TY - GEN A1 - Ehrig, Lutz A1 - Kaiser, Bert A1 - Schenk, Hermann A1 - Stolz, Michael A1 - Langa, Sergiu A1 - Conrad, Holger A1 - Schenk, Harald A1 - Männchen, Andreas A1 - Brocks, Tobias T1 - Acoustic validation of electrostatic all-silicon MEMS-speakers T2 - AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 Y1 - 2019 UR - https://www.aes.org/e-lib/browse.cfm?elib=20522 U6 - https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 ER -