TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Drabe, Christian A1 - Klose, Thomas A1 - Jung, Denis T1 - Micromechanical device with tilted electrodes Y1 - 2012 ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - PAT A1 - Klose, Thomas A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Y1 - 2012 ER -