TY - GEN A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Stolz, Michael A1 - Schenk, Hermann A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schimmanz, Klaus A1 - Schuffenhauer, David T1 - Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers T2 - Microsystems and Nanoengineering N2 - MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. Y1 - 2019 U6 - https://doi.org/10.1038/s41378-019-0095-9 SN - 2055-7434 IS - 5 ER - TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Männchen, Andreas A1 - Brocks, Tobias T1 - Acoustic validation of electrostatic all-silicon MEMS-speakers T2 - AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 Y1 - 2019 UR - https://www.aes.org/e-lib/browse.cfm?elib=20522 U6 - https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 ER - TY - CHAP A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically in-plane driven silicon micropump for modular configuration T2 - Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands Y1 - 2017 UR - http://publica.fraunhofer.de/dokumente/N-477736.html SP - 57 EP - 60 PB - University of Twente CY - Enschede ER - TY - PAT A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Mikromechanical devices with mechanical actuators T1 - Mikromechanische Bauelemente mit mechanischen Aktuatoren Y1 - 2018 ER - TY - CHAP A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Stolz, Michael A1 - Arscott, S. A1 - Conrad, Holger A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatic bending actuators with liquid filled nanometer scale gap T2 - MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017 Y1 - 2017 UR - http://ieeexplore.ieee.org/document/7863369/ SN - 978-1-5090-5078-9 SN - 978-1-5090-5079-6 SP - 175 EP - 178 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Wagner, J. A1 - Ostendorf, Ralf A1 - Grahmann, Jan A1 - Merten, A. A1 - Hugger, S. A1 - Jarvis, J.-P. A1 - Fuchs, F. A1 - Boscovic, D. A1 - Schenk, Harald ED - Razeghi, Manijeh T1 - Widely tunable quantum cascade lasers for spectroscopic sensing T2 - Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-460-8 SP - 937012-1 EP - 937012-6 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive T2 - Microsystem Technologies Y1 - 2017 U6 - https://doi.org/10.1007/s00542-017-3360-6 SN - 1432-1858 VL - 23 IS - 1 SP - 5697 EP - 5708 ER - TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms10078 SN - 2041-1723 IS - 6 SP - 10078 ER - TY - CHAP A1 - Tortschanoff, Andreas A1 - Baumgart, M. A1 - Frank, A. A1 - Wildenhain, Michael A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Optical position feedback for electrostatically driven MOEMS-scanners T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.907761 SN - 978-0-8194-8930-2 SP - 82520S-1 EP - 82520S-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A novel electrostatic micro-actuator class and its application potential for optical MEMS T2 - 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings Y1 - 2016 SN - 978-1-5090-1036-3 U6 - https://doi.org/10.1109/OMN.2016.7565867 SP - Tu 3.11-1 EP - Tu 3.11-2 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Langa, Sergiu A1 - Drabe, Christian A1 - Kunath, Christian A1 - Dreyhaupt, André A1 - Schenk, Harald T1 - Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2003525 SP - 86140F-1 EP - 86140F-8 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - PAT A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Uhlig, Sebastian T1 - Micromechanical devices with mechanical actuators Y1 - 2023 UR - https://www.freepatentsonline.com/11639718.html ER - TY - GEN A1 - Stolz, Michael A1 - Mrosk, Andreas A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schenk, Harald T1 - Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen T2 - MikroSystemTechnik-Kongress, Berlin, Germany, 2019 N2 - In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive – NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollständig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei über einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerstörungsfreie optische Methoden präsentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren ermöglicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann. Y1 - 2019 UR - https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html SP - 366 EP - 369 PB - VDE-Verlag ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, R. A1 - Schenk, Harald T1 - Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897717-1 EP - 897717-9 PB - SPIE Press CY - Bellingham ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T1 - MEMS converter for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2018 ER - TY - PAT A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Rattunde, Marcel T1 - Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers) Y1 - 2015 ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Tulea, C. A1 - Lenenbach, A. A1 - Schenk, Harald T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897705-1 EP - 897705-11 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schenk, Harald A1 - Tortschanoff, Andreas T1 - Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-1-4799-1512-5 SP - 861605-1 EP - 861605-6 PB - SPIE CY - Bellingham, Wash. ER - TY - PAT A1 - Costache, Florenta Adriana A1 - Blasl, Martin A1 - Schenk, Harald T1 - Apparatus and method for guiding optical waves Y1 - 2014 ER - TY - GEN A1 - Schweiger, Severin A1 - Melnikov, Anton A1 - Koch, Sandro G. A1 - Schenk, Harald T1 - Two-Photon Lithography Parameter Study for Manufacturing of Acoustic Metamaterials on MEMS T2 - MikroSystemTechnik Kongress 2021 : Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg N2 - Acoustic impedance matching structures can be used on capacitive micromachined ultrasonic transducers (CMUT) to increase acoustic energy transmission into the load medium. Our contribution contains a systematic study of the viability of the two-photon-polymerization lithography process for the fabrication of acoustic impedance matching metamaterials. For this purpose, acoustic simulations were conducted to find optimized dimensions of the matching structure. Based on the proposed dimensions, parameter sweeps were manufactured on substitute substrates, resulting in a viable parameter space for the direct fabrication on CMUT devices. Y1 - 2021 UR - https://www.vde-verlag.de/proceedings-de/455656092.html SN - 978-3-8007-5656-8 SP - 365 EP - 368 PB - VDE-Verlag CY - Berlin ; Offenbach ER - TY - CHAP A1 - Grüger, Heinrich A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Schenk, Harald T1 - First application close measurements applying the new hybrid integrated MEMS spectrometer T2 - SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore Y1 - 2013 SN - 978-0-8194-9517-4 U6 - https://doi.org/10.1117/12.2016085 SP - 872609-1 EP - 872609-9 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Langa, Sergiu A1 - Kaiser, Bert T1 - MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben T2 - MEMS transducer for interacting with a volume flow of a fluid and method of manufacturing the same Y1 - 2015 ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - GEN A1 - Schweiger, Severin A1 - Schulze, Tim F. A1 - Schlipf, Simon A1 - Reinig, Peter A1 - Schenk, Harald T1 - Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation T2 - Journal of Optical Microsystems N2 - Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power and scan speed to find dependent mechanical material properties. The employed photoresists were examined using Raman spectroscopy to find the degree of conversion (DC) of monomer to polymer, and subsequently, micro- or nanoindentation was used to find Young’s modulus (E). For the photoresist IP-Dip, the attained DC and E ranged from 20% to 45% and 1 to 2.1 GPa, respectively. The results were compared with reports found in the literature. For IP-Q, the attained DC and E ranged from 53% to 80% and 0.5 to 1.3 GPa, respectively. The characterized properties of IP-Q manifest as the current state of knowledge of the material. Y1 - 2022 U6 - https://doi.org/10.1117/1.jom.2.3.033501 SN - 2708-5260 VL - Vol. 2 IS - 3 ER - TY - GEN A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - A novel electrostatic actuator class T2 - Procedia Engineering Y1 - 2016 U6 - https://doi.org/10.1016/j.proeng.2016.11.454 SN - 1877-7058 VL - 168 SP - 1533 EP - 1536 ER - TY - GEN A1 - Hintschich, Susanne A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Schröder, Julia A1 - Reinig, Peter A1 - Grüger, Heinrich A1 - Schenk, Harald T1 - MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring T2 - Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK Y1 - 2014 SP - 430 EP - 434 ER - TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Schenk, Harald A1 - Tulea, C. A1 - Lenenbach, A. T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan N2 - We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW. Y1 - 2013 SN - 978-1-4799-1512-5 SP - 83 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Kolkovsky, Vladimir A1 - Stübner, R. A1 - Langa, Sergiu A1 - Wende, U. A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique T2 - Solid-State Electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.sse.2016.06.005 SN - 0038-1101 VL - 123 SP - 89 EP - 95 ER - TY - CHAP A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schenk, Harald T1 - CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators T2 - MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017 Y1 - 2017 SN - 978-3-8007-4491-6 SP - 219 EP - 222 PB - VDE-Verlag CY - Berlin [u.a.] ER - TY - CHAP A1 - Jung, Denis A1 - Sandner, Thilo A1 - Kallweit, David A1 - Schenk, Harald T1 - Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.906690 SN - 978-0-8194-8930-2 SP - 82520U-1 EP - 82520U-10 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Drabe, Christian A1 - Klose, Thomas A1 - Jung, Denis T1 - Micromechanical device with tilted electrodes Y1 - 2012 ER - TY - GEN A1 - Villasmunta, Francesco A1 - Steglich, Patrick A1 - Heinrich, Friedhelm A1 - Villringer, Claus A1 - Mai, Andreas A1 - Schrader, Sigurd A1 - Schenk, Harald T1 - Optical Through-Silicon Waveguides for 3D-Chip-Interconnections N2 - Integrated optical interconnections in silicon chips have the potential to replace electrical interconnects between integrated circuits thanks to their high bandwidth and low energy communication promises. A silicon dielectric waveguide can be etched through the full thickness of a silicon substrate providing a monolithically integrated solution for 2.5D and 3D photonic architectures. The optical through-silicon waveguide design presented here is based on Finite Difference Time Domain simulations, while the fabrication takes advantage of the innovative plasma cryo-etching process that provides smooth sidewalls and tapering angle tunability. Such structures can provide effective mode size conversion, therefore favoring the coupling of external light sources to photonic integrated circuits and the stacking of multiple optically interconnected dies. KW - Integrated Optics KW - Micro Optics KW - Optical Information Transmission Y1 - 2023 UR - https://www.dgao-proceedings.de/abstract/abstract_only.php?id=2920 ER - TY - GEN A1 - Monsalve, Jorge M. A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Design of Micromachined Ultrasonic Transducers for Variability with the Sample-Average Approximation Method T2 - Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023 Y1 - 2023 SN - 978-3-8007-6204-0 SN - 978-3-8007-6203-3 SP - S. 639 PB - VDE Verlag CY - Berlin ER - TY - PAT A1 - Kurth, Eberhard A1 - Kunath, Christian A1 - Schenk, Harald T1 - Ion-sensitive structure and method for producing the same Y1 - 2023 UR - https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213 ER - TY - PAT A1 - Schenk, Harald A1 - Conrad, Holger T1 - MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same Y1 - 2023 UR - https://www.freepatentsonline.com/11554950.html ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER - TY - GEN A1 - Schenk, Harald A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Kaiser, Bert T1 - Reliability Aspects of in-plane NED Bending Actuators in Silicon-based MEMS T2 - MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg N2 - For several years, Fraunhofer IPMS has been developing a new type of an electrostatic MEMS actuator, called nanoscopic electrostatic drive - NED. Since the first publication in 2015, the project group at IPMS has succeeded in providing lateral actuators, which serve as innovative drives in applications such as micro-positioners or micro-speakers. These applications require a high long-term stability of the drive in order to ensure that the system operates as desired. For this purpose, the reliability of such novel lateral electrostatic actuators was evaluated. Long-term studies of NED actuators have shown that different degradation phenomena can occur during operation. The experiments indicate that high electric fields in the range of several MV/m are one of the most important triggers of the degradations observed. On the one hand, they lead to anodic oxidation occurring at the boundary layers between the NED electrodes and neighbored insulators, which results in corrosion of the silicon electrodes. On the other hand, geometry-based field enhancement far from the insulator interfaces lead to permanent field emission, which causes dark discharges in the electrode gap. This in turn leads to cold plasma oxidation and the growth of oxide b ulges on the electrode surfaces. In the course of the experiments, it was shown that corrosion does not take place in a vacuum and can be avoided with the help of passivation layers. Non silicon oxides, e.g. Al2O3, are well suited as passivation layers. Although they bring additional flexural rigidity to the overall structure, which changes the mechanical behavior of the actuators, they increase the effective relative permittivity in the electrode gap, which in turn makes the actuators more effective. Thanks to the passivation coating,the lifespan of the NED actuators was increased and they can become even more effective by choosing a layer with suitable properties. Y1 - 2021 UR - https://www.vde-verlag.de/proceedings-de/455656134.html SN - 978-3-8007-5656-8 SN - 978-3-8007-5657-5 PB - VDE-Verlag ER - TY - GEN A1 - Schenk, Harald A1 - Narimani, Keyvan A1 - Scholles, Michael A1 - Shashank, Shashank A1 - Langa, Sergiu A1 - Pineda Gomez, Roberto A1 - Ruffert, Christine T1 - Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive T2 - MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg N2 - We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system’s footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM). Y1 - 2021 UR - https://www.vde-verlag.de/proceedings-de/455656160.html SN - 978-3-8007-5656-8 SN - 978-3-8007-5657-5 PB - VDE e.V. ER - TY - GEN A1 - Schenk, Harald A1 - Villasmunta, Francesco A1 - Steglich, Patrick A1 - Schrader, Sigurd A1 - Mai, Andreas T1 - Numerical Simulation of Optical Through-Silicon Waveguide for 3D Photonic Interconnections T2 - 2021 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) N2 - Optical interconnections are a promising step for-ward to overcome the intrinsic limitations of electrical inter-connections in integrated circuits. In this work, we present a finite element method (FEM) simulation study of a dielectric waveguide etched through the full thickness of a silicon substrate. In particular, it is investigated the effect of the bridge-to-core size ratio on the first two supported modes. Then, the influence of the waveguide sidewalls tapering angle on the three-dimensional beam propagation is studied. Such optical through-silicon waveguide (OTSW), if nonadiabatically tapered can provide effective mode size conversion and favour the coupling of external light sources to photonic integrated circuits. Y1 - 2021 UR - https://ieeexplore.ieee.org/document/9541464 SN - 978-1-6654-1276-6 SN - 978-1-6654-4836-9 U6 - https://doi.org/10.1109/NUSOD52207.2021.9541464 SN - 2158-3242 SN - 2158-3234 PB - IEEE ER - TY - GEN A1 - Schenk, Harald A1 - Schweiger, Severin A1 - Koch, Sandro G. T1 - Two-Photon-Lithography Substrate Reflection and Absorption Compensation for Additive Manufacturing of Metamaterials on MEMS T2 - 2021 44th International Spring Seminar on Electronics Technology (ISSE) N2 - Structuring polymers on micro-electro-mechanical-systems (MEMS) for the manufacturing of acoustical and optical metamaterials using the two-photon polymerization process depends on reliable and controllable regulation of the intensity. Reflecting surfaces, diffracting elements and structures with poor heat dissipation can be problematic obstacles for the incident focused and pulsed laser beam. Thermal and optical simulations were performed and compared to test structures. A compensated fabrication approach was successfully applied to create optimized conditions in the polymerized volume. Y1 - 2021 UR - https://ieeexplore.ieee.org/document/9467575 SN - 978-1-6654-1477-7 SN - 978-1-6654-3061-6 U6 - https://doi.org/10.1109/ISSE51996.2021.9467575 SN - 2161-2536 SN - 2161-2528 ER - TY - GEN A1 - Kenda, Andreas A1 - Kraft, Martin A1 - Tortschanoff, Andreas A1 - Scherf, Werner A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Luettjohann, Stephan A1 - Simon, Apolline T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives T2 - Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States Y1 - 2014 SN - 978-1-62841-038-9 SP - 910102-1 EP - 910102-10 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Dauderstädt, Ulrike A1 - Dürr, Peter A1 - Gehner, Andreas A1 - Wagner, Michael A1 - Schenk, Harald T1 - Analog Spatial Light Modulators based on Micromirror Arrays T2 - Micromachines, Special Issue "Beam Steering via Arrayed Micromachines" Y1 - 2021 U6 - https://doi.org/10.3390/mi12050483 SN - 2072-666X VL - 12 IS - 5 ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - GEN A1 - Schirrmann, Christian A1 - Costache, Florenta Adriana A1 - Bornhorst, Kirstin A1 - Pawlik, Boscij A1 - Rieck, Andreas A1 - Schenk, Harald T1 - Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator T2 - Procedia Engineering N2 - A large deflection polymer bending actuator was employed in the design of an integrated micro-lens with electrically adjustable focal length. This micro-lens consisted of micro-fluidic chambers bonded together and sealed by an elastomeric lens membrane to which the polymer actuator has been attached. For focal length optimization, the chambers could be filled with fluids of different refractive indices. The multilayered actuator of radial shape and the variable micro-lens chip design were optimized using 2D FEM simulations. Fabrication steps included bonding of polymer actuator stack with the elastomeric lens membrane on a micro-machined silicon wafer. For a tunable micro-lens with 3 mm aperture, a tuning range in optical power between 0 and more than 15 dpt was achieved. Y1 - 2014 SN - 1877-7058 N1 - Eurosensors XXVIII - The 28th European Conference on Solid-State Transducers 2014 IS - 87 SP - 1553 EP - 1556 ER - TY - CHAP A1 - Bleh, D. A1 - Ostendorf, Ralf A1 - Merten, A. A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Kunzer, M. A1 - Schmidt, R. A1 - Wagner, J. T1 - Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components T2 - International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy Y1 - 2014 UR - http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a SP - 1 EP - 2 ER - TY - PAT A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Elektrostatisch auslenkbares mikromechanisches Bauelement Y1 - 2014 ER - TY - GEN A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Schimmanz, Klaus A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Electrostatically driven in-plane silicon micropump for modular configuration T2 - Micromachines N2 - In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina. KW - micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS Y1 - 2018 U6 - https://doi.org/10.3390/mi9040190 SN - 2072-666X VL - 9 IS - 4 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, Richard A1 - Schenk, Harald T1 - Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011114-1 EP - 011114-10 ER - TY - CHAP A1 - Schenk, Harald A1 - Conrad, Holger A1 - Gaudet, Matthieu A1 - Uhlig, Sebastian A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Schimmanz, Klaus T1 - A contribution to the expansion of the applicability of electrostatic forces in micro transducers T2 - MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States Y1 - 2017 SN - 978-1-5106-0674-6 SN - 978-1-5106-0673-9 U6 - https://doi.org/10.1117/12.2249575 PB - SPIE CY - Bellingham, Washington, USA ER -