TY - CHAP A1 - Müller, Klaus A1 - Paloumpa, Ioanna A1 - Schwiertz, Carola A1 - Jahnke, Agnes A1 - Schmeißer, Dieter T1 - All Polymer Field-Effect-Transistors based on Low-Cost-Microstructuring T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Thin film transistors with P3HT as active layer have been prepared by spin coating. The electrodes for source and drain have been prepared by a low cost plotting method with colloidal graphite or carbon black as the conducting material. PEDOT or carbon black was used as gate electrode. The devices, prepared by different methods and materials have been characterized by electrical measurements, for example, their transfer and output characteristics. Furthermore, the influence of different materials on effects like hysteresis or reproducibility will be compared. In addition, we describe a project investigating new types of biosensors with functionalized gate electrodes. Exchanges of dipole moments or charges by immobilisation of biomolecules will change the electrical characteristic of the transistor, which leads to a sensing signal proportional to their amount. KW - organic field effect transistor KW - low cost printing KW - microstructuring Y1 - 2004 UR - http://www.dpg-verhandlungen.de/year/2004/conference/regensburg/part/syoh/session/5/contribution/75?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Torche, Mohamed A1 - Müller, Klaus A1 - Henkel, Karsten A1 - Lupina, Grzegorz A1 - Goryako, Andrey A1 - Wollweber, Jürgen A1 - Schmeißer, Dieter T1 - Investigations of 3C-SiC growth on Si (001) T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Carbide was grown on Si (001) - substrates with supply of C2H2. Investigation of the interface Si/SiC (buffer layer) is essential for optimized preparation conditions, leading to a high quality of the growing SiC crystal. In addition to the lattice mismatch of 20 per cent between Si and SiC, which causes defects like dislocations or stacking faults, the chemical homogeneity of this layer is important. XPS was used to characterize the first state of SiC crystal growth on the Si substrate. Carbonizing with C2H2 leads to surface reactions which build up the buffer layer. By using electron spectroscopy, it was possible to characterize the SiC/Si (001) buffer layer, depending on the following reaction parameters: Tsubstrate , PC2H2 , PH2 , the ratio of pressures and the reaction time. The measurements were performed in terms of the content of carbide, oxide and roughness/etching-efficiency (Profilometer) for the reaction parameters above. We found, that the most critical parameter is the temperature of the substrate (Tsubstrate). KW - 3C-SiC KW - chemical vapor deposition (CVD) KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2004 UR - http://www.dpg-verhandlungen.de/year/2004/conference/regensburg/part/hl/session/44/contribution/42?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Stability and electronic properties of silicates in the system SiO2 - Pr2O3 - Si(001) T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Hetero- oxides are the candidates to replace SiO2 as the gate dielectric material for sub-0.1µm CMOS technology. In particular, the basic interaction mechanisms at the interface are a key issue and a solid knowledge of these mechanisms is required to address reliability issues. The challenge in material science is to understand the chemical bonding of the hetero oxides and Si on a microscopic scale. This report focuses on the interaction of the high dielectric constant (DK) material Pr2O3 with SiO2 and the bare Si(001) surface. Photoelectron spectroscopy (PES) using tunable Synchrotron radiation (undulator U49/2 at BESSY II) is shown to provide spectroscopic information which is used for characterization of the electronic structure elements at the interface as well as for a non-destructive depth profiling. The chemical state of the Si atoms at the interface is identified and the chemical stability of the various oxide phases is discussed. We determine the variation of the elemental composition across the interface and follow the stability of the silicate phase. KW - Pr2O3 KW - high-k KW - X-ray photoelectron spectroscopy (XPS) KW - silicate Y1 - 2004 UR - http://www.dpg-verhandlungen.de/year/2004/conference/regensburg/part/hl/session/31/contribution/3?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Hoffmann, Patrick A1 - Schmeißer, Dieter T1 - Depth Profiling of Ultrathin Oxynitride Layers Using Synchrotron Radiation T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - To determine the depth structure of samples various destructive (SIMS, depth profiling with sputtering and AES or XPS) and non-destructive techniques (RBS - Rutherford-Back-Scattering) are available. But all methods are less suitable for investigating especially ultrathin (<5nm) layers: While the destructive techniques suffer from Ion-mixing the RBS can not deliver chemical information. Due to the depth-dependent attenuation of photo-electrons XPS also contains depth information. As XPS gives only a sum signal across the layer one needs to modify the Inelastic Mean Free Path (IMFP) of the photo-electrons to vary the depth information in the photo-electron spectra. This can be done by changing the kinetic energy with the use of different excitation energies delivered from a Synchrotron. Using this method we were able to investigate the chemical depth structure of silicon oxynitride layers. The layers were grown on Si(111) by a N2O-treatment. The depth profile of that layer shows a silicon nitride layer forming the interface between the silicon substrate and the oxynitride. KW - oxynitride KW - X-ray photoelectron spectroscopy KW - depth profiling Y1 - 2003 UR - http://www.dpg-verhandlungen.de/year/2003/conference/dresden/part/o/session/12/contribution/36?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - Elektronenspektroskopie an Kupferindiumdisulfid Oberflächen T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - In diesem Beitrag wird eine Studie vorgestellt, welche die elektronenspektroskopische Untersuchung von CIS-Oberflächen für Solarzellen zum Thema hatte. XPS-UPS Analysen von Cu-reichen CuInS2-Dünnfilmen zeigten, daß die Variationen der Elementverhältnisse im Verlauf eines kontrollierten Heizprozesses entlang binärer Schnitte des ternären Phasendiagramms Cu-In-S verlaufen. Die Elementverhältnisse bei zusätzlich aufgedampftem Kupfer und erhöhter Temperatur föhrten in den Homgenitätsbereich von CuInS2. PEEM-Untersuchungen zur Probenmorphologie zeigten, daß ein Sinterprozess während der Temperung der Proben bis 550 C und einer Belegung mit Kupfer erfolgt. Mit Differenz-PEEM-Aufnahmen konnten kupferreiche Fremdphasen wie CuS an der Oberfläche sichtbar gemacht werden. Die in-situ Charakterisierung des Oberflächenchemismus im Verlauf der Temperung zeigte eine zunehmende Homgenität der Elementverteilung, was auf einen geringer werdenden Anteil von Fremdphasen hindeutet. NEXAFS-Aufnahmen ergaben erstmals Informationen über die Bandstruktur oberhalb der Fermienergie und ebenfalls Hinweise auf Fremdphasen sowie deren Reaktionen bei höheren Temperaturen. KW - CIS-Solarzellen KW - Röntgen-Absorptionsspektroskopie KW - Photoemissionselektronenmikroskopie Y1 - 2003 UR - http://www.dpg-verhandlungen.de/year/2003/conference/dresden/part/hl/session/14/contribution/98?lang=de PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Styervoyedov, Andriy A1 - Paloumpa, Ioanna A1 - Schmeißer, Dieter T1 - Composition and thermal stability of thin functional oxidic (Pr, La, Y) and metallic (Ru, Ti) layers on Si and SiC substrates T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Thin Pr-, La- and Y- based oxide layers for applications as gate dielectric in metal-oxide-semiconductor (MOS) structures are investigated with x-ray photoelectron spectroscopy. The films with a thickness of around 2nm have been prepared on Si and SiC wafers by various chemical deposition methods based on nitrate solutions. In addition, we report on Ti- and Ru- based metal contacts prepared in the same way. The film composition is analysed and annealing steps in vacuum up to 900∘C have been applied to test their thermal stability. The interface characteristics, surface composition and thermal stability of MOS functional multilayers have been studied and will be presented. KW - Pr-, La- and Y- based oxides KW - MOS transistor KW - high-k KW - X-Ray photoelectron spectroscopy Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/ds/session/24/contribution/17?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Schmeißer, Dieter T1 - The initial interaction of Pr2O3 to (001) and (111) oriented Si substrates T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - The high surface sensitivity of synchrotron based core level spectroscopy is employed to study the initial growth of Pr2O3 on Si(001) and Si(111) substrates. The Si2p core levels are different for the two substrates when the exposure is below 1nm. The core level shifts indicate a single bonding of the oxide on the terminal Si atom in Si(111) while on Si(001) the two dangling bonds are reactive. On both surfaces a significant broadening in the substrate emission is found and interpreted in terms of non bonding Si atoms located at the interface. Upon increasing the Pr2O3 exposure above 1nm the Si back bonds in the first Si layer are attacked to form Si - O - Pr bonds which cause a silicate like core level shift. KW - Pr2O3 KW - high-k KW - X-ray photoelectron spectroscopy (XPS) Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/ds/session/11/contribution/2?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Lupina, Grzegorz A1 - Schroeder, Thomas A1 - Dabrowski, Jarek Marek A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - Ti-doping of Pr silicate layers for high-k dielectrics applications T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Near-term downscaling of the metal-oxide-semiconductor field-effect transistors (MOSFETs) requires the replacement of the SiO2 gate oxide with a material having a higher dielectric constant. Recent studies indicate that silicate materials are the most promising candidates; among them are Pr silicates. Applying a combination of x-ray photoelectron spectroscopy (XPS), electrical measurements (C-V), and ab initio calculations, we investigated the effect of thin Ti doping on the structural and electrical properties of the gate stacks composed of a Pr silicate film and a SiO2-based interfacial buffer layer. Metallic Ti was deposited at room temperature after the formation of the Pr silicate dielectric. The resulting layered structures were annealed under ultra-high vacuum (UHV) at various temperatures between 70∘C and 880∘C. XPS indicates that the evaporated layer preserves its metallic character over the whole range of UHV annealing temperatures. Synchrotron radiation XPS at BESSY II shows that large amounts of Ti atoms incorporated into the Pr silicate remain metallic even after air exposure at room temperature. Annealing in nitrogen ambient at 300∘C leads to the oxidation of these atoms so that a mixed Pr:Ti silicate is formed. We show that the so formed dielectrics exhibit an improved equivalent oxide thickness and a reduced density of interface states. KW - high-k KW - X-ray photoelectron spectroscopy KW - ab inito calculations KW - Capacitance-voltage measurements KW - Pr silicate Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/df/session/6/contribution/5?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Henkel, Karsten A1 - Paloumpa, Ioanna A1 - Müller, Klaus A1 - Schmeißer, Dieter T1 - P(VDF/TrFE) as a ferroelectric dielectric for Organic Field effect Transistors in MFIS structure T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - MFIS structures consisting of metal, ferroelectric poly[vinylidene fluoride trifluoroethylene](P[VDF/TrFE]), insulator, semiconductor (Si) are fabricated and the influence of the polarization of the P(VDF/TrFE) on the CV characteristics of these structures is investigated. We find a characteristic ferroelectric hysteresis in the CV curves upon increasing the voltage scan window (e.g.-U...U,U=6...30V, |UP(VDF/TrFE)|≤15V, dP(VDF/TrFE)=300 nm). A writing process with adequate electric fields causes large shifts in the flatband voltage ( Δ UFB>4V for the quoted example before) which are stable over days. We report on our investigations which focus on the switching behavior by varying the parameters like polymer thickness, writing field strength and time, long time stability, reversing voltage and insulating material (SiO2, PMMA (Polymethylmetacrylate)). This material combination is favorable for transfer into our full organic concept of field effect transistors for application as a nondestructive readout memory (NDRO) cell. KW - P(VDF/TrFE) KW - Organic ferroelectric field effect transistor KW - capacitance voltage measurements Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/syoo/session/6/contribution/39?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - CHAP A1 - Müller, Klaus A1 - Burkov, Yevgen A1 - Schmeißer, Dieter T1 - Surface potential profiling on organic thin film transistors by photoemission-electron-microscopy (PEEM) T2 - Verhandlungen der Deutschen Physikalischen Gesellschaft N2 - Surface potential imaging with Photoemission-electron-microskopy (PEEM) in high lateral resolution is introduced as a new tool for the characterisation of organic transistor structures. We use source-drain- electrode structures of different organic materials like carbon-black or graphite plotted on a printing foil. Semiconducting regioregular Poly(3-Hexylthiophene-2,5-diyl) (P3HT) was deposited by spin coating. For our measurements we used radiation of a standard high pressure Hg-lamp (4,9 eV) and synchrotron radiation at the BESSYII-U49/2 beam line. In contrast to Kelvin-AFM measurements of the surface potential, PEEM enables a simultaneous analysis of chemical composition by photoelectron spectroscopy. UPS, for example, at zero potential gives information on chemical homogeneity of the organic semiconductor in lateral resolution. PEEM images at applied voltages, compared with UPS-spectra, gives informations on doping profiles in the semiconductor, for example. In conclusion, PEEM should be a complementary method for characterisation of the surface potential with Kelvin-AFM. In addition, PEEM gives opportunities for measurements of chemical composition in the working state of the transistor (applied voltages). KW - organic field effect transistor KW - Photoemission-electron-microscopy (PEEM) KW - Kelvin-AFM KW - X-Ray photoelectron spectroscopy Y1 - 2005 UR - http://www.dpg-verhandlungen.de/year/2005/conference/berlin/part/syoo/session/6/contribution/41?lan=en PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER -