TY - PAT A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Rattunde, Marcel T1 - Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers) Y1 - 2015 ER - TY - GEN A1 - Grahmann, Jan A1 - Merten, André A1 - Ostendorf, Ralf A1 - Fontenot, M. A1 - Bleh, Daniela A1 - Schenk, Harald A1 - Wagner, Hans-Joachim T1 - Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897708-1 EP - 897708-11 PB - SPIE Press CY - Bellingham ER - TY - PAT A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Schenk, Harald A1 - Rattunde, Marcel T1 - MEMS basiertes Durchstimmen von Lasern Y1 - 2014 ER -