TY - CHAP A1 - Berndt, Sebastian A1 - Mrosk, Till A1 - Dörner, Ralf A1 - Lenk, Friedrich T1 - Residual errors in coplanar on-chip 1-port calibration caused by standard deviations T2 - Microwave Measurement Conference (ARFTG), 2013 81st ARFTG, Seattle, Washington, USA, 7 June 2013 N2 - The uncertainty calculation for on-wafer 1-port S-Parameter measurements due to the uncertainty of coplanar on-chip calibration standards is presented. Analytical expressions for the sensitivities are used and applied for typical fabrication tolerances of monolithic integrated on-chip structures. The method is verified for OSM calibration by means of simulations with a commercial calibration software as well as by measurements, where test-structures with artificial errors were used. In each case the analytically calculated deviation is compared to a numerical approach and good agreement is found. All results are given for a MMIC process on GaAs, but can be adopted for other technologies. Y1 - 2013 SN - 978-1-4673-4981-9 U6 - https://doi.org/10.1109/ARFTG.2013.6579054 SP - 141 EP - 144 PB - IEEE CY - Piscataway, NJ ER - TY - CHAP A1 - Lenk, Friedrich A1 - Dörner, Ralf A1 - Kurpas, Paul A1 - Rumiantsev, Andrej T1 - Measurement uncertainties due to non-ideal calibration standards for unknown thru calibration T2 - Microwave Measurement Conference (ARFTG), 2013 81st ARFTG Y1 - 2013 SN - 978-1-4673-4981-9 U6 - https://doi.org/10.1109/ARFTG.2013.6579057 SP - 1 EP - 4 PB - IEEE CY - Piscataway, NJ ER - TY - GEN A1 - Lenk, Friedrich A1 - Dörner, Ralf A1 - Rumiantsev, Andrej T1 - Sensitivity Analysis of S-Parameter Measurements Due to Calibration Standards Uncertainty T2 - IEEE Transactions on Microwave Theory and Techniques Y1 - 2013 U6 - https://doi.org/10.1109/TMTT.2013.2279774 SN - 0018-9480 VL - 61 IS - 10 SP - 3800 EP - 3807 ER -