TY - PAT A1 - Brinkmann, Ralf Peter A1 - Oberrath, Jens A1 - Awakowicz, Peter A1 - Lapke, Martin A1 - Musch, Thomas A1 - Mussenbrock, Thomas A1 - Rolfes, Ilona A1 - Schulz, Christian A1 - Storch, Robert A1 - Styrnoll, Tim A1 - Zietz, Christian T1 - Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma Y1 - 2011 ER - TY - GEN A1 - Berger, Birk A1 - Steinberger, Thomas A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Mussenbrock, Thomas A1 - Awakowicz, Peter A1 - Schulze, Julian T1 - Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase T2 - Applied Physics Letters Y1 - 2017 U6 - https://doi.org/10.1063/1.5000144 SN - 1077-3118 VL - 111 IS - 20 ER - TY - GEN A1 - Trieschmann, Jan A1 - Schmidt, Frederik A1 - Mussenbrock, Thomas T1 - Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges T2 - Plasma Processes and Polymers Y1 - 2017 U6 - https://doi.org/10.1002/ppap.201600140 SN - 1612-8869 VL - 14 IS - 1-2 SP - 1600140 ER - TY - GEN A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas T2 - Plasma Sources Science and Technolgy Y1 - 2017 U6 - https://doi.org/10.1088/1361-6595/aa51f2 SN - 1361-6595 SN - 0963-0252 VL - 26 IS - 2 SP - 024004 ER - TY - GEN A1 - Dirkmann, Sven A1 - Hansen, Mirko A1 - Ziegler, Martin A1 - Kohlstedt, Hermann A1 - Mussenbrock, Thomas T1 - The Role of Ion Transport Phenomena in Memristive Double Barrier Devices T2 - Scientific Reports Y1 - 2016 U6 - https://doi.org/10.1038/srep35686 SN - 2045-2322 VL - 6 SP - 35686 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Eremin, Denis A1 - Brinkmann, Ralf Peter A1 - Schulze, Julian A1 - Schuengel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Hartmann, Peter A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas T2 - Physics of Plasmas Y1 - 2016 U6 - https://doi.org/10.1063/1.4953432 SN - 1070-664X SN - 1089-7674 VL - 23 IS - 6 SP - 063514 ER - TY - GEN A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Mussenbrock, Thomas T1 - Complex Electron Heating in Capacitive Multi-Frequency Plasmas T2 - IEEE Transactions on Plasma Science Y1 - 2014 U6 - https://doi.org/10.1109/TPS.2014.2306265 SN - 0093-3813 VL - 42 IS - 10 SP - 2780 EP - 2781 ER - TY - GEN A1 - Wilczek, Sebastian A1 - Trieschmann, Jan A1 - Schulze, Julian A1 - Schüngel, Edmund A1 - Brinkmann, Ralf Peter A1 - Derzsi, Aranka A1 - Korolov, Ihor A1 - Donkó, Zoltán A1 - Mussenbrock, Thomas T1 - The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges T2 - Plasma Sources Science and Technology Y1 - 2015 U6 - https://doi.org/10.1088/0963-0252/24/2/024002 SN - 0963-0252 SN - 1361-6595 VL - 24 IS - 2 SP - 024002 ER - TY - GEN A1 - Eremin, Denis A1 - Bienholz, Stefan A1 - Szeremley, Daniel A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Awakowicz, Peter A1 - Mussenbrock, Thomas A1 - Brinkmann, Ralf Peter T1 - On the Physics of a Large CCP Discharge T2 - Plasma Sources Science and Technology Y1 - 2016 U6 - https://doi.org/10.1088/0963-0252/25/2/025020 SN - 1361-6595 SN - 0963-0252 VL - 25 IS - 2 SP - 025020 ER - TY - GEN A1 - Berger, Birk A1 - Brandt, Steven A1 - Franek, James A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Mussenbrock, Thomas A1 - Schulze, Julian T1 - Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4937403 SN - 1089-7550 SN - 0021-8979 VL - 118 IS - 22 SP - 223302 ER - TY - GEN A1 - Dirkmann, Sven A1 - Ziegler, Martin A1 - Hansen, Mirko A1 - Kohlstedt, Hermann A1 - Trieschmann, Jan A1 - Mussenbrock, Thomas T1 - Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices T2 - Journal of Applied Physics Y1 - 2015 U6 - https://doi.org/10.1063/1.4936107 SN - 1089-7550 SN - 0021-8979 VL - 118 IS - 21 SP - 214501 ER -