TY - CHAP A1 - Henkel, Karsten A1 - Schwiertz, Carola A1 - Wagner, S. A1 - Valdeig, A. A1 - List, M. A1 - Schmeißer, Dieter T1 - Partikel- und Tropfendetektion im Mikrometerbereich mittels Schwingquarzen Y1 - 2003 SN - 3-935712-92-8 SP - 291 EP - 294 PB - w.e.b.-Univ.-Verl. CY - Dresden ER - TY - GEN A1 - Lamprakopoulos, Stelios A1 - Schmeißer, Dieter A1 - Anastassopoulou, Jane A1 - Theophanides, Theophile A1 - Yfantis, Alexandros D. T1 - An FTIR study of the role of H2O and D2O in the aging mechanism of conductive polypyrroles T2 - Synthetic Metals N2 - In the present work the role of H2O was studied by conductivity measurements and FTIR spectroscopy using the isotopic effect of deuterium in order to elucidate the aging mechanism of conductivity of polypyrroles. Polypyrrole was prepared with PTS as a dopant, by using deuterated water. Conductivity measurements showed changes due to structural water and atmospheric humidity. The FTIR absorption spectra indicated that the most probable structure of polypyrrole is the two-dimensional one. This finding could be attributed to the inhibition of polypyrrole's IR modes. The infrared spectrum analysis show that the gamma -NH bending mode of pyrrole has significantly changed after polymerization of pyrrole and this result is in accordance with XPS measurements. KW - Polypyrrole KW - Conductivity KW - FTIR KW - Isotopic effect Y1 - 2004 U6 - https://doi.org/10.1016/j.synthmet.2004.03.006 SN - 0379-6779 VL - 144 IS - 3 SP - 229 EP - 234 ER - TY - JOUR A1 - Schmeißer, Dieter T1 - Pr2O3/Si(001) interface reactions and stability N2 - We show that an interfacial silicate is formed in a natural way between Si(0 0 1) and the deposited Pr2O3 film if a sufficient amount of oxygen is provided during deposition, as during electron beam evaporation from Pr6O11 source. We provide arguments from results of ab initio calculations and we present a ternary phase diagram of the Pr-O-Si system obtained for epitaxial films from non-destructive depth profiling data acquired by synchrotron radiation and photoelectron spectroscopy (SR-PES) at the undulator beam line U49/2-PGM2. The composition of the interfacial layer is (Pr2O3)(SiO)x(SiO2)y, with x+y between 2 and 6 and depends on the growth condition and distance from the substrate. No interfacial SiO2 and no interfacial silicide is formed during growth. The ternary phase diagram indicates that this non-stoichiometric pseudobinary alloy is stable on Si up to high temperatures, without phase separation into Pr2O3 and SiO2. Therefore, a complete re-engineering of the CMOS process may be not necessary. KW - High-k-material KW - Pr2O3/Si(0 0 1) interface KW - Photoelectron spectroscopy KW - Ab initio calculations KW - CMOS Y1 - 2004 ER - TY - GEN A1 - Sidorenko, Alexander A1 - Tokarev, Igor A1 - Krenek, Radim A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Stamm, Manfred T1 - XPEEM investigations of 2D hierachical array of Ni nanorods using block copolymer templates Y1 - 2004 ER - TY - JOUR A1 - Schmeißer, Dieter T1 - Cooper minimum observed for the Pr5s and Pr5p states in Pr2O3 Y1 - 2004 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Lupina, Grzegorz A1 - Müssig, Hans-Joachim T1 - High reactivity of Pr on oxide covered 4H-SiC T2 - Bessy annual report 2003 Y1 - 2004 SP - 408 EP - 409 PB - Bessy CY - Berlin ER - TY - JOUR A1 - Schmeißer, Dieter T1 - Interface reactivity of Pr and SiO2 at 4H-SiC(0001) N2 - We use photoelectron spectroscopy to characterize the reactivity of Pr evaporated on SiO2 covered 4H-SiC substrates. We analyze the Si2p, C1s, and O1s core levels and find that Pr reacts at RT with the SiO2 layer to form Pr-silicate. In addition also Pr-silizide is formed as well as Pr-carbides. While the latter are formed as reaction intermediates after Pr evaporation, the Pr-silicate layer is formed upon annealing to 300 °C and is stable up to 800 °C. KW - Photoelectron spectroscopy KW - 4H-SiC KW - Interface reactivity KW - High-k dielectric layer Y1 - 2005 ER - TY - JOUR A1 - Schmeißer, Dieter T1 - Pr4f occupancy and origin of gap states at the Pr2O3 / Si (001) interface Y1 - 2005 ER - TY - JOUR A1 - Seifarth, Olaf A1 - Burkov, Yevgen A1 - Goryachko, Andriy A1 - Schmeißer, Dieter A1 - Sydorenko, Alexander A1 - Krenek, Radim A1 - Stamm, Manfred T1 - Photoelectron spectroscopy and microscopy on Cr nano particels embedded into block copolymers Y1 - 2005 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Pr-silicate formation on SiO2 covered 3C-SiC(111) T2 - Physics of semiconductors, 27th International Conference on the Physics of Semiconductors Y1 - 2005 SN - 0-7354-0257-4 SP - 75 EP - 76 PB - AIP, American Inst. of Physics CY - New York, NY ER - TY - JOUR A1 - Wehner, Stefan A1 - Schmeißer, Dieter A1 - Hoffmann, Patrick T1 - Spatiotemporal patterns of external noise-induced transitions in a bistable reaction-diffusion system : Photoelectron Emission Microscopy experiments and modeling Y1 - 2005 ER - TY - GEN A1 - Lupina, Grzegorz A1 - Schroeder, Thomas A1 - Dabrowski, Jarek Marek A1 - Schmeißer, Dieter A1 - Hoffmann, Patrick T1 - Praseodymium silicate layers with atomically abrupt interface on Si(100) T2 - Applied Physics Letters Y1 - 2005 SN - 0003-6951 VL - 87 IS - 5 ER - TY - JOUR A1 - Goryachko, Andriy A1 - Yeromenko, Y. A1 - Henkel, Karsten A1 - Wollweber, Jürgen A1 - Schmeißer, Dieter T1 - The Si(001)/C2H2 interaction to form a buffer layer for 3C-SiC growth JF - Physica status solidi / A N2 - The intial stages of Si(001) interaction with C2H2 were investigated with XPS and surface profilometry. The carbon enriched layer serves as a buffer between Si substrate and the 3C-SiC film aimed at growing on Si(001). Such parameters as substrate temperature and process duration come into a complicated interplay of C deposition, its reaction with Si and out-diffusion of the later from the substrate. Three distinct regimes, namely graphite dominated, carbide dominated and roughness dominated are found to result from this interplay. Y1 - 2004 SN - 0031-8965 VL - 201 IS - 2 SP - 245 EP - 248 ER - TY - JOUR A1 - Goryachko, Andriy A1 - Paloumpa, Ioanna A1 - Beuckert, Guido A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - The Interaction of Pr2O3 with 4H-SiC(0001)surface JF - Physica status solidi / C N2 - Praseodymium oxide (Pr2O3) as a hetero-oxide on SiC(0001) represents a promising semiconductor / high-K dielectric material combination. We prepared thin films (<3 nm) of Pr2O3 on 4H-SiC(0001) surfaces by a wet chemical process involving aqueous solutions of Pr(NO3)3. Synchrotron radiation photoelectron spectroscopy (SR-PES) is used to study the chemical composition of these films after deposition and annealing in 300-900 %B0C range. The Si2p and C1s core level emissions are analysed in detail and reveal that praseodymium-silicate is formed at the interface. Our data are compared to corresponding studies of the Pr2O3 interaction with Si(001) surfaces. Y1 - 2004 SN - 1610-1634 VL - 1 IS - 2 SP - 265 EP - 268 ER - TY - GEN A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - A polymer high-k dielectric insulator for organic field effect Transistors T2 - Journal of Applied Physics Y1 - 2005 SN - 0021-8979 VL - 98 IS - 5 SP - S. 056104 ER - TY - GEN A1 - Henkel, Karsten A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Grenzflächenoptimierung für funktionale Dünnschichtsysteme: Oxide und Polymere T2 - Forum der Forschung Y1 - 2005 SN - 0947-6989 VL - 9 IS - 18 SP - 49 EP - 56 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Himpsel, Franz J. A1 - Denlinger, Jonathan D. A1 - Ederer, David L. T1 - Resonante Photoemission an der Cu2p Kante von Cu und CuO T2 - Forum der Forschung Y1 - 2005 SN - 0947-6989 VL - 9 IS - 18 SP - 57 EP - 62 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Hoffmann, Patrick A1 - Beuckert, Guido ED - Zschech, Ehrenfried ED - Whelan, Caroline T1 - Electronic Properties of the Interface Formed by Pr2o3 Growth on Si(001), Si(111)and SiC(0001) Surfaces Y1 - 2005 ER - TY - JOUR A1 - Müller, Klaus A1 - Scheer, R. A1 - Schmeißer, Dieter A1 - Burkov, Yevgen T1 - Preparation of stoichiometric CuInS2-Surfaces JF - Thin Solid Films KW - preparation Y1 - 2004 SN - 0040-6090 VL - 451–452 SP - 120 EP - 123 ER - TY - JOUR A1 - Müller, Klaus A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - Photo-Emission-Electron-Microscopy for Characterization of an Operating Organic Electronic Device KW - photo-emission-electron-microscopy Y1 - 2006 ER - TY - GEN A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Improvement of Nitrogen Incorporation into Oxynitrides on 4H-SiC(0001) T2 - Nuclear Instruments and Methods in Physics Research, Section B : Beam with Materials and Atoms Y1 - 2006 VL - 246 IS - 1 SP - 85 EP - 89 ER - TY - CHAP A1 - Schmeißer, Dieter T1 - Chemical Bonding in Low-k Dielectric Materials for Interconnect Isolation: Characterization using XAS and EELS KW - XAS KW - EELS KW - low-k Materials Y1 - 2006 ER - TY - JOUR A1 - Schmeißer, Dieter T1 - The Consequences of anisotropic Diffusion and Noise: PEEM at the CO Oxidation Reaction on Stepped Ir(111) Surfaces KW - Ir(111) Surfaces Y1 - 2006 ER - TY - JOUR A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter A1 - Henkel, Karsten T1 - Organic thin film transistors with polymer high-k dielectric insulator KW - high-k Y1 - 2006 ER - TY - GEN A1 - Seifarth, Olaf A1 - Schmeißer, Dieter A1 - Stamm, Manfred A1 - Krenek, Radim A1 - Sydorenko, Alexander T1 - Electron spectroscopy and microscopy on chromium oxide nanowires on templated block copolymers T2 - Progress in Solid State Chemistry KW - copolymers KW - nanowires Y1 - 2006 SN - 0079-6786 VL - 34 IS - 2-4 SP - 111 EP - 119 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried A1 - Stegmann, Heiko A1 - Himpsel, Franz J. A1 - Denlinger, Jonathan D. ED - Tsui, Ting Y. T1 - Characterization of chemical bonding in low-k dielectric materials for interconnect isolation: A XAS and EELS Study T2 - Materials, technology and reliability of low-k dielectrics and copper interconnects, symposium held April 18 - 21, 2006, San Francisco, California Y1 - 2006 SN - 978-1-55899-870-5 SP - 55 EP - 62 PB - Materials Research Society CY - Warrendale, Pa. ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Zheng, Fan A1 - Perez-Dieste, Virginia T1 - Silicate Formation at the Interface of Pr-Oxide as a High-K Dielectric and Si(001) surfaces Y1 - 2006 ER - TY - CHAP A1 - Domaradzki, Jarosław A1 - Schmeißer, Dieter A1 - Kaczmarek, Danuta A1 - Beuckert, Guido A1 - Prociow, E. L. A1 - Borkowska, Angnieszka A1 - Kudrawiec, Robert A1 - Misiewicz, J. T1 - Characterization of Nanocrystalline TiO2 - HfO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering Y1 - 2006 ER - TY - JOUR A1 - Domaradzki, Jarosław A1 - Kaczmarek, Danuta A1 - Schmeißer, Dieter A1 - Beuckert, Guido T1 - Microstructure and Optical Properties of TiO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering Y1 - 2006 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Zheng, Fan A1 - Himpsel, Franz J. A1 - Engelmann, Hans-Jürgen A1 - Zschech, Ehrenfried T1 - Silicate Formation at the Interface of High-k Dielectrics and Si(001) Surfaces Y1 - 2006 ER - TY - CHAP A1 - Zschech, Ehrenfried A1 - Stegmann, Heiko A1 - Schmeißer, Dieter A1 - Hoffmann, Patrick T1 - Chemical Bonding, Permittivity, and Elastic Properties in Locally Modified Organosilicate Glass Y1 - 2006 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Wehner, Stefan A1 - Schmeißer, Dieter T1 - Noise-Induced Spatiotemporal Patterns in a Bistable Reaction-Diffusion System: Photoelectron Emission Microscopy experiments and Modeling of the CO Oxidation Reaction on Ir(111) Y1 - 2006 ER - TY - JOUR A1 - Schmitt, Andrew L. A1 - Bierman, Matthew J. A1 - Schmeißer, Dieter A1 - Himpsel, Franz J. A1 - Jin, Song T1 - Synthesis and Properties of Single-Crystal FeSi Nanowires Y1 - 2006 ER - TY - JOUR A1 - Schmitt, Andrew L. A1 - Zhu, Lei A1 - Schmeißer, Dieter A1 - Himpsel, Franz J. A1 - Jin, Song T1 - Metallic Single-Crystal CoSi Nanowires via Chemical Vapor Deposition of Single-Source Precursor Y1 - 2006 ER - TY - JOUR A1 - Lupina, Grzegorz A1 - Schroeder, Thomas A1 - Schmeißer, Dieter A1 - Dabrowski, Jarek Marek T1 - Praseodymium Silicate Films on Si(100) for Gate Dielectric Applications: Physical and Electrical Characterization Y1 - 2006 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Zheng, Fan T1 - X-ray Absorption and Photoemission Spectroscopy of 3C- and 4H-SiC Y1 - 2006 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Sohal, Rakesh A1 - Schmeißer, Dieter T1 - Resonant photoemission at the oxygen K edge as a tool to study the electronic properties of defects at SiO2/Si and SiO2/SiC interfaces Y1 - 2006 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Silicate Formation at the Interface of Hf-Oxide and Pr-Oxide as a High-k Dielectric and Si(001) surfaces Y1 - 2006 ER - TY - CHAP A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schmeißer, Dieter T1 - Al-Oxynitrides as a Buffer Layer for Pr2O3/SiC Interfaces Y1 - 2006 ER - TY - JOUR A1 - Torche, Mohamed A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - The interaction of Al, Ag, Au and Ti to Pr2O3 thin film dielectrics KW - thin films KW - Pr2O3 Y1 - 2006 ER - TY - GEN A1 - Seifarth, Olaf A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Stamm, Manfred T1 - Metallic nickel nanorod arrays embedded into ordered block copolymer templates T2 - Thin Solid Films Y1 - 2007 SN - 0040-6090 VL - 515 IS - 16 SP - 6552 EP - 6556 ER - TY - GEN A1 - Schroeder, Thomas A1 - Lupina, Grzegorz A1 - Seifarth, Olaf A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2-xO3 (x=0-2) dielectrics on TiN for dynamic random access memory applications T2 - Journal of Applied Physics Y1 - 2007 SN - 0021-8979 VL - 102 IS - 1 SP - 014103 ER - TY - JOUR A1 - Henkel, Karsten A1 - Sohal, Rakesh A1 - Schmeißer, Dieter A1 - Schwiertz, Carola A1 - Burkov, Yevgen A1 - Torche, Mohamed T1 - Al-oxynitride buffer layer facilities for PrOx/SiC interfaces Y1 - 2007 ER - TY - JOUR A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Organic field effect transistors with ferroelectric hysteresis Y1 - 2007 ER - TY - JOUR A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Schmeißer, Dieter T1 - No interfacial layer for PEDOT electrodes on PVDF: Characterization of reactions at the interface P(VDF/TrFE)/Al and P(VDF/TrFE)/PEDOT:PSS Y1 - 2007 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Bierman, Matthew J. T1 - Ferromagnetic Semiconducting EuO Nanorods Y1 - 2007 ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Wehner, Stefan A1 - Hoffmann, Patrick A1 - Brand, Helmut R. A1 - Küppers, Jürgen ED - Descalzi, Orazio T1 - Influence of the Substrate on the Pattern Formation of a Surface Reaction T2 - Nonequilibrium statistical mechanics and nonlinear physics, XV Conference on Nonequilibrium Statistical Mechanics and Nonlinear Physics, Mar del Plata, Argentina, 4 - 8 December 2006 Y1 - 2007 SN - 978-0-7354-0421-2 SP - 121 EP - 126 PB - AIP Publishing CY - Melville, New York ER - TY - JOUR A1 - Müller, Sebastian A1 - Seibold, Götz A1 - Schmeißer, Dieter ED - Vierhaus, Heinrich Theodor T1 - Preparation and Characterization of TiO2 Thin Films and Cr and Co Doped TiO2 Thin Films Y1 - 2007 ER - TY - GEN A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Study of Bulk and Interface Defects in Silicon Oxide with X-ray Absorption Spectroscopy T2 - Materials Science and Engineering : B Y1 - 2007 SN - 0921-5107 VL - 144 IS - 1-3 SP - 23 EP - 26 ER - TY - JOUR A1 - Beck, Romuald B. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Bieniek, Tomasz A1 - Jakubowski, Andrzej T1 - Composition and Electrical Properties of Ultra-Thin SiOxNy Layers Formed by rf Plasma Nitrogen Implantation/Plasma Oxidation Processes Y1 - 2007 ER - TY - JOUR A1 - Mroczynski, Robert A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - The Influence of Annealing (900 Grad C) of Ultra-Thin PECVD Silicon Oxynitride Layers Y1 - 2007 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Mroczynski, Robert A1 - Bieniek, Tomasz T1 - Comparison of Composition of Ultra-Thin Silicon Oxynitride Layers´ fabricated by PECVD and Ultrashallow rf Plasma Ion Implantation Y1 - 2007 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Burkov, Yevgen A1 - Paloumpa, Ioanna A1 - Mandal, Dipankar A1 - Henkel, Karsten T1 - Microscopic and Spectroscopic Characterization of Interfaces and Dielectric Layers for OFET Devices Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Karavaev, Konstantin T1 - Al-Oxynitride Interfacial Layer Investigations for PrxOy on SiC and Si Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Domaradzki, Jarosław A1 - Kaczmarek, Danuta A1 - Borkowska, Angnieszka A1 - Müller, Sebastian T1 - Influence of Annealing on the Structure and Stoichiometry of Europium-Doped Titanium Dioxide Thin Films Y1 - 2008 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Müller, S. A1 - Seifarth, Olaf A1 - Dabrowski, Jarek Marek A1 - Müssig, Hans-Joachim A1 - Schroeder, Thomas T1 - On the band gaps and electronic structure of thin single crystalline praseodymium oxide layers on Si(111) T2 - Journal of vacuum science & technology / B KW - band gabs KW - electronic structure KW - oxide layers Y1 - 2009 VL - 27 IS - 1 SP - 271 EP - 276 ER - TY - GEN A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Sohal, Rakesh A1 - Karavaev, Konstantin A1 - Burkov, Yevgen A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Pr-O-Al-N dielectrics for metal insulator semiconductor stacks KW - semiconductor KW - dielectric Y1 - 2011 ER - TY - GEN A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Spin coated organic ferroelectric films for non volatile memories KW - organic KW - ferroelectric Y1 - 2011 ER - TY - GEN A1 - Seifarth, Olaf A1 - Schubert, Markus Andreas A1 - Giussani, A. A1 - Klenov, D. O. A1 - Schmeißer, Dieter A1 - Schroeder, Thomas T1 - Single crystalline Pr2-xYxO3 (x=0-2)dielectrics on Si with tailored electronic and crystallographic structure KW - crystalline KW - dielectric KW - structure Y1 - 2010 SN - 1089-7550 VL - 108 IS - 10 SP - 103709 ER - TY - GEN A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Band gab determination of P(VDF-TrFE) copolymer film by electron energy loss spectroscopy Y1 - 2010 ER - TY - GEN A1 - Sioncke, Sonja A1 - Lin, Hang-Chu A1 - Brammertz, Guy A1 - Delabie, Annelies A1 - Conard, Thierry A1 - Franquet, Alexis A1 - Caymax, Matty A1 - Meuris, Marc A1 - Schmeißer, Dieter A1 - Tallarida, Massimo T1 - ALD on high mobility channels: engineering the proper gate stack passivation T2 - ECS Transactions KW - ALD KW - engineering KW - gate stack KW - passivation Y1 - 2010 SN - 1938-5862 VL - 33 IS - 2 SP - 9 EP - 23 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - In situ studies of the atomic layer deposition of thin HfO2 dielectrics by ultra high vacuum atomic force microscope KW - in situ KW - atomic layer deposition KW - dielectric KW - microscope Y1 - 2010 ER - TY - GEN A1 - Ho, Paul S. A1 - Zschech, Ehrenfried A1 - Schmeißer, Dieter A1 - Meyer, Moritz Andreas A1 - Huebner, Rene A1 - Hauschildt, Meike A1 - Zhang, Lijuan A1 - Gall, Martin A1 - Kraatz, Matthias T1 - Scaling effects on microstructure and reliability for cu interconnects KW - scaling KW - microstructure KW - interconnects Y1 - 2010 ER - TY - GEN A1 - Wehner, Stefan A1 - Karpitschka, Stefan A1 - Burkov, Yevgen A1 - Schmeißer, Dieter A1 - Küppers, Jürgen A1 - Brand, Helmut R. T1 - Stochastic aspects of pattern formation during the catalytic oxidation of CO on Pd(111) KW - stochastic KW - pattern KW - catalytic oxidation Y1 - 2010 ER - TY - GEN A1 - Henkel, Karsten A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Buffer layer incestigaions on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene] T2 - IOP conference series : Materials Science and Engineering KW - MFIS capacitors KW - ferroelectric Y1 - 2010 SN - 1757-899X VL - 8 IS - 1 SP - 012036 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Bergholz, Matthias A1 - Tallarida, Massimo T1 - The band gab and band offset in ultrathin oxide-semiconductor heterostructures KW - band gab KW - offset KW - ultrathin KW - heterostructures Y1 - 2010 ER - TY - CHAP A1 - Müller, Sebastian A1 - Schmeißer, Dieter T1 - Synchrotron radiation spectroscopy studies of ultrathin chromium films on titanium dioxide T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - synchrotron KW - radiation KW - spectroscopy KW - ultrathin KW - titanium KW - chromium Y1 - 2009 SN - 978-1-4244-4303-1 SP - 64 EP - 68 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - atomic layer deposition KW - microsystems KW - high-k dielectrics Y1 - 2009 SN - 978-1-4244-4303-1 SP - 47 EP - 51 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Klocek, Jolanta A1 - Friedrich, Daniel A1 - Schmeißer, Dieter A1 - Hecker, Michael A1 - Zschech, Ehrenfried T1 - The stability of C60 and its derivatives upon handling in microsystems technologies T2 - International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany KW - c60 KW - derivatices Y1 - 2009 SN - 978-1-4244-4303-1 SP - 43 EP - 46 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Kolanek, Krzysztof A1 - Schmeißer, Dieter T1 - Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films KW - in-situ2 KW - ALD KW - nano-functional Y1 - 2009 ER - TY - CHAP A1 - Schwiertz, Carola A1 - Henkel, Karsten A1 - Blei, S. A1 - Heidenreich, R. A1 - Schmeißer, Dieter T1 - Nachweis von Aerosolen (<1µm) mit Schwingquarzimpedanzspektroskopie KW - Schwingquarzimpedanzspektroskopie Y1 - 2009 ER - TY - GEN A1 - Zschech, Ehrenfried A1 - Ho, O. S. A1 - Schmeißer, Dieter A1 - Meyer, Moritz Andreas A1 - Vairagar, A. V. A1 - Schneider, G. A1 - Hauschildt, Meike A1 - Kraatz, Matthias A1 - Sukharev, V. T1 - Geometry and Microstructure Effect on EM-Induced Copper Interconnect Degradation T2 - IEEE Transactions on Device and Materials Reliability KW - Microstructure Y1 - 2009 UR - http://ieeexplore.ieee.org/xpls/icp.jsp?arnumber=4796372 SN - 1530-4388 VL - 9 IS - 1 SP - 20 EP - 30 ER - TY - CHAP A1 - Heim, S. A1 - Friedrich, Daniel A1 - Guttmann, P. A1 - Rehbein, S. A1 - Chumakov, Dmytro A1 - Ritz, Y. A1 - Schneider, G. A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - Dynamical X-ray Microscopy Study of Stress-Induced Voiding in Cu Interconnects KW - x-ray KW - Microscopy KW - Interconnects Y1 - 2009 UR - http://link.aip.org/link/?APCPCS/1143/20/1 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Tallarida, Massimo T1 - Interface Reactions in Ultrathin Functional Dielectric Films KW - ultrathin KW - dielectric Y1 - 2009 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Tallarida, Massimo A1 - Henkel, Karsten A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Chumakov, Dmytro A1 - Zschech, Ehrenfried T1 - Characterization of oxidic and organic materials with synchrotron radiation based XPS and XAS KW - oxidic KW - organic KW - materials KW - synchrotron radiation KW - XPS KW - XAS Y1 - 2009 ER - TY - GEN A1 - Lazareva, I. A1 - Koval, Yuri A1 - Müller, P. A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Interface screening and imprint in pol(vinylidene fluoride/trifluoroethylene) ferroelectric field effect transistors KW - interface KW - screening KW - transistors Y1 - 2009 ER - TY - CHAP A1 - Müller, Klaus A1 - Burkov, Yevgen A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Goryachko, Andriy A1 - Schmeißer, Dieter ED - Wöll, Christof T1 - Microscopic and spectroscopic characterization of interfaces and dielectric layers for OFET devices T2 - Organic Electronics : structural and Electronic Properties of OFETs KW - microscopic KW - spectrocsopic KW - dielectric Y1 - 2009 SN - 978-3-527-40810-8 SP - 445 EP - 468 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - HfO2/Si interface formation in atomic layer deposition films: an in situ investigation KW - atomic layer deposition Y1 - 2009 ER - TY - GEN A1 - Henkel, Karsten A1 - Lazareva, I. A1 - Mandal, Dipankar A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Koval, Yuri A1 - Müller, P. A1 - Schmeißer, Dieter T1 - Electrical investigations on metal/ferroelectric/insulator/semiconductor structures using Poly[vinylidene fluoride trifluoroethylene] as ferroelectric layer for organic nonvolatile memory applications KW - metal KW - frerroelectric KW - insulator KW - semiconductor Y1 - 2009 ER - TY - GEN A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Karavaev, Konstantin A1 - Torche, Mohamed A1 - Schwiertz, Carola A1 - Schmeißer, Dieter T1 - Optimization of the AION buffer layer for PrxOy/Si stacks KW - AION buffer Y1 - 2009 ER - TY - JOUR A1 - Bieniek, Tomasz A1 - Beck, Romuald B. A1 - Jakubowski, Andrzej A1 - Konarski, Piotr A1 - Cwil, M. A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation KW - ultrashallow KW - oxynitride Y1 - 2008 ER - TY - GEN A1 - Zschech, Ehrenfried A1 - Geisler, Holm A1 - Rinderknecht, Jochen A1 - Schneider, Gerd A1 - Spolenak, Ralph A1 - Schmeißer, Dieter T1 - Nano-scale analysis using synchrotron-radiation: Applications in the semiconductor industry T2 - Current nanoscience KW - synchrotron-radiation KW - semiconductor Y1 - 2008 SN - 1573-4137 VL - 4 IS - 3 SP - 256 EP - 266 ER - TY - GEN A1 - Zagorodniy, Kostyantyn A1 - Chumakov, Dmytro A1 - Täschner, Christine A1 - Lukowiak, Anna A1 - Stegmann, Heiko A1 - Schmeißer, Dieter A1 - Geisler, Holm A1 - Engelmann, Hans-Jürgen A1 - Hermann, Helmut A1 - Zschech, Ehrenfried T1 - Novel Carbon-cage based ultralow-k materials: Modelling and first experiments KW - carbon-cage KW - ultralow-k Y1 - 2008 U6 - https://doi.org/10.1109/TSM.2008.2005396 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Study of silicon/oxides interfaces by means of Si2p resonant photoemission KW - photoemission KW - Si2p Y1 - 2008 ER - TY - JOUR A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter T1 - The initial atomic layer deposition of HfO2/Si(001) as followed in situ by synchrotron radiation photoelectron spectroscopy KW - synchrotron KW - photoelectron KW - HfO2 Y1 - 2008 ER - TY - JOUR A1 - Müller, Klaus A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Ferroelectric properties of spin-coated ultrathin (down to 10nm) copolymer films KW - ferroelectric KW - spin-coated KW - copolymer Y1 - 2008 ER - TY - GEN A1 - Opel, Matthias A1 - Nielsen, Karl-Wilhelm A1 - Bauer, Sebastian A1 - Goennenwein, Sebastian T. B. A1 - Gross, Rudolf A1 - Cezar, Julio C. A1 - Schmeißer, Dieter A1 - Simon, Jürgen A1 - Mader, Werner T1 - Nanosized superparamagnetic precipitates in cobalt-doped ZnO T2 - The European Physical Journal : B KW - nanosized KW - superparamagnetic Y1 - 2008 SN - 1434-6036 VL - 63 IS - 4 SP - 437 EP - 444 ER - TY - CHAP A1 - Seifarth, Olaf A1 - Wilke, A. A1 - Walczyk, Christian A1 - Dabrowski, Jarek Marek A1 - Zaumseil, Peter A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim A1 - Schroeder, Thomas T1 - Band gap and electronic structure determination with XAS and UPS of thin Pr-oxide films on Si(111) T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - band gab KW - XAS KW - UPS KW - Si(111) Y1 - 2008 SP - 285 EP - 286 ER - TY - CHAP A1 - Henkel, Karsten A1 - Burkov, Yevgen A1 - Bergholz, Matthias A1 - Karavaev, Konstantin A1 - Sohal, Rakesh A1 - Torche, Mohamed A1 - Schmeißer, Dieter T1 - Al-Oxynitride as a buffer layer for high-k dielectrics T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - buffer layer KW - high-k KW - dielectric Y1 - 2008 SP - 161 EP - 162 ER - TY - CHAP A1 - Henkel, Karsten A1 - Mandal, Dipankar A1 - Seime, Bernd A1 - Paloumpa, Ioanna A1 - Lazareva, I. A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Electrical investigations on MFIS structures consisting P[VDF/TrFE] as ferro-electric layer for non-volatile memory applications T2 - Proceedings of 15th Workshop on Dielectrics in Microelectronics, Bad Saarow, 23 - 25 June 2008, Bad Saarow (Berlin) KW - MFIS, P[VDF/TrFE] KW - ferroelectric KW - non-volatile Y1 - 2008 SP - 159 EP - 160 ER - TY - JOUR A1 - Zimina, A. A1 - Batchelor, David R. A1 - Eisebitt, S. A1 - Schmeißer, Dieter A1 - Shukalov, A. A1 - Eberhardt, W. T1 - Soft X-ray emission electron microscopy: chemical state microscopy from interface and bulk KW - x-ray KW - microscopy KW - interface KW - bulk Y1 - 2008 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Seibold, Götz A1 - Reif, Jürgen T1 - Nano-scaled Dielectric Barriers (NanoDieB) for CMOS compatible Si-technologies JF - Forum der Forschung KW - nano-scaled KW - dielectric KW - CMOS Y1 - 2006 SN - 0947-6989 IS - 19 SP - 131 EP - 136 ER - TY - JOUR A1 - Müller, Sebastian A1 - Schmeißer, Dieter T1 - Properties of Cr deposited on TiO2 thin films KW - cr KW - TiO2 Y1 - 2008 ER - TY - JOUR A1 - Sohal, Rakesh A1 - Lupina, Grzegorz A1 - Lippert, Gunther A1 - Wenger, Christian A1 - Seifarth, Olaf A1 - Schröder, Thomas A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Interface chemistry of high-k PrxAl2-xO3 (x=2-0) dielectrics on TiN for dynamic random access memory applications KW - high-k KW - dielectric KW - random Y1 - 2008 ER - TY - CHAP A1 - Tallarida, Massimo A1 - Karavaev, Konstantin A1 - Schmeißer, Dieter A1 - Zschech, Ehrenfried T1 - HfO2 ALD-growth studied by in situ photoemission T2 - Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008 KW - ald KW - photoemission Y1 - 2008 SP - 289 EP - 290 ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - Elshocht, Sven van A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum T2 - Applied physics letters Y1 - 2011 U6 - https://doi.org/10.1063/1.3615784 SN - 1077-3118 VL - 99 IS - 4 SP - 042906-1 EP - 042906-3 ER - TY - GEN A1 - Schwarzkopf, Jutta A1 - Dirsyte, R. A1 - Devi, A. A1 - Kwasniewski, A. A1 - Schmidbauer, M. A1 - Wagner, Gerd A1 - Michling, Marcel A1 - Schmeißer, Dieter A1 - Fornari, Robert T1 - Influence of Na on the structure of Bi4Ti3O12 films deposited by liquid-delivery spin MOCVD T2 - Thin solid films Y1 - 2011 SN - 0040-6090 VL - 519 IS - 17 SP - 5754 EP - 5759 ER - TY - GEN A1 - Tallarida, Massimo A1 - Weisheit, Martin A1 - Kolanek, Krzysztof A1 - Michling, Marcel A1 - Engelmann, Hans-Jürgen A1 - Schmeißer, Dieter T1 - Atomic layer deposition of nanolaminate oxide films on Si T2 - Journal of Nanoparticle Research Y1 - 2011 U6 - https://doi.org/10.1007/s11051-011-0319-x VL - 13 IS - 11 SP - 5975 EP - 5983 ER - TY - CHAP A1 - Wyrodek, Jakub A1 - Tallarida, Massimo A1 - Weisheit, Martin A1 - Schmeißer, Dieter T1 - Determination of interfacial layers in high-k nanomaterials by ADXPS measurements Y1 - 2010 ER - TY - CHAP A1 - Starzyk, Łukasz A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition Y1 - 2010 ER - TY - GEN A1 - Schmeißer, Dieter A1 - Schmidt, Stephan A1 - Seibold, Götz A1 - Cherkashinin, Gennady A1 - Jaegermann, Wolfram T1 - Localized Gap States in LiCoO2 and their Influence on the Transport Properties in Li-Ion Batteries T2 - ECS Transactions Y1 - 2010 SN - 1938-5862 VL - 25 IS - 35 SP - 37 EP - 45 ER -