TY - GEN A1 - Schäfer, Anna A1 - Wendt, Fabian A1 - Mantl, Siegfried A1 - Hartdegen, Hilde A1 - Mikulics, Martin A1 - Schubert, Jürgen A1 - Luysberg, Martina A1 - Besmehn, Astrid A1 - Niu, Gang A1 - Schroeder, Thomas T1 - Hexagonal LaLuO3 as high-k dielectric T2 - Journal of Vacuum Science and Technology : B Y1 - 2015 U6 - https://doi.org/10.1116/1.4904401 VL - 33 SP - 01A104 ER - TY - GEN A1 - Wirths, S. A1 - Troitsch, R. A1 - Mussler, G. A1 - Stoica, T. A1 - Hartmann, J.-M. A1 - Zaumseil, Peter A1 - Schroeder, Thomas A1 - Mantl, Siegfried A1 - Buca, Dan T1 - Ternary and Quaternary Ni(Si)GeSn Contact Formation for highly strained Ge p- and n-MOSFETs T2 - Semiconductor Science and Technology Y1 - 2015 U6 - https://doi.org/10.1088/0268-1242/30/5/055003 SN - 0268-1242 VL - 30 IS - 5 SP - 055003 ER - TY - GEN A1 - Schäfer, Anna A1 - Rahmanizadeh, K. A1 - Bihlmayer, G. A1 - Luysberg, Martina A1 - Wendt, Fabian A1 - Besmehn, Astrid A1 - Fox, A. A1 - Schnee, M. A1 - Niu, Gang A1 - Schroeder, Thomas A1 - Mantl, Siegfried A1 - Hartdegen, Hilde A1 - Mikulics, Martin A1 - Schubert, Jürgen T1 - Polymorphous GdScO3 as high permittivity dielectric T2 - Journal of Alloy and Compunds Y1 - 2015 U6 - https://doi.org/10.1016/j.jallcom.2015.08.135 SN - 0925-8388 VL - 651 SP - 514 EP - 520 ER -