TY - GEN A1 - Sanchez-Barquilla, Raquel A1 - Tschammer, Rudi A1 - Buß, Lars A1 - Morales, Carlos A1 - Flege, Jan Ingo T1 - The relation between substrate, Sm alloy, and surface sensitivity of ceria (111)- and (100)-oriented nano-islands on Ru(0001) and Cu(111) T2 - Verhandlungen der DPG N2 - Inverse oxide/metal catalysis allows achieving better catalytic performance than its traditional counterpart. For example, in cerium-based inverse catalyst systems, the Ce3+ states have been shown to be the active sites for methanol synthesis. This suggests that the activity can be enhanced by promoting those through alloying with trivalent, catalytically active rare-earth metals, as, e.g. Sm. We present low-energy and X-ray photoemission electron microscopy (LEEM/XPEEM), investigations that show how epitaxially grown (100)- and (111)-oriented CeO2 islands may be modified and/or alloyed by post-deposited metallic Sm. For the Ce1−xSmxO2−δ/Ru(0001) system, the CeO2 (111)-oriented islands undergo a structural change, concomitant with a partial conversion from Ce4+ to Ce3+. Surprisingly, for Ce1−xSmxO2−δ/Cu(111) the result is found to be face-dependent since only (100)-oriented CeOx islands were reduced whereas the (111)-oriented islands remained unaltered. Both systems have been exposed to reducing (H2) and oxidizing (CO2) conditions, resulting in higher reduction and in a complete recovery of the Ce4+ states, respectively. These unexpected results indicate a complex interaction not only between cerium and the doping element, but also an intricate interplay with the metallic substrate. KW - ceria KW - low-energy electron microscopy (LEEM) KW - X-ray photoemission electron microscopy (XPEEM) KW - samarium KW - metal substrate influence on reduction KW - orientation Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/o/session/85/contribution/6 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Tschammer, Rudi A1 - Kosto, Yuliia A1 - Morales, Carlos A1 - Schmickler, Marcel A1 - Henkel, Karsten A1 - Devi, Anjana A1 - Flege, Jan Ingo T1 - Atomic layer deposition of cerium oxide monitored by operando ellipsometry and in-situ X-ray photoelectron spectroscopy T2 - Verhandlungen der DPG N2 - Atomic layer deposition (ALD) has been used extensively to grow homogeneous films with excellent coverage and atomic-scale thickness control for a variety of applications. However, remaining challenges include the investigation of novel precursor-oxidant combinations for low-temperature deposition as well as unraveling the complex interplay between substrate and coating for ultrathin films. In this work, we present a detailed investigation of ultrathin cerium oxide films grown using the novel Ce(dpdmg)3 precursor with H2O and O2. Following a surface science-based approach, we have combined operando spectroscopic ellipsometry and in-situ X-ray photoelectron spectroscopy to allow rapid process optimization and determination of the complex relation between oxide stoichiometry, film thickness and ALD growth parameters, revealing a distinct dependence of inital Ce3+ content on the film thickness and choice of oxidant. This offers the possibility of adjusting the oxide properties to application requirements e.g. in gas sensing by choosing a suitable precursor-oxidant combination. KW - Atomic layer deposition (ALD) KW - ceria KW - low-temperature deposition KW - operando spectroscopic ellipsometry KW - in-situ X-ray photoelectron spectroscopy KW - film thickness KW - oxidant choice KW - cerium oxidation state Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/o/session/49/contribution/4 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Kosto, Yuliia A1 - Kapuscik, Paulina A1 - Tschammer, Rudi A1 - Guttmann, Dominic A1 - Mankowska, Ewa A1 - Matvija, Peter A1 - Morales, Carlos A1 - Mazur, Michał A1 - Henkel, Karsten A1 - Matolinova, Iva A1 - Domaradzki, Jarosław A1 - Flege, Jan Ingo T1 - Bare and Pd-doped ceria thin films prepared by ALD and EBE for hydrogen detection T2 - Verhandlungen der DPG N2 - The need to store and use hydrogen safely as part of green economy based on renewable energy evokes a necessity to reliably detect it at ambient conditions. The majority of currently used sensors are working at elevated temperatures (200-500 °C). In this work, we demonstrate that ceria films deposited on a commercial electrode by atomic layer deposition (ALD) and electron beam evaporation (EBE) electrically respond to hydrogen (from 20 to 500 ppm) at much lower temperatures (50-200 °C). The results reveal that <1.5 nm thin Pd adlayer increases the electrical response by several orders of magnitude for both ceria films. The NAP-XPS study under changing oxidative/reductive atmospheres sheds light on the mechanism of Pd-CeOx thermal activation and the role of the deposition technique in the reactivity of the oxide. KW - Hydrogen sensor KW - Atomic layer deposition (ALD) KW - ceria KW - Near-ambient pressure X-ray photoelectron spectroscopy (NAP-XPS) Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/o/session/59/contribution/5 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Morales, Carlos A1 - Kosto, Yuliia A1 - Tschammer, Rudi A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Unraveling the effects of substrate interaction on the chemical properties of atomic layer deposited ultra-thin ceria layers T2 - Verhandlungen der DPG N2 - Atomic layer deposition (ALD) is well known to lead to amorphous and defective, non-stoichiometric films, potentially resulting in modified material properties that can also be affected by film/substrate interaction in the case of ultra-thin growths. For example, the formation, diffusion, and recovery of oxygen vacancies can be favored in disordered, reducible metal oxides compared to more ordered deposits, whereas interdiffusion processes can critically affect the film/substrate interface region. These effects have extensively been studied for thin thermal-ALD ceria films (below 15 nm) by combining in-situ and ex-situ characterization techniques in our lab and at synchrotron radiation facilities. While using alumina or silica substrates modifies the initial growth rate, Ce3+/Ce4+ ratio, and ceria morphology, the formation of different species at the interface affects its reactivity. Interestingly, the experiments have shown high reducibility of ALD-ceria ultrathin films on silica for very low hydrogen concentrations, even at room temperature, whereas for alumina substrates the formation of aluminates at the interface prevents further oxidation. Moreover, the comparison with more ordered films indicates a key role of the defective structure of ALD films in Ce3+/Ce4+ conversion. KW - Atomic layer deposition (ALD) KW - ceria KW - interface reaction KW - morphology KW - reducibility KW - hydrogen detection Y1 - 2024 UR - https://www.dpg-verhandlungen.de/year/2024/conference/berlin/part/o/session/49/contribution/8 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Kosto, Yuliia A1 - Tschammer, Rudi A1 - Morales, Carlos A1 - Henkel, Karsten A1 - Flege, Jan Ingo A1 - Ratzke, Markus A1 - Fischer, Inga Anita A1 - Costina, Ioan A1 - Alvarado Chavarin, Carlos A1 - Wenger, Christian T1 - Rational design and development of room temperature hydrogen sensors compatible with CMOS technology: a necessary step for the coming renewable hydrogen economy T2 - Proceedings of iCampus Conference Cottbus 2024 N2 - The transition towards a new, renewable energy system based on green energy vectors, such as hydrogen, requires not only direct energy conversion and storage systems, but also the development of auxiliary components, such as highly sensitive hydrogen gas sensors integrated into mass devices that operate at ambient conditions. Despite the recent advances in nanostructured metal oxide thin films in terms of simple fabrication processes and compatibility with integrated circuits, high sensitivity, and short response/recovery times usually require the use of expensive noble metals or elevated tem-peratures (>250 ºC), which results in high power consumption and poor long-term stability. This article presents the first steps of the work on developing a novel resistive hydrogen gas sensor based on ultrathin cerium oxide films, compatible with complementary metal oxide semiconductor technology and capable of operating at room temperature. Here, we show a multidisciplinary bottom-up approach combining different work areas for the sensor development, such as sensor architecture, sensing mechanism and deposition strategy of the active layer, electrical contact design depending on the desired electrical output, and fast testing under controlled environments. KW - gas sensors KW - micro-structering KW - atomic layer deposition KW - sensor platform Y1 - 2024 SN - 978-3-910600-00-3 U6 - https://doi.org/10.5162/iCCC2024/P21 SP - 182 EP - 185 PB - AMA Service GmbH CY - Wunstorf ER - TY - GEN A1 - Morales, Carlos A1 - Kosto, Yuliia A1 - Tschammer, Rudi A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Reduction by H2 exposure at room temperature of ceria ultrathin films grown by atomic layer deposition T2 - Verhandlungen der DPG N2 - Atomic layer deposition (ALD) exhibits a high potential for integration as a scalable process in microelectronics, allowing well-controlled layer-by-layer deposition and conformal growth on 3D structures. Yet, the ALD technique is also well known to lead to amorphous and defective, non-stoichiometric films, potentially resulting in modified materials properties that, in the case of ultra-thin deposits, can also be affected by film/substrate interaction. Interestingly, initial in situ X-ray photoemission spectroscopy (XPS) measurements of ceria ALD-deposits on Al2O3/Si, sapphire, and SiO2 substrates confirm a Ce3+/Ce4+ mixture dependent on the substrate interaction, deposit thickness, and morphology. Using near-ambient pressure XPS, we have significantly reduced ultrathin (< 10 nm) ceria films grown by ALD by exposing them to different O2/H2 partial pressures at moderate temperatures (< 525K). Notably, the total amount of reduction to Ce3+ is found to depend on the deposit thickness and initial ceria/substrate interaction. Furthermore, the intrinsic defects related to the ALD method seem to play a critical role in the reversible reduction at room temperature. KW - Cerium oxide KW - atomic layer deposition KW - near-ambient pressure X-ray photoemission spectroscopy (NAPXPS) KW - hydrogen detection Y1 - 2023 UR - https://www.dpg-verhandlungen.de/year/2023/conference/skm/part/o/session/92/contribution/6 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Tschammer, Rudi A1 - Buß, Lars A1 - Morales, Carlos A1 - Senanayake, Sanjaya D. A1 - Falta, Jens A1 - Flege, Jan Ingo T1 - In situ characterization of cerium oxide on Au(111) under reducing and oxidizing conditions by low-energy electron microscopy T2 - Verhandlungen der DPG N2 - The development of novel catalysts for a variety of applications is a key challenge for modern catalysis. Inverse metal oxide catalysts consisting of oxide nanoparticles dispersed on a metal support have recently attracted much attention, showing higher activity and selectivity compared to traditional catalytic systems, harnessing synergistic effects attributed to the so-called metal-support interaction. To gain further insights, we deposited cerium oxide nanoparticles on Au(111) and studied this system by low-energy electron microscopy (LEEM) and low-energy electron diffraction (LEED). The prepared samples demonstrate a distinct correlation between the deposition temperature and the structural order of the nanoparticles. This has been expanded upon by exploring the changes induced by reduction with H2 and reoxidation with O2 or CO2, again exhibiting a connection between structural order and activity, while also showing the influence of the oxide-metal interaction on the stability of cerium oxide under reducing conditions. KW - low-energy electron microscopy KW - cerium oxide KW - reduction KW - reoxidation KW - low-energy electron diffraction (LEED) Y1 - 2023 UR - https://www.dpg-verhandlungen.de/year/2023/conference/skm/part/o/session/78/contribution/9 SN - 0420-0195 PB - Deutsche Physikalische Gesellschaft CY - Bad Honnef ER - TY - GEN A1 - Morales, Carlos A1 - Mahmoodinezhad, Ali A1 - Tschammer, Rudi A1 - Kosto, Yuliia A1 - Alvarado Chavarin, Carlos A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates T2 - Inorganics N2 - This work presents a new ultra-high vacuum cluster tool to perform systematic studies of the early growth stages of atomic layer deposited (ALD) ultrathin films following a surface science approach. By combining operando (spectroscopic ellipsometry and quadrupole mass spectrometry) and in situ (X-ray photoelectron spectroscopy) characterization techniques, the cluster allows us to follow the evolution of substrate, film, and reaction intermediates as a function of the total number of ALD cycles, as well as perform a constant diagnosis and evaluation of the ALD process, detecting possible malfunctions that could affect the growth, reproducibility, and conclusions derived from data analysis. The homemade ALD reactor allows the use of multiple precursors and oxidants and its operation under pump and flow-type modes. To illustrate our experimental approach, we revisit the well-known thermal ALD growth of Al2O3 using trimethylaluminum and water. We deeply discuss the role of the metallic Ti thin film substrate at room temperature and 200 °C, highlighting the differences between the heterodeposition (<10 cycles) and the homodeposition (>10 cycles) growth regimes at both conditions. This surface science approach will benefit our understanding of the ALD process, paving the way toward more efficient and controllable manufacturing processes. KW - Atomic layer deposition (ALD) KW - in-situ KW - operando KW - X-ray photoelectron spectroscopy KW - ellipsometry KW - quadrupol mass spectrometry (QMS) Y1 - 2023 U6 - https://doi.org/10.3390/inorganics11120477 SN - 2304-6740 VL - 11 IS - 12 ER - TY - GEN A1 - Morales, Carlos A1 - Tschammer, Rudi A1 - Gouder, Thomas A1 - Choi, YongMan A1 - Anjum, Dalaver A1 - Baunthiyal, Aman A1 - Krisponeit, Jon-Olaf A1 - Falta, Jens A1 - Flege, Jan Ingo A1 - Idriss, Hicham T1 - Stabilization of Ce3+ cations via U-Ce charge transfer in mixed oxides: consequences on the thermochemical water splitting to hydrogen T2 - Journal of Physics: Energy N2 - The work's objective is to enhance the generation of H2 via the thermochemical water splitting (TCWS) reaction over nanocrystalline mixed oxide Ce1-xUxO2. While CeO2 is the most active and stable known reducible oxide for the TCWS reaction, it is below par to make it practical. This has motivated many works to enhance its reduction capacity and therefore increase its activity. In this work the presence of both metal cations (Ce4+ and U4+) has allowed for the charge transfer reaction to occur (Ce4+ + U4+ → Ce3+ + U5+) and therefore increased its capacity to generate oxygen vacancies, VO (2 Ce3+ + VO), needed for the TCWS reaction. Test reactions on the polycrystalline mixed oxides indicated that small atomic percentages of U (<10 %) were found to be optimal for H2 production due to a considerable increase of Ce3+ states. Further studies of the Ce-U interaction were performed on thin epitaxial Ce1-xUxO2 (111) films of about 6 nm deep. In situ X-ray photoelectron spectroscopy showed clear evidences of charge transfer at low U content. Moreover, it was found that while increasing the content of U decreased the charge transfer efficiency it protected reduced Ce3+ from being oxidized. Our computational results using the DFT + U method gave evidence of charge transfer at 3.5 and 6.2 at.% of U. In agreement with experiments, theoretical calculations also showed that the charge transfer is sensitive to the distribution of U4+ around the Ce4+ cations, which in turn affected the creation of VO needed for water splitting. Our results point out to the important yet often neglected effect of statistical entropy (cations distribution in the lattice), in addition to composition, in increasing the density of reduced states and consequently enhancing H2 production from water. KW - cerium uranium mixed oxide KW - charge transfer KW - TCWS KW - In situ x-ray photoelectron spectroscopy (in-situ XPS) KW - DFT KW - statistical entropy Y1 - 2025 U6 - https://doi.org/10.1088/2515-7655/adbad9 SN - 2515-7655 VL - 7 SP - 1 EP - 14 PB - IOP Publishing ER - TY - GEN A1 - Tschammer, Rudi A1 - Buß, Lars A1 - Pożarowska, Emilia A1 - Morales, Carlos A1 - Senanayake, Sanjaya D. A1 - Prieto, Mauricio J. A1 - Tănase, Liviu C. A1 - de Souza Caldas, Lucas A1 - Tiwari, Aarti A1 - Schmidt, Thomas A1 - Niño, Miguel A. A1 - Foerster, Michael A1 - Falta, Jens A1 - Flege, Jan Ingo T1 - High-temperature growth of CeOx on Au(111) and behavior under reducing and oxidizing conditions T2 - The journal of physical chemistry C N2 - Inverse oxide–metal model catalysts can show superior activity and selectivity compared with the traditional supported metal–oxide architecture, commonly attributed to the synergistic overlayer–support interaction. We have investigated the growth and redox properties of ceria nanoislands grown on Au(111) between 700 and 890 °C, which yields the CeO2–Au(111) model catalyst system. We have observed a distinct correlation between deposition temperature, structural order, and oxide composition through low-energy electron microscopy, low-energy electron diffraction, intensity–voltage curves, and X-ray absorption spectroscopy. Improved structural order and thermal stability of the oxide have been achieved by increasing the oxygen chemical potential at the substrate surface using reactive oxygen (O/O2) instead of molecular O2 during growth. In situ characterization under reducing (H2) and oxidizing atmospheres (O2, CO2) indicates an irreversible loss of structural order and redox activity at high reduction temperatures, while moderate temperatures result in partial decomposition of the ceria nanoislands (Ce3+/Ce4+) to metallic cerium (Ce0). The weak interaction between Au(111) and CeOx would facilitate its reduction to the Ce0 metallic state, especially considering the comparatively strong interaction between Ce0 and Au0. Besides, the higher reactivity of atomic oxygen promotes a stronger interaction between the gold and oxide islands during the nucleation process, explaining the improved stability. Thus, we propose that by driving the nucleation and growth of the ceria/Au system in a highly oxidizing regime, novel chemical properties can be obtained. KW - Inverse oxide-metal model catalysts KW - Ceria nanoislands KW - Growth KW - Redox properties KW - Low-energy electron microscopy (LEEM) KW - Low-energy electron diffraction (LEED) KW - Intensity–voltage curves KW - X-ray absorption spectroscopy (XAS) Y1 - 2025 U6 - https://doi.org/10.1021/acs.jpcc.4c08072 SN - 1932-7447 VL - 129 IS - 7 SP - 3583 EP - 3594 PB - American Chemical Society (ACS) CY - Washington, DC ER - TY - GEN A1 - Morales, Carlos A1 - Tschammer, Rudi A1 - Pożarowska, Emilia A1 - Kosto, Julia A1 - Villar‐Garcia, Ignacio J. A1 - Pérez‐Dieste, Virginia A1 - Favaro, Marco A1 - Starr, David E. A1 - Kapuścik, Paulina A1 - Mazur, Michał A1 - Wojcieszak, Damian A1 - Domaradzki, Jarosław A1 - Alvarado, Carlos A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Hydrogen sensing via heterolytic H₂ activation at room temperature by atomic layer deposited ceria T2 - ChemSusChem : chemistry, sustainability, energy, materials N2 - Ultrathin atomic layer deposited ceria films (<20 nm) are capable of H2 heterolytic activation at room temperature, undergoing a significant reduction regardless of the absolute pressure, as measured under in‐situ conditions by near ambient pressure X‐ray photoelectron spectroscopy. ALD‐ceria can gradually reduce as a function of H2 concentration under H2/O2 environments, especially for diluted mixtures below 10 %. At room temperature, this reduction is limited to the surface region, where the hydroxylation of the ceria surface induces a charge transfer towards the ceria matrix, reducing Ce4+ cations to Ce3+. Thus, ALD‐ceria replicates the expected sensing mechanism of metal oxides at low temperatures without using any noble metal decorating the oxide surface to enhance H2 dissociation. The intrinsic defects of the ALD deposit seem to play a crucial role since the post‐annealing process capable of healing these defects leads to decreased film reactivity. The sensing behavior was successfully demonstrated in sensor test structures by resistance changes towards low concentrations of H2 at low operating temperatures without using noble metals. These promising results call for combining ALD‐ceria with more conductive metal oxides, taking advantage of the charge transfer at the interface and thus modifying the depletion layer formed at the heterojunction. KW - Atomic Layer Deposition KW - Ceria KW - Hydrogen Sensing KW - X-Ray photoelectron spectroscopy KW - Raman spectroscopy KW - Resitive sensor Y1 - 2025 U6 - https://doi.org/10.1002/cssc.202402342 SN - 1864-5631 VL - 18 IS - 13 SP - 1 EP - 13 PB - Wiley-VCH CY - Weinheim ER - TY - GEN A1 - Kalra, Amanpreet A1 - Alvarado Chavarin, Carlos A1 - Nitsch, Paul-Gregor A1 - Tschammer, Rudi A1 - Flege, Jan Ingo A1 - Ratzke, Markus A1 - Zoellner, Marvin Hartwig A1 - Schubert, Markus Andreas A1 - Wenger, Christian A1 - Fischer, Inga Anita T1 - Deposition of CeOₓ/SnOₓ-based thin films via RF magnetron sputtering for resistive gas sensing applications T2 - Physica B, Condensed matter N2 - Cerium oxide-tin oxide (CeOx/SnOx) thin films with varying Sn content were deposited using RF magnetron sputtering and investigated for hydrogen sensing applications. Structural, compositional, and morphological properties were characterized using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy (EDX). Gas sensing measurements showed effective hydrogen detection at room temperature, with the sensitivity strongly influenced by Sn content and oxygen vacancy concentration. Higher Sn concentration enhanced the sensing response, which was correlated with microstructural features obtained from AFM and EDX, as well as with the presence of Ce3+ and Ce4+ oxidation states identified by XPS. This study highlights the potential of CeOx/SnOx thin films for possible back-end-of-line integration and provides proof-of-principle for room-temperature hydrogen sensing. KW - RF magnetron sputtering KW - CeOx/SnOx thin film KW - Room temperature KW - Hydrogen sensing Y1 - 2026 U6 - https://doi.org/10.1016/j.physb.2025.418098 SN - 0921-4526 VL - 723 SP - 1 EP - 7 PB - Elsevier BV CY - Amsterdam ER - TY - GEN A1 - Morales, Carlos A1 - Tschammer, Rudi A1 - Guttmann, Dominic A1 - Chavarin, Carlos Alvarado A1 - Ruffert, Christine A1 - Henkel, Karsten A1 - Wenger, Christian A1 - Flege, Jan Ingo T1 - Bottom-up strategy to develop ultrathin active layers by atomic layer deposition for room temperature hydrogen sensors compatible with CMOS technology T2 - MikroSystemTechnik Kongress 2025 : Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveränität : proceedings : 27.-29. Oktober 2025, Duisburg Y1 - 2025 SN - 978-3-8007-6614-7 SN - 978-3-8007-6615-4 SP - 71ff. PB - VDE VERLAG GmbH CY - Berlin ER -