TY - JOUR A1 - Arguirov, Tzanimir V. A1 - Kittler, Martin A1 - Seifert, Winfried A1 - Reif, Jürgen A1 - Bolze, D. A1 - Ehwald, K.-E. A1 - Formanek, Peter T1 - Luminescence of Crystal Defects Formed after Annealing of Phosphorus Implanted Silicon JF - Solid State Phenomena Y1 - 2004 SN - 1012-0394 N1 - Proceedings of the GADEST 2003 VL - 95-96 SP - 289 EP - 296 ER -