TY - GEN A1 - Morales, Carlos A1 - Plate, Paul A1 - Marth, Ludwig A1 - Naumann, Franziska A1 - Kot, Małgorzata A1 - Janowitz, Christoph A1 - Kus, Peter A1 - Zöllner, Marvin Hartwig A1 - Wenger, Christian A1 - Henkel, Karsten A1 - Flege, Jan Ingo T1 - Bottom-up design of a supercycle recipe for atomic layer deposition of tunable Indium Gallium Zinc Oxide thin films T2 - ACS Applied Electronic Materials N2 - We present a successful bottom-up approach to design a generic plasma-enhanced atomic layer deposition (PEALD) supercycle recipe to grow high-quality indium gallium zinc oxide (IGZO) thin films with tunable composition at a relatively low temperature of 150 °C. In situ real-time ellipsometric characterization in combination with ex situ complementary techniques has been used to optimize the deposition process and quality of the films by identifying and solving growth challenges such as degree of oxidation, nucleation delays, or elemental composition. The developed supercycle approach enables facile control of the target composition by adapting the subcycle ratios within the supercycle process. Compared to other low-temperature deposition techniques resulting in amorphous films, our PEALD–IGZO process at 150 °C results in nearly amorphous, nanocrystalline films. The preparation of IGZO films at low temperature by a supercycle PEALD approach allows controlling the thickness, composition, and electrical properties while preventing thermally induced segregation. KW - IGZO KW - PEALD KW - supercycle KW - XPS depth profiling KW - current density Y1 - 2024 U6 - https://doi.org/10.1021/acsaelm.4c00730 SN - 2637-6113 VL - 6 IS - 8 SP - 5694 EP - 5704 PB - American Chemical Society (ACS) ER -