TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Konarski, Piotr A1 - Cwil, M. T1 - Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor Y1 - 2006 ER -