TY - GEN A1 - Brachmann, Erik A1 - Seifert, Marietta A1 - Neumann, Niels A1 - Alshwawreh, Nidal A1 - Uhlemann, Margitta A1 - Menzel, Siegfried A1 - Acker, Jörg A1 - Herold, Steven A1 - Hoffmann, Volker A1 - Gemming, Thomas T1 - Electroless-Deposited Platinum Antennas for Wireless Surface Acoustic Wave Sensors T2 - Materials N2 - In an effort to develop a cost-efficient technology for wireless high-temperature surface acoustic wave sensors, this study presents an evaluation of a combined method that integrates physical vapor deposition with electroless deposition for the fabrication of platinum-based planar antennas. The proposed manufacturing process becomes attractive for narrow, thick, and sparse metallizations for antennas in the MHz to GHz frequency range. In detail, narrow platinum-based lines of a width down to 40 μm were electroless-deposited on γ-Al2O3 substrates using different seed layers. At first, the electrolyte chemistry was optimized to obtain the highest deposition rate. Films with various thickness were prepared and the electrical resistivity, microstructure, and chemical composition in the as-prepared state and after annealing at temperatures up to 1100 ∘C were evaluated. Using these material parameters, the antenna was simulated with an electromagnetic full-wave simulation tool and then fabricated. The electrical parameters, including the S-parameters of the antenna, were measured. The agreement between the simulated and the realized antenna is then discussed. KW - wireless SAW sensor KW - high-temperature KW - antenna KW - electroless deposition KW - platinum film Y1 - 2019 UR - https://www.mdpi.com/1996-1944/12/7/1002 U6 - https://doi.org/10.3390/ma12071002 SN - 1996-1944 VL - 12 IS - 7 SP - 1002 EP - 1014 ER -