TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - GEN A1 - Dauderstädt, Ulrike A1 - Dürr, Peter A1 - Gehner, Andreas A1 - Wagner, Michael A1 - Schenk, Harald T1 - Analog Spatial Light Modulators based on Micromirror Arrays T2 - Micromachines, Special Issue "Beam Steering via Arrayed Micromachines" Y1 - 2021 U6 - https://doi.org/10.3390/mi12050483 SN - 2072-666X VL - 12 IS - 5 ER -