TY - JOUR A1 - Schulze, Knut A1 - Schuldt, U. A1 - Kahle, Olaf A1 - Schulz, Stefan E. A1 - Uhlig, M. T1 - Novel Low-k Polycyanurates for Integrated circuit (IC) Metallization Y1 - 2005 U6 - https://doi.org/10.1016/j.mee.2005.07.016 ER - TY - CHAP A1 - Bauer, Monika A1 - Dreyer, Christian A1 - Kahle, Olaf A1 - Schuldt, U. A1 - Uhlig, C. A1 - Schulze, K. A1 - Schulz, Stefan E. A1 - Uhlig, M. A1 - Geßner, Thomas T1 - Comparison of Fluorinated and Non-Fluorinated Novel Low-k Polycyanurates for Integrated Circuit (IC) Metallization Y1 - 2006 ER -