TY - CHAP A1 - Tortschanoff, Andreas A1 - Baumgart, M. A1 - Frank, A. A1 - Wildenhain, Michael A1 - Sandner, Thilo A1 - Schenk, Harald A1 - Kenda, Andreas T1 - Optical position feedback for electrostatically driven MOEMS-scanners T2 - SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012 Y1 - 2012 UR - http://dx.doi.org/10.1117/12.907761 SN - 978-0-8194-8930-2 SP - 82520S-1 EP - 82520S-8 PB - SPIE, The Society of Photo-Optical Instrumentation Engineers CY - Bellingham ET - 1. Auflage ER -