TY - GEN A1 - Popovici, Mihaela A1 - Delabie, Annelies A1 - Adelmann, Christoph A1 - Meersschaut, Johan A1 - Franquet, Alexis A1 - Tallarida, Massimo A1 - Berg, Jaap van den A1 - Richard, Olivier A1 - Swerts, Johan A1 - Tomida, Kazuyuki A1 - Kim, Min-Soo A1 - Tielens, Hilde A1 - Bender, Hugo A1 - Conard, Thierry A1 - Jurczak, Malgorzata A1 - Elshocht, Sven van A1 - Schmeißer, Dieter T1 - Understanding the Interface Reactions of Rutile TiO2 Grown by Atomic Layer Deposition on Oxidized Ruthenium T2 - ECS Journal of Solid State Science and Technology N2 - The atomic layer deposition of titanium oxide TiO2 on ruthenium and oxidized ruthenium with titanium methoxide as metal precursor and H2O and O3 as oxidant was investigated by Rutherford backscattering (RBS) and time of flight secondary ion mass spectrometry (TOFSIMS). An ultra-thin layer of TiO2 deposited a priori with H2O plays the role of protection of Ru(Ox) substrates against etching by O3. Information about thin films (∼3 nm) interfacial reactions, thickness and structure was brought by Medium Energy Ion Scattering Spectroscopy (MEIS) and X-ray absorption spectroscopy (XAS) measurements. The growth enhancements observed in the first stages of the deposition depends on the pre-treatment (pre-oxidation, H2O based interlayer thickness) of the Ru substrate. Thick films (∼14 nm) were analyzed by transmission electron microscopy (TEM) and X-ray diffraction (XRD). The as deposited TiO2 films are crystalline with rutile structure, as resulted from structural analyzes. However, the presence of small amounts of anatase was detected by soft X-ray absorption spectroscopy (XAS) and is strongly influenced by the surface pre-treatment of the Ru substrate. The electrical properties (equivalent oxide thickness and leakage current density) correlate with a different rutile/anatase ratio present in the films. KW - TiO2 KW - atomic layer deposition KW - rutile KW - RuOx KW - Rutherford backscattering (RBS) KW - time of flight secondary ion mass spectrometry (TOFSIMS) KW - Medium Energy Ion Scattering Spectroscopy (MEIS) KW - X-Ray absorption spectroscopy KW - transmission electron microscopy (TEM) KW - X-ray diffraction (XRD) Y1 - 2013 U6 - https://doi.org/10.1149/2.035301jss SN - 2162-8769 VL - 2 IS - 1 SP - N23 EP - N27 ER - TY - GEN A1 - Fischer, Christian B. A1 - Rohrbeck, Magdalena A1 - Wehner, Stefan A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Interlayer formation of diamond-like carbon coatings on industrial polyethylene: Thickness dependent surface characterization by SEM, AFM and NEXAFS T2 - Applied Surface Science N2 - The coating of materials with diamond-like carbon (DLC) is a very common way to change and improve their basic characteristics. Although DLC is used on several substrates, the chemical and physical properties throughout the coating process on plastics are yet sparsely investigated. Two types of protective coatings one sp3-enriched (robust, r-type) and one with more sp2-centers (flexible, f-type) have been realized on polyethylene by PECVD deposition. SEM and AFM analysis of coated samples of DLC types revealed diverse surface topographies on different scales and images appeared even differently smoothed by the carbonaceous deposits. Grains of both DLC types are platelet-shaped and nearly double in size for the robust type indicating fundamental differences in the epitaxial DLC growth. NEXAFS spectroscopy showed significant details of carbon centers in chemically different neighborhood displaying a characteristic fingerprint behavior. Comparison of deposition models revealed a mechanism of interlayer formation which is discussed in detail. Interlayer formation is clearly the appropriate explanation of the process for the current carbon deposition between these two unequal materials. An improved understanding of hard DLC and soft polyethylene assembly is given in the presented work. KW - Diamond-like carbon KW - Interlayer formation KW - Polyethylene KW - Surface characterization KW - Coatings KW - Plastics Y1 - 2013 U6 - https://doi.org/10.1016/j.apsusc.2013.01.210 SN - 0169-4332 IS - 271 SP - 381 EP - 389 ER - TY - GEN A1 - Richter, Matthias A1 - Paloumpa, Ioanna A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Multiple Auger Decay At Resonant Photo-Excitation In Carbon Thin Films T2 - ECS Transactions N2 - We use resonant photoemission at the C1s edge to study the electronic structure of HOPG, graphene flakes and monolayer graphene. We find remarkable differences in the profile of the Auger decay channels, which we attribute to an additional multiple-Auger with a three-hole final state. A prerequisite for the appearance of this decay mechanism is the existence of localized excitonic states, which cause the appearance of the multiple Auger decay. We use those effects to identify the existence and the quantity of such defect states within the π*-band regime in carbon thin films, because the intensity of the three-hole Auger decay is varying with the defect density of the carbon films. We find that the appearance of the multiple Auger decay is different for multilayer and monolayer graphene. In particular the interaction of impurities leads to broadening of the C1s core levels. The three-hole Auger decay spectroscopy is a new method to detect such contaminations with a high sensitivity. KW - resonant photoelectron spectroscopy KW - graphene KW - HOPG KW - X-ray absorption spectroscopy (XAS) KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2013 U6 - https://doi.org/10.1149/05020.0009ecst VL - 50 IS - 20 SP - 9 EP - 21 ER - TY - GEN A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Spin states in Co-PI catalysts T2 - Applied Physics Letters N2 - Cobalt based oxygen evolution catalysts (Co-PI, PI=electrodeposited from pH 7 phosphate) are studied by resonant photoemission spectroscopy at the Co L3 and O1s edge. For the individual Co3d states, we determine their configuration, their spin, and their energy level relative to the Fermi energy. We identify the Co divalent high spin state and the trivalent low spin state. In addition, we also find the corresponding oxygen-to-metal charge transfer states. We attribute the trivalent charge transfer state to be the active state for the oxygen evolution reaction. KW - resonant photoelectron spectroscopy KW - CoPI KW - oxygen evolution reaction Y1 - 2013 U6 - https://doi.org/10.1063/1.4811748 SN - 1077-3118 IS - 102 SP - 253904-1 EP - 253904-4 ER - TY - GEN A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - The Co2p Oxidation State In Co-PI Catalysts T2 - ECS Transactions N2 - The electronic structure of Cobalt based catalysts used for photocatalytic water splitting in solar cells is analyzed using synchrotron radiation photoelectron spectroscopy. The catalyst films are prepared by electrochemical deposition. We employ a X-ray photoelectron spectroscopy study to analyze the Co2p and O1s core levels,absorption edges and valence bands. We discuss our resonant data in terms of the partial density of states of the valence and conduction band. We find a difference in the Co oxidation state as a function of film thickness (deposited charge). From the relative amount of Co, O, K and P we favor the molecular cobaltate cluster-like structure as the structural motif of the Co-PI catalyst. KW - X-Ray photoelectron spectroscopy (XPS) KW - X-Ray absorption spectroscopy (XAS) KW - CoPI KW - oxygene evolution KW - water oxydation Y1 - 2013 U6 - https://doi.org/10.1149/05049.0113ecst VL - 50 IS - 49 SP - 113 EP - 126 ER - TY - GEN A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - In situALD experiments with synchrotron radiation photoelectron spectroscopy T2 - Semiconductor Science and Technology N2 - In this contribution, we describe some features of atomic layer deposition (ALD) investigated by means of synchrotron radiation photoelemission spectroscopy (SR-PES). In particular, we show how the surface sensitivity of SR-PES combined with the in situ nature of our investigations can point out interactions between the substrate and ALD precursors. We observed changes on all substrates investigated, included Si, GaAs, Ru and their surface oxides. These interactions are extremely important during the first ALD cycles and induce modifications in the substrate, which might lead to its functionality enhancement. KW - Atomic layer deposition (ALD) KW - in situ KW - photoelectron spectroscopy Y1 - 2012 U6 - https://doi.org/10.1088/0268-1242/27/7/074010 SN - 1361-6641 VL - 27 IS - 7 SP - 074010 ER - TY - GEN A1 - Schmidt, Stephan A1 - Schmeißer, Dieter T1 - Electronic structure of cobalt–nickel mixed oxides T2 - Solid State Ionics N2 - We investigate the electronic structure of cobalt–nickel mixed oxides by means of SR-based electron spectroscopy. We vary the Co–Ni content systematically and find that the most significant changes in the spectroscopic data occur at a mixing ratio of 30/70. We analyze the electronic structure of this material in detail and we are able to distinguish between pure covalent contributions, which cause a band gap of about 6 eV and empty defect states, whichfill the band gap almost completely. These defects are associated with the formation of 3d7L charge transfer states. These are correlated defect states and are identified by resonant photo-emission spectroscopy. KW - Transition metals KW - Oxides KW - Resonant photoemission KW - X-ray absorption spectroscopy Y1 - 2012 U6 - https://doi.org/10.1016/j.ssi.2012.06.009 SN - 1872-7689 IS - 225 SP - 737 EP - 741 ER - TY - GEN A1 - Mandal, Dipankar A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - The effect of X-ray photoelectron spectroscopy measurement on P(VDF-TrFE) copolymer thin films T2 - Applied Surface Science N2 - The impact of prolonged X-ray irradiation during X-ray photoelectron spectroscopy (XPS) measurement was investigated on poly(vinylidene-trifluoroethylene) (P(VDF-TrFE)) thin films. It was observed that prolonged X-ray irradiation can accelerate the crosslinking of P(VDF-TrFE) and diminish the ferroelectric phase. Fourier transform infrared spectroscopy (FT-IR) data indicate that the ferroelectric phase diminishes completely after 360 kJ of X-ray irradiation dose and it induces the paraelectric phase. In this work, the main emphasis was given to the optimization of the X-ray irradiation dose during XPS measurements to maintain the ferroelectric phase within the copolymer films. KW - P(VDF-TrFE) copolymer thin film KW - XPS measurement KW - X-ray irradiation KW - Ferroelectric to paraelectric phase transformation Y1 - 2012 U6 - https://doi.org/10.1016/j.apsusc.2012.07.144 SN - 0169-4332 SN - 1873-5584 IS - 261 SP - 209 EP - 213 ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - van Elshocht, Sven A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - GaAs clean up studied with synchrotron radiation photoemission T2 - IOP Conference Series : Materials Science and Engineering N2 - In this contribution we describe the chemical changes at the surface of GaAs upon adsorption of tri-methyl-aluminum (TMA). TMA is used to grow Al2O3 with atomic layer deposition (ALD) usually using H2O as oxygen source. Recently, it was pointed out that the adsorption of TMA on various III-V surfaces reduces the native oxide, allowing the growth of an abrupt III-V/High-K interface with reduced density of defects. Synchrotron radiation photoemission spectroscopy (SR-PES) is a powerful method to characterize surfaces and interfaces of many materials, as it is capable todetermine their chemical composition as well as the electronic properties. We performed in-situ SR-PES measurements after exposing a GaAs surface to TMA pulses at about 250°C. Upon using the possibility of tuning the incident photon energy we compared the Ga3d spectra at 41 eV, 71 eV, 91 eV and 121 eV, as well as the As3d at 71 eV and 91 eV. Finally, we show that using SR-PES allows a further understanding of the surface composition, which is usually not accessible with other techniques. KW - photoemission spectroscopy KW - atomic layer deposition KW - GaAs Y1 - 2012 U6 - https://doi.org/10.1088/1757-899X/41/1/012003 SN - 1757-899X IS - 41 SP - 012003 ER - TY - CHAP A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - The Co2p oxidation state in Co-PI catalysts T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 N1 - MA2012-02(14) SP - 1803 PB - The Electrochemical Society ER - TY - CHAP A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Multiple Auger decay at resonant photo-excitation in carbon thin films T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 UR - http://ma.ecsdl.org/content/MA2012-02/50/3509.full.pdf+html N1 - MA2012-02(50) SP - 3509 PB - The Electrochemical Society ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Richter, Matthias A1 - Tallarida, Massimo ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Intrinsic defects in TiO2 to explain resistive switching devices T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - resonant photoelectron spectroscopy KW - Auger processes KW - XPS KW - X-ray absorption spectroscopy Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch45 SP - 255 EP - 256 PB - Wiley-VCH CY - Weinheim ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Das, Suken A1 - Schmeißer, Dieter ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Control of β- and γ-Phase formation in electroactive P(VDF-HFP) films by silver nano-particle doping T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - P(VDF.HFP) KW - electroactive phase KW - nanoparticle doping KW - FTIR Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch69 SP - 640 EP - 641 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - Elshocht, Sven van A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - III-V/Oxide Interfaces Investigated with Synchrotron Radiation Photoemission Spectroscopy T2 - ECS Transactions N2 - We used synchrotron radiation photoemission spectroscopy (SR-PES) to investigate the surface of GaAs and other III-V semiconductors after tri-methyl-aluminum (TMA) pulses performed at 250{degree sign}C. We observed the removal of native oxide and the growth of Al-oxide upon measuring the As3d, Ga3d, Al2p and VB spectra. After seven TMA pulses we performed one water pulse. As3d and Ga3d peaks showed almost no lineshape change, but a decrease of intensity due to the water adsorption. The valence band shows a change in the secondary electron cut-off and the decrease of work function. We conclude that water mostly adsorbs molecularly and induces the work function decrease. The molecular absorption of water indicates that the seven TMA pulses produce a passivated surface only partially terminated with OH groups. KW - Interfaces KW - III/V KW - Synchrotron Photoemission Spectroscopy Y1 - 2013 U6 - https://doi.org/10.1149/05004.0123ecst SN - 1938-6737 VL - 50 IS - 4 SP - 123 EP - 128 ER - TY - GEN A1 - Müller, Klaus A1 - Fleige, Michael A1 - Rachow, Fabian A1 - Schmeißer, Dieter T1 - Sabatier based CO2-methanation of flue gas emitted by conventional power plants T2 - Energy Procedia N2 - The hydrogenation CO2+ 4H2 ->CH4 + 2H2O discovered by Paul Sabatier nowadays is discussed as "Power-to-approach" to utilize excess energy from renewable electricity generation. In a laboratory scale, we investigate the Sabatier process in a simulated flue gas atmosphere of conventional base load power plants. The reaction is investigated with regard to conversion rates, yield, selectivity and long-term stability. Using a catalyst based on nickel,we extract selectivities near 100% with a conversion around 85%. Beside the influence of oxygen, we investigate further typical contaminations like NO2 and SO2. KW - Power to gas KW - CO2 -Methanation KW - Sabatier-reaction KW - flue gas Y1 - 2013 U6 - https://doi.org/10.1016/j.egypro.2013.08.028 SN - 1876-6102 VL - 40 SP - 240 EP - 248 ER - TY - CHAP A1 - Mai, Andreas A1 - Dauderstädt, Ulrike A1 - Pahner, D. A1 - Krellmann, M. A1 - Schmeißer, Dieter A1 - Wagner, M. T1 - In situ determination of laser induced degradation of micro-mirror arrays T2 - International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011 N2 - The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test. KW - micro-mirror arrays KW - laser induced degradation Y1 - 2011 SN - 978-1-4577-1651-5 U6 - https://doi.org/10.1109/STYSW.2011.6155850 SP - 84 EP - 88 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Barreca, Davide A1 - Carraro, Giorgio A1 - Gasparotto, Alberto A1 - Maccato, Chiara A1 - Rossi, Francesca A1 - Salviati, Giancarlo A1 - Tallarida, Massimo A1 - Das, Chittaranjan A1 - Fresno, Fernando A1 - Korte, Dorota A1 - Štangar, Urška Lavrenčič A1 - Franko, Mladen A1 - Schmeißer, Dieter T1 - Surface Functionalization of Nanostructured Fe2O3 Polymorphs: From Design to Light-Activated Applications T2 - ACS Applied Materials & Interfaces N2 - Nanostructured iron(III) oxide deposits are grown by chemical vapor deposition (CVD) at 400−500 °C on Si(100) substrates from Fe(hfa)2TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = N,N,N′N′-tetramethylethylenediamine), yielding the selective formation of α-Fe2O3or the scarcely studiedε-Fe2O3 polymorphs under suitably optimized preparative conditions. By using Ti(OPr i)4(OPri= iso-propoxy) and water asatomic layer deposition (ALD) precursors, we subsequently functionalized the obtained materials at moderate temperatures (<300°C) by an ultrathin titanomagnetite (Fe3−xTixO4) overlayer. An extensive multitechnique character-ization, aimed at elucidating the system structure, morphology, composition and optical properties, evidenced that the photoactivated hydrophilic and photocatalytic behavior of the synthesized materials is dependent both on iron oxide phase composition and ALD surface modification. The proposed CVD/ALD hybrid synthetic approach candidates itself as a powerful tool for a variety of applications where semiconductor-based nanoarchitectures can benefit from the coupling with an ad hoc surface layer. KW - chemical vapor deposition KW - atomic layer deposition KW - iron oxide KW - titanomagnetite KW - photoactivated properties Y1 - 2013 U6 - https://doi.org/10.1021/am401475g SN - 1944-8252 VL - 5 IS - 15 SP - 7130 EP - 7138 ER - TY - GEN A1 - Adelmann, Christoph A1 - Cuypers, Daniel A1 - Tallarida, Massimo A1 - Rodriguez, Leonard A1 - De Clercq, Astrid A1 - Friedrich, Daniel A1 - Conard, Thierry A1 - Delabie, Annelies A1 - Seo, Jin Won A1 - Locquet, Jean-Pierre A1 - De Gendt, Stefan A1 - Schmeißer, Dieter A1 - Elshocht, Sven van A1 - Caymax, Matty T1 - Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide T2 - Chemistry of Materials N2 - The surface chemistry and the interface formation during the initial stages of the atomic layer deposition (ALD) of Al2O3 from trimethylaluminum (TMA) and H2O on InP(100)were studied by synchrotron radiation photoemission spectroscopy and scanning tunneling microscopy. The effect of the ex situ surface cleaning by either H2SO4 or (NH4)2S was examined. It is shown that the native oxide on the InP surface consisted mainly of indium hydrogen phosphates with a P enrichment at the interface with InP. After a (NH4)2S treatment, S was present on the surface as a sulfide in both surface and subsurface sites. Exposure to TMA led to the formation of a thin AlPO4 layer, irrespective of the surface cleaning. The surface Fermi level of p-type InP was found to be pinned close to midgap after H2SO4 cleaning and moved only slightly further toward the conduction band edge upon TMA exposure, indicating that the AlPO4/InP interface was rather defective. (NH4)2S passivation led to a Fermi level position of p-type InP close to the conduction band edge. Hence, the InP surface was weakly inverted, which can be attributed to surface doping by S donors. TMA exposure was found to remove surface S, which was accompanied by a shift of the Fermi level to midgap, consistent with the removal of (part of) the S donors in combination with a defective AlPO4/InP interface. Further TMA/H2O ALD did not lead to any detectable changes of the AlPO4/InP interface and suggested simple overgrowth with Al2O3. Y1 - 2013 U6 - https://doi.org/10.1021/cm304070h SN - 1520-5002 VL - 25 IS - 7 SP - 1078 EP - 1091 ER - TY - GEN A1 - Rossi, Francesca A1 - Fabbri, Filippo A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Modreanu, Mircea A1 - Attolini, Giovanni A1 - Salviati, Giancarlo T1 - Structural and luminescence properties of HfO2 nanocrystals grown by atomic layer deposition on SiC/SiO2 core/shell nanowires T2 - Scripta Materialia N2 - In this work we report the morphological, structural and luminescence properties of HfO2 nanocrystals grown on the surface of SiC/SiO2 core/shell nanowires by atomic layer deposition. All the studies are carried out in comparison with HfO2 nanocrystal aggregates grown on planar oxidized silicon substrates. The structural analyses reveal that HfO2has monoclinic structure with dif-ferent orientations. The cathodoluminescence emission shows the main components at 2.7 and 2.3 eV, deeply influenced by the arrangement and aggregation of the nanocrystals. KW - Silicon carbide KW - Silicon dioxide KW - Nanowires KW - Hafnium oxide KW - Nanocrystals Y1 - 2013 U6 - https://doi.org/10.1016/j.scriptamat.2013.08.017 SN - 1359-6462 VL - 69 IS - 10 SP - 744 EP - 747 ER - TY - GEN A1 - Haeberle, Jörg A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Arens, Michael A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films T2 - Beilstein Journal of Nanotechnology N2 - We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using thermal atomic layer deposition (T-ALD) and plasma enhanced atomic layer deposition (PE-ALD) in the SENTECH SI ALD LL system. The T-ALD Al2O3layers were deposited at 200 °C, for the PE-ALD films we varied the substrate temperature range between room temperature (rt) and 200 °C. We show data from spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4” wafers and correlatethem to X-ray photoelectron spectroscopy (XPS) results. The 200°C T-ALD and PE-ALD processes yield films with similar refractive indices and with oxygen to aluminum elemental ratios very close to the stoichiometric value of 1.5. However, in both also fragments of the precursor are integrated into the film. The PE-ALD films show an increased growth rate and lower carbon contaminations. Reducing the deposition temperature down to rt leads to a higher content of carbon and CH-species. We also find a decrease of the refractive index and of the oxygen to aluminum elemental ratio as well as an increase of the growth rate whereas the homogeneity of the film growth is not influenced significantly. Initial state energy shifts in all PE-ALD samples are observed which we attribute to a net negative charge within the films. KW - Al2O3 KW - ALD KW - ellipsometry KW - PE-ALD KW - XPS Y1 - 2013 U6 - https://doi.org/10.3762/bjnano.4.83 SN - 2190-4286 VL - 2013 IS - 4 SP - 732 EP - 742 ER - TY - CHAP A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces After Wet Chemical Treatments T2 - Meeting Abstracts-Electrochemical Society, San Francisco, 2013 KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 UR - http://ma.ecsdl.org/content/MA2013-02/30/2132.full.pdf+html N1 - MA2013-02(30) SP - S. 2132 PB - The Electrochemical Society ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Transactions N2 - In this work synchrotron radiation photoemission spectroscopy (SRPES) is used to study InP surfaces after different wet chemical treatments. All results are compared to a typical fingerprint of surface components present on an as received InP sample. It is shown that acidified (HCl and H₂SO₄) treatments efficiently remove the native phosphate, although components like Pᴼ, Inᴼ and P(2±∆)+ remain present. In alkaline solution (NH₄OH) oxide remains present at the surface. As an alternative treatment, the immersion into (NH₄)₂S was studied. This passivation treatment results in fewer surface components which suggests that a higher quality surface is obtained. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 U6 - https://doi.org/10.1149/05806.0297ecst SN - 1938-6737 SN - 1938-5862 VL - 58 IS - 6 SP - 297 EP - 303 ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Conard, Thierry A1 - Rodriguez, Leonard A1 - Mees, M. A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Journal of Solid State Science and Technology N2 - The influence of different wet chemical treatments (HCl, H₂SO₄, NH₄OH) on the composition of InP surfaces is studied by using synchrotron radiation photoemission spectroscopy (SRPES). It is shown that a significant amount of oxide remains present after immersion in a NH₄OH solution which is ascribed to the insolubility of In³⁺ at higher pH values. Acidic treatments efficiently remove the native oxide, although components like Pᴼ, Inᴼ and P(2±Δ)+ suboxides are observed. Alternatively, the influence of a passivation step in (NH₄)₂S solution on the surface composition was investigated. The InP surface after immersion into (NH₄)₂S results in fewer surface components, without detection of Pᴼ and P(2±Δ)+ suboxides. Finally, slight etching of InP surfaces in HCl/H₂O₂ solution followed by a native oxide removal step, showed no significant effect on the surface composition. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - Scanning Tunneling Microscopy KW - InP KW - Wet chemical treatment Y1 - 2014 U6 - https://doi.org/10.1149/2.005401jss SN - 2162-8777 SN - 2162-8769 VL - 3 IS - 1 SP - N3016 EP - N3022 ER - TY - GEN A1 - Müller, Klaus A1 - Städter, Matthias A1 - Rachow, Fabian A1 - Hoffmannbeck, David A1 - Schmeißer, Dieter T1 - Sabatier-based CO2-methanation by catalytic conversion T2 - Environmental Earth Sciences N2 - The catalytic conversion of CO2is an important component for the reintegration of secondary products like CO2 or H2 into the energy supply. An example is the "power to gas’" concept with a conversion of CO2 into CH4. The CO2 is transferred into a carrier of chemical energy, with the possibility to feed the produced CH4 into the existing network of natural gas. At temperatures of around 350 °C, hydrogenation of CO2 to CH4 is possible by the Sabatier reaction CO2+4H2->CH4+H2O. One prerequisite for efficient kinetics of the Sabatier reaction is the application and optimization of catalysts. The focus of catalyst development is given to their performance under the conditions to be expected in the special application. As a part of the project Geoenergy-Research (GeoEn), we address questions related to the catalytic utilization of CO2 produced in the course of the oxyfuel combustion of lignite. In this contribution, we report on the experimental setup in laboratory scale, which enables an advanced characterization of the catalytic performance, including thermodesorption measurements at atmospheric pressure in order to determine the amount of adsorbed CO2 under real conditions. We also show data for activation energies, the catalytic performance as function of temperature and the long time stability of a commercial Ru-based catalyst. KW - CO2 KW - Sabatier reaction KW - Catalysis KW - RuO2 Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2609-3 SN - 1866-6280 VL - 70 IS - 8 SP - 3771 EP - 3778 ER - TY - GEN A1 - Das, Chittaranjan A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Linear dichroism in ALD layers of TiO₂ T2 - Environmental Earth Sciences N2 - We prepare TiO₂film by ALD and study their electronic properties by soft X-ray absorption spectroscopy (XAS) and photoelectron spectroscopy. We focus on XAS and X-ray linear dichroism to indentify band onset and learn about local distortion of the Ti–O octahedral atomic and about defects which cause Ti-based electronic states within the band gap. KW - Anatase KW - Dichroism KW - Amorphous Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2836-7 SN - 1866-6280 VL - 70 IS - 8 SP - 3785 EP - 3795 ER -