TY - GEN A1 - Schweiger, Severin A1 - Schulze, Tim F. A1 - Schlipf, Simon A1 - Reinig, Peter A1 - Schenk, Harald T1 - Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation T2 - Journal of Optical Microsystems N2 - Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power and scan speed to find dependent mechanical material properties. The employed photoresists were examined using Raman spectroscopy to find the degree of conversion (DC) of monomer to polymer, and subsequently, micro- or nanoindentation was used to find Young’s modulus (E). For the photoresist IP-Dip, the attained DC and E ranged from 20% to 45% and 1 to 2.1 GPa, respectively. The results were compared with reports found in the literature. For IP-Q, the attained DC and E ranged from 53% to 80% and 0.5 to 1.3 GPa, respectively. The characterized properties of IP-Q manifest as the current state of knowledge of the material. Y1 - 2022 U6 - https://doi.org/10.1117/1.jom.2.3.033501 SN - 2708-5260 VL - Vol. 2 IS - 3 ER - TY - PAT A1 - Kurth, Eberhard A1 - Kunath, Christian A1 - Schenk, Harald T1 - Ion-sensitive structure and method for producing the same Y1 - 2023 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213 ER - TY - PAT A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Micromechanical devices with mechanical actuators Y1 - 2023 UR - https://www.freepatentsonline.com/11639718.html ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger T1 - MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same Y1 - 2023 UR - https://www.freepatentsonline.com/11554950.html ER - TY - GEN A1 - Monsalve Guaracao, Jorge Mario A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Design of Micromachined Ultrasonic Transducers for Variability with the Sample-Average Approximation Method T2 - Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023 Y1 - 2023 SN - 978-3-8007-6204-0 SN - 978-3-8007-6203-3 SP - S. 639 PB - VDE Verlag CY - Berlin ER - TY - GEN A1 - Villasmunta, Francesco A1 - Steglich, Patrick A1 - Heinrich, Friedhelm A1 - Villringer, Claus A1 - Mai, Andreas A1 - Schrader, Sigurd A1 - Schenk, Harald T1 - Optical Through-Silicon Waveguides for 3D-Chip-Interconnections N2 - Integrated optical interconnections in silicon chips have the potential to replace electrical interconnects between integrated circuits thanks to their high bandwidth and low energy communication promises. A silicon dielectric waveguide can be etched through the full thickness of a silicon substrate providing a monolithically integrated solution for 2.5D and 3D photonic architectures. The optical through-silicon waveguide design presented here is based on Finite Difference Time Domain simulations, while the fabrication takes advantage of the innovative plasma cryo-etching process that provides smooth sidewalls and tapering angle tunability. Such structures can provide effective mode size conversion, therefore favoring the coupling of external light sources to photonic integrated circuits and the stacking of multiple optically interconnected dies. KW - Integrated Optics KW - Micro Optics KW - Optical Information Transmission Y1 - 2023 UR - https://www.dgao-proceedings.de/abstract/abstract_only.php?id=2920 ER - TY - GEN A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Ruffert, Christine A1 - Jongmanns, Marcel A1 - Schenk, Harald T1 - Highly integrable silicon micropumps using lateral electrostatic bending actuators T2 - Microsystem Technologies N2 - We present the design, fabrication, and characterization of an innovative silicon-based micropump with high potential for portable lab-on-chip (LoC) as well as point-of-care (PoC) applications. The actuators of the pump are electrostatic driven in-plane bending devices, which were presented earlier (Borcia et al. in Phys Rev Fluids 3(8): 084202, 2018. 10.1103/PhysRevFluids.3.084202; Uhlig et al. in Micromachines, 9(4), 2018. 10.3390/mi9040190). This paper presents the characterization results achieved with the micropump. The dielectric non-polar liquid Novec7100™ was used as a test liquid due to its adequate physical properties. When applying a periodic voltage of 130 V, a flow rate of up to 80 µL/min was detected. The counter pressure amounts up to 30 kPa and the correspondent fluidic power (volumetric flow rate times the counter pressure) was calculated to 10 µW. The pump contains passive flap valves at the inlet and outlet, which are based on a bending cantilever design. Depending on the application requirements, the micropump can be designed modularly to adjust the specific parameters by an adequate arrangement of pump base units. In this paper, the proof of principle is shown using a single base unit with different number of stacked NED-actuator beams, as well as the serial arrangement of base units. Both modular concepts target the increase of backpressure of the NED-micropump in an inherently different way compared to conventional membrane micropumps. Y1 - 2024 U6 - https://doi.org/10.1007/s00542-024-05635-w SN - 0946-7076 VL - 30 IS - 8 SP - 949 EP - 960 PB - Springer Science and Business Media LLC ER - TY - GEN A1 - Schenk, Harald T1 - Silicon integrated electrostatic drives T2 - International Conference and Exhibition on New Actuator Systems and Applications 2024 N2 - Presentation held at ACTUATOR 2024, International Conference and Exhibition on New Actuator Systems and Applications, June 13 - 14, 2024, Wiesbaden, Germany Y1 - 2024 U6 - https://doi.org/10.24406/publica-3964 ER - TY - GEN A1 - Schenk, Harald ED - Schenk, Harald T1 - Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung T2 - Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung N2 - Leben mit Krebs - Digitalisierung, Künstliche Intelligenz in Medizin und Tumormedizin Y1 - 2024 U6 - https://doi.org/10.24406/publica-3965 ER - TY - GEN A1 - Schenk, Harald T1 - Highly integrated active Spatial Light Modulators - from imaging to holography T2 - International Conference on Machine Vision 2024 Y1 - 2024 U6 - https://doi.org/10.24406/publica-3963 ER - TY - GEN A1 - Guaraco, Jorge Mario Monsalve A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Mrosk, Andreas A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Design of micromachines under uncertainty with the sample-average approximation method T2 - Journal of Advanced Mechanical Design, Systems, and Manufacturing Y1 - 2024 U6 - https://doi.org/10.1299/jamdsm.2024jamdsm0018 SN - 1881-3054 VL - 18 (2024) IS - 2 PB - Japan Society of Mechanical Engineers ER - TY - GEN A1 - Villasmunta, Francesco A1 - Steglich, Patrick A1 - Villringer, Claus A1 - Schrader, Sigurd A1 - Schenk, Harald A1 - Mai, Andreas A1 - Regehly, Martin ED - Schröder, Henning ED - Chen, Ray T. T1 - Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections T2 - Optical Interconnects XXIV Y1 - 2024 U6 - https://doi.org/10.1117/12.3003146 PB - SPIE ER - TY - CHAP A1 - Schenk, Harald A1 - Schulze, Matthias T1 - Micro mirrors T2 - Handbook of Silicon Based MEMS Materials and Technologies Y1 - 2020 SN - 978-0-12-817786-0 U6 - https://doi.org/10.1016/B978-0-12-817786-0.00049-9 SP - 949 EP - 968 PB - Elsevier ET - Third Edition ER - TY - CHAP A1 - Schenk, Harald T1 - Optische Mikrosysteme T2 - Lehrbuch Mikrotechnologie Y1 - 2011 SN - 9783446425606 U6 - https://doi.org/10.3139/9783446429741.017 SP - 539 EP - 592 PB - Carl Hanser Verlag GmbH & Co. KG CY - München ER - TY - PAT A1 - Schenk, Harald A1 - Shashank, S. A1 - Gaudet, M. T1 - MEMS actuator and method for controlling a MEMS actuator N2 - The invention provides a MEMS actuator comprising at least one actuator cell. The actuator cell comprises a first connecting piece and a second connecting piece. A mechanical connection between the first connecting piece and the second connecting piece comprises at least one connector unit. The connector unit comprises a first beam and a second beam being serially connected with the first beam so as to provide for a meandered shape. At least the first beam comprises a serial arrangement of a plurality of actuator elements configured to change a bending of the first beam upon actuation. Y1 - 2022 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=EP2021082038 ER - TY - PAT A1 - Schenk, Harald A1 - Sander, T. A1 - Schmidt, J.-U. A1 - Gatto, A. A1 - Yang, M. A1 - Heber, J. A1 - Kaiser, N. T1 - Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof Y1 - 2009 ER - TY - PAT A1 - Schenk, Harald A1 - Sander, T. A1 - Scholles, M. A1 - Schwarzenberg, M. A1 - Wolter, A. T1 - Projection apparatus for scanningly projection Y1 - 2010 ER - TY - PAT A1 - Schenk, Harald T1 - Micromechanical device Y1 - 2014 ER - TY - PAT A1 - Schenk, Harald A1 - Wolter, A. A1 - Schwarzenberg, M. T1 - Projection apparatus Y1 - 2005 ER - TY - PAT A1 - Schenk, Harald A1 - Sander, T. A1 - Pufe, W. T1 - Microoptic reflecting component N2 - The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present. Y1 - 2009 ER - TY - PAT A1 - Schenk, Harald A1 - Wolter, A. A1 - Sander, T. A1 - Drabe, C. A1 - Klose, T. T1 - Oscillating, deflectable micromechanical element and method for use thereof Y1 - 2012 ER - TY - PAT A1 - Schenk, Harald A1 - Drabe, C. T1 - Micro-optical arrangement Y1 - 2013 ER - TY - PAT A1 - Schenk, Harald T1 - Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element Y1 - 2011 ER - TY - PAT A1 - Schenk, Harald A1 - Sander, T. A1 - Heber, J. A1 - Klose, T. A1 - Bergmann, A. A1 - Gerwig, C. A1 - Knieling, T. T1 - Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device Y1 - 2012 ER - TY - PAT A1 - Schenk, Harald A1 - Zimmer, F. A1 - Wolter, A. T1 - Mikrooptisches Beugungsgitter sowie Verfahren zur Herstellung T2 - Micro-optical electromagnetic radiation diffraction grating and method for manufacture Y1 - 2017 ER -