TY - CHAP A1 - Henkel, Karsten A1 - Torche, Mohamed A1 - Sohal, Rakesh A1 - Schwiertz, Carola A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter ED - Dudley, Michael T1 - Pr-O-N Dielectrics for MIS Stacks on Silicon and Silicon Carbide Surfaces T2 - Silicon carbide 2006 - materials, processing and devices, symposium held April 18 - 20, 2006, San Francisco, California, U.S.A. Y1 - 2006 SN - 978-1-55899-867-4 SP - 353 EP - 358 PB - Materials Research Society CY - Warrendale, Pa. ER - TY - GEN A1 - Beerbom, Martin A1 - Mayer, Thomas A1 - Jaegermann, Wolfram A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Electrochemically Induced Redox-Reactions on GaAs-Surfaces: High Resolution Photoemission Spectra Taken at the U49/2 Beamline Y1 - 2001 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Soinski, M. S. A1 - Follath, Rolf T1 - The chromatic aberration of PEEM - demonstration on graphite inclusions in cast iron, Kategrorie: Microscopy - Spectromicroscopy Y1 - 2001 ER - TY - JOUR A1 - Sieber, N. A1 - Mantel, B. F. A1 - Seyller, Th. A1 - Ristein, J. A1 - Ley, L. A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Structural, electronic and chemical properties of hydrogen terminated 6H-SiC Y1 - 2001 ER - TY - JOUR A1 - Graupner, R. A1 - Seyller, Th. A1 - Ley, L. A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - PEEM Investigation of CVD-Diamond grown on Si Y1 - 2001 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Follath, Rolf T1 - N2O-Oxidation of Si(100) Y1 - 2001 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Valence band spectroscopy of semiconducting regioregular Poly(3-Hexylthiophene)-2,5-diyl Y1 - 2001 ER - TY - CHAP A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Carbon-Plot-Micostructuring for All-Polymer-Transistors Y1 - 2001 ER - TY - JOUR A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter A1 - Kompotiatis, L. T1 - Polypyrrole based conversion coatings for aluminium alloys Y1 - 2001 ER - TY - JOUR A1 - Sieber, N. A1 - Seyller, Th. A1 - Graupner, R. A1 - Ley, L. A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - PES and LEED study of hydrogen and oxygen terminated 6H-SiC(0001) and (000-1) surfaces Y1 - 2001 ER - TY - CHAP A1 - Yfantis, Alexandros D. A1 - Bourdas, N. A1 - Yfantis, N. A1 - Yfantis, Alexandros D. A1 - Lambrakopoulos, S. A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - A study of anticorrosive conversion coatings based on conductive polymers of pyrrole Y1 - 2002 ER - TY - PAT A1 - Yfantis, Alexandros D. A1 - Schmeißer, Dieter T1 - Method of chemical deposition of compose conductive polymer coatings on aluminium alloy surfaces Y1 - 2002 ER - TY - JOUR A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Back-propagation based neural network with a two sensor system for monitoring of carbon dioxide and relative humidity Y1 - 2002 ER - TY - RPRT A1 - Schwiertz, Carola A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter A1 - Kamieth, P. A1 - Schnegber, P. T1 - Aufbau eines Sensorarrays zur Detektion von umwelt- und tierphysiologisch relevanten Komponenten Y1 - 2001 ER - TY - RPRT A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schwiertz, D. A1 - Schmeißer, Dieter A1 - Kamieth, P. A1 - Schengber, P. T1 - Gezielte Entwicklung von Sensormaterialien und Sensoren zur spezifischen Detektion von schwefel- und stickstoffhaltigen Stoffgruppen Y1 - 2001 ER - TY - JOUR A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Schwiertz, B. A1 - Elling, B. A1 - Danz, R. A1 - Büchtemann, A. A1 - Straube, Oliver A1 - Schmeißer, Dieter T1 - Kraftsensoren aus Polymerfolien-Piezoelektrische Polymersensoren für Hochdruckanwendungen Y1 - 2001 ER - TY - JOUR A1 - Kraft, D. A1 - Thißen, A. A1 - Mayer, Thomas A1 - Klein, A. A1 - Jaegermann, Wolfram A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Backcontact Formation on CdTe Thin Film Solar Cells Y1 - 2001 ER - TY - RPRT A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Oprea, A. A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Frandsen, W. A1 - Schölzel, Mario T1 - Entwicklung von Sensoren mit Elektroden aus leitfähigen Polymeren Y1 - 2000 N1 - Teilbericht 16SV335/7 im Gemeinsamen Abschlussbericht zum Verbundprojekt "Sensoren mit mikrostrukturierten Elektroden aus leitfähigen Polymeren", März 2000, Kurzfassung ER - TY - JOUR A1 - Batchelor, David R. A1 - Scheer, M. A1 - Schmeißer, Dieter T1 - WAVE Calculations of Off Axis Undulator Radiation for the BESSY II U49 Undulator Y1 - 2000 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Klein, A. A1 - Jaegermann, Wolfram A1 - Pettenkofer, Christian A1 - Follath, Rolf T1 - Spectro-Microscopy with PEEM / µESCA Y1 - 2000 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Appel, Günter A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter A1 - Mast, M. T1 - Multi-Atom Resonant Photoemission applied to study the silver to nitrogen interaction in polypyrrole films Y1 - 2000 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Batchelor, David R. A1 - Beuckert, Guido A1 - Schmeißer, Dieter A1 - Kittler, Martin A1 - Ourmazd, A. A1 - Lewerenz, Hans-Joachim T1 - Solare Energieumwandlung in dünnen Schichten Y1 - 2000 ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Batchelor, David R. A1 - Schmeißer, Dieter T1 - Spectro-Microscopic analyses in metallurgical systems: spheroidic graphite in cast iron and the interface of friction-welded Al-Fe joints Y1 - 2000 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Appel, Günter A1 - Böhme, O. A1 - Heller, Thomas A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Batchelor, David R. T1 - Nanoparticles and polarons: active centers in thin film sensor devices Y1 - 2000 ER - TY - JOUR A1 - Appel, Günter A1 - Mikalo, Ricardo Pablo A1 - Henkel, Karsten A1 - Oprea, A. A1 - Yfantis, Alexandros D. A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Polymeric Electrodes Y1 - 2000 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - A spectro-microscopic approach for spatially resolved characterisation of semiconductor structures in PEEM Y1 - 2000 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Richter, H. A1 - Pfitzner, L. A1 - Prasad, S. T1 - E-MRS 1999 Spring Meeting, Strasbourg, June1-4,1999-Preface Y1 - 2000 ER - TY - JOUR A1 - Yfantis, Alexandros D. A1 - Yfantis, Alexandros D. A1 - Tzalas, B. A1 - Schmeißer, Dieter T1 - A new chrome - free passivation method of tinplate used in the canning industry Y1 - 2000 ER - TY - JOUR A1 - Heller, Thomas A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - Polarons in oxidic semiconductors - the SrTiO3 case Y1 - 1999 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Appel, Günter A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Determination of the Vacuum Level in NEXAFS-spectra by Selected-Yield-NEXAFS Y1 - 1999 ER - TY - GEN A1 - Batchelor, David R. A1 - Schmeißer, Dieter A1 - Follath, Rolf T1 - The BTU Cottbus Beamline at BESSY II Y1 - 1999 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - Photoemissionselektronenmikroskopie - ein Instrument für die Materialforschung Y1 - 1999 ER - TY - JOUR A1 - Appel, Günter A1 - Böhme, O. A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter T1 - The polaron and bipolaron contributions to the electronic structure of polypyrrole films Y1 - 1999 ER - TY - JOUR A1 - Schmeißer, Dieter A1 - Böhme, O. A1 - Yfantis, Alexandros D. A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Lundström, Ingemar A1 - Lloyd Spetz, Anita T1 - Dipole moment of nanoparticles at interfaces Y1 - 1999 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Schmeißer, Dieter A1 - Kittler, Martin T1 - A spectro-microscopic approach to study the morphology and elemental distribution of mc-Si surfaces Y1 - 1999 ER - TY - JOUR A1 - Oprea, A. A1 - Henkel, Karsten A1 - Oehmgen, R. A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Lauer, H. A1 - Hausmann, P. T1 - Increased sensor sensitivities obtained by polymer coated quartz microbalances Y1 - 1999 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Heller, Thomas A1 - Batchelor, David R. A1 - Appel, Günter A1 - Schmeißer, Dieter T1 - Doping and defect inhomogeneities of polypyrrole tosylate films as revealed by ?-NEXAFS Y1 - 1999 ER - TY - JOUR A1 - Yfantis, Alexandros D. A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Yfantis, Alexandros D. T1 - Polypyrrole doped with fluoro-metal complexes: thermal stability and structural properties Y1 - 1999 ER - TY - JOUR A1 - Appel, Günter A1 - Schmeißer, Dieter A1 - Bauer, Jakob A1 - Bauer, Monika A1 - Egelhaaf, H. J. A1 - Oelkrug, D. T1 - The formation of oligomers in the electrolyte upon polymerization of pyrrole Y1 - 1999 ER - TY - JOUR A1 - Batchelor, David R. A1 - Follath, Rolf A1 - Schmeißer, Dieter T1 - The optical design of a PGM for the Undulator U49/2 at BESSY II Y1 - 1998 ER - TY - JOUR A1 - Heller, Thomas A1 - Böhme, O. A1 - Tonti, D. A1 - Klein, A. A1 - Jaegermann, Wolfram A1 - Schmeißer, Dieter T1 - Na interaction with relaxed WO3 thin films Y1 - 1998 ER - TY - JOUR A1 - Appel, Günter A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - NEXAFS-Spectroscopy of Differently Doped Polypyrroles Y1 - 1998 ER - TY - JOUR A1 - Hoffmann, Patrick A1 - Mikalo, Ricardo Pablo A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - PEEM-investigations on cleaved MoTe2-surfaces Y1 - 1998 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Böhme, O. A1 - Schmeißer, Dieter T1 - Doping inhomogenities in Polypyrrole films: a Photoemission Electron Microscope (PEEM) and Spectro-Microscopic Study Y1 - 1998 ER - TY - JOUR A1 - Naarmann, H. A1 - Schmeißer, Dieter A1 - Bartl, A. A1 - Dunsch, L. A1 - Göpel, W. T1 - Electronic and magnetic properties of polypyrrole films depending on their 1-dimensional and 2-dimensional microstructures Y1 - 1998 ER - TY - JOUR A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Heller, Thomas A1 - Schmeißer, Dieter T1 - Lateral Doping Inhomogeneities as Revealed by ?-NEXAFS and ?-PES Y1 - 1998 ER - TY - JOUR A1 - Lloyd Spetz, Anita A1 - Schmeißer, Dieter A1 - Baranzahi, A. A1 - Wälivaare, B. A1 - Göpel, W. A1 - Lundström, Ingemar T1 - X-ray photoemission and Auger electron spectroscopy analysis of fast responding activated metal oxide silicon carbide gas sensors Y1 - 1997 ER - TY - JOUR A1 - Appel, Günter A1 - Yfantis, Alexandros D. A1 - Göpel, W. A1 - Schmeißer, Dieter T1 - Highly conductive polypyrrole films on nonconductive substrates Y1 - 1996 ER - TY - CHAP A1 - Gehrlich, Lukas A1 - Ohsiek, Susanne A1 - Klein, C. A1 - Geiß, M. A1 - Friedemann, Michael A1 - Kücher, Peter A1 - Schmeißer, Dieter T1 - Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements T2 - 2011 IEEE International Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM 2011), Dresden, Germany, 8 - 12 May 2011 Y1 - 2011 SN - 978-1-4577-0503-8 U6 - https://doi.org/10.1109/IITC.2011.5940322 SP - 82 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Friedrich, Daniel A1 - Henkel, Karsten A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Fullerenol as probed by Synchrotron X-Ray Photoemission and Absorption Spectroscopy Y1 - 2011 ER - TY - JOUR A1 - Batchelor, David R. A1 - Follath, Rolf A1 - Mikalo, Ricardo Pablo A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Commissioning Results of the BTUC-PGM beamline Y1 - 2001 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Michling, Marcel A1 - Schmeißer, Dieter T1 - In situ study of the atomic layer deposition of HfO2 on Si T2 - Journal of Vacuum Science and Technology Y1 - 2012 SN - 0734-2101 IS - A 30 SP - 01A143-1 EP - 01A143-15 ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - Control of the Crystalline Polymorph, Molecular Dipole and Chain Orientations in P(VDF-HFP) for High Electrical Energy Storage Application T2 - International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011 Y1 - 2012 SN - 978-1-4577-2035-2 U6 - https://doi.org/10.1109/NSTSI.2011.6111801 PB - IEEE ER - TY - GEN A1 - Klocek, Jolanta A1 - Henkel, Karsten A1 - Kolanek, Krzysztof A1 - Broczkowska, K. A1 - Schmeißer, Dieter A1 - Miller, M. A1 - Zschech, Ehrenfried T1 - Studies of the chemical and electrical properties of fullerene and 3-aminopropyltrimethoxysilane based low-k materials T2 - Thin Solid Films Y1 - 2012 SN - 0040-6090 VL - 520 IS - 7 SP - 2498 EP - 2504 ER - TY - GEN A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - The electroactive Beta-phase formation in Poly(vinylidene fluoride) by gold nanoparticles doping T2 - Materials Letters Y1 - 2012 SN - 0167-577X IS - 73 SP - 123 EP - 125 ER - TY - GEN A1 - Klocek, Jolanta A1 - Henkel, Karsten A1 - Kolanek, Krzysztof A1 - Zschech, Ehrenfried A1 - Schmeißer, Dieter T1 - Annealing influence on siloxane based materials incorporated with fullerenes, phthalocyanines and silsesquioxanes T2 - BioNanoScience Y1 - 2012 SN - 2191-1630 VL - 2 IS - 1 SP - 52 EP - 58 ER - TY - GEN A1 - Müller, Klaus A1 - Richter, Matthias A1 - Philip, Shine A1 - Kunst, Manuel A1 - Schmeißer, Dieter T1 - Excited states in P3HT and P3HT/PCBM blends T2 - BioNanoScience Y1 - 2012 SN - 2191-1630 VL - 2 IS - 1 SP - 42 EP - 51 ER - TY - GEN A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Valence and Conduction band states of PCBM as probed by photoelectron spectroscopy at resonant excitation T2 - BioNanoScience Y1 - 2012 SN - 2191-1630 VL - 2 IS - 1 SP - 59 EP - 65 ER - TY - GEN A1 - Klocek, Jolanta A1 - Kolanek, Krzysztof A1 - Schmeißer, Dieter T1 - Spectroscopic and atomic force microscopy investigations of hybrid materials composed of fullerenes and 3-aminopropyltrimethoxysilane T2 - Journal of Physics and Chemistry of Solids Y1 - 2012 SN - 0022-3697 VL - 73 IS - 5 SP - 699 EP - 706 ER - TY - GEN A1 - Klocek, Jolanta A1 - Henkel, Karsten A1 - Kolanek, Krzysztof A1 - Zschech, Ehrenfried A1 - Schmeißer, Dieter T1 - Spectroscopic and capacitance-voltage characterization of thin aminopropylmethoxysilane films doped with copper phthalocyanine, tris(dimethylvinylsilyloxy)-POSS and fullerene cages T2 - Applied surface science Y1 - 2012 SN - 0169-4332 VL - 258 IS - 10 SP - 4213 EP - 4221 ER - TY - GEN A1 - Michling, Marcel A1 - Schmeißer, Dieter T1 - Resonant Photoemission at the O1s threshold to characterize β-Ga2O 3 single crystals T2 - IOP Conference Series: Materials Science and Engineering N2 - We report on spectroscopic investigations on β-Ga2O3single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. We analyze the electronic structure and assign the O2p to build the valence band and both, O2p and Ga4s4p states to contribute to the conduction band. We determine the partial density of states for the valence and conduction bands and find a strong hybridization of O2p and Ga4s states. This is deduced from constant final state spectra on the O-KLL-Auger over the O K-edge and Ga L2,3-edge and a comparison to the corresponding X-ray absorption spectroscopy data. We also identify several types of defects. A broad band of oxygen derived defects is identified that extends through-out the gap. Small polarons are attributed to cause an anti-resonance in the valence states around the O1s threshold. In addition, a separate Auger decay at resonance indicates the existence of localized charge transfer states which involves localized Ga4sp states. KW - resonant photoelectron spectroscopy KW - Ga2O3 Y1 - 2012 U6 - https://doi.org/10.1088/1757-899X/34/1/012002 SN - 1757-8981 IS - 34 SP - 012002 ER - TY - GEN A1 - Müller, Klaus A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Paloumpa, Ioanna A1 - Kramm, Ulrike Ingrid A1 - Schmeißer, Dieter T1 - Spectroscopic characterization of Cobalt–Phthalocyanine electrocatalysts for fuel cell applications T2 - Solid State Ionics N2 - For polymer–electrolyte–membrane fuel cells (PEM-FC), platinumcatalysts on carbon based substrates are state of the art, due to high electrochemical activity and chemical stability in acid electrolytes. High costs of platinum force investigations of alternative catalysts. With respect to the oxygen reduction reaction, possible candidates are transition metal (TM) complexes like TM-porphyrines or TM-phthalocyanines. Pyrolysis on carbon based substrates improves the catalytic activity. Highest activities were found for Fe or Co as transition metal centers. We present results of the pyrolysis of Co-phthalocyanine (CoPc) on carbon black. Besides an investigation of morphology by scanning electron microscopy (SEM) and chemical composition by energy dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS) during pyrolysis, we present a near edge X-ray absorption fine structure (NEXAFS) study of the chemical composition for the related annealing steps. This investigation is accompanied by an electrochemical characterization of the catalytic activity and selectivity. The XPS and NEXAFS data indicate a decomposition of the CoN4(chelate-) complex during pyrolysis. The N1s data for 800 °C show graphite-like, formally pyrrolic and pyridinic like features, without any significant contri-bution of Co. The Co2p data for both, XPS and NEXAFS are dominated by CoO/Co2O3. It can be concluded that during the pyrolysis cobalt particles are formed by the disintegration of CoN4-centers, after pyrolysis these par-ticles become oxidized upon contact with air. KW - Co-phthalocyanine KW - Catalysis KW - Oxygen reduction reaction (ORR) KW - XPS KW - NEXAFS Y1 - 2012 U6 - https://doi.org/10.1016/j.ssi.2011.12.013 SN - 1872-7689 IS - 216 SP - 78 EP - 82 ER - TY - GEN A1 - Kolanek, Krzysztof A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Height distribution of atomic force microscopy images as a tool for atomic layer deposition characterization T2 - Journal of Vacuum Science and Technology : A N2 - The authors propose the analysis of surface height histograms as a tool for the atomic layer deposition (ALD) growth characterization in the initial stage of the process. ALD of HfO2 on a Si(100)/SiO2 substrate was investigated in situ by ultra high vacuum atomic force microscope working in noncontact mode. The ALD cycles, made by using tetrakis-di-methyl-amido-Hf and H2O as precursors, were performed at 230 C. After each ALD cycle, the relation between the film growth and the root mean square surface roughness was studied. Parameters equivalent to HfO2 layer thickness, coverage, and surface roughness of the substrate and deposited material can be calculated in the proposed routine. KW - Atomic layer deposition (ALD) KW - Atomic force microscopy KW - HfO2 KW - height distribution Y1 - 2013 U6 - https://doi.org/10.1116/1.4754557 VL - 31 IS - 1 SP - 01A104-1 EP - 01A104-9 ER - TY - GEN A1 - Klocek, Jolanta A1 - Kolanek, Krzysztof A1 - Henkel, Karsten A1 - Zschech, Ehrenfried A1 - Schmeißer, Dieter T1 - Influence of the fullerene derivatives and cage polyhedral oligomeric silsesquioxanes on 3-aminopropyltrimethoxysilane based hybrid nanocomposites chemical, morphological and electrical properties T2 - Journal of Physics and Chemistry of Solids N2 - In this study we produced 3-aminopropyltrimethoxysilane based hybrid nanocomposites using fullerene derivative [6,6]–phenyl–C61–butyric acid methyl ester (PCBM) as nanodopants. Additionally, we modified obtained material with incompletely condensed cage polyhedral oligomeric silsesqiuox-anes (POSS) in order to improve its properties. Thin films were deposited by means of the spin-coating method. The films were characterized by atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and capacitance–voltage (CV) measurements. We observed that a properly chosen PCBM concentration may be a crucial factor to obtain high quality APTMS based films by the spin-coating technique. XPS revealed the presence of the C-NH-C species within POSS containing films indicating chemical interaction between the amino group of APTMS and the POSS molecules. AFM results suggest that at high POSS monomer concentration in the range of 1% the creation of fractal-shaped aggregates takes place. The CV characterization of the samples exhibits a decrease of the APTMS based films dielectric constant due to the POSS and PCBM contribution. The combination of the applied methods delivers complementary information concerning the properties of the analyzed films. KW - low-k KW - fullerene KW - aminopropyltrimethoxysilane KW - silsesqiuoxane KW - X-ray photoelectron spectroscopy (XPS) KW - Atomic force microscopy (AFM) KW - Capacitance voltage (CV) Y1 - 2013 U6 - https://doi.org/10.1016/j.jpcs.2012.08.013 SN - 0022-3697 VL - 74 IS - 1 SP - 135 EP - 145 ER - TY - GEN A1 - Kukli, Kaupo A1 - Dimri, Mukesh Chandra A1 - Tamm, Aile A1 - Kemell, Marianna A1 - Käämbre, Tanel A1 - Vehkamäki, Marko A1 - Puttaswamy, Manjunath A1 - Stern, Raivo A1 - Kuusik, Ivar A1 - Kikas, Arvo A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Ritala, Mikko A1 - Leskelä, Markku T1 - Structural and Magnetic Studies on Iron Oxide and Iron-Magnesium Oxide Thin Films Deposited Using Ferrocene and (Dimethylaminomethyl)ferrocene Precursors T2 - ECS Journal of Solid State Science and Technology N2 - Iron oxide and magnesium-doped iron oxide films were grown by atomic layer deposition in the temperature range of 350–500 ◦C from ferrocene, (dimethylaminomethyl)ferrocene, magnesiumβ-diketonate, and ozone. Phase composition of the films depended on the deposition temperature, as magnetite and/or maghemite tended to form instead of hematite upon lowering the temperature. Iron oxide layers were also mixed with magnesium oxide by alternate deposition of MgO and Fe2O3 which also favored the formation of magnetite or maghemite structure prior to hematite. Scanning electron microscopy implied the smoothening of the films after doping with magnesium oxide. Magnetometry was used to study the effects of temperature and doping levels on the magnetic properties of the films. KW - iron oxide KW - iron magnesium oxide KW - GIXRD KW - Raman spectroscopy KW - X-Ray absorption spectroscopy (XAS) KW - scanning electron microscopy (SEM) KW - magnetization Y1 - 2013 U6 - https://doi.org/10.1149/2.004303jss SN - 2162-8769 VL - 2 IS - 3 SP - N45 EP - N54 ER - TY - GEN A1 - Popovici, Mihaela A1 - Delabie, Annelies A1 - Adelmann, Christoph A1 - Meersschaut, Johan A1 - Franquet, Alexis A1 - Tallarida, Massimo A1 - Berg, Jaap van den A1 - Richard, Olivier A1 - Swerts, Johan A1 - Tomida, Kazuyuki A1 - Kim, Min-Soo A1 - Tielens, Hilde A1 - Bender, Hugo A1 - Conard, Thierry A1 - Jurczak, Malgorzata A1 - Elshocht, Sven van A1 - Schmeißer, Dieter T1 - Understanding the Interface Reactions of Rutile TiO2 Grown by Atomic Layer Deposition on Oxidized Ruthenium T2 - ECS Journal of Solid State Science and Technology N2 - The atomic layer deposition of titanium oxide TiO2 on ruthenium and oxidized ruthenium with titanium methoxide as metal precursor and H2O and O3 as oxidant was investigated by Rutherford backscattering (RBS) and time of flight secondary ion mass spectrometry (TOFSIMS). An ultra-thin layer of TiO2 deposited a priori with H2O plays the role of protection of Ru(Ox) substrates against etching by O3. Information about thin films (∼3 nm) interfacial reactions, thickness and structure was brought by Medium Energy Ion Scattering Spectroscopy (MEIS) and X-ray absorption spectroscopy (XAS) measurements. The growth enhancements observed in the first stages of the deposition depends on the pre-treatment (pre-oxidation, H2O based interlayer thickness) of the Ru substrate. Thick films (∼14 nm) were analyzed by transmission electron microscopy (TEM) and X-ray diffraction (XRD). The as deposited TiO2 films are crystalline with rutile structure, as resulted from structural analyzes. However, the presence of small amounts of anatase was detected by soft X-ray absorption spectroscopy (XAS) and is strongly influenced by the surface pre-treatment of the Ru substrate. The electrical properties (equivalent oxide thickness and leakage current density) correlate with a different rutile/anatase ratio present in the films. KW - TiO2 KW - atomic layer deposition KW - rutile KW - RuOx KW - Rutherford backscattering (RBS) KW - time of flight secondary ion mass spectrometry (TOFSIMS) KW - Medium Energy Ion Scattering Spectroscopy (MEIS) KW - X-Ray absorption spectroscopy KW - transmission electron microscopy (TEM) KW - X-ray diffraction (XRD) Y1 - 2013 U6 - https://doi.org/10.1149/2.035301jss SN - 2162-8769 VL - 2 IS - 1 SP - N23 EP - N27 ER - TY - GEN A1 - Fischer, Christian B. A1 - Rohrbeck, Magdalena A1 - Wehner, Stefan A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Interlayer formation of diamond-like carbon coatings on industrial polyethylene: Thickness dependent surface characterization by SEM, AFM and NEXAFS T2 - Applied Surface Science N2 - The coating of materials with diamond-like carbon (DLC) is a very common way to change and improve their basic characteristics. Although DLC is used on several substrates, the chemical and physical properties throughout the coating process on plastics are yet sparsely investigated. Two types of protective coatings one sp3-enriched (robust, r-type) and one with more sp2-centers (flexible, f-type) have been realized on polyethylene by PECVD deposition. SEM and AFM analysis of coated samples of DLC types revealed diverse surface topographies on different scales and images appeared even differently smoothed by the carbonaceous deposits. Grains of both DLC types are platelet-shaped and nearly double in size for the robust type indicating fundamental differences in the epitaxial DLC growth. NEXAFS spectroscopy showed significant details of carbon centers in chemically different neighborhood displaying a characteristic fingerprint behavior. Comparison of deposition models revealed a mechanism of interlayer formation which is discussed in detail. Interlayer formation is clearly the appropriate explanation of the process for the current carbon deposition between these two unequal materials. An improved understanding of hard DLC and soft polyethylene assembly is given in the presented work. KW - Diamond-like carbon KW - Interlayer formation KW - Polyethylene KW - Surface characterization KW - Coatings KW - Plastics Y1 - 2013 U6 - https://doi.org/10.1016/j.apsusc.2013.01.210 SN - 0169-4332 IS - 271 SP - 381 EP - 389 ER - TY - GEN A1 - Richter, Matthias A1 - Paloumpa, Ioanna A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Multiple Auger Decay At Resonant Photo-Excitation In Carbon Thin Films T2 - ECS Transactions N2 - We use resonant photoemission at the C1s edge to study the electronic structure of HOPG, graphene flakes and monolayer graphene. We find remarkable differences in the profile of the Auger decay channels, which we attribute to an additional multiple-Auger with a three-hole final state. A prerequisite for the appearance of this decay mechanism is the existence of localized excitonic states, which cause the appearance of the multiple Auger decay. We use those effects to identify the existence and the quantity of such defect states within the π*-band regime in carbon thin films, because the intensity of the three-hole Auger decay is varying with the defect density of the carbon films. We find that the appearance of the multiple Auger decay is different for multilayer and monolayer graphene. In particular the interaction of impurities leads to broadening of the C1s core levels. The three-hole Auger decay spectroscopy is a new method to detect such contaminations with a high sensitivity. KW - resonant photoelectron spectroscopy KW - graphene KW - HOPG KW - X-ray absorption spectroscopy (XAS) KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2013 U6 - https://doi.org/10.1149/05020.0009ecst VL - 50 IS - 20 SP - 9 EP - 21 ER - TY - GEN A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Spin states in Co-PI catalysts T2 - Applied Physics Letters N2 - Cobalt based oxygen evolution catalysts (Co-PI, PI=electrodeposited from pH 7 phosphate) are studied by resonant photoemission spectroscopy at the Co L3 and O1s edge. For the individual Co3d states, we determine their configuration, their spin, and their energy level relative to the Fermi energy. We identify the Co divalent high spin state and the trivalent low spin state. In addition, we also find the corresponding oxygen-to-metal charge transfer states. We attribute the trivalent charge transfer state to be the active state for the oxygen evolution reaction. KW - resonant photoelectron spectroscopy KW - CoPI KW - oxygen evolution reaction Y1 - 2013 U6 - https://doi.org/10.1063/1.4811748 SN - 1077-3118 IS - 102 SP - 253904-1 EP - 253904-4 ER - TY - GEN A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - The Co2p Oxidation State In Co-PI Catalysts T2 - ECS Transactions N2 - The electronic structure of Cobalt based catalysts used for photocatalytic water splitting in solar cells is analyzed using synchrotron radiation photoelectron spectroscopy. The catalyst films are prepared by electrochemical deposition. We employ a X-ray photoelectron spectroscopy study to analyze the Co2p and O1s core levels,absorption edges and valence bands. We discuss our resonant data in terms of the partial density of states of the valence and conduction band. We find a difference in the Co oxidation state as a function of film thickness (deposited charge). From the relative amount of Co, O, K and P we favor the molecular cobaltate cluster-like structure as the structural motif of the Co-PI catalyst. KW - X-Ray photoelectron spectroscopy (XPS) KW - X-Ray absorption spectroscopy (XAS) KW - CoPI KW - oxygene evolution KW - water oxydation Y1 - 2013 U6 - https://doi.org/10.1149/05049.0113ecst VL - 50 IS - 49 SP - 113 EP - 126 ER - TY - GEN A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - In situALD experiments with synchrotron radiation photoelectron spectroscopy T2 - Semiconductor Science and Technology N2 - In this contribution, we describe some features of atomic layer deposition (ALD) investigated by means of synchrotron radiation photoelemission spectroscopy (SR-PES). In particular, we show how the surface sensitivity of SR-PES combined with the in situ nature of our investigations can point out interactions between the substrate and ALD precursors. We observed changes on all substrates investigated, included Si, GaAs, Ru and their surface oxides. These interactions are extremely important during the first ALD cycles and induce modifications in the substrate, which might lead to its functionality enhancement. KW - Atomic layer deposition (ALD) KW - in situ KW - photoelectron spectroscopy Y1 - 2012 U6 - https://doi.org/10.1088/0268-1242/27/7/074010 SN - 1361-6641 VL - 27 IS - 7 SP - 074010 ER - TY - GEN A1 - Schmidt, Stephan A1 - Schmeißer, Dieter T1 - Electronic structure of cobalt–nickel mixed oxides T2 - Solid State Ionics N2 - We investigate the electronic structure of cobalt–nickel mixed oxides by means of SR-based electron spectroscopy. We vary the Co–Ni content systematically and find that the most significant changes in the spectroscopic data occur at a mixing ratio of 30/70. We analyze the electronic structure of this material in detail and we are able to distinguish between pure covalent contributions, which cause a band gap of about 6 eV and empty defect states, whichfill the band gap almost completely. These defects are associated with the formation of 3d7L charge transfer states. These are correlated defect states and are identified by resonant photo-emission spectroscopy. KW - Transition metals KW - Oxides KW - Resonant photoemission KW - X-ray absorption spectroscopy Y1 - 2012 U6 - https://doi.org/10.1016/j.ssi.2012.06.009 SN - 1872-7689 IS - 225 SP - 737 EP - 741 ER - TY - GEN A1 - Mandal, Dipankar A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Schmeißer, Dieter T1 - The effect of X-ray photoelectron spectroscopy measurement on P(VDF-TrFE) copolymer thin films T2 - Applied Surface Science N2 - The impact of prolonged X-ray irradiation during X-ray photoelectron spectroscopy (XPS) measurement was investigated on poly(vinylidene-trifluoroethylene) (P(VDF-TrFE)) thin films. It was observed that prolonged X-ray irradiation can accelerate the crosslinking of P(VDF-TrFE) and diminish the ferroelectric phase. Fourier transform infrared spectroscopy (FT-IR) data indicate that the ferroelectric phase diminishes completely after 360 kJ of X-ray irradiation dose and it induces the paraelectric phase. In this work, the main emphasis was given to the optimization of the X-ray irradiation dose during XPS measurements to maintain the ferroelectric phase within the copolymer films. KW - P(VDF-TrFE) copolymer thin film KW - XPS measurement KW - X-ray irradiation KW - Ferroelectric to paraelectric phase transformation Y1 - 2012 U6 - https://doi.org/10.1016/j.apsusc.2012.07.144 SN - 0169-4332 SN - 1873-5584 IS - 261 SP - 209 EP - 213 ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - van Elshocht, Sven A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - GaAs clean up studied with synchrotron radiation photoemission T2 - IOP Conference Series : Materials Science and Engineering N2 - In this contribution we describe the chemical changes at the surface of GaAs upon adsorption of tri-methyl-aluminum (TMA). TMA is used to grow Al2O3 with atomic layer deposition (ALD) usually using H2O as oxygen source. Recently, it was pointed out that the adsorption of TMA on various III-V surfaces reduces the native oxide, allowing the growth of an abrupt III-V/High-K interface with reduced density of defects. Synchrotron radiation photoemission spectroscopy (SR-PES) is a powerful method to characterize surfaces and interfaces of many materials, as it is capable todetermine their chemical composition as well as the electronic properties. We performed in-situ SR-PES measurements after exposing a GaAs surface to TMA pulses at about 250°C. Upon using the possibility of tuning the incident photon energy we compared the Ga3d spectra at 41 eV, 71 eV, 91 eV and 121 eV, as well as the As3d at 71 eV and 91 eV. Finally, we show that using SR-PES allows a further understanding of the surface composition, which is usually not accessible with other techniques. KW - photoemission spectroscopy KW - atomic layer deposition KW - GaAs Y1 - 2012 U6 - https://doi.org/10.1088/1757-899X/41/1/012003 SN - 1757-899X IS - 41 SP - 012003 ER - TY - CHAP A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - The Co2p oxidation state in Co-PI catalysts T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 N1 - MA2012-02(14) SP - 1803 PB - The Electrochemical Society ER - TY - CHAP A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Multiple Auger decay at resonant photo-excitation in carbon thin films T2 - Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012 Y1 - 2012 UR - http://ma.ecsdl.org/content/MA2012-02/50/3509.full.pdf+html N1 - MA2012-02(50) SP - 3509 PB - The Electrochemical Society ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Richter, Matthias A1 - Tallarida, Massimo ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Intrinsic defects in TiO2 to explain resistive switching devices T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - resonant photoelectron spectroscopy KW - Auger processes KW - XPS KW - X-ray absorption spectroscopy Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch45 SP - 255 EP - 256 PB - Wiley-VCH CY - Weinheim ER - TY - CHAP A1 - Mandal, Dipankar A1 - Henkel, Karsten A1 - Das, Suken A1 - Schmeißer, Dieter ED - Heber, Jörg ED - Schlom, Darrell ED - Tokura, Yoshinori ED - Waser, Rainer ED - Wuttig, Matthias T1 - Control of β- and γ-Phase formation in electroactive P(VDF-HFP) films by silver nano-particle doping T2 - Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany KW - P(VDF.HFP) KW - electroactive phase KW - nanoparticle doping KW - FTIR Y1 - 2012 SN - 978-3-527-41191-7 U6 - https://doi.org/10.1002/9783527667703.ch69 SP - 640 EP - 641 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Tallarida, Massimo A1 - Adelmann, Christoph A1 - Delabie, Annelies A1 - Elshocht, Sven van A1 - Caymax, Matty A1 - Schmeißer, Dieter T1 - III-V/Oxide Interfaces Investigated with Synchrotron Radiation Photoemission Spectroscopy T2 - ECS Transactions N2 - We used synchrotron radiation photoemission spectroscopy (SR-PES) to investigate the surface of GaAs and other III-V semiconductors after tri-methyl-aluminum (TMA) pulses performed at 250{degree sign}C. We observed the removal of native oxide and the growth of Al-oxide upon measuring the As3d, Ga3d, Al2p and VB spectra. After seven TMA pulses we performed one water pulse. As3d and Ga3d peaks showed almost no lineshape change, but a decrease of intensity due to the water adsorption. The valence band shows a change in the secondary electron cut-off and the decrease of work function. We conclude that water mostly adsorbs molecularly and induces the work function decrease. The molecular absorption of water indicates that the seven TMA pulses produce a passivated surface only partially terminated with OH groups. KW - Interfaces KW - III/V KW - Synchrotron Photoemission Spectroscopy Y1 - 2013 U6 - https://doi.org/10.1149/05004.0123ecst SN - 1938-6737 VL - 50 IS - 4 SP - 123 EP - 128 ER - TY - GEN A1 - Müller, Klaus A1 - Fleige, Michael A1 - Rachow, Fabian A1 - Schmeißer, Dieter T1 - Sabatier based CO2-methanation of flue gas emitted by conventional power plants T2 - Energy Procedia N2 - The hydrogenation CO2+ 4H2 ->CH4 + 2H2O discovered by Paul Sabatier nowadays is discussed as "Power-to-approach" to utilize excess energy from renewable electricity generation. In a laboratory scale, we investigate the Sabatier process in a simulated flue gas atmosphere of conventional base load power plants. The reaction is investigated with regard to conversion rates, yield, selectivity and long-term stability. Using a catalyst based on nickel,we extract selectivities near 100% with a conversion around 85%. Beside the influence of oxygen, we investigate further typical contaminations like NO2 and SO2. KW - Power to gas KW - CO2 -Methanation KW - Sabatier-reaction KW - flue gas Y1 - 2013 U6 - https://doi.org/10.1016/j.egypro.2013.08.028 SN - 1876-6102 VL - 40 SP - 240 EP - 248 ER - TY - CHAP A1 - Mai, Andreas A1 - Dauderstädt, Ulrike A1 - Pahner, D. A1 - Krellmann, M. A1 - Schmeißer, Dieter A1 - Wagner, M. T1 - In situ determination of laser induced degradation of micro-mirror arrays T2 - International Students and Young Scientists Workshop Photonics and Microsystems, Cottbus, Germany, 8 - 10 June 2011 N2 - The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) develops spatial light modulators (SLMs) based on arrays of tiltable micro mirrors on a semiconductor chip. Typical applications are pattern generation for deepUV-laser mask writing or structured illumination in microscopy. Development and optimization of such SLMs requires detailed knowledge of the device behaviour under operating conditions. Here, the flatness of each single mirror effects the image resolution and contrast of the generated pattern and is amongst others a characteristic property of SLMs. In this context a surface topography measurement under laser exposure (in situ) was designed. The interferometric setup uses the phase-shift principle and allows a resolution in z-direction in the single-digit nanometer range. During irradiation with UV-laser light at 248 nm (KrF) and energy densities of up to 20 mJ/cm2 the change in single micro-mirrors topography was detected in situ. Measurementswith varying pulse energies were carried out to identify an impacton the device performance. In general, the setup is neither limited to a specific illumination wavelength nor to micro-mirrors as structures under test. KW - micro-mirror arrays KW - laser induced degradation Y1 - 2011 SN - 978-1-4577-1651-5 U6 - https://doi.org/10.1109/STYSW.2011.6155850 SP - 84 EP - 88 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Barreca, Davide A1 - Carraro, Giorgio A1 - Gasparotto, Alberto A1 - Maccato, Chiara A1 - Rossi, Francesca A1 - Salviati, Giancarlo A1 - Tallarida, Massimo A1 - Das, Chittaranjan A1 - Fresno, Fernando A1 - Korte, Dorota A1 - Štangar, Urška Lavrenčič A1 - Franko, Mladen A1 - Schmeißer, Dieter T1 - Surface Functionalization of Nanostructured Fe2O3 Polymorphs: From Design to Light-Activated Applications T2 - ACS Applied Materials & Interfaces N2 - Nanostructured iron(III) oxide deposits are grown by chemical vapor deposition (CVD) at 400−500 °C on Si(100) substrates from Fe(hfa)2TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = N,N,N′N′-tetramethylethylenediamine), yielding the selective formation of α-Fe2O3or the scarcely studiedε-Fe2O3 polymorphs under suitably optimized preparative conditions. By using Ti(OPr i)4(OPri= iso-propoxy) and water asatomic layer deposition (ALD) precursors, we subsequently functionalized the obtained materials at moderate temperatures (<300°C) by an ultrathin titanomagnetite (Fe3−xTixO4) overlayer. An extensive multitechnique character-ization, aimed at elucidating the system structure, morphology, composition and optical properties, evidenced that the photoactivated hydrophilic and photocatalytic behavior of the synthesized materials is dependent both on iron oxide phase composition and ALD surface modification. The proposed CVD/ALD hybrid synthetic approach candidates itself as a powerful tool for a variety of applications where semiconductor-based nanoarchitectures can benefit from the coupling with an ad hoc surface layer. KW - chemical vapor deposition KW - atomic layer deposition KW - iron oxide KW - titanomagnetite KW - photoactivated properties Y1 - 2013 U6 - https://doi.org/10.1021/am401475g SN - 1944-8252 VL - 5 IS - 15 SP - 7130 EP - 7138 ER - TY - GEN A1 - Adelmann, Christoph A1 - Cuypers, Daniel A1 - Tallarida, Massimo A1 - Rodriguez, Leonard A1 - De Clercq, Astrid A1 - Friedrich, Daniel A1 - Conard, Thierry A1 - Delabie, Annelies A1 - Seo, Jin Won A1 - Locquet, Jean-Pierre A1 - De Gendt, Stefan A1 - Schmeißer, Dieter A1 - Elshocht, Sven van A1 - Caymax, Matty T1 - Surface Chemistry and Interface Formation during the Atomic Layer Deposition of Alumina from Trimethylaluminum and Water on Indium Phosphide T2 - Chemistry of Materials N2 - The surface chemistry and the interface formation during the initial stages of the atomic layer deposition (ALD) of Al2O3 from trimethylaluminum (TMA) and H2O on InP(100)were studied by synchrotron radiation photoemission spectroscopy and scanning tunneling microscopy. The effect of the ex situ surface cleaning by either H2SO4 or (NH4)2S was examined. It is shown that the native oxide on the InP surface consisted mainly of indium hydrogen phosphates with a P enrichment at the interface with InP. After a (NH4)2S treatment, S was present on the surface as a sulfide in both surface and subsurface sites. Exposure to TMA led to the formation of a thin AlPO4 layer, irrespective of the surface cleaning. The surface Fermi level of p-type InP was found to be pinned close to midgap after H2SO4 cleaning and moved only slightly further toward the conduction band edge upon TMA exposure, indicating that the AlPO4/InP interface was rather defective. (NH4)2S passivation led to a Fermi level position of p-type InP close to the conduction band edge. Hence, the InP surface was weakly inverted, which can be attributed to surface doping by S donors. TMA exposure was found to remove surface S, which was accompanied by a shift of the Fermi level to midgap, consistent with the removal of (part of) the S donors in combination with a defective AlPO4/InP interface. Further TMA/H2O ALD did not lead to any detectable changes of the AlPO4/InP interface and suggested simple overgrowth with Al2O3. Y1 - 2013 U6 - https://doi.org/10.1021/cm304070h SN - 1520-5002 VL - 25 IS - 7 SP - 1078 EP - 1091 ER - TY - GEN A1 - Rossi, Francesca A1 - Fabbri, Filippo A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Modreanu, Mircea A1 - Attolini, Giovanni A1 - Salviati, Giancarlo T1 - Structural and luminescence properties of HfO2 nanocrystals grown by atomic layer deposition on SiC/SiO2 core/shell nanowires T2 - Scripta Materialia N2 - In this work we report the morphological, structural and luminescence properties of HfO2 nanocrystals grown on the surface of SiC/SiO2 core/shell nanowires by atomic layer deposition. All the studies are carried out in comparison with HfO2 nanocrystal aggregates grown on planar oxidized silicon substrates. The structural analyses reveal that HfO2has monoclinic structure with dif-ferent orientations. The cathodoluminescence emission shows the main components at 2.7 and 2.3 eV, deeply influenced by the arrangement and aggregation of the nanocrystals. KW - Silicon carbide KW - Silicon dioxide KW - Nanowires KW - Hafnium oxide KW - Nanocrystals Y1 - 2013 U6 - https://doi.org/10.1016/j.scriptamat.2013.08.017 SN - 1359-6462 VL - 69 IS - 10 SP - 744 EP - 747 ER - TY - GEN A1 - Haeberle, Jörg A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Naumann, Franziska A1 - Gruska, Bernd A1 - Arens, Michael A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films T2 - Beilstein Journal of Nanotechnology N2 - We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using thermal atomic layer deposition (T-ALD) and plasma enhanced atomic layer deposition (PE-ALD) in the SENTECH SI ALD LL system. The T-ALD Al2O3layers were deposited at 200 °C, for the PE-ALD films we varied the substrate temperature range between room temperature (rt) and 200 °C. We show data from spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4” wafers and correlatethem to X-ray photoelectron spectroscopy (XPS) results. The 200°C T-ALD and PE-ALD processes yield films with similar refractive indices and with oxygen to aluminum elemental ratios very close to the stoichiometric value of 1.5. However, in both also fragments of the precursor are integrated into the film. The PE-ALD films show an increased growth rate and lower carbon contaminations. Reducing the deposition temperature down to rt leads to a higher content of carbon and CH-species. We also find a decrease of the refractive index and of the oxygen to aluminum elemental ratio as well as an increase of the growth rate whereas the homogeneity of the film growth is not influenced significantly. Initial state energy shifts in all PE-ALD samples are observed which we attribute to a net negative charge within the films. KW - Al2O3 KW - ALD KW - ellipsometry KW - PE-ALD KW - XPS Y1 - 2013 U6 - https://doi.org/10.3762/bjnano.4.83 SN - 2190-4286 VL - 2013 IS - 4 SP - 732 EP - 742 ER - TY - CHAP A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces After Wet Chemical Treatments T2 - Meeting Abstracts-Electrochemical Society, San Francisco, 2013 KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 UR - http://ma.ecsdl.org/content/MA2013-02/30/2132.full.pdf+html N1 - MA2013-02(30) SP - S. 2132 PB - The Electrochemical Society ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Rodriguez, Leonard A1 - Conard, Thierry A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Transactions N2 - In this work synchrotron radiation photoemission spectroscopy (SRPES) is used to study InP surfaces after different wet chemical treatments. All results are compared to a typical fingerprint of surface components present on an as received InP sample. It is shown that acidified (HCl and H₂SO₄) treatments efficiently remove the native phosphate, although components like Pᴼ, Inᴼ and P(2±∆)+ remain present. In alkaline solution (NH₄OH) oxide remains present at the surface. As an alternative treatment, the immersion into (NH₄)₂S was studied. This passivation treatment results in fewer surface components which suggests that a higher quality surface is obtained. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - InP KW - Wet chemical treatment Y1 - 2013 U6 - https://doi.org/10.1149/05806.0297ecst SN - 1938-6737 SN - 1938-5862 VL - 58 IS - 6 SP - 297 EP - 303 ER - TY - GEN A1 - Cuypers, Daniel A1 - Dorp, Dennis H. von A1 - Tallarida, Massimo A1 - Brizzi, Simone A1 - Conard, Thierry A1 - Rodriguez, Leonard A1 - Mees, M. A1 - Arnauts, Sophia A1 - Schmeißer, Dieter A1 - Adelmann, Christoph A1 - De Gendt, Stefan T1 - Study of InP Surfaces after Wet Chemical Treatments T2 - ECS Journal of Solid State Science and Technology N2 - The influence of different wet chemical treatments (HCl, H₂SO₄, NH₄OH) on the composition of InP surfaces is studied by using synchrotron radiation photoemission spectroscopy (SRPES). It is shown that a significant amount of oxide remains present after immersion in a NH₄OH solution which is ascribed to the insolubility of In³⁺ at higher pH values. Acidic treatments efficiently remove the native oxide, although components like Pᴼ, Inᴼ and P(2±Δ)+ suboxides are observed. Alternatively, the influence of a passivation step in (NH₄)₂S solution on the surface composition was investigated. The InP surface after immersion into (NH₄)₂S results in fewer surface components, without detection of Pᴼ and P(2±Δ)+ suboxides. Finally, slight etching of InP surfaces in HCl/H₂O₂ solution followed by a native oxide removal step, showed no significant effect on the surface composition. KW - Synchrotron Radiation Photoelectron Spectroscopy KW - Scanning Tunneling Microscopy KW - InP KW - Wet chemical treatment Y1 - 2014 U6 - https://doi.org/10.1149/2.005401jss SN - 2162-8777 SN - 2162-8769 VL - 3 IS - 1 SP - N3016 EP - N3022 ER - TY - GEN A1 - Müller, Klaus A1 - Städter, Matthias A1 - Rachow, Fabian A1 - Hoffmannbeck, David A1 - Schmeißer, Dieter T1 - Sabatier-based CO2-methanation by catalytic conversion T2 - Environmental Earth Sciences N2 - The catalytic conversion of CO2is an important component for the reintegration of secondary products like CO2 or H2 into the energy supply. An example is the "power to gas’" concept with a conversion of CO2 into CH4. The CO2 is transferred into a carrier of chemical energy, with the possibility to feed the produced CH4 into the existing network of natural gas. At temperatures of around 350 °C, hydrogenation of CO2 to CH4 is possible by the Sabatier reaction CO2+4H2->CH4+H2O. One prerequisite for efficient kinetics of the Sabatier reaction is the application and optimization of catalysts. The focus of catalyst development is given to their performance under the conditions to be expected in the special application. As a part of the project Geoenergy-Research (GeoEn), we address questions related to the catalytic utilization of CO2 produced in the course of the oxyfuel combustion of lignite. In this contribution, we report on the experimental setup in laboratory scale, which enables an advanced characterization of the catalytic performance, including thermodesorption measurements at atmospheric pressure in order to determine the amount of adsorbed CO2 under real conditions. We also show data for activation energies, the catalytic performance as function of temperature and the long time stability of a commercial Ru-based catalyst. KW - CO2 KW - Sabatier reaction KW - Catalysis KW - RuO2 Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2609-3 SN - 1866-6280 VL - 70 IS - 8 SP - 3771 EP - 3778 ER - TY - GEN A1 - Das, Chittaranjan A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Linear dichroism in ALD layers of TiO₂ T2 - Environmental Earth Sciences N2 - We prepare TiO₂film by ALD and study their electronic properties by soft X-ray absorption spectroscopy (XAS) and photoelectron spectroscopy. We focus on XAS and X-ray linear dichroism to indentify band onset and learn about local distortion of the Ti–O octahedral atomic and about defects which cause Ti-based electronic states within the band gap. KW - Anatase KW - Dichroism KW - Amorphous Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2836-7 SN - 1866-6280 VL - 70 IS - 8 SP - 3785 EP - 3795 ER - TY - GEN A1 - Städter, Matthias A1 - Müller, Klaus A1 - Rachow, Fabian A1 - Richter, Matthias A1 - Schmeißer, Dieter T1 - Ambient pressure thermal desorption spectroscopy (AP-TDS) of NiO/SiO2 catalysts T2 - Environmental Earth Sciences N2 - The Sabatier reaction is a key process in the "power-to-gas" application which is considered to con-tribute to future chemical energy storage systems. In this contribution we focus on the catalytic active sites of a NiO catalyst supported on SiO2(NiO/SiO2) which is commonly used in the Sabatier reaction. A novel technique for the characterization of the active sites is presented and dis-cussed using thermal desorption spectroscopy at ambient pressure. This analytical tool is operated under reaction conditions and allows element specific measurements during the catalytic process of CO2 reforming towards methane. Beside the desorption experiments, XPS and XAS measurements of pristine and catalytically used samples are performed to determine the influence of the Sabatier reaction conditions on the surface structure of the catalyst. KW - CO2 KW - NiO KW - TDS KW - XAS KW - XPS Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2835-8 SN - 1866-6280 VL - 70 IS - 8 SP - 3779 EP - 3784 ER - TY - GEN A1 - Scheck-Wenderoth, Magdalena A1 - Schmeißer, Dieter A1 - Mutti, Maria A1 - Kolditz, Olaf A1 - Huenges, Ernst A1 - Schultz, Hans-Martin A1 - Liebscher, Axel A1 - Bock, Michaela T1 - Geoenergy: new concepts for utilization of geo-reservoirs as potential energy sources T2 - Environmental Earth Sciences KW - Geothermal technologies KW - capturing and storing and utilizing CO2 KW - hydraulic fracturing Y1 - 2013 U6 - https://doi.org/10.1007/s12665-013-2877-y SN - 1866-6280 VL - 70 IS - 8 SP - 3427 EP - 3431 ER - TY - GEN A1 - Gerlich, Lukas A1 - Ohsiek, Susanne A1 - Klein, Christoph A1 - Geiß, Mario A1 - Friedemann, Michael A1 - Kücher, Peter A1 - Schmeißer, Dieter T1 - Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth T2 - Microelectronic Engineering N2 - As a consequence of device shrinking the resistivity of the widely used TaN/Ta double barrier layer becomes an increasingly important parameter for device speed beyond the 32 nm technology node. In this study we describe the optimization of the deposition of TaN/Ta stacks in such a way that tantalum nitride layer thickness is minimized and tantalum grows in the favorable conducting alpha-phase. In the first part of the study we usedin situ ARXPS to investigate the growth of different tantalum nitride layers on SiO2 and SiOCH as a function of deposition time, nitrogen flow and deposition power. In the second part we analyzed the crystalline phase of a 20 nm thick tantalum layer deposited on top of the same series of tantalum nitride layers characterized in the growth study. The main findings are the appearance of tan-talum carbide and tantalum silicide as interface species for the deposition on SiOCH and only tantalum silicide for the deposition on SiO2. We found that alpha-tantalum grows preferably on tantalum carbide and nitrogen rich intermediate layers whereas silicide at the interface promotes the growth of beta-tantalum. To verify these findings we studied two additional modifications of the interface. A lower bias power for a deposition of tantalum nitride on SiO2 was used to confirm the role of tantalum silicide and a thermal treatment of a thin tantalum layer on SiOCH was applied to confirm the role of tantalum carbide. Finally, the contact resistance in via chains on patterned wafers for four selected processes showed the same trends as the sheet resistance of the corresponding barrier films on blanket wafer experiments. KW - Tantalum KW - in situ XPS KW - Ta-phase KW - TaNx KW - Barrier KW - Interface Y1 - 2013 U6 - https://doi.org/10.1016/j.mee.2013.01.017 VL - Vol. 106 SP - 63 EP - 68 ER - TY - GEN A1 - Henkel, Karsten A1 - Gargouri, Hassan A1 - Gruska, Bernd A1 - Arens, Michael A1 - Tallarida, Massimo A1 - Schmeißer, Dieter T1 - Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by PE-ALD at 25°C ≤ T ≤ 200°C T2 - Journal of Vacuum Science and Technology A N2 - In this work, plasma enhanced atomic layer deposited (PE-ALD) samples were prepared at substrate temperatures in the range between room temperature (RT) and 200 °C and investigated by capacitance–voltage and conductance–voltage recordings. The measurements are compared to standard thermal atomic layer deposition (T-ALD) at 200 °C. Very low interface state density (D it) ~1011 eV−1 cm−2 could be achieved for the PE-ALD process at 200 °C substrate temperature after postdeposition anneal (PDA) in forming gas at 450 °C. The PDA works very effectively for both the PE-ALD and T-ALD at 200 °C substrate temperature delivering also similar values of negative fixed charge density (N fix) around −2.5 × 1012 cm−2. At the substrate temperature of 150 °C, highest N fix (−2.9 × 1012 cm−2) and moderate D it (2.7 × 1011 eV−1 cm−2) values were observed. The as deposited PE-ALD layer at RT shows both low D it in the range of (1 to 3) × 1011 eV−1 cm−2 and low N fix (−4.4 × 1011 cm−2) at the same time. The dependencies of N fix, D it, and relative permittivity on the substrate temperatures and its adjustability are discussed. KW - Atomic layer deposition (ALD) KW - Al2O3 KW - dielectric properties KW - interface state density KW - fixed oxide charge KW - permittivity Y1 - 2014 UR - http://link.aip.org/link/?JVA/32/01A107&aemail=author U6 - https://doi.org/10.1116/1.4831897 VL - 1 IS - 32 SP - 01A107-1 EP - 01A107-10 ER - TY - GEN A1 - Richter, Matthias A1 - Starke, Ulrich A1 - Schmeißer, Dieter T1 - Multiple Auger processes in Graphene T2 - Journal of Electron Spectroscopy and Related Phenomena N2 - Resonant Auger decay processes have been studied by resonant photoemission spectroscopy (resPES) and X-ray absorption spectroscopy (XAS) in Graphene systems. The pi*-resonance is used to identify the degree of localization of the lowest pi*-orbitals in the conduction band. Localization and lifetime of the photo-excited intermediate state cause the formation of multiple Auger processes. For the Graphene systems we identify two novel Auger decay combinations with a four hole final state: the (S+S) and the(S+S)* decay. We demonstrate that these processes are sensitive for interlayer coupling and interactions with the metallic free electrons of the substrate. KW - Graphene KW - X-Ray absorption spectroscopy KW - XAS KW - resonant photoemission spectroscopy KW - resPES KW - multiple hole Auger Y1 - 2014 U6 - https://doi.org/10.1016/j.elspec.2013.12.009 SN - 0368-2048 IS - Vol. 192 SP - 1 EP - 6 ER - TY - GEN A1 - Tallarida, Massimo A1 - Das, Chittaranjan A1 - Schmeißer, Dieter T1 - Quantum size effects in TiO2 thin films grown by atomic layer deposition T2 - Beilstein Journal of Nanotechnology N2 - We study the atomic layer deposition of TiO2 by means of X-ray absorption spectroscopy. The Ti precursor, titanium isopropoxide, was used in combination with H2O on Si/SiO2 substrates that were heated at 200 °C. The low growth rate (0.15 Å/cycle) and the in situ characterization permitted to follow changes in the electronic structure of TiO2 in the sub-nanometer range, which are influenced by quantum size effects. The modified electronic properties may play an important role in charge carrier transport and separation, and increase the efficiency of energy conversion systems. KW - atomic layer deposition (ALD) KW - charge transfer multiplet KW - covalency KW - energy conversion KW - quantum size effects KW - titanium dioxide (TiO2) KW - water splitting KW - X-ray absorption spectroscopy (XAS) Y1 - 2014 U6 - https://doi.org/10.3762/bjnano.5.7 SN - 2190-4286 IS - 5 SP - 77 EP - 82 ER - TY - GEN A1 - Richter, Matthias A1 - Friedrich, Daniel A1 - Schmeißer, Dieter T1 - Interlayer-exciton mediated three-hole-Auger-decay in the pi-band of highly oriented pyrolytic graphite T2 - Physica E N2 - Resonant photoemission spectroscopy(resPES) is used to probe the occupied pi- and unoccupied pi*-bands of carbon thin films with particular focus on the Auger decay. Highly Oriented Pyrolytic Graphite (HOPG) is studied at the C1s edge. We find strong resonant features at 285.5 eV and 292 eV in the resPES diagram. The normal two-hole Auger decay proceeds under constant kinetic energy (451)only in the sigma*-region. In the pi*-region, however, it proceeds under 67.5° in terms of a Ebind(w) diagram. We attribute this to a multiple Auger decay with a net three hole final state. For this novel decay process we propose a model.We discuss the long lifetime of the first resonant excitation and conclude that it arises from the strong excitonic character of the first resonant state. We use HOPG as a reference system and suggest that this novel process is a tool to identify interlayer–substrate interaction of the carbon layers involved. KW - resonant excitation KW - three hole Auger decay KW - X-ray photoelectron spectroscopy KW - HOPG Y1 - 2014 U6 - https://doi.org/10.1016/j.physe.2013.01.015 SN - 1386-9477 VL - Vol. 56 SP - 441 EP - 446 ER - TY - GEN A1 - Haeberle, Jörg A1 - Richter, Matthias A1 - Galazka, Zbigniew A1 - Janowitz, Christoph A1 - Schmeißer, Dieter T1 - Resonant Photoemission at the O1s threshold to characterize In2O3 single crystals T2 - Thin Solid Films N2 - We report on spectroscopic investigations on In2O3 single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. We analyze the electronic structure and assign the O2p to build the valence band and both, O2p and In5s5p states to contribute to the conduction band (CB). We determine the partial density of states for the valence and CBs and find a strong hybridization of O2p and In5s states. This is deduced from constant final state spectra on the O-KLL-Auger over the O K-edge and In M4,5-edge and a comparison to the corresponding X-ray absorption spectroscopy data.We also identify several types of defects. A broad band of oxygen derived defects is identified that extends throughout the gap. These are attributed to small polarons which cause an anti-resonance in the valence states around the O1s threshold. In addition, a separate Auger decay at resonance indicates the existence of localized charge transfer states which involves localized In5s5p states. KW - In2O3 KW - TCO KW - X-ray spectroscopy KW - Small polaron KW - Charge transfer Y1 - 2014 U6 - https://doi.org/10.1016/j.tsf.2013.03.036 SN - 0040-6090 SN - 1879-2731 VL - 2014 IS - 555 SP - 53 EP - 56 ER - TY - GEN A1 - Kramm, Ulrike Ingrid A1 - Herrmann-Geppert, Iris A1 - Fiechter, Sebastian A1 - Zehl, Gerald A1 - Zizak, Ivo A1 - Dorbandt, Iris A1 - Schmeißer, Dieter A1 - Bogdanoff, Peter T1 - Effect of iron carbide formation on the number of active sites in Fe-N-C catalysts for the oxygen reduction reaction in acidic media T2 - Journals of materials chemistry A KW - Oxygen reduction reaction (ORR) KW - Fe-N-C catalyst KW - acidic media KW - high-temperature X-ray diffraction (HT-XRD) KW - thermogravimetry coupled with mass-spectroscopy (TG-MS) Y1 - 2014 U6 - https://doi.org/10.1039/c3ta13821f SN - 2050-7488 SN - 2050-7496 IS - 8 SP - 2663 EP - 2670 ER - TY - GEN A1 - Kramm, Ulrike Ingrid A1 - Lefèvre, Michel A1 - Larouche, Nicholas A1 - Schmeißer, Dieter A1 - Dodelet, Jean-Pol T1 - Correlations between Mass Activity and Physicochemical Properties of Fe/N/C Catalysts for the ORR in PEM Fuel Cell via 57 Fe Mössbauer Spectroscopy and Other Techniques T2 - Journal of the American Chemica Society N2 - The aim of this work is to clarify the origin of the enhanced PEM-FC performance of catalysts prepared by the procedures described in Science 2009, 324, 71 and Nat. Commun. 2011, 2, 416. Catalysts were characterized after a first heat treatment in argon at 1050 °C (Ar) and a second heat treatment in ammonia at 950 °C (Ar + NH3). For the NC catalysts a variation of the nitrogen precursor was also implemented. 57Fe Mössbauer spectroscopy, X-ray photoelectron spectroscopy, neutron activation analysis, and N2 sorption measurements were used to characterize all catalysts. The results were correlated to the mass activity of these catalysts measured at 0.8 V in H2/O2 PEM-FC. It was found that all catalysts contain the same FeN4-like species already found in INRS Standard (Phys. Chem. Chem. Phys. 2012, 14, 11673). Among all FeN4-like species, only D1 sites, assigned to FeN4/C, and D3, assigned to N-FeN2+2 /C sites, were active for the oxygen reduction reaction (ORR). The difference between INRS Standard and the new catalysts is simply that there are many more D1 and D3 sites available in the new catalysts. All (Ar + NH3)-type catalysts have a much larger porosity than Ar-type catalysts, while the maximum number of their active sites is only slightly larger after a second heat treatment in NH3. The large difference in activity between the Ar-type catalysts and the Ar + NH3 ones stems from the availability of the sites to perform ORR, as many sites of the Ar-type catalysts are secluded in the material, while they are available at the surface of the Ar + NH3-type catalysts. KW - Fe-N-C catalyst KW - 57 Fe Mössbauer Spectroscopy KW - X-ray photo-electron spectroscopy KW - neutron activation analysis KW - nitrogen sorption measurements KW - oxygen reduction reaction (ORR) KW - PEM Fuel Cell Y1 - 2014 U6 - https://doi.org/10.1021/ja410076f SN - 0002-7863 SN - 1520-5126 VL - 136 IS - 3 SP - 978 EP - 985 ER - TY - GEN A1 - Adelmann, Christoph A1 - Schram, Tom A1 - Chew, Soon Aik A1 - Woicik, J. C. A1 - Brizzi, Simone A1 - Tallarida, Massimo A1 - Schmeißer, Dieter A1 - Horiguchi, Naoto A1 - Elshocht, Sven van A1 - Ragnarsson, Lars-Åke T1 - On the scalability of doped hafnia thin films T2 - Applied Physics Letters N2 - The scaling behavior of Gd- and Al-doped HfO2 films as gate dielectrics in metal-oxide-semiconductor (MOS) capacitors was studied. For equivalent oxide thicknesses (EOTs) in the range of 10 Å, crystallized Gd:HfO2 showed higher leakage current densities than crystallized Al:HfO2, with undoped HfO2 in between. Ultimately, the scalability of Al:HfO2 was limited by the ability to crystallize the films at a given thermal budget. As a result, for post-deposition annealing at 800 °C, the EOT of Al:HfO2 based MOS capacitors was limited to ∼8 Å. However, for such an EOT, leakage current densities were reduced by about 100× with respect to HfO2. This demonstrates the high potential of Al:HfO2 for low-standby-power MOS devices. KW - scalability KW - hafnia thin films KW - Al:HfO2 KW - Gd:HfO2 KW - EXAFS KW - equivalent oxide thickness (EOT) KW - leakage current KW - X-ray absorption spectroscopy (XAS) Y1 - 2014 U6 - https://doi.org/10.1063/1.4870075 SN - 0003-6951 SN - 1077-3118 IS - 104 SP - 122906-1 EP - 122906-4 ER -