TY - CHAP A1 - Tortschanoff, Andreas A1 - Baumgart, M. A1 - Frank, A. A1 - Wildenhain, Michael A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Optical position feedback for electrostatically driven MOEMS-scanners T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.907761 SN - 978-0-8194-8930-2 SP - 82520S-1 EP - 82520S-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, R. A1 - Schenk, Harald T1 - Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014 Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897717-1 EP - 897717-9 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Tulea, C. A1 - Lenenbach, A. A1 - Schenk, Harald T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States Y1 - 2014 SN - 978-0-8194-9890-8 SP - 897705-1 EP - 897705-11 PB - SPIE Press CY - Bellingham ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schenk, Harald A1 - Tortschanoff, Andreas T1 - Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera T2 - SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013 Y1 - 2013 SN - 978-1-4799-1512-5 SP - 861605-1 EP - 861605-6 PB - SPIE CY - Bellingham, Wash. ER - TY - GEN A1 - Schenk, Harald A1 - Grahmann, Jan A1 - Sandner, Thilo A1 - Wagner, Michael A1 - Dauderstädt, Ulrike A1 - Schmidt, Jan-Uwe T1 - Micro mirrors for high-speed laser deflections and patterning T2 - Physics Procedia Y1 - 2014 U6 - https://doi.org/10.1016/j.phpro.2014.08.090 SN - 1875-3892 VL - 56 SP - 7 EP - 18 ER - TY - CHAP A1 - Sandner, Thilo A1 - Kimme, S. A1 - Grashoff, Thomas A1 - Todt, U. A1 - Graf, A. A1 - Schenk, Harald A1 - Tulea, C. A1 - Lenenbach, A. T1 - Micro-scanning mirrors for high-power laser applications in laser surgery T2 - International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan N2 - We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW. Y1 - 2013 SN - 978-1-4799-1512-5 SP - 83 EP - 84 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Jung, Denis A1 - Sandner, Thilo A1 - Kallweit, David A1 - Schenk, Harald T1 - Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.906690 SN - 978-0-8194-8930-2 SP - 82520U-1 EP - 82520U-10 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Drabe, Christian A1 - Klose, Thomas A1 - Jung, Denis T1 - Micromechanical device with tilted electrodes Y1 - 2012 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Gaumont, E. A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011115-1 EP - 011115-14 ER - TY - GEN A1 - Kenda, Andreas A1 - Kraft, Martin A1 - Tortschanoff, Andreas A1 - Scherf, Werner A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Luettjohann, Stephan A1 - Simon, Apolline T1 - Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives T2 - Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States Y1 - 2014 SN - 978-1-62841-038-9 SP - 910102-1 EP - 910102-10 PB - SPIE CY - Bellingham, Wash. ER - TY - PAT A1 - Jung, Denis A1 - Drabe, Christian A1 - Schenk, Harald A1 - Sandner, Thilo A1 - Klose, Thomas A1 - Wolter, Alexander T1 - Method for generating a micromechanical structure Y1 - 2013 ER - TY - GEN A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schwarzenberg, Markus A1 - Schroedter, Richard A1 - Schenk, Harald T1 - Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera T2 - Journal of Micro/Nanolithography, MEMS, and MOEMS Y1 - 2014 SN - 1932-5134 VL - 13 IS - 1 SP - 011114-1 EP - 011114-10 ER - TY - PAT A1 - Schenk, Harald A1 - Sandner, Thilo T1 - Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same Y1 - 2012 ER - TY - PAT A1 - Conrad, Holger A1 - Schenk, Harald A1 - Schirrmann, Christian A1 - Zimmer, Fabian A1 - Schmidt, Jan-Uwe A1 - Sandner, Thilo T1 - Micromechanical element Y1 - 2015 ER - TY - CHAP A1 - Sandner, Thilo A1 - Grashoff, Thomas A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 SN - 978-0-8194-8930-2 U6 - https://doi.org/10.1117/12.909817 SP - 82520C-1 EP - 82520C-10 PB - SPIE Press CY - Bellingham ET - 1. Auflage ER - TY - PAT A1 - Sandner, Thilo A1 - Schenk, Harald T1 - Optical device comprising a structure for avoiding reflections Y1 - 2013 ER -