TY - GEN A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Stolz, Michael A1 - Schenk, Hermann A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schimmanz, Klaus A1 - Schuffenhauer, David T1 - Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers T2 - Microsystems and Nanoengineering N2 - MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. Y1 - 2019 U6 - https://doi.org/10.1038/s41378-019-0095-9 SN - 2055-7434 IS - 5 ER - TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Männchen, Andreas A1 - Brocks, Tobias T1 - Acoustic validation of electrostatic all-silicon MEMS-speakers T2 - AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 Y1 - 2019 UR - https://www.aes.org/e-lib/browse.cfm?elib=20522 U6 - https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 ER - TY - PAT A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Elektrostatisch auslenkbares mikromechanisches Bauelement Y1 - 2014 ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A contribution to the expansion of the applicability of electrostatic forces in micro transducers T2 - MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States Y1 - 2017 SN - 978-1-5106-0674-6 SN - 978-1-5106-0673-9 U6 - https://doi.org/10.1117/12.2249575 PB - SPIE CY - Bellingham, Washington, USA ER -