TY - CHAP A1 - Berger, Birk A1 - Brandt, Steven A1 - Franek, James A1 - Schüngel, Edmund A1 - Koepke, Mark A1 - Schulze, Julian A1 - Mussenbrock, Thomas A1 - Bruneau, Bastien A1 - Johnson, Erik A1 - Lafleur, Trevor A1 - Booth, Jean-Paul A1 - O'Connell, Deborah A1 - Gans, Timo A1 - Korolov, Ihor A1 - Derzsi, Aranka A1 - Donkó, Zoltán T1 - Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4 T2 - 2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016 Y1 - 2016 SN - 978-1-4673-9601-1 U6 - https://doi.org/10.1109/PLASMA.2016.7534353 PB - IEEE CY - Piscataway, NJ ER -