TY - CHAP A1 - Conrad, Holger A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Schuffenhauer, David A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Schenk, Harald T1 - CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen T2 - Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung für Akustik, 19.-22. März 2018, München Y1 - 2018 SN - 978-3-939296-13-3 SP - 892 EP - 894 PB - Deutsche Gesellschaft für Akustik e.V. (DEGA) CY - Berlin ER - TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Hermann A1 - Schuffenhauer, David A1 - Stolz, Michael A1 - Gaudet, Matthieu A1 - Schenk, Harald A1 - Kolkovsky, Vladimir T1 - MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications T2 - Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30 N2 - Wireless earphones require a tremendous degree of integration: In addition to the electroacoustic transducer at least the power supply and a radio module have to be accommodated, supplemented by several microphones for hands-free applications or for noise reduction, as well as position and bio sensors, memory and CPU. With increasing integration, the pressure on the individual components increases in terms of size, energy efficiency and costs. In the field of microphones, MEMS technology has enjoyed great popularity for almost 10 years, and due to their benefits (size, cost, integration) MEMS microphones have almost completely supersede other microphone technologies in mobile audio devices and opened up new fields of applications. Y1 - 2018 VL - TMT 30 SP - 189 EP - 192 ER - TY - GEN A1 - Spitz, Barbara A1 - Wall, Franziska A1 - Schenk, Hermann A1 - Melnikov, Anton A1 - Ehrig, Lutz A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald A1 - Pufe, Wolfram T1 - Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren T2 - MikroSystemTechnik-Kongress, Berlin, Germany, 2019 N2 - Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity. Y1 - 2019 SP - 54 EP - 57 PB - VDE-Verlag ER - TY - GEN A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Ehrig, Lutz A1 - Stolz, Michael A1 - Schenk, Hermann A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schimmanz, Klaus A1 - Schuffenhauer, David T1 - Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers T2 - Microsystems and Nanoengineering N2 - MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. Y1 - 2019 U6 - https://doi.org/10.1038/s41378-019-0095-9 SN - 2055-7434 IS - 5 ER - TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Männchen, Andreas A1 - Brocks, Tobias T1 - Acoustic validation of electrostatic all-silicon MEMS-speakers T2 - AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 Y1 - 2019 UR - https://www.aes.org/e-lib/browse.cfm?elib=20522 U6 - https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 ER - TY - GEN A1 - Ehrig, Lutz A1 - Schenk, Hermann A1 - Wall, Franziska A1 - Melnikov, Anton A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Electrostatic all silicon MEMS speakers for in-ear audio applications – acoustic measurements and modelling approach T2 - 23rd International Congress on Acoustics, Aachen, Germany, 2019 Y1 - 2019 U6 - https://doi.org/10.18154/RWTH-CONV-239893 ER - TY - GEN A1 - Melnikov, Anton A1 - Schenk, Hermann A1 - Wall, Franziska A1 - Spitz, Barbara A1 - Ehrig, Lutz A1 - Langa, Sergiu A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation T2 - SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293 Y1 - 2020 U6 - https://doi.org/10.1117/12.2551271 ER - TY - GEN A1 - Schenk, Harald A1 - Melnikov, Anton A1 - Stolz, Michael A1 - Wall, Franziska A1 - Kaiser, Bert A1 - Mrosk, Andreas A1 - Schuffenhauer, David A1 - Monsalve Guaracao, Jorge Mario A1 - Langa, Sergiu A1 - Schenk, Hermann A1 - Ehrig, Lutz A1 - Conrad, Holger A1 - Ahnert, Maik T1 - Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals T2 - 27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV) N2 - A recently introduced novel actuator class, called the nano electrostatic drive (NED), uses the elec-trostatic actuation to generate large deflections of elastic structures. The NED principle was recently successfully applied to create an all silicon loudspeaker based on micro-electro-mechanical systems (MEMS) technology. Such MEMS audio transducers cover the full frequency range required for high fidelity audio applications. High fidelity audio reproduction also demands minimizing harmonic distortions substantially below 1 %. A major advance in this direction is combining the NED principle with a push-pull driving scheme in a balanced design (BNED), eliminating even harmonics. The practical implementation of a BNED design is however demanding. The nature of the Coulomb force, the impact of stress stiffening and the large deformations required for generating high sound pressures, to name a few aspects, potentially contribute to the harmonic distortion and therefore need advanced experimental methods and simulation models to allow for an apt design. In this paper, we report first results of an experimental technique, combining an optical microscope with a high-speed camera, capable of analyzing the local details of the actuator movement at frame rates of 50,000 frames per second. Dynamic features, such as the excitation of harmonics and intermodulations become clearly visible. These experimental results are then used to scrutinize and refine our multi physics FEM simulations. Y1 - 2021 UR - https://www.researchgate.net/publication/354465569_Nonlinearity_of_balanced_MEMS_loudspeakers_optical_experiments_and_numerical_modeling_using_time-harmonic_signals ER - TY - GEN A1 - Monsalve Guaracao, Jorge Mario A1 - Melnikov, Anton A1 - Kaiser, Bert A1 - Schuffenhauer, David A1 - Stolz, Michael A1 - Ehrig, Lutz A1 - Schenk, Hermann A1 - Conrad, Holger A1 - Schenk, Harald T1 - Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers T2 - IEEE/ASME Transactions on Mechatronics N2 - This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required. KW - Acoustic transducers KW - Duffing oscillator KW - Acoustic electrostatic actuators KW - equivalent-circuit model KW - microactuators KW - Electrostatics KW - Transducers KW - Mathematical models KW - Integrated circuit modeling KW - Capacitors KW - Microphones KW - Force Y1 - 2021 U6 - https://doi.org/10.1109/TMECH.2021.3112267 SN - 1083-4435 SN - 1941-014X VL - 7 IS - 5 SP - 2612 EP - 2622 ER - TY - GEN A1 - Kaiser, Bert A1 - Schenk, Hermann A. G. A1 - Ehrig, Lutz A1 - Wall, Franziska A1 - Monsalve Guaracao, Jorge Mario A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Melnikov, Anton A1 - Conrad, Holger A1 - Schuffenhauer, David A1 - Schenk, Harald T1 - The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers T2 - Microsystems & Nanoengineering N2 - Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer. Y1 - 2022 U6 - https://doi.org/10.1038/s41378-022-00458-z SN - 2055-7434 VL - Vol. 8 ER - TY - GEN A1 - Monsalve Guaracao, Jorge Mario A1 - Melnikov, Anton A1 - Stolz, Michael A1 - Mrosk, Andreas A1 - Jongmanns, Marcel A1 - Wall, Franziska A1 - Langa, Sergiu A1 - Marica-Bercu, Ioana A1 - Brändel, Tim A1 - Kircher, Marco A1 - Schenk, Hermann A. G. A1 - Kaiser, Bert A1 - Schenk, Harald T1 - Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion T2 - Sensors and Actuators A: Physical N2 - An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip’s surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3×3.3 mm², 2D/λ≈0.77) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35-63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range. Y1 - 2022 U6 - https://doi.org/10.1016/j.sna.2022.113813 SN - 1873-3069 SN - 0924-4247 VL - Vol. 345 ER - TY - GEN A1 - Wall, Franziska A1 - Schenk, Hermann A. G. A1 - Melnikov, Anton A1 - Kaiser, Bert A1 - Schenk, Harald T1 - A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators T2 - Nonlinear Dynamics N2 - For electrostatic actuators, the pull-in marks an upper limit for the operation range. Once reached, the electrodes come into contact and are shorted without further protection. A non-destructive measurement technique to predict this failure mode is of high interest to allow, e.g. fabrication monitoring or reliability studies. To this end, we develop a surprisingly simple nonlinear lumped parameter model (LPM) for a rather complex electrostatic actuator, designed for an in-ear loudspeaker application. It turns out that a single degree-of-freedom model with only one parameter is sufficient. Our key approach is to experimentally determine this free model parameter by analysing harmonic distortions at low frequencies. Harmonic distortions are a very sensitive tool for nonlinearities. Our method is suggested by simulations with a 2D stationary finite element method (FEM), demonstrating how the analysis of harmonic distortions for voltages far below the pull-in can predict not only the DC pull-in but also the quasi-static AC pull-in voltages at different working points. The distortion analysis of electrostatic actuator ensembles therefore seems a viable route for their non-destructive characterization in the nonlinear domain. KW - Pull-in KW - Electrostatic actuator KW - Microspeaker KW - Harmonic distortions Y1 - 2023 UR - https://link.springer.com/article/10.1007/s11071-023-08811-1 U6 - https://doi.org/10.1007/s11071-023-08811-1 SN - 1573-269X SN - 0924-090X VL - 111 IS - 19 SP - 17809 EP - 17818 ER - TY - GEN A1 - Ruffert, Christine A1 - Schenk, Hermann A. G. A1 - Kaiser, Bert A1 - Ehrig, Lutz A1 - Monsalve Guaracao, Jorge Mario A1 - Langa, Sergiu A1 - Wall, Franziska A1 - Melnikov, Anton A1 - Stolz, Michael A1 - Morsk, Andreas A1 - Schuffenhauer, David A1 - Conrad, Holger A1 - Schenk, Harald T1 - Elektrostatischer Gegentakt NED-Aktor für Im-Ohr-µLautsprecher Y1 - 2023 UR - https://publica.fraunhofer.de/entities/publication/af8b72ee-2b53-4478-a964-a9dfb17ac3ad/details U6 - https://doi.org/10.24406/publica-2553 N1 - Im Rahmen der Mittelstandskonferenz 2023 in Berlin präsentiert. ER - TY - GEN A1 - Wall, F. A1 - Schenk, Hermann A1 - Schenk, Harald A1 - Melnikov, A. A1 - Ehrig, L. A1 - Kaiser, B. T1 - P31 - Optimization of Harmonic Distortions for Electrostatic MEMS Push-Pull NED-Microspeakers T2 - iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster Y1 - 2024 SN - 978-3-910600-00-3 U6 - https://doi.org/10.5162/iCCC2024/P31 SP - 218 EP - 221 PB - AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.909817 SP - 82520C-1 EP - 82520C-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Tortschanoff, Andreas A1 - Baumgart, M. A1 - Frank, A. A1 - Wildenhain, Michael A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Optical position feedback for electrostatically driven MOEMS-scanners T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.907761 SN - 978-0-8194-8930-2 SP - 82520S-1 EP - 82520S-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Jung, Denis A1 - Sandner, Thilo A1 - Kallweit, David A1 - Schenk, Harald T1 - Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.906690 SN - 978-0-8194-8930-2 SP - 82520U-1 EP - 82520U-10 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Grüger, Heinrich A1 - Schenk, Harald T1 - Realization of a hybrid-integrated MEMS scanning grating spectrometer T2 - SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland Y1 - 2012 UR - http://dx.doi.org/10.1117/12.919068 SP - 83740W-1 EP - 83740W-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Grahmann, Jan A1 - Wildenhain, Michael A1 - Grashoff, Thomas A1 - Gerwig, Christian A1 - Dallmann, Hans-Georg A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.910671 SN - 978-0-8194-8930-2 IS - 1. Auflage SP - 825205-1 EP - 825205-9 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ER - TY - CHAP A1 - Drabe, Christian A1 - Kallweit, David A1 - Dreyhaupt, Andre A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Davis, Wyatt T1 - Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.910203 SP - 825209-1 EP - 825209-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schenk, Harald A1 - Tortschanoff, Andreas T1 - Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-1-4799-1512-5 SP - 861605-1 EP - 861605-6 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Grüger, Heinrich A1 - Knobbe, Jens A1 - Pügner, Tino A1 - Schenk, Harald T1 - Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2004215 SP - 86160L-1 EP - 86160L-13 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - GEN A1 - Langa, Sergiu A1 - Drabe, Christian A1 - Kunath, Christian A1 - Dreyhaupt, André A1 - Schenk, Harald T1 - Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2003525 SP - 86140F-1 EP - 86140F-8 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - CHAP A1 - Grüger, Heinrich A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Schenk, Harald T1 - First application close measurements applying the new hybrid integrated MEMS spectrometer T2 - SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore Y1 - 2013 SN - 978-0-8194-9517-4 U6 - https://doi.org/10.1117/12.2016085 SP - 872609-1 EP - 872609-9 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Schenk, Harald A1 - Tulea, C. A1 - Lenenbach, A. T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan N2 - We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW. Y1 - 2013 SN - 978-1-4799-1512-5 SP - 83 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, R. A1 - Schenk, Harald T1 - Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897717-1 EP - 897717-9 PB - SPIE Press CY - Bellingham ER - TY - GEN A1 - Grahmann, Jan A1 - Merten, André A1 - Ostendorf, Ralf A1 - Fontenot, M. A1 - Bleh, Daniela A1 - Schenk, Harald A1 - Wagner, Hans-Joachim T1 - Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897708-1 EP - 897708-11 PB - SPIE Press CY - Bellingham ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, Richard A1 - Schenk, Harald T1 - Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011114-1 EP - 011114-10 ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Tulea, C. A1 - Lenenbach, A. A1 - Schenk, Harald T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897705-1 EP - 897705-11 PB - SPIE Press CY - Bellingham ER - TY - PAT A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Schenk, Harald A1 - Rattunde, Marcel T1 - MEMS basiertes Durchstimmen von Lasern Y1 - 2014 ER - TY - PAT A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Stolz, Michael T1 - Elektrostatisch auslenkbares mikromechanisches Bauelement Y1 - 2014 ER - TY - GEN A1 - Schirrmann, Christian A1 - Costache, Florenta Adriana A1 - Bornhorst, Kirstin A1 - Pawlik, Boscij A1 - Rieck, Andreas A1 - Schenk, Harald T1 - Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator T2 - Procedia Engineering N2 - A large deflection polymer bending actuator was employed in the design of an integrated micro-lens with electrically adjustable focal length. This micro-lens consisted of micro-fluidic chambers bonded together and sealed by an elastomeric lens membrane to which the polymer actuator has been attached. For focal length optimization, the chambers could be filled with fluids of different refractive indices. The multilayered actuator of radial shape and the variable micro-lens chip design were optimized using 2D FEM simulations. Fabrication steps included bonding of polymer actuator stack with the elastomeric lens membrane on a micro-machined silicon wafer. For a tunable micro-lens with 3 mm aperture, a tuning range in optical power between 0 and more than 15 dpt was achieved. Y1 - 2014 SN - 1877-7058 N1 - Eurosensors XXVIII - The 28th European Conference on Solid-State Transducers 2014 IS - 87 SP - 1553 EP - 1556 ER - TY - GEN A1 - Hintschich, Susanne A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Schröder, Julia A1 - Reinig, Peter A1 - Grüger, Heinrich A1 - Schenk, Harald T1 - MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring T2 - Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK Y1 - 2014 SP - 430 EP - 434 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER - TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - GEN A1 - Conrad, Holger A1 - Schenk, Harald A1 - Kaiser, Bert A1 - Langa, Sergiu A1 - Gaudet, Matthieu A1 - Schimmanz, Klaus A1 - Stolz, Michael A1 - Lenz, Miriam T1 - A small-gap electrostatic micro-actuator for large deflections T2 - Nature Communications Y1 - 2015 U6 - https://doi.org/10.1038/ncomms10078 SN - 2041-1723 IS - 6 SP - 10078 ER - TY - CHAP A1 - Bleh, D. A1 - Ostendorf, Ralf A1 - Merten, A. A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Kunzer, M. A1 - Schmidt, R. A1 - Wagner, J. T1 - Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components T2 - International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy Y1 - 2014 UR - http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a SP - 1 EP - 2 ER - TY - GEN A1 - Kenda, Andreas A1 - Kraft, Martin A1 - Tortschanoff, Andreas A1 - Scherf, Werner A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Luettjohann, Stephan A1 - Simon, Apolline T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives T2 - Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States Y1 - 2014 SN - 978-1-62841-038-9 SP - 910102-1 EP - 910102-10 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Wagner, J. A1 - Ostendorf, Ralf A1 - Grahmann, Jan A1 - Merten, A. A1 - Hugger, S. A1 - Jarvis, J.-P. A1 - Fuchs, F. A1 - Boscovic, D. A1 - Schenk, Harald ED - Razeghi, Manijeh T1 - Widely tunable quantum cascade lasers for spectroscopic sensing T2 - Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-460-8 SP - 937012-1 EP - 937012-6 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Sicker, Cornelius A1 - Heber, Jörg A1 - Berndt, Dirk A1 - Rückerl, Florian A1 - Tinevez, Jean-Yves A1 - Shorte, Spencer A1 - Wagner, Michael A1 - Schenk, Harald T1 - Spatially resolved contrast measurement of diffractive micromirror arrays T2 - MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-465-3 SP - 93750D-1 EP - 93750D-10 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Schenk, Harald A1 - Hornbeck, L. J. ED - Waser, Rainer T1 - Micro Mirrors T2 - Nanoelectronics and information technology : advanced electronic materials and novel devices Y1 - 2012 SN - 978-3-527-40927-3 SP - 985 EP - 999 PB - Wiley-VCH-Verlag CY - Weinheim ER - TY - GEN A1 - Kaiser, Bert A1 - Grashoff, Thomas A1 - Drabe, Christian A1 - Conrad, Holger A1 - Schenk, Harald T1 - About stress in filled DRIE-trenches T2 - Journal of Micromechanics and Microengineering (JMM) Y1 - 2015 UR - http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 SN - 0960-1317 VL - 25 IS - 8 SP - 8085003 ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Drabe, Christian A1 - Klose, Thomas A1 - Jung, Denis T1 - Micromechanical device with tilted electrodes Y1 - 2012 ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - PAT A1 - Sandner, Thilo A1 - Schenk, Harald T1 - Optical device comprising a structure for avoiding reflections Y1 - 2013 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER - TY - PAT A1 - Klose, Thomas A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Y1 - 2012 ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo T1 - Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same Y1 - 2012 ER - TY - GEN A1 - Kolkovsky, Vladimir A1 - Stübner, R. A1 - Langa, Sergiu A1 - Wende, U. A1 - Kaiser, Bert A1 - Conrad, Holger A1 - Schenk, Harald T1 - Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique T2 - Solid-State Electronics Y1 - 2016 U6 - https://doi.org/10.1016/j.sse.2016.06.005 SN - 0038-1101 VL - 123 SP - 89 EP - 95 ER - TY - GEN A1 - Conrad, Holger A1 - Kaiser, Bert A1 - Gaudet, Matthieu A1 - Langa, Sergiu A1 - Stolz, Michael A1 - Uhlig, Sebastian A1 - Schimmanz, Klaus A1 - Schenk, Harald T1 - A novel electrostatic actuator class T2 - Procedia Engineering Y1 - 2016 U6 - https://doi.org/10.1016/j.proeng.2016.11.454 SN - 1877-7058 VL - 168 SP - 1533 EP - 1536 ER -