TY - GEN A1 - Schmeißer, Dieter A1 - Müssig, Hans-Joachim T1 - The Pr2O3 / Si (001) interface studied by synchrotron radiation photo-electron spectroscopy T2 - Solid State Electronics N2 - Pr2O3 is currently under consideration as a potential replacement for SiO2 as the gate-dielectric material for sub-0.1micro m complementary metal-oxide-semiconductor (CMOS) technology. We studied the Pr2O3/Si(0 0 1) interface by a non-destructive depth profiling using synchrotron radiation photoelectron spectroscopy. Our data suggests that there is no silicide formation at the interface. Based on reported results, a chemical reactive interface exists, consisting of a mixed Si-Pr oxide such as (Pr2O3)x(SiO2)1?x, i.e. as a silicate phase with variable silicon content. This pseudo-binary alloy at the interface offers large flexibility toward successful integration of Pr2O3 into future CMOS technologies. KW - High-k dielectric material KW - Pr2O3 KW - Interface KW - Silicate Y1 - 2003 SN - 0038-1101 VL - 47 IS - 10 SP - 1607 EP - 1611 ER -