TY - GEN A1 - Trieschmann, Jan A1 - Ries, Stefan A1 - Bibinov, Nikita A1 - Awakowicz, Peter A1 - Mráz, Stanislav A1 - Schneider, Jochen M. A1 - Mussenbrock, Thomas T1 - Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma T2 - Plasma Sources Science and Technology Y1 - 2018 U6 - https://doi.org/10.1088/1361-6595/aac23e VL - 27 IS - 5 ER -