TY - CHAP A1 - Mai, Andreas A1 - Dauderstädt, Ulrike A1 - Pahner, D. A1 - Krellmann, M. A1 - Schmeißer, Dieter A1 - Wagner, M. T1 - In situ determination of laser induced degradation of micro-mirror arrays T2 - International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011 N2 - The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test. KW - micro-mirror arrays KW - laser induced degradation Y1 - 2011 SN - 978-1-4577-1651-5 U6 - https://doi.org/10.1109/STYSW.2011.6155850 SP - 84 EP - 88 PB - IEEE CY - Piscataway, NJ ER - TY - RPRT A1 - Müller, Jörg A1 - Dieter, M. A1 - Bauhus, J. A1 - Spellmann, H. A1 - Möhring, B. A1 - Wagner, S. A1 - Wolf, Heino A1 - Niekisch, M. A1 - Weiger, H. A1 - Feindt, Peter H. A1 - Hamm, Ulrich A1 - Wätzold, Frank A1 - Wolters, Volkmar A1 - Engels, Eve-Marie A1 - Schraml, U. A1 - Lang, F. A1 - Pröbstl-Haider, U. A1 - Richter, K. T1 - Wege zu einem effizienten Waldnaturschutz in Deutschland. Stellungnahme Y1 - 2020 UR - http://www.fnr.de/fileadmin/allgemein/pdf/Effizienter_Waldnaturschutz_in_Deutschland.pdf PB - Wissenschaftlicher Beirat Waldpolitik und Wissenschaftlicher Beirat Biodiversität und Genetische Ressourcen beim BMEL ER - TY - CHAP A1 - Pickenhain, Sabine A1 - Wagner, M. ED - Grötschel, Martin T1 - Optimal Control Problems with a First Order PDE System - Necessary and Sufficient Optimality Conditions T2 - Online optimization of large scale systems Y1 - 2001 SN - 3-540-42459-8 SP - 159 EP - 172 PB - Springer CY - Berlin [u.a.] ER - TY - CHAP A1 - Henkel, Karsten A1 - Schwiertz, Carola A1 - Wagner, S. A1 - Valdeig, A. A1 - List, M. A1 - Schmeißer, Dieter T1 - Partikel- und Tropfendetektion im Mikrometerbereich mittels Schwingquarzen Y1 - 2003 SN - 3-935712-92-8 SP - 291 EP - 294 PB - w.e.b.-Univ.-Verl. CY - Dresden ER - TY - JOUR A1 - Pickenhain, Sabine A1 - Wagner, M. T1 - Pontryagin principle for state-constrained control problems governed by a first-order PDE system Y1 - 2000 ER - TY - JOUR A1 - Wagner, M. T1 - Transportation flow problems with Radon measure variables Y1 - 2000 ER - TY - CHAP A1 - Pickenhain, Sabine A1 - Wagner, M. ED - Ioffe, Alexander T1 - Critical points in relaxed deposit problems T2 - Calculus of variations and optimal control, Technion 1998, proceedings of the International Conference on the Calculus of Variations and Related Topics, 25 - 31 March, 1998 Y1 - 2000 SN - 0-8493-0605-1 SP - 217 EP - 236 PB - Chapman & Hall/CRC CY - Boca Raton, Fla. [u.a.] ER - TY - JOUR A1 - Wagner, M. T1 - Pontryagin's maximum principle for Dieudonne-Rashevsky type problems involving Lipschitz functions Y1 - 1999 ER - TY - JOUR A1 - Lykina, Valeriya A1 - Pickenhain, Sabine A1 - Wagner, M. T1 - Different interpretations of the improper integral objective in an infinite horizon control problem Y1 - 2008 ER - TY - JOUR A1 - Lykina, Valeriya A1 - Pickenhain, Sabine A1 - Wagner, M. T1 - On a resource allocation model with inifinite horizon Y1 - 2008 ER -