TY - GEN A1 - Becker, L. A1 - Storck, Peter A1 - Liu, Y. A1 - Schwalb, G. A1 - Schroeder, Thomas A1 - Fischer, Inga Anita A1 - Albrecht, M. T1 - Optimizing misfit dislocation glide kinetics for enhanced threading dislocation density reduction in Si1− xGex/Si (001) layers through dynamic growth rate control T2 - Journal of Applied Physics Y1 - 2024 U6 - https://doi.org/10.1063/5.0204318 SN - 0021-8979 SN - 1089-7550 VL - 135 IS - 20 SP - 10 ER -