TY - GEN A1 - Linz, Sarah A1 - Oesterle, Florian A1 - Lindner, Stefan A1 - Mann, Sebastian A1 - Weigel, Robert A1 - Kölpin, Alexander T1 - Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring T2 - IEEE Transactions on Microwave Theory and Techniques Y1 - 2016 U6 - https://doi.org/10.1109/TMTT.2016.2612664 SN - 0018-9480 SN - 1557-9670 VL - 64 IS - 11 SP - 3918 EP - 3926 ER - TY - GEN A1 - Kölpin, Alexander A1 - Lurz, Fabian A1 - Linz, Sarah A1 - Mann, Sebastian A1 - Will, Christoph A1 - Lindner, Stefan T1 - Six-Port Based Interferometry for Precise Radar and Sensing Application T2 - Sensors Y1 - 2016 U6 - https://doi.org/10.3390/s16101556 SN - 1424-8220 VL - 16 IS - 10 SP - 1556 ER -