TY - GEN A1 - Grahmann, Jan A1 - Merten, André A1 - Ostendorf, Ralf A1 - Fontenot, M. A1 - Bleh, Daniela A1 - Schenk, Harald A1 - Wagner, Hans-Joachim T1 - Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897708-1 EP - 897708-11 PB - SPIE Press CY - Bellingham ER - TY - PAT A1 - Costache, Florenta Adriana A1 - Schenk, Harald A1 - Bornhorst, Kirstin A1 - Schirrmann, Christian T1 - Fluidic Variable Focal length optical Lens and Method of Manufacturing the same Y1 - 2012 ER - TY - GEN A1 - Borcia, Rodica A1 - Bestehorn, Michael A1 - Uhlig, Sebastian A1 - Gaudet, Matthieu A1 - Schenk, Harald T1 - Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach T2 - Physical Review Fluids N2 - Two liquid pumps are investigated theoretically and numerically: a single thin liquid layer actuated by a periodic force at an elastic beam and a two-layer geometry actuated by an elastic beam. For the second geometry, the beam actuates the liquid from both sides. For both pumps, the liquid film thickness is small compared to the lateral characteristic length of the system. A lubrication theory is developed. The Euler-Bernoulli equation for transverse deformations of an elastic beam is coupled to the fundamental hydrodynamic equations: the Navier-Stokes equation and a continuity equation in the long-wave approximation. In this way, one connects the transverse displacement of the beam with the hydrodynamic quantities (pressure, velocity fields, and flow rates). Appropriate boundary conditions incorporate the function of the valves. The derivation of the theoretical model is followed by numerical simulations. We estimate flow rates (in two and three spatial dimensions) for different system parameters and we compute the efficiency of a well-designed liquid pump. KW - Microfluidic devices KW - Thin fluid films Y1 - 2018 UR - https://journals.aps.org/prfluids/abstract/10.1103/PhysRevFluids.3.084202 U6 - https://doi.org/10.1103/PhysRevFluids.3.084202 SN - 2469-990X VL - 3 IS - 8 ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo T1 - Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same Y1 - 2012 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.909817 SP - 82520C-1 EP - 82520C-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Grahmann, Jan A1 - Wildenhain, Michael A1 - Grashoff, Thomas A1 - Gerwig, Christian A1 - Dallmann, Hans-Georg A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.910671 SN - 978-0-8194-8930-2 IS - 1. Auflage SP - 825205-1 EP - 825205-9 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ER - TY - CHAP A1 - Schenk, Harald A1 - Wagner, Michael A1 - Grahmann, Jan A1 - Merten, André ED - Kye, Jongwook ED - Owa, Soichi T1 - Advances in MOEMS technologies for high quality imaging systems T2 - Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States N2 - An overview of advances in MOEMS devices and technologies for high quality imaging systems is provided. A particular focus is laid on recent technological further developments possibly opening gateways to unprecedented device and system functionality by e. g.: increase of pixel count towards higher parallel operation, decrease of the mirror pitch in large arrays towards applications like high-performance holography, novel technologies for higher operation bandwidth, increase of aperture size for scanning applications like LIDAR, integration of high reflection coatings for processing of multi Watt laser radiation for marking and engraving, and phased arrays for high speed laser beam steering. Y1 - 2018 SN - 978-1-5106-1666-0 SN - 978-1-5106-1667-7 U6 - https://doi.org/10.1117/12.2297399 PB - SPIE CY - Bellingham, Washington ER - TY - PAT A1 - Grahmann, Jan A1 - Wagner, Hans-Joachim A1 - Ostendorf, Ralf A1 - Schenk, Harald A1 - Rattunde, Marcel T1 - MEMS basiertes Durchstimmen von Lasern Y1 - 2014 ER - TY - PAT A1 - Sandner, Thilo A1 - Schenk, Harald T1 - Optical device comprising a structure for avoiding reflections Y1 - 2013 ER - TY - CHAP A1 - Schenk, Harald A1 - Hornbeck, L. J. ED - Waser, Rainer T1 - Micro Mirrors T2 - Nanoelectronics and information technology : advanced electronic materials and novel devices Y1 - 2012 SN - 978-3-527-40927-3 SP - 985 EP - 999 PB - Wiley-VCH-Verlag CY - Weinheim ER - TY - CHAP A1 - Grüger, Heinrich A1 - Knobbe, Jens A1 - Pügner, Tino A1 - Schenk, Harald T1 - Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-0-8194-9385-9 U6 - https://doi.org/10.1117/12.2004215 SP - 86160L-1 EP - 86160L-13 PB - SPIE CY - Bellingham, Wash. ET - 1. Auflage ER - TY - PAT A1 - Kurth, Eberhard A1 - Kunath, Christian A1 - Schenk, Harald T1 - Ion-sensitive structure and method of manufacturing the same Y1 - 2016 ER - TY - CHAP A1 - Drabe, Christian A1 - Kallweit, David A1 - Dreyhaupt, Andre A1 - Grahmann, Jan A1 - Schenk, Harald A1 - Davis, Wyatt T1 - Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.910203 SP - 825209-1 EP - 825209-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - PAT A1 - Klose, Thomas A1 - Wolter, Alexander A1 - Schenk, Harald T1 - Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Y1 - 2012 ER - TY - GEN A1 - Sicker, Cornelius A1 - Heber, Jörg A1 - Berndt, Dirk A1 - Rückerl, Florian A1 - Tinevez, Jean-Yves A1 - Shorte, Spencer A1 - Wagner, Michael A1 - Schenk, Harald T1 - Spatially resolved contrast measurement of diffractive micromirror arrays T2 - MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States Y1 - 2015 SN - 978-1-62841-465-3 SP - 93750D-1 EP - 93750D-10 PB - SPIE CY - Bellingham, Wash. ER - TY - CHAP A1 - Pügner, Tino A1 - Knobbe, Jens A1 - Grüger, Heinrich A1 - Schenk, Harald T1 - Realization of a hybrid-integrated MEMS scanning grating spectrometer T2 - SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland Y1 - 2012 UR - http://dx.doi.org/10.1117/12.919068 SP - 83740W-1 EP - 83740W-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER -