TY - GEN A1 - Ratzke, Markus A1 - Wolfframm, Dirk A1 - Kappa, Mathias A1 - Kouteva-Arguirova, Simona A1 - Reif, Jürgen T1 - Pulsed laser deposition of HfO2 and Pr(x)O(y) high-k films on Si(100) T2 - Applied Surface Science Y1 - 2005 SN - 0169-4332 VL - 247 IS - 1-4 SP - 128 EP - 133 ER - TY - GEN A1 - Kappa, Mathias A1 - Ratzke, Markus A1 - Reif, Jürgen T1 - Pulsed laser deposition of hafnium oxide on silicon Y1 - 2005 ER -