TY - CHAP A1 - Tortschanoff, Andreas A1 - Baumgart, M. A1 - Frank, A. A1 - Wildenhain, Michael A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Optical position feedback for electrostatically driven MOEMS-scanners T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.907761 SN - 978-0-8194-8930-2 SP - 82520S-1 EP - 82520S-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - GEN A1 - Kenda, Andreas A1 - Kraft, Martin A1 - Tortschanoff, Andreas A1 - Scherf, Werner A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Luettjohann, Stephan A1 - Simon, Apolline T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives T2 - Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States Y1 - 2014 SN - 978-1-62841-038-9 SP - 910102-1 EP - 910102-10 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schenk, Harald A1 - Tortschanoff, Andreas T1 - Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-1-4799-1512-5 SP - 861605-1 EP - 861605-6 PB - SPIE CY - Bellingham, Wash. ER -