TY - GEN A1 - Lee, Hyunjoo J. A1 - Park, Kwan Kyu A1 - Kupnik, Mario A1 - Melosh, Nicholas A. A1 - Khuri-Yakub, Butrus T. T1 - Mesoporous thin-film on highly sensitive resonant chemical sensors for relative humidity and CO2 detection T2 - Analytical Chemistry N2 - Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 × 10–4% RH/Hz to water vapor in N2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 × 10–4%/Hz and a volume resolution of 1.82 × 10–4% to CO2 in N2. Y1 - 2012 U6 - https://doi.org/10.1021/ac300225c SN - 1520-6882 VL - 84 IS - 7 SP - 3063 EP - 3066 ER -