TY - CHAP A1 - Mai, Andreas A1 - Dauderstädt, Ulrike A1 - Pahner, D. A1 - Krellmann, M. A1 - Schmeißer, Dieter A1 - Wagner, M. T1 - In situ determination of laser induced degradation of micro-mirror arrays T2 - International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011 N2 - The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test. KW - micro-mirror arrays KW - laser induced degradation Y1 - 2011 SN - 978-1-4577-1651-5 U6 - https://doi.org/10.1109/STYSW.2011.6155850 SP - 84 EP - 88 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - GEN A1 - Dauderstädt, Ulrike A1 - Dürr, Peter A1 - Gehner, Andreas A1 - Wagner, Michael A1 - Schenk, Harald T1 - Analog Spatial Light Modulators based on Micromirror Arrays T2 - Micromachines, Special Issue "Beam Steering via Arrayed Micromachines" Y1 - 2021 U6 - https://doi.org/10.3390/mi12050483 SN - 2072-666X VL - 12 IS - 5 ER -