TY - GEN A1 - Langa, Sergiu A1 - Drabe, Christian A1 - Kunath, Christian A1 - Dreyhaupt, André A1 - Schenk, Harald T1 - Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2003525 SP - 86140F-1 EP - 86140F-8 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - GEN A1 - Grahmann, Jan A1 - Merten, André A1 - Ostendorf, Ralf A1 - Fontenot, M. A1 - Bleh, Daniela A1 - Schenk, Harald A1 - Wagner, Hans-Joachim T1 - Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897708-1 EP - 897708-11 PB - SPIE Press CY - Bellingham ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, Richard A1 - Schenk, Harald T1 - Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011114-1 EP - 011114-10 ER - TY - GEN A1 - Hintschich, Susanne A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Schröder, Julia A1 - Reinig, Peter A1 - Grüger, Heinrich A1 - Schenk, Harald T1 - MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring T2 - Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK Y1 - 2014 SP - 430 EP - 434 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER - TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - GEN A1 - Kenda, Andreas A1 - Kraft, Martin A1 - Tortschanoff, Andreas A1 - Scherf, Werner A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Luettjohann, Stephan A1 - Simon, Apolline T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives T2 - Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States Y1 - 2014 SN - 978-1-62841-038-9 SP - 910102-1 EP - 910102-10 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Sicker, Cornelius A1 - Heber, Jörg A1 - Berndt, Dirk A1 - Rückerl, Florian A1 - Tinevez, Jean-Yves A1 - Shorte, Spencer A1 - Wagner, Michael A1 - Schenk, Harald T1 - Spatially resolved contrast measurement of diffractive micromirror arrays T2 - MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-465-3 SP - 93750D-1 EP - 93750D-10 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Schenk, Harald ED - Schenk, Harald T1 - Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung T2 - Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung N2 - Leben mit Krebs - Digitalisierung, Künstliche Intelligenz in Medizin und Tumormedizin Y1 - 2024 U6 - https://doi.org/10.24406/publica-3965 ER -