW - in-situ X-ray photoelectron spectroscopy Y1 - 2021 UR - https://www.dpg-verhandlungen.de/year/2021/conference/surfacescience/part/o/session/74/contribution/5 VL - 2021 PB - Deutsche Physikalische Gesellschaft e.V. CY - Bad Honnef ER - TY - GEN A1 - Pérez-Bosch Quesada, Emilio A1 - Romero-Zaliz, Rocío A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Reuben, John A1 - Schubert, Markus Andreas A1 - Jiménez-Molinos, Francisco A1 - Roldán, Juan Bautista A1 - Wenger, Christian T1 - Toward Reliable Compact Modeling of Multilevel 1T-1R RRAM Devices for Neuromorphic Systems T2 - Electronics (MDPI) N2 - In this work, three different RRAM compact models implemented in Verilog-A are analyzed and evaluated in order to reproduce the multilevel approach based on the switching capability of experimental devices. These models are integrated in 1T-1R cells to control their analog behavior by means of the compliance current imposed by the NMOS select transistor. Four different resistance levels are simulated and assessed with experimental verification to account for their multilevel capability. Further, an Artificial Neural Network study is carried out to evaluate in a real scenario the viability of the multilevel approach under study. KW - RRAM KW - multilevel switching KW - compact modeling KW - Verilog-A Y1 - 2021 U6 - https://doi.org/10.3390/electronics10060645 SN - 2079-9292 VL - 10 IS - 6 ER - TY - GEN A1 - Pechmann, Stefan A1 - Mai, Timo A1 - Völkel, Matthias A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Pérez, Eduardo A1 - Perez-Bosch Quesada, Emilio A1 - Reichenbach, Marc A1 - Wenger, Christian A1 - Hagelauer, Amelie T1 - A Versatile, Voltage-Pulse Based Read and Programming Circuit for Multi-Level RRAM Cells T2 - Electronics N2 - In this work, we present an integrated read and programming circuit for Resistive Random Access Memory (RRAM) cells. Since there are a lot of different RRAM technologies in research and the process variations of this new memory technology often spread over a wide range of electrical properties, the proposed circuit focuses on versatility in order to be adaptable to different cell properties. The circuit is suitable for both read and programming operations based on voltage pulses of flexible length and height. The implemented read method is based on evaluating the voltage drop over a measurement resistor and can distinguish up to eight different states, which are coded in binary, thereby realizing a digitization of the analog memory value. The circuit was fabricated in the 130 nm CMOS process line of IHP. The simulations were done using a physics-based, multi-level RRAM model. The measurement results prove the functionality of the read circuit and the programming system and demonstrate that the read system can distinguish up to eight different states with an overall resistance ratio of 7.9. KW - RRAM KW - Multilevel switching KW - Programming circuit Y1 - 2021 U6 - https://doi.org/10.3390/electronics10050530 SN - 2079-9292 VL - 10 IS - 5 ER - TY - GEN A1 - Matbaechi Ettehad, Honeyeh A1 - Wenger, Christian T1 - Characterization and Separation of Live and Dead Yeast Cells Using CMOS-Based DEP Microfluidics T2 - Micromachines N2 - This study aims at developing a miniaturized CMOS integrated silicon-based microfluidic system, compatible with a standard CMOS process, to enable the characterization, and separation of live and dead yeast cells (as model bio-particle organisms) in a cell mixture using the DEP technique. DEP offers excellent benefits in terms of cost, operational power, and especially easy electrode integration with the CMOS architecture, and requiring label-free sample preparation. This can increase the likeliness of using DEP in practical settings. In this work the DEP force was generated using an interdigitated electrode arrays (IDEs) placed on the bottom of a CMOS-based silicon microfluidic channel. This system was primarily used for the immobilization of yeast cells using DEP. This study validated the system for cell separation applications based on the distinct responses of live and dead cells and their surrounding media. The findings confirmed the device’s capability for efficient, rapid and selective cell separation. The viability of this CMOS embedded microfluidic for dielectrophoretic cell manipulation applications and compatibility of the dielectrophoretic structure with CMOS production line and electronics, enabling its future commercially mass production. KW - dielectrophoresis KW - microfluidics KW - cell characterization KW - CMOS Y1 - 2021 U6 - https://doi.org/10.3390/mi12030270 SN - 2072-666X VL - 12 IS - 3 ER - TY - GEN A1 - Pérez, Eduardo A1 - Pérez-Ávila, Antonio Javier A1 - Romero-Zaliz, Rocío A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Pérez-Bosch Quesada, Emilio A1 - Roldan, Juan Bautista A1 - Jiménez-Molinos, Francisco A1 - Wenger, Christian T1 - Optimization of Multi-Level Operation in RRAM Arrays for In-Memory Computing T2 - Electronics (MDPI) N2 - Accomplishing multi-level programming in resistive random access memory (RRAM) arrays with truly discrete and linearly spaced conductive levels is crucial in order to implement synaptic weights in hardware-based neuromorphic systems. In this paper, we implemented this feature on 4-kbit 1T1R RRAM arrays by tuning the programming parameters of the multi-level incremental step pulse with verify algorithm (M-ISPVA). The optimized set of parameters was assessed by comparing its results with a non-optimized one. The optimized set of parameters proved to be an effective way to define non-overlapped conductive levels due to the strong reduction of the device-to-device variability as well as of the cycle-to-cycle variability, assessed by inter-levels switching tests and during 1k reset-set cycles. In order to evaluate this improvement in real scenarios, the experimental characteristics of the RRAM devices were captured by means of a behavioral model, which was used to simulate two different neuromorphic systems: an 8×8 vector-matrixmultiplication (VMM) accelerator and a 4-layer feedforward neural network for MNIST database recognition. The results clearly showed that the optimization of the programming parameters improved both the precision of VMM results as well as the recognition accuracy of the neural network in about 6% compared with the use of non-optimized parameters. KW - RRAM KW - Multilevel switching KW - In-memory computing Y1 - 2021 U6 - https://doi.org/10.3390/electronics10091084 SN - 2079-9292 VL - 10 IS - 9 ER - TY - GEN A1 - Milo, Valerio A1 - Anzalone, Francesco A1 - Zambelli, Cristian A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Ossorio, Óscar G. A1 - Olivo, Piero A1 - Wenger, Christian A1 - Ielmini, Daniele T1 - Optimized programming algorithms for multilevel RRAM in hardware neural networks T2 - IEEE International Reliability Physics Symposium (IRPS), 2021 N2 - A key requirement for RRAM in neural network accelerators with a large number of synaptic parameters is the multilevel programming. This is hindered by resistance imprecision due to cycle-to-cycle and device-to-device variations. Here, we compare two multilevel programming algorithms to minimize resistance variations in a 4-kbit array of HfO 2 RRAM. We show that gate-based algorithms have the highest reliability. The optimized scheme is used to implement a neural network with 9-level weights, achieving 91.5% (vs. software 93.27%) in MNIST recognition. KW - RRAM KW - Multilevel switching KW - neural network KW - memristive switching Y1 - 2021 SN - 978-1-7281-6894-4 U6 - https://doi.org/10.1109/IRPS46558.2021.9405119 SN - 1938-1891 ER - TY - GEN A1 - Petryk, Dmytro A1 - Dyka, Zoya A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Kabin, Ievgen A1 - Wenger, Christian A1 - Langendörfer, Peter T1 - Evaluation of the Sensitivity of RRAM Cells to Optical Fault Injection Attacks T2 - EUROMICRO Conference on Digital System Design (DSD 2020), Special Session: Architecture and Hardware for Security Applications (AHSA) Y1 - 2021 SN - 978-1-7281-9535-3 U6 - https://doi.org/10.1109/DSD51259.2020.00047 SN - 978-1-7281-9536-0 ER - TY - GEN A1 - Romero-Zaliz, Rocío A1 - Pérez, Eduardo A1 - Jimenez-Molinos, Francisco A1 - Wenger, Christian A1 - Roldan, Juan Bautista T1 - Influence of variability on the performance of HfO2 memristor-based convolutional neural networks T2 - Solid State Electronics N2 - A study of convolutional neural networks (CNNs) was performed to analyze the influence of quantization and variability in the network synaptic weights. Different CNNs were considered accounting for the number of convolutional layers, size of the filters in the convolutional layer, number of neurons in the final network layers and different sets of quantization levels. The conductance levels of fabricated 1T1R structures based on HfO2 memristors were considered as reference for four or eight level quantization processes at the inference stage of the CNNs, which were previous trained with the MNIST dataset. We also included the variability of the experimental conductance levels that was found to be Gaussian distributed and was correspondingly modeled for the synaptic weight implementation. KW - RRAM KW - neural network KW - HfO2 KW - memristive switching Y1 - 2021 U6 - https://doi.org/10.1016/j.sse.2021.108064 SN - 0038-1101 VL - 185 ER - TY - GEN A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Perez-Bosch Quesada, Emilio A1 - Wenger, Christian T1 - Variability and Energy Consumption Tradeoffs in Multilevel Programming of RRAM Arrays T2 - IEEE Transactions on Electron Devices N2 - Achieving a reliable multi-level programming operation in resistive random access memory (RRAM) arrays is still a challenging task. In this work, we assessed the impact of the voltage step value used by the programming algorithm on the device-to-device (DTD) variability of the current distributions of four conductive levels and on the energy consumption featured by programming 4-kbit HfO2-based RRAM arrays. Two different write-verify algorithms were considered and compared, namely, the incremental gate voltage with verify algorithm (IGVVA) and the incremental step pulse with verify algorithm (ISPVA). By using the IGVVA, a main trade-off has to be taken into account since reducing the voltage step leads to a smaller DTD variability at the cost of a strong increase in the energy consumption. Although the ISPVA can not reduce the DTD variability as much as the IGVVA, its voltage step can be decreased in order to reduce the energy consumption with almost no impact on the DTD variability. Therefore, the final decision on which algorithm to employ should be based on the specific application targeted for the RRAM array. KW - RRAM KW - Multilevel switching KW - HfO2 Y1 - 2021 U6 - https://doi.org/10.1109/TED.2021.3072868 SN - 0018-9383 SN - 1557-9646 VL - 68 IS - 6 SP - 2693 EP - 2698 ER - TY - GEN A1 - Ossorio, Óscar G. A1 - Vinuesa, Guillermo A1 - Garcia, Hector A1 - Sahelices, Benjamin A1 - Dueñas, Salvador A1 - Castán, Helena A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Wenger, Christian T1 - Performance Assessment of Amorphous HfO2-based RRAM Devices for Neuromorphic Applications T2 - ECS Transactions N2 - The use of thin layers of amorphous hafnium oxide has been shown to be suitable for the manufacture of Resistive Random-Access memories (RRAM). These memories are of great interest because of their simple structure and non-volatile character. They are particularly appealing as they are good candidates for substituting flash memories. In this work, the performance of the MIM structure that takes part of a 4 kbit memory array based on 1-transistor-1-resistance (1T1R) cells was studied in terms of control of intermediate states and cycle durability. DC and small signal experiments were carried out in order to fully characterize the devices, which presented excellent multilevel capabilities and resistive-switching behavior. KW - RRAM KW - resistive switching KW - HfO2 Y1 - 2021 U6 - https://doi.org/10.1149/10202.0029ecst SN - 1938-6737 SN - 1938-5862 VL - 102 IS - 2 SP - 29 EP - 35 ER - TY - GEN A1 - Mahmoodinezhad, Ali A1 - Morales, Carlos A1 - Naumann, Franziska A1 - Plate, Paul A1 - Meyer, Robert A1 - Janowitz, Christoph A1 - Henkel, Karsten A1 - Kot, Małgorzata A1 - Zöllner, Marvin Hartwig A1 - Wenger, Christian A1 - Flege, Jan Ingo T1 - Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma T2 - Journal of Vacuum Science and Technology A N2 - Indium oxide (InxOy) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium and oxygen plasma in a low-temperature range of 80–200 °C. The optical properties, chemical composition, crystallographic structure, and electrical characteristics of these layers were investigated by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), as well as current-voltage and capacitance-voltage measurements. The SE results yielded a nearly constant growth rate of 0.56 Å per cycle and a thickness inhomogeneity of ≤1.2% across 4-in. substrates in the temperature range of 100–150 °C. The refractive index (at 632.8 nm) was found to be 2.07 for the films deposited at 150 °C. The PEALD-InxOy layers exhibit a direct (3.3 ± 0.2 eV) and an indirect (2.8 ± 0.1 eV) bandgap with an uptrend for both with increasing substrate temperature. Based on XPS characterization, all InxOy samples are free of carbon impurities and show a temperature-dependent off-stoichiometry indicating oxygen vacancies. XRD diffraction patterns demonstrate an onset of crystallization at 150 °C. Consistent with the optical, XPS, and XRD data, the films deposited at ≥150 °C possess higher electrical conductivity. Our findings prove that a low-temperature PEALD process of InxOy is feasible and promising for a high-quality thin-film deposition without chemical impurities on thermally fragile substrates. KW - Indium oxide KW - Plasma-enhanced atomic layer deposition KW - X-ray photoelectron spectroscopy KW - Ellipsometry KW - X-ray diffraction KW - Electrical properties Y1 - 2021 U6 - https://doi.org/10.1116/6.0001375 SN - 0734-2101 SN - 1520-8559 VL - 39 IS - 6 ER - TY - GEN A1 - Yun, Min Ju A1 - Lee, Doowon A1 - Kim, Sungho A1 - Wenger, Christian A1 - Kim, Hee-Dong T1 - A nonlinear resistive switching behaviors of Ni/HfO2/TiN memory structures for self-rectifying resistive switching memory T2 - Materials Characterization N2 - This work reports forming free/self-rectifying resistive switching characteristics and dependency of the top electrode (TE) of a crystalline HfO2-based resistive switching memory device. In the memory cells, nonlinear bipolar resistive switching characteristics, i.e., an asymmetric current-voltage curve like the Schottky diode, was observed. In addition, the device exhibits resistive switching behaviors without forming process, which makes it possible to switch the resistance state under ultra-low current levels of <10 nA. In addition, compared to the resistive switching of the proposed resistive switching memory devices with different TEs, the VSET was decreased when using TE with lower work function, and the height read margin was obtained in the sample with the Ni TE, covering over 56 × 56 arrays. Consequently, these results indicate that the interface control resistive switching properties in memory structures having the Schottky junction warrant the realization of selector-free resistive switching memory cells in a high-density crossbar array. KW - RRAM KW - resistive switching KW - HfO2 Y1 - 2021 U6 - https://doi.org/10.1016/j.matchar.2021.111578 SN - 1044-5803 VL - 182 ER - TY - GEN A1 - Perez-Bosch Quesada, Emilio A1 - Pérez, Eduardo A1 - Mahadevaiah, Mamathamba Kalishettyhalli A1 - Wenger, Christian T1 - Memristive-based in-memory computing: from device to large-scale CMOS integration T2 - Neuromorphic Computing and Engineering N2 - With the rapid emergence of in-memory computing systems based on memristive technology, the integration of such memory devices in large-scale architectures is one of the main aspects to tackle. In this work we present a study of HfO2-based memristive devices for their integration in large-scale CMOS systems, namely 200 mm wafers. The DC characteristics of single metal–insulator–metal devices are analyzed taking under consideration device-to-device variabilities and switching properties. Furthermore, the distribution of the leakage current levels in the pristine state of the samples are analyzed and correlated to the amount of formingless memristors found among the measured devices. Finally, the obtained results are fitted into a physic-based compact model that enables their integration into larger-scale simulation environments. KW - RRAM KW - memristive device KW - HfO2 Y1 - 2021 U6 - https://doi.org/10.1088/2634-4386/ac2cd4 SN - 2634-4386 VL - 1 IS - 2 ER - TY - GEN A1 - Baroni, Andrea A1 - Zambelli, Cristian A1 - Olivo, Piero A1 - Pérez, Eduardo A1 - Wenger, Christian A1 - Ielmini, Daniele T1 - Tackling the Low Conductance State Drift through Incremental Reset and Verify in RRAM Arrays T2 - 2021 IEEE International Integrated Reliability Workshop (IIRW), South Lake Tahoe, CA, USA, 10 December 2021 N2 - Resistive switching memory (RRAM) is a promising technology for highly efficient computing scenarios. RRAM arrays enabled the acceleration of neural networks for artificial intelligence and the creation of In-Memory Computing circuits. However, the arrays are affected by several issues materializing in conductance variations that might cause severe performance degradation in those applications. Among those, one is related to the drift of the low conductance states appearing immediately at the end of program and verify algorithms that are fundamental for an accurate Multi-level conductance operation. In this work, we tackle the issue by developing an Incremental Reset and Verify technique showing enhanced variability and reliability features compared with a traditional refresh-based approach. KW - RRAM KW - resistive switching KW - neural network Y1 - 2021 SN - 978-1-6654-1794-5 SN - 978-1-6654-1795-2 U6 - https://doi.org/10.1109/IIRW53245.2021.9635613 SN - 2374-8036 PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - GEN A1 - Romero-Zaliz, Rocio A1 - Cantudo, Antonio A1 - Pérez, Eduardo A1 - Jimenez-Molinos, Francisco A1 - Wenger, Christian A1 - Roldan, Juan Bautista T1 - An Analysis on the Architecture and the Size of Quantized Hardware Neural Networks Based on Memristors T2 - Electronics (MDPI) N2 - We have performed different simulation experiments in relation to hardware neural networks (NN) to analyze the role of the number of synapses for different NN architectures in the network accuracy, considering different datasets. A technology that stands upon 4-kbit 1T1R ReRAM arrays, where resistive switching devices based on HfO2 dielectrics are employed, is taken as a reference. In our study, fully dense (FdNN) and convolutional neural networks (CNN) were considered, where the NN size in terms of the number of synapses and of hidden layer neurons were varied. CNNs work better when the number of synapses to be used is limited. If quantized synaptic weights are included, we observed thatNNaccuracy decreases significantly as the number of synapses is reduced; in this respect, a trade-off between the number of synapses and the NN accuracy has to be achieved. Consequently, the CNN architecture must be carefully designed; in particular, it was noticed that different datasets need specific architectures according to their complexity to achieve good results. It was shown that due to the number of variables that can be changed in the optimization of a NN hardware implementation, a specific solution has to be worked in each case in terms of synaptic weight levels, NN architecture, etc. KW - RRAM KW - memristive device KW - neural network Y1 - 2021 U6 - https://doi.org/10.3390/electronics10243141 SN - 2079-9292 VL - 10 IS - 24 ER - TY - GEN A1 - Stanke, Sandra A1 - Wenger, Christian A1 - Bier, Frank F. A1 - Hölzel, Ralph T1 - AC electrokinetic immobilization of influenza virus T2 - Electrophoresis N2 - The use of alternating current (AC) electrokinetic forces, like dielectrophoresis and AC electroosmosis, as a simple and fast method to immobilize sub-micrometer objects onto nanoelectrode arrays is presented. Due to its medical relevance, the influenza virus is chosen as a model organism. One of the outstanding features is that the immobilization of viral material to the electrodes can be achieved permanently, allowing subsequent handling independently from the electrical setup. Thus, by using merely electric fields, we demonstrate that the need of prior chemical surface modification could become obsolete. The accumulation of viral material over time is observed by fluorescence microscopy. The influences of side effects like electrothermal fluid flow, causing a fluid motion above the electrodes and causing an intensity gradient within the electrode array, are discussed. Due to the improved resolution by combining fluorescence microscopy with deconvolution, it is shown that the viral material is mainly drawn to the electrode edge and to a lesser extent to the electrode surface. Finally, areas of application for this functionalization technique are presented. KW - dielectrophoresis KW - immobilization KW - virus Y1 - 2022 U6 - https://doi.org/10.1002/elps.202100324 SN - 1522-2683 VL - 43 IS - 12 SP - 1309 EP - 1321 ER -