TY - GEN A1 - Schenk, Harald A1 - Narimani, Keyvan A1 - Scholles, Michael A1 - Shashank, Shashank A1 - Langa, Sergiu A1 - Pineda Gomez, Roberto A1 - Ruffert, Christine T1 - Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive T2 - MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg N2 - We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system’s footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM). Y1 - 2021 UR - https://www.vde-verlag.de/proceedings-de/455656160.html SN - 978-3-8007-5656-8 SN - 978-3-8007-5657-5 PB - VDE e.V. ER - TY - GEN A1 - Safdar, Muddasar A1 - Shezad, Nasir A1 - Dorneanu, Bogdan A1 - Jafari, Mitra A1 - Shashank Bhat, Sharvendu A1 - Akhtar, Farid A1 - Arellano-García, Harvey T1 - Dry Reforming of Methane for the Syngas Production Catalyzed by Ni-doped Perovskites T2 - 15Th European Congress on Katakysis EUROPACAT2023 N2 - different perovskite-type supports considering ABO3 (such as A= Al, La with B=Ce and A=Mg, Mn with B=Zr) were prepared via the sol-gel method. Ni metal loading of 10 wt.% was deposited on prepared perovskite supports via the impregnation method. The catalysts were characterized using XRD and FTIR techniques. The DRM activity was carried out in a tubular reactor as described in our previous study [5]. The catalytic performance was assessed in the temperature range of 500–700 ◦C, CH4/CO2 = 1/1 and under GHSV of 12,000 h–1. Among the prepared catalysts, Ni-doped perovskite combination (i.e. A=Mg with B=Zr)O3-δ exhibited higher (CH4, CO2) conversion ca. (69, 59) percent and syngas yield of ca. (H2/CO =0.72) at 700 oC. This indicates that the magnesium zirconate perovskite catalyst established strong interfacial metal-support interaction, redox properties and surface basic sites that linked with good performance of the catalyst during DRM process. KW - Dry reforming of methane (DRM) KW - Ni-Perovskites KW - Syngas production KW - Greenhouse gases (GHGs) Y1 - 2023 ER - TY - PAT A1 - Schenk, Harald A1 - Shashank, S. A1 - Gaudet, M. T1 - MEMS actuator and method for controlling a MEMS actuator N2 - The invention provides a MEMS actuator comprising at least one actuator cell. The actuator cell comprises a first connecting piece and a second connecting piece. A mechanical connection between the first connecting piece and the second connecting piece comprises at least one connector unit. The connector unit comprises a first beam and a second beam being serially connected with the first beam so as to provide for a meandered shape. At least the first beam comprises a serial arrangement of a plurality of actuator elements configured to change a bending of the first beam upon actuation. Y1 - 2022 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=EP2021082038 ER -