TY - CHAP A1 - Bauer, Monika A1 - Dreyer, Christian A1 - Kahle, Olaf A1 - Schuldt, U. A1 - Uhlig, C. A1 - Schulze, K. A1 - Schulz, Stefan E. A1 - Uhlig, M. A1 - Geßner, Thomas T1 - Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization Y1 - 2006 ER -