TY - JOUR A1 - Schmeißer, Dieter A1 - Seibold, Götz A1 - Reif, Jürgen T1 - Nano-scaled Dielectric Barriers (NanoDieB) for CMOS compatible Si-technologies JF - Forum der Forschung KW - nano-scaled KW - dielectric KW - CMOS Y1 - 2006 SN - 0947-6989 IS - 19 SP - 131 EP - 136 ER -